CN101098065A - Unstable resonator automatic cavity-adjusting system and method using self-collimation feedback light path - Google Patents

Abstract

The invention discloses an instable chamber automatic chamber adjusting system based on auto-collimating feedback optical path, and a relative adjusting method, for using an aberration detecting system, an instable chamber, and a feedback mirror to build an auto-collimating system for automatically adjusting instable chamber. The invention uses the aberration detecting system to obtain the optical aberration of reflected beam, according to Zernike aberration factors and system sensitivity matrix to calculate out the position bias of chamber mirror, thereby outputting a drive signal according to the position bias, to correct the position bias. The invention has the advantages that (1), the invention can detect the high-order aberration of chamber adjusting signal light, to make instable chamber adjustment more stable and accurate, (2), the invention can calculate the position bias of chamber mirror according to aberration directly, to adjust the instable chamber with fewer operation and high speed.

Description

Adopt the unsteady cavity automatic cavity-adjusting system and the cavity adjustment method of self-collimation feedback light path

Technical field

The present invention relates to laser technology field, be specifically related to a kind of unsteady cavity automatic cavity-adjusting system and cavity adjustment method.

Background technology

Unsteady cavity is to realize in the high-energy laser that laser energy extracts and the Primary Component of output, whether the collimation of unsteady cavity will directly influence the output beam quality of laser and the stability of power output, therefore laser all will carry out the adjusting of resonant cavity chamber mirror when installing or move, and makes mirror position, chamber reach designing requirement and could realize predetermined output-index.

The cavity adjustment method of high-energy laser unsteady cavity generally is to adopt the Gaussian beam of He-Ne laser 22 outputs to be injected in the unsteady cavity through the aperture on the concave mirror 23 as guide lights (as shown in Figure 1) at present, guide lights comes and goes for more than 23 time outside expansion Shu Houjing output coupling mirror 21 output cavities through convex mirror 20 and concave mirror in resonant cavity, output beam scioptics 24 are focused on observe the focal spot pattern on the focal plane 19, judge by the shape of interference fringe of focal spot or the skew of focal spot whether unsteady cavity collimates, the result regulates each chamber mirror repeatedly according to the observation, up to the tilt quantity of interference pattern that obtains symmetry or focal spot near 0.There are many weak points in existing method:

(1), the hot spot on the focal plane is the multiple-beam fringe that the multiple beam stack forms, the optical field distribution complexity, the aberration situation of judgement output beam that can not be quantitative, only can obtain the inclination information of unsteady cavity output beam, and can't judge high-order aberrations such as spherical aberration, comas, therefore transfer the chamber precision not high;

(2), need judge rule of thumb that there is skew in which mirror position, need regulate a plurality of minute surfaces repeatedly, therefore regulate loaded down with trivial detailsly, governing speed is slow.

(3), open the mode of aperture on the concave mirror, not only increased the difficulty of mirror finish and the risk of minute surface fire damage, also destroyed the formation of unsteady cavity fresnel diffraction nuclear, be unfavorable for the raising of unsteady cavity output beam quality.

Expansion along with the high energy laser system range of application, the superlaser application system is had higher requirement to indexs such as Laser Output Beam quality, power stabilities, automaticity that unsteady cavity is regulated and real-time require also more and more higher, realize that therefore quick, the High Precision Automatic adjusting of unsteady cavity will inevitably play huge impetus for the extensive use of high energy laser system.

Summary of the invention

Technical problem to be solved by this invention is to overcome the defective that above-mentioned prior art exists, provide a kind of adjusting quick and precisely, transfer the unsteady cavity automatic cavity-adjusting system and the cavity adjustment method of the employing self-collimation feedback light path that chamber precision height, the output beam quality that makes laser and energy extraction efficiency be improved.

For solving the problems of the technologies described above, the present invention adopts following technical proposals.

The unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path of the present invention, it is characterized in that it comprises the aberration detection system, unstable cavity mirror, the feedback mirror, data analysis system, chamber mirror control system and laser pedestal, described unstable cavity mirror comprises the second chamber mirror, the output coupling mirror and the first chamber mirror, output coupling mirror places between the second chamber mirror and the first chamber mirror and the close second chamber mirror, the feedback mirror places between the output coupling mirror and the first chamber mirror and the close first chamber mirror, described output coupling mirror is the plane mirror that the center offers slotted eye or rectangular opening, the long limit of elliptical aperture major axis or rectangular opening is parallel with laser pedestal installation base surface, the center of output coupling mirror and unsteady cavity optical axis coincidence, the minute surface of output coupling mirror and unsteady cavity optical axis are 45 degree angles; Described feedback mirror is a plane mirror, minute surface center and unsteady cavity optical axis coincidence, and minute surface is vertical with the unsteady cavity optical axis; Be provided with the gain module of laser between output coupling mirror and the feedback mirror, the unsteady cavity optical axis is positioned at the center of gain module; The second chamber mirror, output coupling mirror, the first chamber mirror and feedback mirror all are installed on the automatically controlled adjusting microscope base, the optical axis of aberration detection system is by the center of output coupling mirror, vertical with the unsteady cavity optical axis, data analysis system is connected by data wire with chamber mirror control system with the aberration detection system respectively, chamber mirror control system is connected by data wire with each automatically controlled adjusting microscope base respectively again, and each automatically controlled adjusting microscope base all is loaded on the laser pedestal.

Described feedback mirror is circular or square, and the diameter that it is circular or the square length of side are the 1/M of the effective aperture of the first chamber mirror, and M is how much magnification ratios of unsteady cavity.

Described aberration detection system is carried out the instrument of Aberration Analysis function and is constituted by having to transmit light and receive feedback beam, comprise the various interferometers that have probe source, or Hartmann wave front sensor, or by He-Ne laser, parallel light tube, spectroscope with do not combine with the interferometer of measurement light source.

The type of drive of described automatically controlled adjusting microscope base is that voice coil loudspeaker voice coil driving, Piezoelectric Ceramic or accurate thread drive.

Described unsteady cavity is a positive-branch confocal unstable resonator, and the described first chamber mirror is a concave mirror, and the second chamber mirror is a convex mirror.

