CN101209902B - Glass thinning method - Google Patents

Glass thinning method Download PDF

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Publication number
CN101209902B
CN101209902B CN 200710079753 CN200710079753A CN101209902B CN 101209902 B CN101209902 B CN 101209902B CN 200710079753 CN200710079753 CN 200710079753 CN 200710079753 A CN200710079753 A CN 200710079753A CN 101209902 B CN101209902 B CN 101209902B
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glass substrate
display panel
etching solution
glass
flow rate
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CN 200710079753
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Chinese (zh)
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CN101209902A (en
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朴文泳
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崔灒圭
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Priority to KR10-2006-0138924 priority Critical
Priority to KR1020060138924A priority patent/KR100835745B1/en
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Publication of CN101209902A publication Critical patent/CN101209902A/en
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Publication of CN101209902B publication Critical patent/CN101209902B/en

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Abstract

The present invention discloses a method for thinning glass, wherein etching solution flow downwards from the top to the bottom of glass substrate or display panel along the surface thereof in fixing flow rate or alterable flow rate, so as to thin the glass substrate or the display panel. The etching solution is HF solution. Due to the etching solution flows downwards by gravity action and etchesthe glass substrate or the display panel to prospective thickness, the method reduces the generation of particles and thins greatly the glass substrate or the display panel. Furtherly, the method avoids the generation of scratch on the surface of the glass substrate or the display panel, so as to obtain thin glass substate or display panel with excellent quality.

Description

玻璃减薄方法 Glass thinning method

技术领域 FIELD

[0001] 本发明涉及一种玻璃减薄方法,更具体地是涉及一种其中蚀刻溶液依靠重力作用沿着玻璃基材的表面从所述玻璃基材的上部向下流到下部,从而将玻璃基材蚀刻到所希望的厚度,由此在显著减少颗粒产生的同时将玻璃基材超薄化的玻璃减薄方法。 [0001] The present invention relates to a method of thinning the glass, and more particularly to a method in which the etching solution flows by gravity acting downward from the upper portion of the lower portion of the glass substrate along the surface of the glass substrate, so that the glass substrate material to be etched to a desired thickness, thereby significantly reducing the generation of particles while the thin glass substrate of the glass thinning method.

背景技术 Background technique

[0002] 用于显示器中的玻璃包括碱石灰玻璃,其是通过将碱离子按需要加到二氧化硅(SiO2)中形成的,和无碱玻璃,其在高温下几乎不发生改变。 [0002] The glass for a display comprising a soda-lime glass, which is needed by the added alkali ions, alkali-free glass, and silica (SiO2) is formed, which almost does not change at high temperature. 碱石灰玻璃物性温度转变点低,但不贵,因而用于采用低温工艺的超扭转向列液晶显示器(STN LCD)或无源矩阵型有机发光二级管(PM 0LED)中。 Low soda-lime glass transition temperature properties, but are not expensive, and thus the process for the low temperature liquid crystal display super twisted nematic (STN LCD) or a passive matrix organic light emitting diode (PM 0LED) in. 无碱玻璃物性温度转变点高,因而适宜用于形成TFT阵列的高温工艺中,并因而用于薄膜晶体管-液晶显示器(TFT-LCD)或有源矩阵型有机发光二级管(AM 0LED)中。 High temperature properties alkali-free glass transition point, and therefore suitable for high-temperature process for forming the TFT array, and thus a thin film transistor - liquid crystal display (TFT-LCD) or active matrix organic light emitting diode (AM 0LED) in .

[0003] 近来,为了满足显示设备工业的发展需要和顾客对轻、薄、短和小的产品趋势的需求,迫切需要一种用于减薄通过结合玻璃基材制得的显示面板的技术。 [0003] Recently, development of a display device in order to meet the industrial needs and customer demands for light, thin, short and small products trends, urgent need for a technique for thinning by combining a display panel glass substrate was prepared. 也就是说,要求减薄用于LCD中的玻璃基材以满足设备的薄轮廓趋势需要。 That is, the profile required for thinning the thin glass substrate in an LCD device to meet the required trend. 通过蚀刻显示面板来实现玻璃基材的减薄。 Thinning the glass substrate is achieved by etching the display panel.

