CN101169976A - A high-precision adjustment tool and its adjustment method - Google Patents

Abstract

The invention discloses a high-precision adjustment tool and an adjustment method thereof, which solves the problems of less positioning freedom and poor positioning flexibility of the traditional tool. The high-precision adjustment tooling includes a positioning seat, a cantilever, a support plate, a right-angle connecting block, a vertical positioning moving mechanism and a vertical positioning leveling mechanism, a horizontal positioning moving mechanism and a horizontal positioning leveling mechanism; the positioning seat is installed on the cantilever The upper end, the support plate is installed on the lower end of the cantilever, the vertical positioning and leveling mechanism is installed on the support plate, the vertical positioning and moving mechanism is installed on the vertical positioning and leveling mechanism, and the horizontal positioning and moving mechanism is installed on the On the horizontal positioning and leveling mechanism, the horizontal positioning and leveling mechanism and the vertical positioning and moving mechanism are respectively installed on two planes of the right-angle connecting block. Adjusting the vertical positioning and moving mechanism, the vertical positioning and leveling mechanism, the horizontal positioning and moving mechanism and the horizontal positioning and leveling mechanism can realize the high-precision positioning of the tooling with five degrees of freedom.

Description

A high-precision adjustment tool and its adjustment method

technical field

The invention relates to the field of tooling for positioning and installing mechanical workpieces, in particular to a high-precision adjusting tooling for positioning and installing precision workpieces.

Background technique

At present, the installation of high-precision workpieces in the mechanical field mostly uses tooling for positioning. In the field of micro-manufacturing, the installation of many precision workpieces requires the use of general tooling or special tooling. For example, workpieces on many devices in the semiconductor manufacturing industry require tooling for positioning and installation. During the integration process of the lithography machine, the installation of most components requires high-precision adjustment tooling, and high-precision adjustment tooling is used to position components. mouth connection. The silicon wafer transmission guide rail is a precision component. During the installation process, the distance between the positioning reference plane and the components to be positioned is relatively long, so the space for installation and adjustment tooling is limited. The precision of the positioned components is high, and the adjustment tooling is required to have Five degrees of freedom are adjustable.

Traditional general tooling or special tooling has certain limitations. Under the condition of ensuring the positioning accuracy of the tooling, the distance between the installation datum and the positioning datum of the traditional tooling is required to be short; they can only easily realize the positioning of the workpiece with 2 to 3 degrees of freedom; they are suitable for fixed workpieces of a certain shape and a certain size Easier to achieve positioning.

If the traditional general-purpose tooling or special-purpose tooling needs to perform micron-level positioning on the workpiece, the requirements for the size of the parts on the tooling will be increased. The dimensional accuracy of some parts may not be achieved by ordinary machining, which will greatly improve the tooling. production cost.

Therefore, traditional tooling is difficult to meet the installation requirements of workpieces such as silicon wafer transmission guide rails.

Contents of the invention

The invention provides a high-precision adjustment tool, which can effectively solve the problems that the traditional tool has less adjustable degrees of freedom, the distance between the installation reference and the positioning reference is short, and the positioning is easily restricted by the shape of the workpiece.

In order to achieve the above object, the high-precision adjustment tooling of the present invention includes a positioning seat, a cantilever, a support plate, a right-angle connecting block, a vertical positioning moving mechanism and a vertical positioning leveling mechanism, a horizontal positioning moving mechanism and a horizontal positioning leveling mechanism; The right-angle connecting block has a horizontal connection surface and a vertical connection surface; the positioning seat is installed on the upper end of the cantilever, the support plate is installed on the lower end of the cantilever, the vertical positioning and leveling mechanism is installed on the support plate, and the vertical The positioning and moving mechanism is installed on the vertical positioning and leveling mechanism, and the horizontal positioning and moving mechanism is installed on the horizontal positioning and leveling mechanism. and vertical connection surfaces.

