CN101192505A - Membrane viscosity measurement method - Google Patents
Membrane viscosity measurement method Download PDFInfo
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- CN101192505A CN101192505A CNA2006101184953A CN200610118495A CN101192505A CN 101192505 A CN101192505 A CN 101192505A CN A2006101184953 A CNA2006101184953 A CN A2006101184953A CN 200610118495 A CN200610118495 A CN 200610118495A CN 101192505 A CN101192505 A CN 101192505A
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- Prior art keywords
- membrane
- film
- measured
- viscosity
- laminator
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- 238000000691 measurement method Methods 0.000 title claims description 9
- 239000012528 membrane Substances 0.000 title abstract 10
- 238000005259 measurement Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000003908 quality control method Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000002313 adhesive film Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
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- Force Measurement Appropriate To Specific Purposes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a method for measuring viscosity of a membrane. The invention includes the following steps: (1) a rubber belt is pasted and attached with the membrane to be measured by using pasting pressure and attaching pressure of a fixed roller on a sticking film machine; (2) the pasted membrane to be measured is fixed adhesively faceup on a working platform of the sticking film machine, and one end of the rubber belt is connected with a tensometer which is inversely fixed on the sticking film machine; and (3) the membrane to be measured is departed from the rubber belt by a movement with uniform speed of the working platform on the sticking film machine, and numerical value in the tensometer is read and taken as the result of measurement on the viscosity of the membrane to be measured. The invention admirably adopts the inherent function of sticking membrane in the present sticking film machine and device to carry out the quantitative measurement on the viscosity of all kinds of membranes used for being pasted and attached in silicon chips like the blue membrane, the UV membrane, etc. , with the advantages of easy and fast operation and low cost. The invention provides reliable evidences for the manufacturing technology condition and quality control of the semiconductor products.
Description
Technical field
The present invention relates to a kind of process of IC semiconductor packaging and testing, relate in particular to a kind of viscosity measurement method of film.
Background technology
Can use adhesive film in the semiconductor packages industry, silicon chip is attached the back so that carry out further fine finishining.Because the viscosity of film directly has influence on the processing conditions of product quality and postorder, therefore need carry out quantitative management to the viscosity of film.Industry does not have a unified standard definition as yet to the viscosity of used various films in the silicon chip pad pasting at present, in present encapsulation factory, rarer the viscosity of film is carried out the means of quantitative management, the effective ways of viscosity of measuring film are less, and general adopt manually judged by rule of thumb.At present known method as shown in Figure 1, film is attached on the stainless steel metal table top (stainless steel plate) that moves horizontally, and for example, translational speed is 300mm/min, peel off the generation pulling force by measuring film and stainless steel platform, judge the viscosity size of film.This method is used the equipment that needs customization special, carry out the attaching of film and stretch measuring, therefore the equipment of this method and complicated operation and cost are higher, precision is higher, and only be applicable under the specific laboratory condition, for the environment of plant require simple, fast, economical for, above method is also inapplicable.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of viscosity measurement method of film, and this method is easy and simple to handle, quick, and cost is low.
For solving the problems of the technologies described above, the invention provides a kind of viscosity measurement method of film, comprise the steps: that (1) utilizes the attaching pressure of fixed roller on the laminator that rubber strip and film to be measured are attached; The film bonding plane to be measured that (2) will post is fixed on the laminator job platform up, and rubber strip one end connects tensiometer, and tensiometer oppositely is fixed on the laminator; (3) utilize the laminator job platform at the uniform velocity to move film to be measured and rubber strip are peeled off, read the tensiometer reading, as the viscosity measurement result of film to be measured.
Described rubber strip is of a size of: long 10-200cm, wide 2-15cm.
Tensiometer described in the step (2) oppositely is fixed on the laminator, and its fixing point and described laminator job platform are with high.
Compare with prior art, the present invention has following beneficial effect: the present invention utilizes the intrinsic pad pasting function of existing laminator equipment admirably, on the basis of not destroying existing capability, the various viscosity that are used for the film of silicon chip attaching such as blue film, UV film are carried out quantitative measurment, easy and simple to handle, quick, and cost is low, for the control of semiconductor fabrication process condition and product quality provides reliable foundation.
Description of drawings
Fig. 1 is the operation chart of the viscosity measurement method of existing film;
Fig. 2 is the operation chart of step 1 in the embodiment of the invention;
Fig. 3 and Fig. 4 are the operation charts of step 2 in the embodiment of the invention;
Fig. 5 is the operation chart of step 3 in the embodiment of the invention.