[0004] 采用浸渍技术、喷雾技术和浸渍喷雾技术的常规玻璃减薄方法是广为人知的。 [0004] The use of immersion techniques, spraying techniques and impregnation of conventional glass thin spraying techniques are well known methods.

[0005] 下面,参考附图详细描述这些常规的玻璃减薄方法。 [0005] Next, with reference to the accompanying drawings of these thinning methods described conventional glass.

[0006] 图IA举例说明了采用浸渍技术的常规玻璃减薄方法100。 [0006] FIG IA illustrates a conventional impregnation techniques using glass thinning method 100. 参考图1A,通过隔膜120在外室150中彼此划分出了单元区130,显示面板130分别设置在单元区130的各单元内。 1A, the outer chamber 120 through the separator 150 dividing a cell region 130 with each other, the display panel 130 are disposed in each unit cell region 130. 蚀刻溶液装在外室150中,并供给至各单元。 The etching solution was filled in the outer chamber 150, and supplied to the respective units. 其后,从室110的下端向上提供泡沫140, 由此使分别设置在各单元中的显示面板减薄。 Thereafter, from the lower end 110 of chamber 140 provides an upward bubble, whereby the display panel are disposed in each cell thinning. 该方法的优点在于工艺简单,并且可以同时减薄多个玻璃基材。 The advantage of this method is that a simple process, and a plurality of glass substrates can be thinned simultaneously. 但是,该方法减薄玻璃基材所需要的时间长,当泡沫产生时引起玻璃基材所产生的残余物与玻璃基材表面碰撞,或者产生各种颗粒,以致在玻璃基材的表面上形成划痕或者在玻璃基材的内表面上形成颗粒。 However, this method of thinning the glass substrate required for a long time, causing the glass substrate resulting residue was collide with the surface of the glass substrate when the bubble generation, or generate various particle, so as to form on the surface of the glass substrate particles or scratches are formed on the inner surface of the glass substrate.

[0007] 图IB举例说明了采用喷雾技术的常规玻璃减薄方法200。 [0007] FIG IB illustrates a conventional technique using a spray thinning glass 200 method. 参考图1B,喷嘴220设置在显示面板210的两侧,所述喷嘴220将蚀刻溶液喷射在显示面板210的两个表面上以蚀刻显示面板210的表面,由此减薄显示面板210。 1B, a nozzle 220 disposed at both sides of the display panel 210, the injection nozzle 220 the etching solution to etch the surface of the display panel 210 on both surfaces of the display panel 210, whereby the thin display panel 210. 该方法类似于采用浸渍技术的玻璃减薄方法,有少量残余物生成,并且对于减薄大尺寸的玻璃基材而言是有利的。 The method is similar to method of impregnating glass thinning techniques, a small amount of residue is generated, and, for a large-sized thin glass substrate is advantageous. 但是,由于喷射压力高,会在玻璃基材表面产生酒窝形划痕,并且要求的工艺复杂。 However, due to the high injection pressure, it will produce dimples formed on the glass substrate surface scratches, and require complex processes.

[0008] 图IC举例说明采用浸渍喷雾技术的常规玻璃减薄方法300,其中组合使用了浸渍和喷雾技术。 [0008] FIG IC illustrates a conventional spraying techniques using impregnation methods thin glass 300, wherein the combination of dipping and spraying techniques. 参考图1C,将显示面板310浸渍到含有蚀刻溶液330的设备中后,设置在显示面板310两侧的喷嘴将蚀刻溶液330喷射到显示面板310的两个表面上,由此减薄显示面板310。 Referring to Figure 1C, the display panel 310 after dipping the etching solution containing the device 330, the nozzle 310 is provided on both sides of the display panel 330 ejecting the etching solution to both surfaces of the display panel 310, whereby the thin display panel 310 . 该方法要求的工艺复杂,成本高,造成维护和修理困难,并且仍然会在玻璃基材表面产生划痕。 This method requires a complex, high cost, resulting in difficulty of maintenance and repair, and still scratches on the surface of the glass substrate.