The positioning seat has a mounting surface and a positioning surface, and the fastener installs the positioning seat on the upper end of the cantilever through the mounting surface. The fasteners are four hexagon socket head cap screws.

The vertical positioning and moving mechanism includes a vertical adjustment block, a positioning pin, and a vertical adjustment screw. The positioning pin is installed on the vertical adjustment block, and the vertical adjustment screw is installed on the vertical adjustment block. There are two locating pins, and the place where the locating pins are installed on the vertical adjustment block is correspondingly provided with a guide rail groove. The vertical adjustment block is installed on the vertical connecting surface of the right-angle connecting block through fasteners, and the fasteners are four hexagon socket head screws, and the hexagon socket head screws are vertically connected through the right-angle connection block Mounted on the vertical adjustment block.

The horizontal positioning and moving mechanism includes a horizontal adjustment block, a positioning pin, a horizontal adjustment screw, and a positioning block; the positioning pin and the horizontal adjustment screw are installed on the horizontal adjustment block, and the positioning block is installed on the horizontal adjustment block. There are two locating pins, and the place where the locating pins are installed on the horizontal adjustment block is correspondingly provided with guide rail grooves. The positioning block has a horizontal positioning surface and a vertical positioning surface, and the fasteners install the positioning block on the horizontal adjustment block through the horizontal positioning surface, and the fasteners are four hexagon socket head screws.

The vertical adjustment screw or the horizontal adjustment screw can also be replaced with a ball slide table with a micrometer.

The vertical positioning and leveling mechanism includes: a vertical adjustment block and a fastener; the vertical adjustment block is installed on the support plate through the fastener. The fasteners include: three hexagon socket head screws, three lock nuts and three hexagon socket head screws; the three socket head screws are sequentially connected to the vertical adjustment block, the lock nuts and the hexagon thin Install the nuts on the support plate.

The horizontal positioning and leveling mechanism includes: a horizontal adjustment block and fasteners; the horizontal adjustment block is installed on the horizontal connection surface of the right-angle connection block through the fasteners. The fasteners include: three hexagon socket head screws, three lock nuts, and three hexagon thin nuts; the three socket head screws are sequentially connected to the horizontal adjustment block, lock nuts and hexagon thin nuts Installed on the horizontal connection surface of the right-angle connection block.

The adjustment method of the high-precision adjustment tool of the present invention comprises the following steps: Step 1: put the assembled adjustment tool on a standard flat plate, and use the pad iron to support the adjustment tool with a cantilever and fix it; Step 2: measure and Adjust the flatness of the back of the cantilever and the vertical positioning surface of the positioning block to meet the workpiece installation requirements; Step 3: Measure and adjust the flatness of the positioning surface of the positioning seat and the horizontal positioning surface of the positioning block to meet the workpiece installation requirements ; Step 4: Measure and adjust the vertical distance between the positioning surface of the positioning seat and the horizontal positioning surface of the positioning block; Step 5: Measure and adjust the horizontal distance between the back of the cantilever and the vertical positioning surface of the positioning block.

In step 2, the adjustment is achieved by adjusting the height of the three socket head cap screws. In step 3, the adjustment is achieved by adjusting the height of the three hexagon socket head cap screws. The adjustment of the vertical distance in step 4 is realized by adjusting the vertical adjustment screw or the ball slide table. The adjustment of the horizontal distance in step 5 is realized by adjusting the horizontal adjustment screw or the ball slide table.

Compared with the existing tooling, the vertical positioning and leveling mechanism, the vertical positioning and moving mechanism, the horizontal positioning and leveling mechanism, and the horizontal positioning and moving mechanism of the high-precision adjustment tooling of the present invention can realize the adjustment of five degrees of freedom of the tooling, and the installation reference The distance between it and the positioning reference can be adjusted according to the workpiece, and the positioning and installation are not easily affected by the shape of the workpiece. Adjusting the size of the parts on the tooling does not require a high degree of accuracy, and the adjustment of the tooling can achieve micron-level positioning accuracy, so the production cost is low. The whole adjustment tool has compact structure, small volume and light weight.

Description of drawings

The high-precision adjustment tooling of the present invention is provided by the following embodiments and accompanying drawings.

Figure 1 is a schematic diagram of the axonometric view of the high-precision adjustment tooling.

Fig. 2 is a front view of the vertical positioning and moving mechanism of the high-precision adjustment tool.

Fig. 3 is a right view of the vertical positioning and moving mechanism of the high-precision adjustment tool.

Fig. 4 is a front view of the vertical positioning and leveling mechanism of the high-precision adjustment tool.

Fig. 5 is a right view of the vertical positioning and leveling mechanism of the high-precision adjustment tool.

Fig. 6 is a front view of the horizontal positioning and moving mechanism of the high-precision adjustment tool.

Fig. 7 is a top view of the horizontal positioning and moving mechanism of the high-precision adjustment tooling.

Fig. 8 is a front view of the horizontal positioning and leveling mechanism of the high-precision adjustment tool.

Fig. 9 is a top view of the horizontal positioning and leveling mechanism of the high-precision adjustment tool.

Fig. 10 is a schematic diagram of high-precision adjustment tooling adjustment.

Fig. 11 is a front view of the high-precision adjustment tool installation silicon wafer transmission guide rail.

Fig. 12 is a right view of the silicon wafer transmission guide rail installed by the high-precision adjustment tool.

Detailed ways

The high-precision adjustment tool of the present invention will be further described in detail below.

The high-precision adjustment tooling of the present invention, as shown in Figure 1, includes a positioning seat 1, a cantilever 4, a support plate 6, and a right-angle connecting block 15; the right-angle connecting block 15 has a vertical connecting surface 151 and a horizontal connecting surface 152; Seat 1 is installed on the upper end of the cantilever 4, the support plate 6 is installed on the lower end of the cantilever 4, the vertical positioning and leveling mechanism is installed on the support plate 6, the vertical positioning and moving mechanism is installed on the vertical positioning and leveling mechanism, and the horizontal positioning and moving mechanism is installed. On the horizontal positioning leveling mechanism, the horizontal positioning leveling mechanism and the vertical positioning moving mechanism are respectively installed on the horizontal connection surface 152 and the vertical connection surface 151 of the right-angle connection block 15 .

The positioning seat 1 has a positioning surface 011 and a mounting surface 012 , and the fasteners pass the mounting surface 012 to install the positioning seat 1 on the upper end of the cantilever, and the fasteners are four hexagon socket head cap screws 2 .

The structure of the vertical positioning mobile mechanism is shown in Figure 2 and Figure 3. Figure 2 and Figure 3 are the front view and right view of the vertical positioning mobile mechanism respectively, which includes a vertical adjustment block 9, a positioning pin 10, and a vertical adjustment screw 11. Two positioning pins 10 are installed on the vertical adjustment block 9, and the vertical adjustment screw 11 is also installed on the vertical adjustment block 9. The place where the positioning pin 10 is installed on the vertical adjustment block 9 corresponds to a guide rail groove; The vertical adjustment block 9 is installed on the vertical connection surface 151 of the right-angle connection block 15 through the fastener 16 . The fasteners 16 are 4 hexagon socket head screws, which are installed on the vertical adjustment block (9) by the vertical connection surface 151 of the right-angle connection block 15

The structure of the horizontal positioning moving mechanism is shown in Figure 6 and Figure 7, and Figure 6 and Figure 7 are the front view and top view of the horizontal positioning moving mechanism respectively, which includes a horizontal adjustment block 19, a positioning pin 17, a horizontal adjustment screw 20, and a positioning block 21 The positioning pin 17 is two installed on the horizontal adjustment block 19, and the horizontal adjustment screw 20 is also installed on the horizontal adjustment block 19, and the place where the positioning pin 17 is installed on the horizontal adjustment block 19 is correspondingly provided with a guide rail groove; the positioning block 21 has a horizontal The positioning surface 211 and the vertical positioning surface 212 , the fastener 22 installs the positioning block 21 on the horizontal adjustment block 19 through the horizontal positioning surface 211 . Fasteners 22 are four hexagon socket cap screws.