Embodiment
The present invention is further detailed explanation below in conjunction with drawings and Examples.
The viscosity of measuring the UV film with employing LINTEC system (RAD-2500 series) laminator is example, and the concrete operations step of the inventive method is as follows:
1, as shown in Figure 2, use LINTEC system (RAD-2500 series) laminator, utilize roller bearing fixing on the equipment to attach pressure, with the rubber strip 1 of fixed dimension (long: 10-200cm, wide: as 2-15cm) to be attached to the fixed position of UV film 2.
2, as shown in Figure 3 and Figure 4, film 2 bonding planes that post are fixed on the laminator job platform 4 up, an end of rubber strip 1 is connected with tensiometer 3, and tensiometer 3 oppositely is fixed on the laminator, and fixing point and laminator job platform 4 are with high.
3, as shown in Figure 5, utilize the at the uniform velocity mobile of laminator job platform 4 horizontal directions, rubber strip 1 and film 2 are peeled off, produce pulling force, choose the numerical value after the stable reading of tensiometer 3,, judge the viscosity size of film with this as the viscosity measurement result.
As the viscosity difference between the film that will be more different, or identical film is handled the variation of back (as the UV film) viscosity through viscosity, can adopt the rubber strip of same material, tension force and size to be attached to the same position of film, utilize same attaching power and movable workbench condition, the value of thrust that obtains can be made quantitative comparison.
Claims (3)
1. the viscosity measurement method of a film is characterized in that, comprises the steps: that (1) utilizes the attaching pressure of fixed roller on the laminator that rubber strip and film to be measured are attached; The film bonding plane to be measured that (2) will post is fixed on the laminator job platform up, and rubber strip one end connects tensiometer, and tensiometer oppositely is fixed on the laminator; (3) utilize the laminator job platform at the uniform velocity to move film to be measured and rubber strip are peeled off, read the tensiometer reading, as the viscosity measurement result of film to be measured.
2. the viscosity measurement method of film as claimed in claim 1 is characterized in that, described rubber strip is of a size of: long 10-200cm, wide 2-15cm.
3. the viscosity measurement method of film as claimed in claim 1 is characterized in that, the tensiometer described in the step (2) oppositely is fixed on the laminator, and its fixing point and described laminator job platform are with high.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200610118495A CN100576429C (en) | 2006-11-20 | 2006-11-20 | The viscosity measurement method of film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200610118495A CN100576429C (en) | 2006-11-20 | 2006-11-20 | The viscosity measurement method of film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101192505A true CN101192505A (en) | 2008-06-04 |
| CN100576429C CN100576429C (en) | 2009-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200610118495A Active CN100576429C (en) | 2006-11-20 | 2006-11-20 | The viscosity measurement method of film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100576429C (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101814450A (en) * | 2010-04-29 | 2010-08-25 | 上海宏力半导体制造有限公司 | Method for detecting adhesive force of metal layer on back of wafer |
| CN101206173B (en) * | 2006-12-22 | 2010-10-13 | 上海比亚迪有限公司 | Method for measuring coating adhesive strength on a coating body using flexible material as substrate |
| CN102183441A (en) * | 2011-02-18 | 2011-09-14 | 华东理工大学 | Method for measuring surface adhesive capacity and elastic modulus of soft material |
| CN101852710B (en) * | 2009-04-06 | 2011-11-30 | 潍坊恒联玻璃纸有限公司 | Method for measuring heat sealability of glass paper |
| CN103278447A (en) * | 2013-05-22 | 2013-09-04 | 上海烟草集团有限责任公司 | Simulation detection device and method for release force of hot-stamped electrochemical aluminum thin film |
| CN103323392A (en) * | 2013-07-08 | 2013-09-25 | 常熟市威腾进出口有限公司 | Method for testing adhesive force of industrial adhesive tape |
| CN103335943A (en) * | 2013-05-31 | 2013-10-02 | 东莞市正新包装制品有限公司 | A method for detecting ink adhesion of gravure plastic film |