[0009] 尽管这些划痕是细微的,但仍然会给高技术设备,例如给显示面板带来致命的缺陷,从而显著降低了设备的价值。 [0009] Although these scratches are subtle, but still give high-tech equipment, such as a fatal flaw to the display panel, thereby significantly reducing the value of the equipment. 因此,玻璃基材上细微的划痕会使得其被丢弃。 Thus, fine scratches on a glass substrate such that it will be discarded.

[0010] 也就是说,当采用上述任何一种方法通过在蚀刻溶液中产生泡沫或喷射蚀刻溶液来蚀刻原玻璃基材时,细微划痕或细小颗粒都会对玻璃基材表面造成损害,从而给通过结合上述基材制得并且要求高精度的显示面板带来致命的质量缺陷。 [0010] That is, when using any of these methods by generating a foam or spray the etching solution in the etching solution to etch the glass substrate original, minor scratches or fine particles can cause damage to the surface of the glass substrate, thereby to prepared by binding the substrate and the accuracy required of display panel fatal quality defects. 尽管制得的显示面板只有细微的划痕,但其必须被丢弃。 While a display panel prepared with only slight scratches, but it must be discarded. 因此,上述常规方法是不利的,因为其导致显示面板的生产成本增加。 Therefore, the above conventional method is disadvantageous because it leads to an increase in production cost of the display panel.

发明内容 SUMMARY

[0011] 因此,本发明是考虑到上述问题而作出的,本发明的目的之一是提供一种玻璃减薄方法,其中蚀刻溶液依靠重力作用沿着玻璃基材或显示面板的表面从所述玻璃基材或显示面板的上部流到下部,从而将玻璃基材或显示面板蚀刻到所希望的厚度,由此在减少颗粒产生的同时将玻璃基材或显示面板超薄化。 [0011] Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a method for thinning the glass, wherein the etching solution depend on the action of gravity along the surface of a glass substrate or a display panel, from the upper panel display glass substrate or a lower flows, whereby the panel or a glass substrate is etched to the desired thickness of the display, thereby reducing the generation of particles while the glass substrate or the ultra-thin display panel.

[0012] 根据本发明,通过提供一种玻璃减薄方法能够实现上述或者其它目的,其中蚀刻溶液沿着玻璃基材或显示面板的表面从所述玻璃基材或显示面板的上部竖直向下流到下部以减薄玻璃基材或显示面板,由此防止了外部压力对玻璃基材或显示面板表面的损害, 并且在没有颗粒产生的情况下将玻璃基材或显示面板减薄到所希望的厚度。 [0012] According to the present invention, by providing a thin glass or other method can accomplish the above object, wherein the etching solution along the glass substrate or a display panel from an upper surface of the glass substrate or a display panel vertical downflow to the lower portion to thin display panel or a glass substrate, thereby preventing damage to the external pressure of the display panel or a glass substrate surface, and in the case where no particles resulting thinned glass substrate or a display panel to the desired thickness.

[0013] 所述蚀刻溶液以固定流速或可变流速沿着玻璃基材或显示面板的两个侧面从所述玻璃基材或显示面板的上部流到下部,由此依靠重力作用沿着玻璃基材或显示面板的两个侧面均勻流动,并因此精确控制蚀刻厚度。 [0013] The flow rate of the etching solution at a fixed or variable flow rate along the two sides of a glass substrate or a display panel from an upper portion of a lower portion of the flowing glass substrate or a display panel, whereby action of gravity along the glass substrate two side panels or display material of uniform flow, and thus precise control of the etching thickness.

[0014] 用HF溶液作为所述蚀刻溶液,由此降低了玻璃基材或显示面板的生产成本。 [0014] with an HF solution is used as the etching solution, thereby reducing the production cost of a glass substrate or a display panel.

[0015] 提供用于固定玻璃基材或显示面板的固定单元以及用于均勻控制所述蚀刻溶液流速的流速控制单元,由此消除了由于玻璃基材或显示面板的移动带来的蚀刻厚度改变, 并将玻璃基材或显示面板减薄到所希望的厚度。 Fixing units [0015] are provided for fixing a glass substrate or a display panel and means for uniformly controlling the flow rate of the etching solution flow rate control unit, thereby eliminating the glass substrate or etching the movable panel thickness to change the display to bring and a display panel or a glass substrate is thinned to a desired thickness.

[0016] 通过用于调节出口宽度的通道部分调节蚀刻溶液流的宽度,其中所述蚀刻溶液通过所述通道部分流出,由此根据显示面板的宽度调节蚀刻溶液流的宽度,并使得玻璃基材或显示面板的整个表面能够被同时均勻地蚀刻。 [0016] By adjusting a passage width of the outlet portion of the flow adjusting the width of the etching solution, wherein the etching solution flows through the passage portion, thereby adjusting the width of the etching solution flows according to the width of the display panel, so that the glass substrate and a display panel or the entire surface can be uniformly etched simultaneously.

附图说明 BRIEF DESCRIPTION

[0017] 结合附图,由下列详细描述可以更加清楚地理解本发明的上述和其它目的、特征和其它优点,其中: [0017] conjunction with the accompanying drawings, will be more clearly understood from the above and other objects, features and other advantages of the present invention consists of the following detailed description, wherein:

[0018] 图IA为举例说明采用浸渍技术的常规玻璃减薄方法的剖面示意图; [0018] FIG IA is a schematic cross-sectional illustration of a conventional impregnation technique glass thinning process;

[0019] 图IB为举例说明采用喷雾技术的常规玻璃减薄方法的剖面示意图; [0019] FIG. IB is a schematic cross-sectional illustration of a conventional technique using a spray method of thinning the glass;

[0020] 图IC为举例说明采用浸渍喷雾技术的常规玻璃减薄方法的剖面示意图; [0020] FIG IC is a schematic diagram illustrating a conventional spraying techniques using impregnation of glass sectional thinning process;

[0021] 图2为举例说明根据本发明一个实施方案的玻璃减薄方法的侧视图;和 [0021] Figure 2 is illustrated according to the present invention is a method of thinning the glass side view of the embodiment of the program; and

[0022] 图3A至3C为分别举例说明原玻璃基材表面、根据常规方法减薄的玻璃基材表面和根据本发明方法减薄的玻璃基材表面的照片。 [0022] Figures 3A to 3C illustrate, respectively, the surface of the original glass substrate surface according to a conventional method of thinning a glass substrate and a photograph of the surface of the glass substrate thinning process of the invention.

具体实施方式 Detailed ways

[0023] 现在,参考附图详细描述本发明的优选实施方案。 [0023] Now, preferred embodiments of the invention with reference to the detailed description. [0024] 图2为举例说明根据本发明优选实施方案的玻璃减薄方法的侧视图。 [0024] FIG. 2 is a side view illustrates a method of thinning the glass according to a preferred embodiment of the present invention. 参考图2,蚀刻溶液30沿着要被减薄的显示面板10的两个侧面从所述显示面板10的上部均勻流到所述显示面板10的下部。 Referring to Figure 2, along both sides of the etching solution 30 to be thinned the display panel 10 from the upper portion of the display panel 10 of the lower panel 10 uniformly flows to the display. 尽管该实施方案中仅公开了蚀刻溶液30沿着显示面板10的两个侧面从所述显示面板10的上部流到下部,但是本领域技术人员应当理解蚀刻溶液可以依靠重力作用从所述显示面板10的上部流到下部以减薄显示面板10。 Although this embodiment discloses only the etching solution 30 along the two sides of the display panel 10 can rely on gravity from the upper portion of the display panel 10 to flow to a lower, but those skilled in the art will appreciate the etching solution from the display panel an upper portion of the lower portion 10 flows to thin the display panel 10.

[0025] 更具体地,在显示面板10或玻璃基材的上部设置一个喷嘴单元或多个喷嘴单元以提供蚀刻溶液30。 [0025] More specifically, the nozzle unit is provided a plurality of nozzle units or the upper panel 10 or the display glass substrate 30 to provide an etching solution. 当使用一个喷嘴单元时,该喷嘴单元在显示面板10或玻璃基材的两侧支化为两部分,以便从该两部分喷出的蚀刻溶液30沿着显示面板10或玻璃基材的两个侧面流动。 When using a nozzle unit, the nozzle unit 10 in the sides of the display panel branched or glass substrate into two parts, so that the etching solution 30 from the discharge portion of the two display panel 10 along a glass substrate or two side flow. 作为替代方案,当使用多个喷嘴单元时,所述多个喷嘴单元分别设置在显示面板10或玻璃基材的两侧,以便从所述多个喷嘴单元喷出的蚀刻溶液沿着显示面板10或玻璃基材的两个侧面流动。 Alternatively, when a plurality of nozzle units, each of the plurality of nozzle units disposed on both sides of the panel display glass substrate 10 or to the display panel along a plurality of nozzle units discharged from the etching solution 10 or both sides of the glass substrate flow. 沿显示面板10的两个表面流动的蚀刻溶液30的流速可以是均一的,也可以是根据用户操作需要改变的,以便有效减薄显示面板10或玻璃基材。 Flow rate along the display surface of the panel 10 two flowing etching solution 30 may be uniform, or may be changed according to a user operation required in order to efficiently display panel 10 or thinned glass substrate.

[0026] 可以使用任何能够蚀刻玻璃的物质作为蚀刻溶液30。 [0026] may be used any material capable of etched glass 30 as an etching solution. 优选地,从有利于经济成本的方面考虑,用HF溶液作为蚀刻溶液30。 Preferably, in terms of economic cost considerations favor using HF solution as an etching solution 30. 进一步优选地,提供根据用户要求的蚀刻程度控制蚀刻溶液30流速的流速控制单元(未示出)。 Further preferably, there is provided according to the degree required by the user to control the etching of the flow rate of the etching solution 30 flow rate control unit (not shown). 更优选地,流速控制单元连接到自动化设备上来控制蚀刻时间和蚀刻厚度。 More preferably, the flow rate control unit connected to the automation equipment controlling the etching time and etching up thickness.

[0027] 在该实施方案的方法中,蚀刻溶液30从所述显示面板10的上部向下流到所述显示面板10的下部。 [0027] In the method of this embodiment, the etching solution 30 of the upper panel 10 flows down the lower portion of the display panel 10 from the display. 优选地,通道部分(未示出)设置在流量控制单元的出口处,且蚀刻溶液30从其中流出,所述通道部分具有可调宽度。 Preferably, channel portion (not shown) is provided at the outlet of the flow control unit, and wherein the etching solution 30 from flowing out of the passage portion has an adjustable width. 通道部分的宽度根据显示面板10的尺寸增加或减小,由此实现有效通用的玻璃减薄方法。 Width of the channel portion is increased or decreased according to the size of the display panel 10, thereby achieving efficient general method of thinning the glass.

[0028] 图3A是原玻璃基材表面的照片,图:3B是按照常规方法减薄的玻璃基材表面的照片,图3C是按照本发明的方法减薄的玻璃基材表面的照片。 [0028] FIG 3A is a photograph of the original surface of the glass substrate, FIG: 3B is a photograph of the surface of the glass substrate is thinned by a conventional method, FIG. 3C is a photograph of the surface of the glass substrate thinning process according to the present invention. 上述照片是用扫描电子显微镜(SEM = X 10, 000)拍摄的。 Above is a scanning electron microscope photograph (SEM = X 10, 000) taken. 如图:3B所示,在玻璃基材表面按照常规方法完成玻璃减薄工艺后,玻璃基材表面上产生划痕,即使这些划痕是细微的,也会给高技术设备,例如给显示面板带来致命的缺陷,从而显著降低设备的价值。 FIG: 3B, the surface of the glass substrate after the thinning process is completed glass in a conventional manner, scratches on the surface of the glass substrate, even if the scratches are minor, will give high-tech equipment, for example, to the display panel fatal flaw, thereby significantly reducing the value of the equipment. 因此,必须将具有细微划痕的薄玻璃基材丢弃。 Thus, the thin glass substrate having fine scratches must be discarded. 另一方面,如图3C所示,在玻璃基材表面按照本发明的方法完成玻璃减薄工艺后,在玻璃基材的表面上没有划痕产生。 On the other hand, as shown in FIG complete surface of the glass substrate according to the inventive method after glass thinning process, no scratch is generated on the surface 3C of the glass substrate.

[0029] 因此,区别于常规的玻璃减薄方法,本发明的玻璃减薄方法防止了玻璃基材表面上划痕的产生。 [0029] Accordingly, different from the conventional method of thin glass, glass thinning process of the present invention prevents the occurrence of scratches on the surface of the glass substrate. 因此,可以提高玻璃基材的质量,并可以修复因具有划痕而通常必须被丢弃的玻璃基材,从而减少了不必要的花费。 Thus, it is possible to improve the quality of the glass substrate, and can fix a glass substrate by having scratches typically must be discarded, thereby reducing unnecessary costs.

[0030] 从上述描述明显可见,本发明提供了一种玻璃减薄的方法,其中蚀刻溶液依靠重力作用从玻璃基材或显示面板的上部向下流到下部,从而将玻璃基材或显示面板蚀刻到所希望的厚度,由此在减少颗粒产生的同时将玻璃基材或显示面板超薄化。 [0030] apparent from the above description, the present invention provides a method of thinning the glass, wherein the etching solution flows by gravity action from an upper portion of a lower glass substrate of a display panel or downwardly so as to etch a glass substrate or a display panel to a desired thickness, thereby reducing the generation of particles while the glass substrate or the ultra-thin display panel.

[0031] 当采用本发明的方法超薄化显示面板时,显示面板表面上没有划痕产生。 [0031] When the present invention is a method of ultra-thin display panel, the display on the panel surface without scratches generated. 因此,本发明的方法能够提供极高质量的薄显示面板。 Thus, the method of the present invention can provide high quality thin display panel.

[0032] 尽管出于举例的目的,公开了本发明的优选实施方案,但是本领域技术人员应当理解可以在不偏离本发明在所附权利要求书中所公开的范围和精神的情况下,对本发明进行各种改变、添加和代替。 [0032] While, for purposes of example, discloses a preferred embodiment of the invention, those skilled in the art will appreciate may be made without departing from the present invention in the case of the appended claims disclosed scope and spirit of the present disclosure that various modifications, additions and substitutions.

Claims (1)

1. 一种玻璃减薄方法,其中蚀刻溶液依靠重力作用以固定流速或可变流速沿着玻璃基材或显示面板的两侧表面从所述玻璃基材或显示面板的上部竖直向下流到下部,从而使玻璃基材或显示面板变薄,在玻璃基材或显示面板的上部设置一个喷嘴单元或多个喷嘴单元以提供蚀刻溶液,并且所述一个喷嘴单元在玻璃基材或显示面板的两侧支化为两部分,或者所述多个喷嘴单元分别设置在玻璃基材或显示面板的两侧,使得蚀刻溶液以固定流速或可变流速沿着玻璃基材或显示面板的两个侧面流下,并且其中用HF溶液作为蚀刻溶液,提供用于固定玻璃基材或显示面板的固定单元以及用于均勻控制蚀刻溶液流速的流速控制单元,并且通过用于调节出口宽度的通道部分调节蚀刻溶液流的宽度,所述蚀刻溶液通过所述通道部分流出。 CLAIMS 1. A method of thin glass, wherein the etching solution depend on gravity flow at a fixed or variable flow along both sides of a glass substrate or a display panel from an upper surface of the glass substrate or a display panel to flow down vertically a lower portion, so that the thin display panel or a glass substrate, a nozzle unit is provided a plurality of nozzle units or the upper glass substrate or a display panel to provide an etching solution, and the nozzle unit in a display panel or a glass substrate branched into two parts on both sides, or a plurality of nozzle units are respectively disposed at both sides of a glass substrate or a display panel, two side panels such that the etching solution at a fixed flow rate or a variable flow rate along a glass substrate or a display stream, and wherein a HF solution as an etching solution, there is provided a fixing unit for fixing a glass substrate or a display panel and means for uniformly controlling the flow rate of the etching solution flow rate control unit, and in part by adjusting the etching solution was used to adjust the width of the outlet passage width of the flow of the etching solution flows through the passage portion.
CN 200710079753 2006-12-29 2007-03-07 Glass thinning method CN101209902B (en)

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