Described unsteady cavity is negative branch confocal unstable resonator, and the described first chamber mirror and the second chamber mirror are concave mirror.

The cavity adjustment method of the unsteady cavity automatic cavity-adjusting system of above-mentioned use self-collimation feedback light path, it is characterized in that by the aberration detection system, the output coupling mirror of forming unstable cavity mirror, the first chamber mirror, the second chamber mirror and feedback mirror constitute self-collimation feedback light path, launch a branch of directional light as signal beams by optical axis by the center of output coupling mirror and the aberration detection system vertical with the unsteady cavity optical axis, successively through output coupling mirror, the first chamber mirror, the second chamber mirror, the feedback mirror, the second chamber mirror, after the first chamber mirror and the output coupling mirror reflection, become the unstable cavity mirror position deviation information of having carried, auto-collimation feedback beam with certain aberration, feedback beam is returned the aberration detection system, provide each rank aberration coefficients of this light beam by the aberration detection system, poor by inclination or the offset of side-play amount equipotential that the data analysis system that links to each other with the aberration detection system is calculated each chamber mirror in the unstable cavity mirror according to the aberrometer of feedback beam, the chamber mirror control system that links to each other with data analysis system is done corresponding the adjusting according to the inclination of each chamber mirror or each chamber mirror of side-play amount driving unsteady cavity, and each mirror position, chamber reaches design load in the unsteady cavity thereby make.

The application of the unsteady cavity automatic cavity-adjusting system of above-mentioned use self-collimation feedback light path, having of it is characterized in that the output coupling mirror, the first chamber mirror, the second chamber mirror of aberration detection system, unsteady cavity and the self-collimation feedback light path that the feedback mirror constitutes the produce feedback beam that plane wave front distributes can be used for fine adjustment, Laser Output Beam transmission direction indication and the focal position indication of the follow-up optics string of laser in the laser system.

Compared with prior art, beneficial effect of the present invention is:

1), the flashlight that the aberration detection system is sent is only made single and is come and gone in unsteady cavity, it is unsteady cavity first, two chamber mirrors and output coupling mirror are successively only done twice to this light beam and are reflected to form outside the feedback beam output cavity, output beam no longer is the multi-light beam coherent superimposed of complexity, and only be the single beam laser that has carried chamber mirror position deviation information, by general Aberration Analysis method just can be quantitative any rank of analysis aberration, make Aberration Analysis become quantitative analysis by former qualitative analysis, and can detect the higher order aberratons of transferring the chamber flashlight, thereby it is more accurate that unsteady cavity is regulated, and increased the precision of transferring the chamber.

2), by finding the solution the functional relation of aberration information and chamber mirror position deviation, can therefore transfer the speed in chamber faster according to the side-play amount of mirror position, aberration quantitative solving chamber, chamber mirror driving mechanism is only once regulated and can be made the position of unsteady cavity reach design load.

3), need not the aperture of special processing on the mirror of chamber, guaranteed the integrality of chamber mirror, the output beam quality and the energy extraction efficiency of laser are improved.

4), the feedback light of self-collimation feedback light path and the PHASE DISTRIBUTION of the actual output beam of laser have consistency, so the feedback beam that produces of the auto-collimation light path fine adjustment, Laser Output Beam transmission direction that can be used for the follow-up optics string of laser in the laser system accurately indication and focal position are accurately indicated.

Description of drawings

Fig. 1 is the cavity adjustment method schematic diagram of existing unsteady cavity;

Fig. 2 is the structure principle chart of unsteady cavity cavity-adjusting system of the present invention;

Fig. 3 is a cavity adjustment method schematic diagram of the present invention;

Fig. 4 is the structural principle schematic diagram of embodiment 1;

Fig. 4 (a) is the feedback beam interference pattern before embodiment 1 transfers the chamber;

Fig. 4 (b) is the feedback beam interference pattern after embodiment 1 transfers the chamber;

Fig. 5 is the structural principle schematic diagram of embodiment 2;

Fig. 6 is the structural principle schematic diagram of embodiment 3;

Fig. 7 is the structural principle schematic diagram of embodiment 4.

Embodiment

Shown in Fig. 2,3, the unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path of the present invention, comprise aberration detection system 1, unstable cavity mirror, feedback mirror 5, data analysis system 6, chamber mirror control system 7 and laser pedestal 9, unstable cavity mirror comprises the second chamber mirror 4, output coupling mirror 2 and the first chamber mirror 3, output coupling mirror 2 places between the second chamber mirror 4 and the first chamber mirror 3 and near the second chamber mirror 4, feedback mirror 5 places between the output coupling mirror 2 and the first chamber mirror 3 and the close first chamber mirror 3.Output coupling mirror 2 offers the plane mirror of slotted eye (also can be rectangular opening) for the center, elliptical aperture major axis (or the long limit of rectangular opening) is parallel with laser pedestal 9 installation base surfaces, the center of output coupling mirror 2 overlaps with unsteady cavity optical axis 11, and the minute surface of output coupling mirror 2 and unsteady cavity optical axis 11 are 45 degree angles; Feedback mirror 5 is a circle (or square) level crossing, and its diameter (or length of side) is the 1/M (M is how much magnification ratios of unsteady cavity) of the effective aperture of the first chamber mirror 3, and the minute surface center overlaps with unsteady cavity optical axis 11, and minute surface is vertical with unsteady cavity optical axis 11; Be provided with the gain module 8 of laser between output coupling mirror 2 and the feedback mirror 5, unsteady cavity optical axis 11 is positioned at the center of gain module 8, the second chamber mirror 4, output coupling mirror 2, the first chamber mirror 3 and feedback mirror 5 all are installed on the automatically controlled adjusting microscope base 13 (among Fig. 3～Fig. 7, automatically controlled adjusting microscope base is all with the little square frame reduced representation of black), the optical axis 12 of aberration detection system 1 is by the center of output coupling mirror 2, vertical with unsteady cavity optical axis 11, data analysis system 6 is connected by data wire with aberration detection system 1 and chamber mirror control system 7 respectively, chamber mirror control system 7 is connected (among Fig. 3～Fig. 7 by data wire with each automatically controlled adjusting microscope base 13 respectively again, for simplifying, chamber mirror control system 7, data wire between computer 14 and the automatically controlled adjusting microscope base 13 is not shown), each automatically controlled adjusting microscope base 13 all is loaded on the laser pedestal 9, the type of drive of automatically controlled adjusting microscope base 13 is to have precision, stable, the various type of drive of controlled placement property can be voice coil loudspeaker voice coil and drive, Piezoelectric Ceramic or accurate thread drive.Aberration detection system 1 is carried out the instrument of Aberration Analysis function and is constituted by having to transmit light and receive feedback beam, as have various interferometers of probe source, or Hartmann wave front sensor, or by He-Ne laser, parallel light tube, spectroscope with do not combine with the interferometer of measurement light source.