| CN104111223A (en) * | 2014-08-05 | 2014-10-22 | 江苏申凯包装高新技术股份有限公司 | Method for detecting composite surface of release film |
| CN104655562A (en) * | 2015-02-14 | 2015-05-27 | 广州发展环保建材有限公司 | Method for testing pull-breaking value of bonding strength of autoclaved aerated concrete interface material |
| CN106867432A (en) * | 2015-12-10 | 2017-06-20 | 新纶科技（常州）有限公司 | A kind of ultraviolet photo-curing cementing agent and the release force test method using the adhesive |
| CN109238957A (en) * | 2018-09-07 | 2019-01-18 | 博众精工科技股份有限公司 | A kind of auto-stitching and tensile test integral mechanism |
| CN109781617A (en) * | 2019-01-17 | 2019-05-21 | 威士达半导体科技(张家港)有限公司 | A kind of UV scribing film easily tears the appraisal procedure of effect with counterdie |
| CN111458290A (en) * | 2020-05-06 | 2020-07-28 | 河源新之源粘贴技术有限公司 | Method for testing electrolyte resistance of adhesive tape |
| CN112730234A (en) * | 2020-12-30 | 2021-04-30 | 江苏大东新材料科技有限公司 | Writing board film coating viscosity testing method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4080825A (en) * | 1976-11-22 | 1978-03-28 | Champion International Corporation | Glue bond tester |
| JPH0726908B2 (en) * | 1988-01-25 | 1995-03-29 | 三菱電機株式会社 | Coating film adhesion strength or shear strength measuring device |
-
2006
- 2006-11-20 CN CN200610118495A patent/CN100576429C/en active Active
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101206173B (en) * | 2006-12-22 | 2010-10-13 | 上海比亚迪有限公司 | Method for measuring coating adhesive strength on a coating body using flexible material as substrate |
| CN101852710B (en) * | 2009-04-06 | 2011-11-30 | 潍坊恒联玻璃纸有限公司 | Method for measuring heat sealability of glass paper |
| CN101814450A (en) * | 2010-04-29 | 2010-08-25 | 上海宏力半导体制造有限公司 | Method for detecting adhesive force of metal layer on back of wafer |
| CN102183441A (en) * | 2011-02-18 | 2011-09-14 | 华东理工大学 | Method for measuring surface adhesive capacity and elastic modulus of soft material |
| CN102183441B (en) * | 2011-02-18 | 2012-12-12 | 华东理工大学 | Method for measuring surface adhesive capacity and elastic modulus of soft material |
| CN103278447B (en) * | 2013-05-22 | 2015-06-17 | 上海烟草集团有限责任公司 | Simulation detection device and method for release force of hot-stamped electrochemical aluminum thin film |
| CN103278447A (en) * | 2013-05-22 | 2013-09-04 | 上海烟草集团有限责任公司 | Simulation detection device and method for release force of hot-stamped electrochemical aluminum thin film |
| CN103335943A (en) * | 2013-05-31 | 2013-10-02 | 东莞市正新包装制品有限公司 | A method for detecting ink adhesion of gravure plastic film |
| CN103323392A (en) * | 2013-07-08 | 2013-09-25 | 常熟市威腾进出口有限公司 | Method for testing adhesive force of industrial adhesive tape |
| CN104111223A (en) * | 2014-08-05 | 2014-10-22 | 江苏申凯包装高新技术股份有限公司 | Method for detecting composite surface of release film |
| CN104655562A (en) * | 2015-02-14 | 2015-05-27 | 广州发展环保建材有限公司 | Method for testing pull-breaking value of bonding strength of autoclaved aerated concrete interface material |
| CN106867432A (en) * | 2015-12-10 | 2017-06-20 | 新纶科技（常州）有限公司 | A kind of ultraviolet photo-curing cementing agent and the release force test method using the adhesive |
| CN106867432B (en) * | 2015-12-10 | 2018-12-11 | 新纶科技（常州）有限公司 | A kind of ultraviolet photo-curing cementing agent and the release force test method using the adhesive |
| CN109238957A (en) * | 2018-09-07 | 2019-01-18 | 博众精工科技股份有限公司 | A kind of auto-stitching and tensile test integral mechanism |
| CN109238957B (en) * | 2018-09-07 | 2020-11-24 | 博众精工科技股份有限公司 | Automatic pressing and tension testing integrated mechanism |
| CN109781617A (en) * | 2019-01-17 | 2019-05-21 | 威士达半导体科技(张家港)有限公司 | A kind of UV scribing film easily tears the appraisal procedure of effect with counterdie |
| CN111458290A (en) * | 2020-05-06 | 2020-07-28 | 河源新之源粘贴技术有限公司 | Method for testing electrolyte resistance of adhesive tape |
| CN112730234A (en) * | 2020-12-30 | 2021-04-30 | 江苏大东新材料科技有限公司 | Writing board film coating viscosity testing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100576429C (en) | 2009-12-30 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140108 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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| TR01 | Transfer of patent right |
Effective date of registration: 20140108 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |