CN101236146B - Metal thin film /foil dynamic performance critical characteristic dimension test system and method - Google Patents
Metal thin film /foil dynamic performance critical characteristic dimension test system and method Download PDFInfo
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- CN101236146B CN101236146B CN200710010241A CN200710010241A CN101236146B CN 101236146 B CN101236146 B CN 101236146B CN 200710010241 A CN200710010241 A CN 200710010241A CN 200710010241 A CN200710010241 A CN 200710010241A CN 101236146 B CN101236146 B CN 101236146B
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Abstract
The invention relates to the establishment of a mechanical property critical characteristic scale test system for materials with small thickness such as metallic thin film or metallic foil. The system provides a complete set of test apparatuses and specific testing method to carry out a micro-bending test for a sample. The complete set of test apparatuses comprises a base, a propeller, a sample loading mold pair, a core axle, etc. The propeller is thrust to buckle the upper mold and the lower mold together, the sample receives the action of a pure bending load in the loading mold pair till the tested sample is completely bent and deformed according to the contact core axle curvature, and the mechanical property critical characteristic scale value of the material can be further obtained through working out the radius of curvature of the buckling distortion of the sample. The complete set of test apparatuses and specific testing method provided by the invention can work out the mechanical property critical characteristic scale value of the material through correctly measuring the arc curvature radius corresponding to the micro-bending deformation when loading and unloading the sample without calculating the size of the load applied on the sample. The complete set of apparatuses has a low fabricating cost and the testing method has a simple and easy execution.
Description
Technical field
The present invention relates to the building of test macro of metallic film or metal forming dynamic performance critical characteristic dimension, be specially and adopt a kind of method of microbend to test its dynamic performance critical characteristic dimension, the package unit and the concrete method of testing of implementing of this test macro is provided for metallic film with micron/submicron thickness or metal forming.
Background technology
In recent years, along with continuing to bring out of high-tech product, micro-electromechanical system (MEMS) is used in a large number, as be used for the fast-breaking little accelerator of safe automobile air bag, medically be used for little gear of drug delivery and microfluidic device etc., and these MEMS devices are to be made by metallic film with micron/submicron thickness or metal foil material mostly.Because these microscale materials are in its little processing and preparing,, cause its performance to descend even destroy as being subjected to the effect of the pulsating stress that power, heat, electricity etc. cause in sputter, deposition, etching etc. and the military service process subsequently inevitably.For example, in the miniature radio-frequency switch, semi-girder device with micron thickness often is subjected to the effect of high-frequency resonant and causes damage, the appearance that damages in little member can change parameters such as its response frequency and resistance gradually, thereby influenced the output quantity of microsensor and actuator, even caused ultimate failure.Therefore, the same with block materials, the testing research of the mechanical performance index of microscale material has crucial meaning for the reliable military service that guarantees micro element.
Yet,, be applicable to that the many basic mechanical theories and the mechanical property parameter of block materials is no longer suitable when the yardstick of material is little during to micron dimension.The plastic strain gradient theory thinks that the stress of any is not only relevant with strain arbitrarily in the material plastically deforming area, and relevant with strain gradient.For block materials, strain gradient can be ignored to the contribution of the strength of materials, and the intensity of material is determined by strain; And when the material yardstick little when the micron dimension, strain gradient just can not be ignored the contribution of the strength of materials, and the material yardstick is more little, strain gradient is big more to the contribution of the strength of materials.For this reason, in this structure rule of traditional material mechanics, added material critical characteristic dimension l
cThis parameter is used for reflecting that strain gradient was to the size of the strength of materials contribution when non-homogeneous plastic yield took place the microscale material.
People adopt the whole bag of tricks, as this critical characteristic dimension mechanical property parameter of torsional technique, nano impress method test microscale material, wish to obtain l more accurately by the experiment of various exquisitenesses
cValue.
Summary of the invention
The object of the present invention is to provide dynamic performance critical characteristic dimension l a kind of and diverse metallic film of other test macro or metal foil material
cCover test macro and a method of testing, it is easy for operation, can obtain dynamic performance critical characteristic dimension l more accurately
cValue.
Technical scheme of the present invention is:
A kind of test macro of metal thin film/foil dynamic performance critical characteristic dimension, this test macro comprises:
(1) is used for fixing the angle of rake pedestal of loading;
(2) thruster; Load thruster and adopt vernier caliper, the thruster main scale down and be fixed on the pedestal, vernier scale is last;
(3) sample loads mould to mould; This cover is made up of mold and bed die mould, is installed on relatively respectively on angle of rake vernier scale and the main scale;
(4) mandrel; The mandrel that is used for the clamping sample is installed in the groove of bed die.
The test macro of described metal thin film/foil dynamic performance critical characteristic dimension, during test axle diameter choose relevant with the thickness of sample, sample surface strain ε
sThe dependent variable that value reflected is no more than 10%.
Described mold is by securing member and execute and carry a part and constitute, executing a year part is the flat member that two lower ends have circular arc, to execute a year part before the work penetrates the slideway of securing member and is fixed on the securing member, two arc surfaces of executing year part are relative, when sample is loaded, execute a gap of carrying in the middle of the part and be buckled in clamping and have on a pair of mandrel of sample.
Described bed die is a female member, and the spill two side has groove, and during work, clamping has the mandrel of sample to put into institute's open channels.
A kind of method of testing of metal thin film/foil dynamic performance critical characteristic dimension, concrete enforcement testing procedure is as follows:
(1) be fixed on thruster on the pedestal upside down; (2) select the mandrel of a pair of diameter consistent size, and specimen holder is held in therebetween, together put into sample then and load the bed die of mould, mold is bonded on the thruster vernier scale mould; (3) slowly promote angle of rake vernier scale, mold and bed die are fastened, sample is subjected to the effect of pure bending load in loading mould, according to the mandrel curvature that is contacted complete flexural deformation takes place up to sample; (4) angle of rake vernier scale is released, to the sample unloading, the elastic deformation that sample takes place is partly replied fully and is kept micro-plastic yield part; (5) edge-on film after the free elastic recovery or foil sample, the pattern of shooting microbend sample; (6) sample arc profile that photo write down is simulated the circular arc of sample bending, the radius-of-curvature of testing this circular arc by computer graphics.
In the described step (3), angle of rake vernier scale fltting speed is 0.05mm/s～5mm/s.
Metallic film of the present invention or metal foil material are the various metallic films of present known method preparation and the metal foil material with micron and the following thickness of micron for preparing through methods such as rolling or rolling after annealings, or the material that cuts through line from block materials, for guaranteeing measuring accuracy, the material that cuts will be prepared the metal forming with micron, submicron thickness by mechanical lapping and electropolishing subsequently.
Ultimate principle of the present invention:
Sample was in three different phases when the present invention tested metallic film or metal forming sample: do not load, apply microbend load and unloading.The thickness of tested sample represents that with t b is the width of sample, and d is the axle diameter of clamped sample, takes place when being subjected to microbend loading state crookedly fully when sample is in, and its crooked circular arc radius-of-curvature is R
i,
2R
i＝d+t (1)
The surface strain ε that is taken place in the sample test process like this
sFor:
Sample is in elastic unloading behind this state, represents the microbend moment of flexure of sample, the then nominal moment of flexure of sample with M
For:
Here R
fThe circular arc radius-of-curvature of natural torsion during for the sample unloaded state; E is the Young modulus of this material plane strain.
And moment M and surface strain ε
sHave linear relationship:
Here
σ
0Effective yield strength for material; E
pBe the material strain hardening coefficient.Partly carry out linear fit with the bending strain same level on the trus stress-strain curve that is obtained by the same material stretching experiment, the intersection value of gained fitting a straight line and axis of ordinates is σ
0Value, and the slope of this fitting a straight line is exactly E
pValue.
Simultaneous equations (2), (3), (4) use Mathematica 5.0 computer mathematics softwares to carry out the critical characteristic dimension l that computing can obtain tested sample
cValue.
Characteristics of the present invention are:
When 1, the designed microbend experimental system of the present invention is implemented sample test, need not to calculate the size of imposed load.Different with block materials, the metal sample of film or paper tinsel shape belongs to the two-dimensional film sample because of it, have thickness as thin as a wafer, the microbend experiment time will accurately be measured the size of the load of executing and the size of sample moment of flexure is difficult to carrying out, and so also just is difficult to accurate its strain level of controlling.The a whole set of proving installation that this test macro provided can be realized the pure bending distortion of film or foil sample.When the designed microbend experimental system of the present invention is implemented test, the size of imposed load need not be measured, just the critical characteristic dimension value can be obtained as long as obtain the moment of flexure of sample microbend circular arc.
Simple when 2, the designed microbend experimental system of the present invention is implemented test, package unit is cheap.
3, the designed microbend experiment test system of the present invention can have metal film, the paper tinsel shape material that size is little on one dimension (thickness) direction and carries out the microbend test various, and sample is easy to preparation.
4, the present invention is when carrying out the microbend experiment, and the strain of sample can accurately be controlled by the mandrel of selecting the different-diameter size for use.
Description of drawings
Fig. 1 is a microbend testing system device synoptic diagram.
Fig. 2 is the synoptic diagram of test macro loading to the mould mold.Wherein, Fig. 2-1～Fig. 2-3 is two parts general assembly drawings of mold, and Fig. 2-1 is a front view, and Fig. 2-2 is a vertical view, and Fig. 2-3 is a side view; Fig. 2-4～Fig. 2-6 is the securing member figure of mold, and Fig. 2-4 is a front view, and Fig. 2-5 is a vertical view, and Fig. 2-6 is a side view; Fig. 2-7～Fig. 2-9 carries part figure for executing of mold, and Fig. 2-7 is a front view, and Fig. 2-8 is a vertical view, and Fig. 2-9 is a side view.
Fig. 3 is the synoptic diagram of test macro loading to the mould bed die.Wherein, Fig. 3-1 is a front view; Fig. 3-2 is a vertical view; Fig. 3-3 is a side view.
Fig. 4 is polycrystalline copper film crooked radius of curvature measurement synoptic diagram after microbend experiment unloaded.
Among the figure, 1 pedestal; 2 thrusters; 3 molds; 4 bed dies; 5 mandrels; 6 samples; 7 main scales; 8 vernier scales; 9 securing members; 10 execute a year part; 11 slideways; 12 grooves.
Embodiment
Below in conjunction with drawings and Examples in detail the present invention is described in detail.
As Fig. 1～shown in Figure 3, metallic film of the present invention or metal foil material dynamic performance critical characteristic dimension l
cTest macro, whole test system is made up of four parts:
(1) pedestal.Pedestal 1 is used for fixing and loads thruster 2.
(2) thruster.For guaranteeing that deflection does not take place the load that sample is applied, load thruster 2 and serve as by the vernier caliper of a standard.During work the main scale 7 of thruster 2 down and be fixed on the pedestal 1, vernier scale 8 slowly promotes vernier scale 8 last, two chis act on simultaneously and clamp sample and load mould to mould up and down, by moving sample 6 imposed loads of vernier scale 8, specifically see Fig. 1.
(3) sample loads mould to mould.This cover is made up of mold 3 and bed die 4 mould, and shown in Fig. 2-1～Fig. 2-3, Fig. 3-1～Fig. 3-3 is the three-view diagram of bed die to the three-view diagram of its mold 3 respectively.According to different mandrel sizes, 4 open channels of bed die, 12 size differences have designed a series of upper and lower moulds.Be to guarantee measuring accuracy, with mould is carried out electropolishing handle after the machining.
Fig. 2-4～Fig. 2-6, Fig. 2-7～Fig. 2-9 be respectively mold securing member 9, execute the three-view diagram that carries part 10, executing a year part 10 is the flat member that two lower ends have the quadrant arc, two arc surfaces of executing year part 10 are relative, this design can guarantee that sample is when the loading of carrying out the microbend experiment and unloading, the executing to carry between part and the sample of mold can not produce sliding friction, thereby guarantees in the experimentation to the load that sample applied to be pure bending load.Execute the gap of carrying between the part 10 and cooperates to sample with the mandrel 5 of bed die 4 and apply microbend load, will execute a year part 10 before the work and penetrate in the slideway 11 of securing member 9, will execute a year part 10 with two pieces of screws and be fixed on the securing member 9.
Described bed die 4 is a female member, and the spill two side has groove 12 structures, and clamping has the mandrel 5 of sample 6 to put into institute's open channels 12 during work.
(4) mandrel.The cylindrical stainless steel bar that processing has the different-diameter size is as mandrel, and the mandrel 5 with a pair of diameter consistent size during work clamps sample 6.For guaranteeing that the suffered load of sample is pure bending load, carry out electropolishing after the mandrel processing and handle, make its smooth surface.
The dynamic performance critical yardstick test macro and the method for testing of metallic film of the present invention or metal forming are utilized above-mentioned test macro, and concrete steps are as follows: (1) is fixed on thruster 2 on the pedestal 1 upside down; (2) select a pair of mandrel 5 and sample 6 is clamped in therebetween, together put into sample then and load the bed die 4 of mould, mold 3 is bonded on the thruster vernier scale 8 mould; (3) slowly promote angle of rake vernier scale 8, mold 3 and bed die 4 are fastened, sample 6 is subjected to the effect of pure bending load in loading mould, according to mandrel 5 curvature that contacted complete flexural deformation takes place up to sample 6; (4) vernier scale 8 of thruster 2 is released, to sample 6 unloadings, the elastic deformation that sample takes place is partly replied fully and is kept micro-plastic yield part; (5) edge-on film after the free elastic recovery or foil sample, the pattern of shooting microbend sample; (6) sample arc profile that photo write down is simulated the circular arc of sample bending by computer graphics, the radius-of-curvature of testing this circular arc, as shown in Figure 4.For reducing experimental error, get the mean value of repeatedly measuring.
The dynamic performance critical characteristic dimension l of embodiment 1 SUS304 stainless steel foil
cThe value measuring and calculating
(1) specimen preparation
The SUS304 stainless steel foil that thickness after will handling through mill-annealed is respectively 25 μ m and 50 μ m adopts line cutting means to cut 10 * 4mm
2Sample, sample is carried out in short-term electropolishing to clean its surface, finally make each 5 in the sample of two kinds of thickness.
(2) the stainless steel foil sample is carried out the microbend experiment
Selecting diameter respectively for use is that the mandrel of 240 μ m, 546 μ m and 1000 μ m is that the foil sample of 25 μ m carries out the microbend experiment to thickness; For thickness is that the foil sample of 50 μ m selects for use diameter to be respectively the mandrel of 480 μ m, 1092 μ m and 2000 μ m.As shown in Figure 1, thruster 2 is fixed on the pedestal 1 upside down, selects a pair of mandrel 5 and sample 6 is clamped in therebetween, together put into sample then and load the bed die 4 of mould, mold 3 is bonded on the thruster vernier scale 8 mould; Slowly promote angle of rake vernier scale 8, fltting speed is 1mm/s, and mold 3 and bed die 4 are fastened, and sample is subjected to the effect of pure bending load in loading mould, according to the mandrel curvature that is contacted complete flexural deformation takes place up to sample; Angle of rake vernier scale is released, sample is unloaded.Here, the strain level of two kinds of thickness stainless steel foils (calculating by formula (2)) is listed in table 1.
The strain level of the SUS304 stainless steel foil of two kinds of thickness of table 1
(3) measure the radius-of-curvature that unloads back stainless steel foil sample
Unloading back stainless steel foil sample generation elastic recovery.Edge-on the foil sample after the free elastic recovery in the experiment, shoot the profile photo of paper tinsel, the mapping software that uses a computer simulates the radius of curvature R that the foil sample arc of curvature ejects
f, write down each R
fValue.For reducing experimental error, get the mean value of repeatedly measuring.
(4) calculate the measured material dynamic performance critical characteristic dimension
From formula (3) and (4) as seen, calculate the dynamic performance critical characteristic dimension l of material
cValue will be used three materials in the tensile mechanical properties index that takes place under the uniform plastic deformation condition, studies show that in a large number, material with micro-meter scale does not show tangible size effect when uniform plastic deformation takes place, to thickness is that the SUS304 stainless steel foil of 25 μ m and 50 μ m carries out the microbend experiment to select the Young modulus E value of the plane strain of sample for use be 210GPa, the effective yield strength σ of sample
0Value is 420MPa; The strain hardening coefficient E of sample
pValue is got 2159MPa.Bring above-mentioned each parameter into equation (2), (3), (4), use Mathematica 5.0 computer mathematics software computings to try to achieve the dynamic performance critical characteristic dimension l of SUS304 stainless steel foil
cValue is 6.0 ± 0.3 μ m.
The measuring and calculating of embodiment 2 polycrystalline copper mechanical properties in films critical characteristic dimensions
(1) preparation sample
Adopt line cutting means on a block polycrystalline copper material, to cut one and be of a size of 10 * 4 * 0.5mm
3Sample, then it is carried out the mechanical lapping attenuate, when being thinned to thickness and being 0.08～0.1mm, carry out electropolishing again, finally make two kinds of single crystal Cu film samples that thickness is respectively 25 μ m and 50 μ m.
(2) the copper film sample is carried out the microbend experiment
Selecting diameter respectively for use is that the mandrel of 240 μ m, 546 μ m and 1000 μ m is that the film sample of 25 μ m carries out the microbend experiment to thickness; For thickness is that the film sample of 50 μ m selects for use diameter to be respectively the mandrel of 480 μ m, 1092 μ m and 2000 μ m.As shown in Figure 1, thruster 2 is fixed on the pedestal 1 upside down, selects a pair of mandrel 5 and sample 6 is clamped in therebetween, together put into sample then and load the bed die 4 of mould, mold 3 is bonded on the thruster vernier scale 8 mould; Slowly promote angle of rake vernier scale, fltting speed is 0.5mm/s, and mold 3 and bed die 4 are fastened, and sample is subjected to the effect of pure bending load in loading mould, according to the mandrel curvature that is contacted complete flexural deformation takes place up to sample; Angle of rake vernier scale is released, sample is unloaded.Here, the strain level of two kinds of thickness polycrystalline copper films (calculating by formula (2)) is listed in table 2.
The strain level of the polycrystalline copper film of two kinds of thickness of table 2
(3) measure the radius-of-curvature that unloads back copper film sample
Unloading back copper film sample generation elastic recovery.Edge-on the film sample after the free elastic recovery in the experiment, the profile photo of shooting copper film, the mapping software that uses a computer simulates the radius of curvature R that the film sample arc of curvature ejects
f, write down each R
fValue.Tested copper film sample unloading and crooked outline photo and the R through elastic recovery after of Fig. 4 for taking
fThe measuring and calculating of value.
(4) calculate the measured material dynamic performance critical characteristic dimension
By formula (3) and (4) as seen, calculate the dynamic performance critical characteristic dimension l of material
cValue will be used three tensile mechanical properties indexs under the material uniform plastic deformation condition, studies show that in a large number, metal material with micro-meter scale does not show tangible size effect when uniform plastic deformation takes place, the tensile mechanical properties index of the metallic film material of different micron order thickness and corresponding block materials or the index with membraneous material of other thickness are consistent substantially, therefore, by being that the polycrystalline copper film of 25 μ m and 50 μ m carries out the microbend experiment to thickness, the nothing that the Young modulus value E of the plane strain of sample adopts H.D.Espinosa to report on document is supported the Young modulus value 125GPa of copper film, the effective yield strength σ of sample
0Value is got the 31MPa of block copper product; The strain hardening coefficient E of sample
pValue is got 1128MPa.Bring above-mentioned each parameter into equation (2), (3), (4), try to achieve polycrystalline copper mechanical properties in films critical characteristic dimension l through computing with mathematical software
cValue is 4.1 ± 0.5 μ m.