Use this system to carry out the self-regulating method of unsteady cavity and step as follows:

1), at first determines the optical axis of unsteady cavity: with a He-Ne laser 18, place laser pedestal 9 outer and with the relative side of the first chamber mirror, 3 reflectings surface, make the light pencil that He-Ne laser 18 sends and the central lines of gain module 8, with of the indication of this light pencil as unsteady cavity optical axis 11 positions.

2), at first carry out the installation of the first chamber mirror 3, regulate the first chamber mirror 3 light pencil that incides on the first chamber mirror 3 is returned along former road according to the design attitude of the position of aforementioned each system relation and each chamber mirror of unsteady cavity; Feedback mirror 5 is installed, is regulated feedback mirror 5 light pencil that incides on the feedback mirror 5 is returned along former road.After the position of the feedback mirror 5 and the first chamber mirror 3 mixed up, the first chamber mirror 3 and feedback mirror 5 fixed-site can guarantee no longer to change in unsteady cavity optical axis 11 self-regulating process afterwards like this in the self-regulating process afterwards.After this step is finished, close He-Ne laser 18.

3), carry out the preliminary installation adjusting of aberration detection system 1, output coupling mirror 2, the second chamber mirror 4 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity.Make aberration detection system 1 send a branch of directional light, regulate the inclination angle and the angle of pitch of output coupling mirror 2, make signal beams after output coupling mirror 2 reflections, pass through gain module 8, and the center of signal beams overlaps with gain module 8 centers are approximate as signal beams.The preliminary second chamber mirror 4 of regulating, the directional light as signal beams that aberration detection system 1 is launched successively reflects through output coupling mirror 2, the first chamber mirror 3, the second chamber mirror 4, feedback mirror 5, the second chamber mirror 4, the first chamber mirror 3 and output coupling mirror 2, forms and carries auto-collimation feedback beam unstable cavity mirror position deviation information, that have certain aberration.

4), come and go the feedback beam of exporting the back and return aberration detection system 1 through single, aberration detection system 1 is measured each rank aberration information of feedback beam, be transferred to data analysis system 6, go out the position deviation information of the output coupling mirror 2 and the second chamber mirror 4 by data analysis system 6 according to the functional relation quantitative solving of aberration and chamber mirror position offset.

5), according to position deviation information, data analysis system 6 is transferred to chamber mirror control system 7 with the position deviation data that solves, by the automatically controlled adjusting microscope base 13 of chamber mirror control system 7 output drive signals to the output coupling mirror 2 and the second chamber mirror 4, inclination and skew equipotential offset difference to the chamber mirror are corrected, and the driving mechanism of automatically controlled adjusting microscope base 13 is only once regulated and can be made interior each the mirror position, chamber of unsteady cavity reach design load.

The accent chamber finishes, take off the feedback mirror 5 after, laser brings into operation.

It needs to be noted, among the present invention, after unsteady cavity was regulated and finished, the feedback beam with plane wave front distribution that the auto-collimation light path produces can be used for fine adjustment, Laser Output Beam transmission direction indication and the focal position indication of the follow-up optics string of laser system laser simultaneously.Because the method that adopts the present invention to provide can guarantee the PHASE DISTRIBUTION of the actual output beam of the feedback light of self-collimation feedback light path and laser and have consistency.

Embodiment 1

As shown in Figure 4, the embodiment that is used for positive-branch confocal unstable resonator for the present invention, as shown in the drawing, the present invention uses the laser positive-branch confocal unstable resonator automatic cavity-adjusting system of self-collimation feedback light path, its aberration detection system is a laser plane interferometer 101, the flashlight of output is a branch of directional light, and wavelength is 632.8nm.Data analysis system 6 and chamber mirror control system 7 realize that by a computer 14 promptly native system comprises laser plane interferometer 101, unstable cavity mirror, feedback mirror 5, computer 14 and laser pedestal 9.Unstable cavity mirror comprises the second chamber mirror 4, output coupling mirror 2 and the first chamber mirror 3, the first chamber mirror 3 is a concave mirror, the second chamber mirror 4 is a convex mirror, output coupling mirror 2 places between the second chamber mirror 4 and the first chamber mirror 3 and near the second chamber mirror 4, feedback mirror 5 places between the output coupling mirror 2 and the first chamber mirror 3 and the close first chamber mirror 3.Output coupling mirror 2 offers the plane mirror of slotted eye for the center, and the elliptical aperture major axis is parallel with laser pedestal 9 installation base surfaces, and the center of output coupling mirror 2 overlaps with unsteady cavity optical axis 11, and the minute surface of output coupling mirror 2 and unsteady cavity optical axis 11 are 45 degree angles; Feedback mirror 5 is the circular flat speculum, and the minute surface center of feedback mirror 5 overlaps with unsteady cavity optical axis 11, and its diameter is the 1/M (M is how much magnification ratios of unsteady cavity) of the effective aperture of the first chamber mirror 3, and its minute surface is vertical with unsteady cavity optical axis 11; Be provided with the gain module 8 of laser between output coupling mirror 2 and the feedback mirror 5, unsteady cavity optical axis 11 is positioned at the center of gain module 8, the second chamber mirror 4, output coupling mirror 2, the first chamber mirror 3 and feedback mirror 5 all are installed on the automatically controlled adjusting microscope base 13, the optical axis 12 of laser plane interferometer 101 is by the center of output coupling mirror 2, vertical with unsteady cavity optical axis 11, be connected by data wire between computer 14 and the laser plane interferometer 101, computer 14 is connected by data wire with each automatically controlled adjusting microscope base 13 respectively.

Use this system to carry out the self-regulating method of unsteady cavity and step is:

With a He-Ne laser 18 place laser pedestal 9 outer and with the relative side of the first chamber mirror, 3 reflectings surface, make the light pencil that the He-Ne laser sends and the central lines of gain module 8, with of the indication of this light pencil as unsteady cavity optical axis 11 positions.

At first carry out the installation of the first chamber mirror 3 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity, regulate the first chamber mirror 3 light pencil that incides on the first chamber mirror 3 is returned along former road; Feedback mirror 5 is installed, is regulated feedback mirror 5 light pencil that incides on the feedback mirror 5 is returned along former road.After the position of the feedback mirror 5 and the first chamber mirror 3 mixed up, the first chamber mirror 3 and feedback mirror 5 fixed-site can guarantee no longer to change in unsteady cavity optical axis 11 self-regulating process afterwards like this in the self-regulating process afterwards.After this step is finished, close He-Ne laser 18.

Carry out the preliminary installation adjusting of laser plane interferometer 101, output coupling mirror 2, the second chamber mirror 4 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity.The directional light of laser plane interferometer 101 outputs is incided on the unsteady cavity output coupling mirror 2, regulate output coupling mirror 2, make signal beams after output coupling mirror 2 reflections, pass through gain module 8, and the center of signal beams overlaps with gain module 8 centers are approximate.

The preliminary second chamber mirror 4 of regulating, the signal beams that laser plane interferometer 101 is sent successively forms feedback beam through output coupling mirror 2, the first chamber mirror 3, the second chamber mirror 4, feedback mirror 5, the second chamber mirror 4, the first chamber mirror 3 to output coupling mirror 2 reflection backs.

Feedback beam return laser light interferometer 101 forms interference fringe, and computer 14 is gathered the interference fringe pattern, can obtain each rank Zernike aberration coefficients of feedback beam by the interference pattern analysis.Because the position of the first chamber mirror 3 and feedback mirror 5 is fixing, then the aberration of feedback beam is only relevant with the position deviation of the output coupling mirror 2 that constitutes reponse system, the second chamber mirror 4, and the aberration of feedback beam is the function of each mirror position deviation.If each rank Zernike aberration coefficients of feedback beam is with F _iExpression, i=1,2,3 ... m represents that higher order aberratons is the m rank; The position deviation of the second chamber mirror 4 has 5 degrees of freedom, uses variable x _i, i=1,2,3,4,5 expressions, these five variablees minute surface of the corresponding second chamber mirror 4 respectively rotate T around the x axle _x, around y axle rotation T _y, along x axle translation D _x, along y axle translation D _y, along z axle translation D _z(the xyz coordinate is a right-handed coordinate system in the present embodiment, wherein the z axle overlaps with unsteady cavity optical axis 11, its positive direction is that the second chamber mirror 4 points to the first chamber mirror 3, y axle and aberration detection system 1 are that the optical axis 12 of laser interferometer 101 overlaps, its positive direction is opposite with the light direction of laser interferometer 101, the coordinate system of other embodiment is identical with above-mentioned definition), because output coupling mirror 2 is a level crossing, it can not influence the aberration of feedback beam along the translation in the installation accuracy scope of x, y, z axle, so the position deviation of output coupling mirror 2 is only got two degree of freedom x ₆, x ₇, the minute surface of corresponding output coupling mirror 2 is around the rotation T of x axle respectively _Sx, around y axle rotation T _SyTherefore, mirror position deviation matrix Δ X comprises 7 matrix elements in the present embodiment:

ΔX＝[x ₁?x ₂?x ₃?x ₄?x ₅?x ₆?x ₇]

F _iCan represent with A Δ X=F with the relation of mirror position deviation, wherein F=[F _i, i=1,2,3 ... m] for surveying each the rank aberration coefficients matrix that obtains by laser interferometer 101; Aberration order m gets 9 and gets final product in this embodiment.Promptly

$F=\left[\begin{array}{c}{\mathrm{<figure-callout\; id="1"\; label="F"\; filenames="A20071003529200191.png"\; state="\{\{state\}\}">F</figure-callout>}}_1\\ \&CenterDot;\\ \&CenterDot;\\ \&CenterDot;\\ {\mathrm{<figure-callout\; id="9"\; label="F"\; filenames="A20071003529200191.png,A20071003529200211.png"\; state="\{\{state\}\}">F</figure-callout>}}_9\end{array}\right]=\left[\begin{array}{c}{f}_1(x_1,...,x_7)\\ \&CenterDot;\\ \&CenterDot;\\ \&CenterDot;\\ f_9(x_1,\&hellip;,x_7)\end{array}\right]$

A is the sensitivity matrix of auto-collimation reponse system, is defined as:

$A=\left[\begin{array}{ccc}\frac{\mathrm{\&delta;}{f}_1}{\mathrm{\&delta;}{\mathrm{<figure-callout\; id="1"\; label="x"\; filenames="A20071003529200191.png"\; state="\{\{state\}\}">x</figure-callout>}}_1}& \&CenterDot;\&CenterDot;\&CenterDot;& \frac{\mathrm{\&delta;}{f}_1}{\mathrm{\&delta;}{x}_7}\\ & \&CenterDot;& \\ & \&CenterDot;& \\ & \&CenterDot;& \\ \frac{\mathrm{\&delta;}{f}_9}{\mathrm{\&delta;}{x}_1}& \&CenterDot;\&CenterDot;\&CenterDot;& \frac{\mathrm{\&delta;}{f}_9}{\mathrm{\&delta;}{x}_7}\end{array}\right]$

According to above definition, the sensitivity matrix A of auto-collimation reponse system can use the Zemax optical design software to calculate.Specific practice is to use the Zemax optical design software to set up the optical system model according to the structural relation of aforementioned self-collimation feedback light path, makes the second chamber mirror 4 of this optical system model and the position deviation variable x of output coupling mirror 2 then _iChange a small quantity δ X _i, each aberration coefficients of feedback beam changes with regard to corresponding in the self-collimation feedback light path so, the variable quantity δ f of aberration coefficients _mUse the Zemax optical design software to obtain automatically, then aberration coefficients is δ f to the difference coefficient of this independent variable _m/ δ x _iEach element that is sensitivity matrix can be obtained.

$\mathrm{\&Delta;X}=\left[\begin{array}{c}{x}_1\\ \&CenterDot;\\ \&CenterDot;\\ \&CenterDot;\\ x_7\end{array}\right]$ Be the second chamber mirror 4 to be found the solution and the position deviation matrix of output coupling mirror 2.

Find the solution matrix

$\left[\begin{array}{ccc}\frac{\mathrm{\&delta;}{f}_1}{\mathrm{\&delta;}{\mathrm{<figure-callout\; id="1"\; label="x"\; filenames="A20071003529200191.png"\; state="\{\{state\}\}">x</figure-callout>}}_1}& \&CenterDot;\&CenterDot;\&CenterDot;& \frac{\mathrm{\&delta;}{f}_1}{\mathrm{\&delta;}{\mathrm{<figure-callout\; id="7"\; label="x"\; filenames="A20071003529200191.png"\; state="\{\{state\}\}">x</figure-callout>}}_7}\\ & \&CenterDot;& \\ & \&CenterDot;& \\ & \&CenterDot;& \\ \frac{\mathrm{\&delta;}{f}_9}{\mathrm{\&delta;}{x}_1}& \&CenterDot;\&CenterDot;\&CenterDot;& \frac{\mathrm{\&delta;}{f}_9}{\mathrm{\&delta;}{x}_7}\end{array}\right]$ $\left[\begin{array}{c}{x}_1\\ \&CenterDot;\\ \&CenterDot;\\ \&CenterDot;\\ {\mathrm{<figure-callout\; id="7"\; label="x"\; filenames="A20071003529200191.png"\; state="\{\{state\}\}">x</figure-callout>}}_7\end{array}\right]=\left[\begin{array}{c}{\mathrm{<figure-callout\; id="1"\; label="F"\; filenames="A20071003529200191.png"\; state="\{\{state\}\}">F</figure-callout>}}_1\\ \&CenterDot;\\ \&CenterDot;\\ \&CenterDot;\\ F_9\end{array}\right]$

By using generalized inverse method iterative equation group A Δ X=F just can obtain the position deviation Δ X of the second chamber mirror 4 and output coupling mirror 2 in the auto-collimation reponse system, here need to prove, the equation group A Δ X=F that native system constitutes is the overdetermined equation group, Δ X does not have exact solution, what obtain is the least square solution of position deviation, this is common phenomena very in practical engineering application, and separating also of gained can be instructed practical application.Computer 14 provides the corresponding driving signal according to the chamber mirror position deviation that solves, and by the RS232 serial data interface control signal is passed to automatically controlled adjusting microscope base 13, and automatically controlled adjusting microscope base 13 is carried out the fine adjustment action makes mirror position, chamber reach design attitude.

In this embodiment, be 5m if get the radius of curvature of the first chamber mirror 3, its effective aperture is 50mm, and the radius of curvature of the second chamber mirror 4 is-3m, the long L=1m in chamber then, how much magnification ratio M=1.67 of unsteady cavity.Output coupling mirror 2 elliptical aperture major axis radius are 21.3mm, and minor axis radius is 15mm, and feedback mirror 5 diameters are 30mm.The system's sensitive matrix that uses the Zemax optical design software to obtain this system is:

$A=\left[\begin{array}{ccccccc}1.54E-03& 1.54E-03& 1.28E-04& 1.28E-04& -9.22E-02& -7.13E-04& -3.56E-04\\ 0& -1.90E+03& 3.64E+01& 0& 0& 0& -2.24E+03\\ 1.90E+03& 4.00E-10& 0& 3.64E+01& 0.00E+00& 3.17E+03& -1.38E-01\\ 1.54E-03& 1.54E-03& 1.28E-04& 1.28E-04& -9.22E-02& -7.13E-04& -3.56E-04\\ -2.50E-03& 2.50E-03& 1.82E-04& -1.82E-04& 0.00E+00& -6.72E-04& 3.36E-04\\ 0.00E+00& 9.00E-10& 0.00E+00& 0.00E+00& 0.00E+00& 0.00E+00& 1.10E-07\\ 0.00E+00& 2.98E-02& -5.68E-04& 0.00E+00& 0.00E+00& 0.00E+00& 2.33E-02\\ -2.98E-02& 4.20E-09& 0.00E+00& -5.68E-04& 0.00E+00& -3.30E-02& 1.40E-06\\ -1.47E-08& -8.90E-09& -7.00E-10& -7.00E-10& 2.09E-06& 2.23E-07& 1.62E-07\end{array}\right]$

After system such as preceding step are finished preliminary Installation and Debugging, there is bigger aberration in feedback beam, feedback enters laser plane interferometer 101 and forms interference fringe shown in Fig. 4 (a), and the interference fringe analysis software that computer 14 uses laser plane interferometer 101 to provide obtains the Zernike aberration coefficients of feedback beam

$F=\left[\begin{array}{c}-0.4607173617\\ -3.1757109962\\ 20.0260890586\\ -0.4607069165\\ -0.0000786329\\ -0.0000354562\\ 0.0000740823\end{array}\right]$

This moment, the Si Telieer ratio of feedback beam was 0.329048.Use generalized inverse method iterative equation group A Δ X=F obtain this moment the first chamber mirror 4 and the position deviation matrix of output coupling mirror 2 be:

Computer 14 is controlled automatically controlled adjustment seat 13 and is done rightabout adjusting according to finding the solution the minute surface angle of inclination that obtains and side-play amount, laser plane interferometer 101 was surveyed and is obtained the interference pattern of feedback beam shown in Fig. 4 (b) after adjusting finished, the interference fringe analysis software that uses laser plane interferometer 101 to carry can be learnt, this moment, the Si Telieer of feedback beam reached 0.99997 than, this shows the feedback beam aberration near 0, and the position of each minute surface has reached design load.

Crucial equipment in this embodiment such as laser plane interferometer 101, automatically controlled adjusting microscope base 13 is the industrialization finished product, can directly use; The Zemax optical design software is the widely used normalized optical design software in international optical design field, and friendly interface is easy to use.Aberration coefficients can be obtained by the interference fringe analysis software that laser plane interferometer carries, and the system sensitivity matrix can use the Zemax optical design software to calculate.The finding the solution of the equation group that aberration coefficients, position deviation and system sensitivity matrix constitute uses that common method for solving gets final product in the numerical computations.Whole system is practical.

Embodiment 2

As shown in Figure 5, another embodiment that is used for positive-branch confocal unstable resonator for the present invention.As shown in the drawing, the present invention uses the laser positive-branch confocal unstable resonator automatic cavity-adjusting system of self-collimation feedback light path, its unstable cavity mirror structure is identical with embodiment 1, difference from Example 1 is the aberration detection system, and this aberration detection system 1 is for to be combined by He-Ne laser 102, parallel light tube 103, spectroscope 104 and Hartmann wave front sensor (or shearing interferometer) 105.The optical axis 12 of He-Ne laser 102, parallel light tube 103 is vertical with unsteady cavity optical axis 11, spectroscope 104 is between parallel light tube 103 and output coupling mirror 2, and be miter angle with unsteady cavity optical axis 11, Hartmann wave front sensor 105 places spectroscope reflected light path and close spectroscope 104, its optical axis 15 is parallel with unsteady cavity optical axis 11, Hartmann wave front sensor 105 is connected with computer 14 by data wire, and computer 14 is connected by data wire with each automatically controlled adjusting microscope base 13 respectively.

Use this system to carry out the self-regulating method of unsteady cavity and step is:

With a He-Ne laser 18 place laser pedestal 9 outer and with the relative side of the first chamber mirror, 3 reflectings surface, make the light pencil that He-Ne laser 18 sends and the central lines of gain module 8, with of the indication of this light pencil as unsteady cavity optical axis 11 positions.

At first carry out the installation of the first chamber mirror 3 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity, regulate the first chamber mirror 3 light pencil that incides on the first chamber mirror 3 is returned along former road; Feedback mirror 5 is installed, is regulated feedback mirror 5 light pencil that incides on the feedback mirror 5 is returned along former road.After the position of the feedback mirror 5 and the first chamber mirror 3 mixed up, the first chamber mirror 3 and feedback mirror 5 fixed-site can guarantee no longer to change in unsteady cavity optical axis 11 self-regulating process afterwards like this in the self-regulating process afterwards.After this step is finished, close He-Ne laser 18.

Carry out the preliminary installation adjusting of He-Ne laser 102, parallel light tube 103, spectroscope 104, output coupling mirror 2, the second chamber mirror 4 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity.The light that He-Ne laser 102 sends, become directional light by parallel light tube 103, directional light sees through spectroscope 104 and incides on the unsteady cavity output coupling mirror 2, regulate unsteady cavity output coupling mirror 2, make signal beams after output coupling mirror 2 reflections, pass through gain module 8, and the center of signal beams overlap with gain module 8 centers are approximate.

The preliminary unsteady cavity second chamber mirror 4 of regulating, make signal beams that parallel light tube 103 launches through spectroscope 104 transmissions, successively through after output coupling mirror 2, the first chamber mirror 3, the second chamber mirror 4, feedback mirror 5, the second chamber mirror 4, the first chamber mirror 3, output coupling mirror 2 reflections, another arrives spectroscope 104, after spectroscope 104 reflections, enter in the Hartmann wave front sensor 105, survey the aberration information that obtains feedback beam by Wavefront sensor 105.

Because the position of the first chamber mirror 3 and feedback mirror 5 is fixing, then the aberration of feedback beam is only relevant with the position deviation of the output coupling mirror 2 that constitutes reponse system, the second chamber mirror 4, and the aberration of feedback beam is the function of each mirror position deviation.If each rank Zernike aberration coefficients of feedback beam is with F _iExpression, i=1,2,3 ... m represents that higher order aberratons is the m rank, and m gets 9 and gets final product in this embodiment, then aberration coefficients matrix F=[F _i, i=1,2,3 ... 9]; Identical with embodiment one, the mirror position deviation matrix comprises 7 matrix elements: Δ X=[x ₁x ₂x ₃x ₄x ₅x ₆x ₇].

Solution procedure with embodiment 1 is identical, computer 14 obtains the aberration coefficients matrix F by Hartmann wave front sensor 105, use the Zemax optical design software to obtain the system sensitivity matrix A, use generalized inverse method iterative equation A Δ X=F can obtain the position deviation matrix Δ X of the second chamber mirror 4 and output coupling mirror 2.Computer 14 provides the corresponding driving signal according to the chamber mirror position deviation that solves, and by the RS232 serial data interface control signal is passed to automatically controlled adjusting microscope base 13, and automatically controlled adjusting microscope base 13 is carried out the fine adjustment action makes each chamber mirror reach design attitude.

Embodiment 3

As shown in Figure 6, the embodiment that is used for negative branch confocal unstable resonator for the present invention.As shown in the drawing, the present invention uses the negative branch confocal unstable resonator automatic cavity-adjusting system of the laser of self-collimation feedback light path, and its aberration detection system is a laser plane interferometer 101, and the flashlight of output is a branch of directional light, and wavelength is 632.8nm.Data analysis system 6 and chamber mirror control system 7 realize that by a computer 14 promptly native system comprises laser plane interferometer 101, unstable cavity mirror, feedback mirror 5, computer 14 and and laser pedestal 9.Unstable cavity mirror comprises the second chamber mirror 4, output coupling mirror 2 and the first chamber mirror 3, the first chamber mirror 3 and the second chamber mirror 4 are concave mirror, output coupling mirror 2 places between the second chamber mirror 4 and the first chamber mirror 3 and near the second chamber mirror 4, feedback mirror 5 places between the output coupling mirror 2 and the first chamber mirror 3 and the close first chamber mirror 3; Output coupling mirror 2 offers the plane mirror of slotted eye for the center, and the elliptical aperture major axis is parallel with laser pedestal 9 installation base surfaces, and the center of output coupling mirror 2 overlaps with unsteady cavity optical axis 11, and the minute surface of output coupling mirror 2 and unsteady cavity optical axis 11 are 45 degree angles; Feedback mirror 5 is a circular flat mirror, and its diameter is the 1/M (M is how much magnification ratios of unsteady cavity) of the first chamber mirror, 3 effective apertures, and the minute surface center overlaps with unsteady cavity optical axis 11, and minute surface is vertical with unsteady cavity optical axis 11; Be provided with the gain module 8 of laser between output coupling mirror 2 and the feedback mirror 5, unsteady cavity optical axis 11 is positioned at the center of gain module 8, the second chamber mirror 4, output coupling mirror 2, the first chamber mirror 3 and feedback mirror 5 all are installed on the automatically controlled adjusting microscope base 13, the optical axis 12 of laser plane interferometer 101 is by the center of output coupling mirror 2, vertical with unsteady cavity optical axis 11, laser plane interferometer 101 and computer 14 are connected by data wire, and computer 14 is connected by data wire with each automatically controlled adjusting microscope base 13 respectively.

Use this system to carry out the self-regulating method of unsteady cavity and step is:

With a He-Ne laser 18 place laser pedestal 9 outer and with the relative side of the first chamber mirror, 3 reflectings surface, make the light pencil that He-Ne laser 18 sends and the central lines of gain module 8, with of the indication of this light pencil as unsteady cavity optical axis 11 positions.

At first carry out the installation of the first chamber mirror 3 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity, regulate the first chamber mirror 3 light pencil that incides on the first chamber mirror 3 is returned along former road; Feedback mirror 5 is installed, is regulated feedback mirror 5 light pencil that incides on the feedback mirror 5 is returned along former road.After the position of the feedback mirror 5 and the first chamber mirror 3 mixed up, the first chamber mirror 3 and feedback mirror 5 fixed-site can guarantee no longer to change in unsteady cavity optical axis 11 self-regulating process afterwards like this in the self-regulating process afterwards.After this step is finished, close He-Ne laser 18.

Carry out the preliminary installation adjusting of laser plane interferometer 101, output coupling mirror 2, the second chamber mirror 4 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity.The directional light of laser plane interferometer 101 outputs is incided on the unsteady cavity output coupling mirror 2, regulate output coupling mirror 2, make signal beams after output coupling mirror 2 reflections, pass through gain module 8, and the center of signal beams overlaps with gain module 8 centers are approximate.

The preliminary second chamber mirror 4 of regulating, the signal beams that laser plane interferometer 101 is sent successively forms feedback beam through output coupling mirror 2, the first chamber mirror 3, the second chamber mirror 4, feedback mirror 5, the second chamber mirror 4, the first chamber mirror 3 to output coupling mirror 2 reflection backs.

Because the position of the first chamber mirror 3 and feedback mirror 5 is fixing, then the aberration of feedback beam is only relevant with the position deviation of the output coupling mirror 2 that constitutes reponse system, the second chamber mirror 4, and the aberration of feedback beam is the function of each mirror position deviation.If each rank Zernike aberration coefficients of feedback beam is with F _iExpression, i=1,2,3 ... m represents that higher order aberratons is the m rank, and m gets 9 and gets final product in this embodiment, then aberration coefficients matrix F=[F _i, i=1,2,3 ... 9]; Identical with embodiment one, the mirror position deviation matrix comprises 7 matrix elements: Δ X=[x ₁x ₂x ₃x ₄x ₅x ₆x ₇].

Solution procedure with embodiment 1 is identical, the feedback beam interference fringe that computer 14 is surveyed according to laser plane interferometer 101 obtains the aberration coefficients matrix F, use the Zemax optical design software to obtain the system sensitivity matrix A, use generalized inverse method iterative equation A Δ X=F can obtain the position deviation matrix Δ X of the second chamber mirror 4 and output coupling mirror 2.Computer 14 provides the corresponding driving signal according to the chamber mirror position deviation that solves, and by the RS232 serial data interface control signal is passed to automatically controlled adjusting microscope base 13, and automatically controlled adjusting microscope base 13 is carried out the fine adjustment action makes each chamber mirror reach design attitude.

Embodiment 4

Shown in Figure 7, the adjusting that is used for positive-branch confocal unstable resonator for automatic cavity-adjusting system of the present invention is used for follow-up optics string of laser and focal position indication simultaneously.The unsteady cavity mirror structure of present embodiment is identical with embodiment 1, between laser plane interferometer 101 and output coupling mirror 2, also be provided with spectroscope 17 as different from Example 1, this spectroscope 17 is a slice level crossings through special coating film treatment, to near the wave band 632.8nm is semi-transparent semi-reflecting, is high reflection to laser operation wave band.Spectroscope 17 places between laser plane interferometer 101 and the output coupling mirror 2 and with output coupling mirror 2 and is an angle of 90 degrees, follow-up optics string 106 places the reflected light path of spectroscope 17, focus lamp 107 places after the follow-up optics string 106, the optical axis of follow-up optics string 106 and focus lamp 107 common optical axis, and their optical axis 16 is parallel with unsteady cavity optical axis 11.

Use this system to carry out the self-regulating method of unsteady cavity and step is:

With a He-Ne laser 18 place laser pedestal 9 outer and with the relative side of the first chamber mirror, 3 reflectings surface, make the light pencil that He-Ne laser 18 sends and the central lines of gain module 8, with of the indication of this light pencil as unsteady cavity optical axis 11 positions.

At first carry out the installation of the first chamber mirror 3 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity, regulate the first chamber mirror 3 light pencil that incides on the first chamber mirror 3 is returned along former road; Feedback mirror 5 is installed, is regulated feedback mirror 5 light pencil that incides on the feedback mirror 5 is returned along former road.After the position of the feedback mirror 5 and the first chamber mirror 3 mixed up, the first chamber mirror 3 and feedback mirror 5 fixed-site can guarantee no longer to change in unsteady cavity optical axis 11 self-regulating process afterwards like this in the self-regulating process afterwards.After this step is finished, close He-Ne laser 18.

Carry out the preliminary installation adjusting of laser plane interferometer 101, spectroscope 17, output coupling mirror 2, the second chamber mirror 4 according to the position relation of aforementioned each system and the design attitude of each chamber mirror of unsteady cavity.The directional light of laser plane interferometer 101 outputs is incided on the unsteady cavity output coupling mirror 2 through behind the spectroscope 17, regulate output coupling mirror 2, make signal beams after output coupling mirror 2 reflections, pass through gain module 8, and the center of signal beams overlap with gain module 8 centers are approximate.