The structure of the vertical positioning leveling mechanism is shown in Figure 4 and Figure 5, and Figure 4 and Figure 5 are the front view and the right side view of the vertical positioning leveling mechanism respectively, which includes a vertical adjustment block 9, fasteners; The parts include three hexagon socket head screws 12, three lock nuts 8, and three hexagonal thin nuts 7; the three inner hexagon socket head screws 12 are connected to the vertical adjustment block 9, lock nuts 8, and hexagon thin nuts 7 in turn. Installed on the support plate 6 afterward.

The structure of the horizontal positioning and leveling mechanism is shown in Figure 8 and Figure 9, and Figure 8 and Figure 9 are the front view and top view of the horizontal positioning and leveling mechanism respectively, which includes a horizontal adjustment block 19 and fasteners; the fasteners include three Hexagon socket head screw 14, three lock nuts 18, three hexagonal thin nuts 13; three hexagon socket head screws 14 are connected to the horizontal adjustment block 9, lock nut 18, and hexagonal thin nut 13 in turn to be installed on the right angle connection On the horizontal connection surface 152 of the block 15.

Adjusting the three hexagon socket head cap screws 12 in the vertical positioning and leveling mechanism can realize the adjustment of the degree of freedom of the tooling R _y and R _z . Adjusting the three hexagon socket head cap screws 14 in the horizontal positioning and leveling mechanism can realize the adjustment of the degree of freedom of the tooling R _x and R _y . The vertical adjustment screw 11 can realize the adjustment of the degree of freedom of the tooling in the Z direction, and the horizontal adjustment screw 20 can realize the adjustment of the degree of freedom of the tooling in the Y direction. In this way, the tooling can realize the adjustment of five degrees of freedom.

The vertical adjustment screw 11 or the horizontal adjustment screw 20 in the vertical positioning moving mechanism or the horizontal positioning moving mechanism can be replaced by a ball slide table with a micrometer.

After the tooling is installed, the tooling of the present invention needs to be adjusted, as shown in FIG. 6 . Tooling adjustments include the following steps:

Step 1: Put the assembled adjustment tool on the standard flat plate 1004, use the pad iron 1005 to support the cantilever and fix the adjustment tool;

Step 2: Measure and adjust the flatness of the back surface 041 of the cantilever 4 and the vertical positioning surface 212 of the positioning block 21 to meet the mounting accuracy of the workpiece;

Step 3: Measure and adjust the flatness of the positioning surface 011 of the positioning seat 1 and the horizontal positioning surface 211 of the positioning block 21 to meet the mounting accuracy of the workpiece;

Step 4: Measure and adjust the distance H1 between the positioning surface 011 of the positioning seat 1 and the horizontal positioning surface 211 of the positioning block ₂₁ ;

Step 5: Measure and adjust the horizontal distance H ₂ between the back surface 041 of the cantilever 4 and the vertical positioning surface 212 of the positioning block 21 .

In step 2, adjust the height of the three hexagon socket cap screws 12 in the vertical positioning and leveling mechanism to adjust the flatness between the vertical positioning surface 212 of the positioning block 21 and the back 041 of the cantilever to meet the workpiece installation requirements. In step 3, adjust the three hexagon socket cap screws 14 in the horizontal positioning and leveling mechanism to adjust the flatness between the horizontal positioning surface 211 of the positioning block 21 and the positioning surface 011 of the positioning seat, so as to meet the workpiece installation requirements. In step 4, adjusting the vertical adjustment screw 11 in the vertical positioning moving mechanism can adjust the vertical distance H ₁ between the horizontal positioning surface 211 of the positioning block 21 and the positioning surface 011 of the positioning seat 1 . If the vertical adjustment screw is replaced by a micrometer ball slide, the distance H ₁ can be controlled by rotating the micrometer of the ball slide. By adjusting the horizontal adjustment screw 20 in the horizontal positioning moving mechanism in step 5, the horizontal distance H ₂ between the back 041 of the cantilever 4 and the vertical positioning surface 212 of the positioning block 21 can be adjusted. Similarly, if the horizontal adjustment screw 20 is replaced by a ball slide table with a micrometer, the horizontal distance H ₂ can be controlled by rotating the ball slide table micrometer.

After adjusting the tooling, use the tooling for positioning. For example, the installation of the silicon wafer transmission guide rail is shown in Fig. 11 and Fig. 12, and Fig. 11 and Fig. 12 are the front view and the right view of the silicon wafer transmission guide rail for adjusting the installation of the tooling respectively. First, fix the adjusted frock on the mainboard 1001 with the hexagon socket head cap screw 3. Adjust the silicon wafer transport part 1003 on the basic frame 1002, so that one side of the guide rail 1006 of the whole silicon wafer transport part 1003 is in contact with the vertical positioning surface 212 of the positioning block 21, and the other side of the guide rail 1006 is in contact with the horizontal positioning surface 211 of the positioning block 21 touch. After both surfaces are in contact, tighten the bolts on the whole silicon wafer transport part 1003.

Claims (21)

1. a high precision is adjusted frock, and it is characterized in that: it comprises positioning seat (1), cantilever (4), and back up pad (6), right angle contiguous block (15) is vertically located travel mechanism and is vertically located levelling gear, horizontal location travel mechanism and horizontal location levelling gear; Described right angle contiguous block (15) has horizontal connecting surface (152) and vertical joint face (151); Described positioning seat (1) is installed in cantilever (4) upper end, described back up pad (6) is installed in cantilever (4) lower end, described vertical location levelling gear is installed on the back up pad (6), described vertical location travel mechanism is installed on the levelling gear of vertical location, described horizontal location travel mechanism is installed on the horizontal location levelling gear, described horizontal location levelling gear and vertically location travel mechanism be installed in respectively on the horizontal connecting surface (152) and vertical joint face (151) of right angle contiguous block 15.

2. high precision as claimed in claim 1 is adjusted frock, and it is characterized in that: described positioning seat (1) has installed surface (012) and locating surface (011), and securing member is installed in cantilever (4) upper end by described installed surface (012) with positioning seat (1).

3. high precision as claimed in claim 2 is adjusted frock, and it is characterized in that: described securing member is four hexagon socket cap head screws (2).

4. high precision as claimed in claim 1 is adjusted frock, it is characterized in that: described vertical location travel mechanism comprises vertical adjustment piece (9), register pin (10), vertically adjust screw (11), described register pin (10) is installed on the vertical adjustment piece (9), and described vertical adjustment screw (11) is installed on the vertical adjustment piece (9).

5. high precision as claimed in claim 4 is adjusted frock, and it is characterized in that: described register pin (10) is two, and the local correspondence that described vertical adjustment piece (9) is gone up installing and locating pin (10) has guide-track groove.

6. high precision as claimed in claim 4 is adjusted frock, and it is characterized in that: described vertical adjustment piece (9) is installed on the vertical joint face (151) of right angle contiguous block (15) by securing member.

7. high precision as claimed in claim 6 is adjusted frock, it is characterized in that: described securing member is four hexagon socket cap head screws (16), and described hexagon socket cap head screw (16) is installed on vertical adjustment piece (9) by the vertical joint face (151) of right angle contiguous block (15).

8. high precision as claimed in claim 1 is adjusted frock, it is characterized in that: described horizontal location travel mechanism comprises horizontal adjustment piece (19), register pin (17), adjusted leveling screws (20), locating piece (21); Described register pin (17) and adjusted leveling screws (20) are installed on the horizontal adjustment piece (19), and described locating piece (21) is installed on the horizontal adjustment piece (19).

9. high precision as claimed in claim 8 is adjusted frock, and it is characterized in that: described register pin (17) is two, and the local correspondence that described horizontal adjustment piece (19) is gone up installing and locating pin (17) has guide-track groove.

10. high precision as claimed in claim 8 is adjusted frock, it is characterized in that: described locating piece (21) has horizontal location face (211) and vertical locating surface (212), and securing member is installed in locating piece (21) on the horizontal adjustment piece (19) by horizontal location face (211).

11. high precision as claimed in claim 10 is adjusted frock, it is characterized in that: described securing member is four hexagon socket cap head screws (22).

12. adjust frock as claim 4 or 8 described high precision, it is characterized in that: described vertical adjustment screw or adjusted leveling screws also can change the ball slide unit with thousand parts of chis into.

13. high precision as claimed in claim 1 is adjusted frock, it is characterized in that: described vertical location levelling gear comprises: vertically adjust piece (9), securing member; Described vertical adjustment piece (9) is installed on the back up pad by securing member.

14. high precision as claimed in claim 13 is adjusted frock, it is characterized in that: described securing member comprises: three hexagon socket cap head screws (12), three set nuts and three interior hexagonal cylindrical nuts; Described three hexagon socket cap head screws (12) are installed on the back up pad (6) after connecting vertical adjustment piece (9), set nut (8) and hexagon thin nut successively.

15. high precision as claimed in claim 1 is adjusted frock, it is characterized in that: described horizontal location levelling gear comprises: horizontal adjustment piece (19), securing member; Described horizontal adjustment piece (19) is installed on the horizontal connecting surface (152) of right angle contiguous block (15) by securing member.

16. high precision as claimed in claim 15 is adjusted frock, it is characterized in that: described securing member comprises: three hexagon socket cap head screws (14), three tight split nuts (18), three hexagon thin nuts (13); Described three hexagon socket cap head screws (14) are installed on the horizontal connecting surface (152) of right angle contiguous block (15) after connecting horizontal adjustment piece (19), tight split nut (18) and hexagon thin nut (13) successively.

17. a high precision as claimed in claim 1 is adjusted the method for adjustment of frock, it is characterized in that: it may further comprise the steps:

Step 1: the adjustment frock that has assembled is placed on the flat board (1004) of standard, props cantilever and fixing adjusting frock with parallels (1005);

Step 2: measure and adjust the back side (041) of cantilever (4) and the flatness of the vertical locating surface (212) of locating piece (21), make it satisfy the installation requirement of workpiece;

Step 3: measure and adjust the flatness of locating surface (011) with the horizontal location face (211) of locating piece (21) of positioning seat (1), make it satisfy the workpiece installation requirement;

Step 4: measure and adjust the vertical distance of the locating surface (011) of positioning seat (1) apart from the horizontal location face (211) of locating piece (21);

Step 5: measure and adjust the horizontal range of cantilever (4) back side (041) apart from the vertical locating surface (212) of locating piece (21).

18. high precision as claimed in claim 17 is adjusted the method for adjustment of frock, it is characterized in that: in step 2, adjustment is to realize by the height of adjusting three hexagon socket cap head screws (12).

19. high precision as claimed in claim 17 is adjusted the method for adjustment of frock, it is characterized in that: in step 3, adjustment is to realize by the height of adjusting three hexagon socket cap head screws (14).

20. high precision as claimed in claim 17 is adjusted the method for adjustment of frock, it is characterized in that: distance is to realize by adjusting vertical adjustment screw (11) or ball slide unit adjusting vertically described in the step 4.

21. high precision as claimed in claim 17 is adjusted the method for adjustment of frock, it is characterized in that: adjusting horizontal range described in the step 5 is to realize by adjusting adjusted leveling screws (20) or ball slide unit.

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