Claims (5)
1. the test macro of a metal thin film/foil dynamic performance critical characteristic dimension is characterized in that, this test macro comprises:
(1) is used for fixing angle of rake pedestal;
(2) thruster; Thruster adopts vernier caliper, the thruster main scale down and be fixed on the pedestal, vernier scale is last;
(3) sample loads mould to mould; This cover is made up of mold and bed die mould, is installed on relatively respectively on angle of rake vernier scale and the main scale;
Described mold is by securing member and execute and carry a part and constitute, executing a year part is the flat member that two lower ends have circular arc, to execute a year part before the work penetrates the slideway of securing member and is fixed on the securing member, it is relative to execute the arc surface that carries part, when sample is loaded, execute a gap of carrying in the middle of the part and be buckled in clamping and have on a pair of mandrel of sample;
Described bed die is a female member, and the spill two side has groove, and during work, clamping has the mandrel of sample to put into institute's open channels;
(4) mandrel; The mandrel that is used for the clamping sample is installed in the groove of bed die.
2. according to the test macro of the described metal thin film/foil dynamic performance critical characteristic dimension of claim 1, it is characterized in that: during test axle diameter choose relevant with the thickness of sample, sample surface strain ε
SThe dependent variable that value reflected is no more than 10%.
3. the method for testing of a metal thin film/foil dynamic performance critical characteristic dimension is characterized in that concrete enforcement testing procedure is as follows:
(1) be fixed on thruster on the pedestal upside down; (2) select the mandrel of a pair of diameter consistent size, and specimen holder is held in therebetween, together put into sample then and load the bed die of mould, mold is bonded on the thruster vernier scale mould; (3) slowly promote angle of rake vernier scale, mold and bed die are fastened, sample is subjected to the effect of pure bending load in to mould loading mould, according to the mandrel curvature that is contacted complete flexural deformation takes place up to sample; (4) angle of rake vernier scale is released, to the sample unloading, the elastic deformation that sample takes place is partly replied fully and is kept micro-plastic yield part; (5) edge-on film after the free elastic recovery or foil sample, the pattern of shooting microbend sample; (6) sample arc profile that photo write down is simulated the circular arc of sample bending, the radius-of-curvature of testing this circular arc by computer graphics.
4. according to the method for testing of the described metal thin film/foil dynamic performance critical characteristic dimension of claim 3, it is characterized in that: metallic film of being tested or metal foil material are the micron that has by the various metallic films of present known method preparation and the rolling or rolling after annealing disposal route preparation of process, the metal foil material of sub-micron and following thickness, or the material that cuts through line from block materials, for guaranteeing measuring accuracy, the material that cuts will be by mechanical lapping and electropolishing subsequently, prepares to have micron, the metal forming of submicron thickness.
5. according to the method for testing of the described metal thin film/foil dynamic performance critical characteristic dimension of claim 3, it is characterized in that: in the described step (3), angle of rake vernier scale fltting speed is 0.05mm/s～5mm/s.
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| CN101726442B (en) * | 2008-10-24 | 2011-09-21 | 中国科学院金属研究所 | In situ evaluation system and method of reliability of thin-film materials on flexible electronic substrate |
| CN101441157B (en) * | 2008-12-26 | 2010-08-11 | 哈尔滨工业大学 | Metal foil plate high precision bending mechanical performance test apparatus |
| CN105784928B (en) * | 2016-01-05 | 2018-07-10 | 中国科学院金属研究所 | It is a kind of to measure device and method of the flexible material performance with bending radius changing rule |
| CN113790959B (en) * | 2021-09-03 | 2023-12-19 | 电子科技大学(深圳)高等研究院 | Sheet metal yield stress measuring tool and method |
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| CN1731135A (en) * | 2005-08-15 | 2006-02-08 | 清华大学 | Film stretching loading device under scanning microscopy environment and film distortion measurement method |
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