The preliminary second chamber mirror 4 of regulating, the signal beams that laser plane interferometer 101 is sent successively forms feedback beam through output coupling mirror 2, the first chamber mirror 3, the second chamber mirror 4, feedback mirror 5, the second chamber mirror 4, the first chamber mirror 3 to output coupling mirror 2 reflection backs.

Because the position of the first chamber mirror 3 and feedback mirror 5 is fixing, then the aberration of feedback beam is only relevant with the position deviation of the output coupling mirror 2 that constitutes reponse system, the second chamber mirror 4, and the aberration of feedback beam is the function of each mirror position deviation.If each rank Zernike aberration coefficients of feedback beam is with F _iExpression, i=1,2,3 ... m represents that higher order aberratons is the m rank, and m gets 9 and gets final product in this embodiment, then aberration coefficients matrix F=[F _i, i=1,2,3 ... 9]; Identical with embodiment 1, the mirror position deviation matrix comprises 7 matrix elements: Δ X=[x ₁x ₂x ₃x ₄x ₅x ₆x ₇].

Solution procedure with embodiment 1 is identical, the feedback beam interference fringe that computer 14 is surveyed according to laser plane interferometer 101 obtains the aberration coefficients matrix F, use the Zemax optical design software to obtain the system sensitivity matrix A, use generalized inverse method iterative equation A Δ X=F can obtain the position deviation matrix Δ X of the second chamber mirror 4 and output coupling mirror 2.Computer 14 provides the corresponding driving signal according to the chamber mirror position deviation that solves, and by the RS232 serial data interface control signal is passed to automatically controlled adjusting microscope base 13, and automatically controlled adjusting microscope base 13 is carried out the fine adjustment action makes each chamber mirror reach design attitude.

As previously mentioned, after feedback beam arrives spectroscope 17, except seeing through the flashlight of spectroscope 17 return laser light flat interferometers 101, also have one road light after spectroscope 17 partial reflections, to arrive the follow-up optics string 106 and the condenser lens 107 of laser as the unsteady cavity adjusting.After mirror adjusting in chamber finishes, therefore the wavefront of output beam is identical when the wavefront of this road light and laser actual motion, can be used as that follow-up optics optical crosstalk is learned the direct light of element fine adjustment and as Laser Output Beam transmission direction indication and focal position indication.

Cavity-adjusting system disclosed by the invention and method are applicable to that all have the unsteady cavity structure of output coupling mirror, for example positive-branch confocal unstable resonator, negative branch confocal unstable resonator, folding confocal unstable resonator and annular confocal unstable resonator etc.

Claims (9)

1, a kind of unsteady cavity automatic cavity-adjusting system that uses self-collimation feedback light path, it is characterized in that it comprises aberration detection system (1), unstable cavity mirror, feedback mirror (5), data analysis system (6), chamber mirror control system (7) and laser pedestal (9), described unstable cavity mirror comprises the second chamber mirror (4), the output coupling mirror (2) and the first chamber mirror (3), output coupling mirror (2) places between the second chamber mirror (4) and the first chamber mirror (3) and the close second chamber mirror (4), feedback mirror (5) places between the output coupling mirror (2) and the first chamber mirror (3) and the close first chamber mirror (3), described output coupling mirror (2) offers the plane mirror of slotted eye or rectangular opening for the center, the long limit of elliptical aperture major axis or rectangular opening is parallel with laser pedestal (9) installation base surface, the center of output coupling mirror (2) overlaps with unsteady cavity optical axis (11), and the minute surface of output coupling mirror (2) and unsteady cavity optical axis (11) are 45 degree angles; Described feedback mirror (5) is a plane mirror, and its minute surface center overlaps with unsteady cavity optical axis (11), and minute surface is vertical with unsteady cavity optical axis (11); Be provided with the gain module (8) of laser between output coupling mirror (2) and the feedback mirror (5), unsteady cavity optical axis (11) is positioned at the center of gain module (8); The second chamber mirror (4), output coupling mirror (2), the first chamber mirror (3) and feedback mirror (5) all are installed on the automatically controlled adjusting microscope base (13), the optical axis (12) of aberration detection system (1) is by the center of output coupling mirror (2), vertical with unsteady cavity optical axis (11), data analysis system (6) is connected by data wire with chamber mirror control system (7) with aberration detection system (1) respectively, chamber mirror control system (7) is connected by data wire with each automatically controlled adjusting microscope base (13) respectively again, and each automatically controlled adjusting microscope base (13) all is loaded on the laser pedestal (9).

2, the unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path according to claim 1, it is characterized in that described feedback mirror (5) is for circular or square, the diameter that it is circular or the square length of side are the 1/M of the effective aperture of the first chamber mirror (3), and M is how much magnification ratios of unsteady cavity.

3, the unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path according to claim 2, it is characterized in that described aberration detection system (1) carries out the instrument of Aberration Analysis function and constitute by having to transmit light and receive feedback beam, comprise the various interferometers that have probe source, or Hartmann wave front sensor, or by He-Ne laser, parallel light tube, spectroscope with do not combine with the interferometer of measurement light source.

4, the unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path according to claim 2, the type of drive that it is characterized in that described automatically controlled adjusting microscope base (13) are that voice coil loudspeaker voice coil driving, Piezoelectric Ceramic or accurate thread drive.

5, according to the unsteady cavity automatic cavity-adjusting system of arbitrary described use self-collimation feedback light path in the claim 1 to 4, it is characterized in that described unsteady cavity is a positive-branch confocal unstable resonator, the described first chamber mirror (3) is a concave mirror, the second chamber mirror (4) is a convex mirror.

6, according to the unsteady cavity automatic cavity-adjusting system of arbitrary described use self-collimation feedback light path in the claim 1 to 4, it is characterized in that described unsteady cavity is negative branch confocal unstable resonator, the described first chamber mirror (3) and the second chamber mirror (4) are concave mirror.

7, a kind of cavity adjustment method of unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path as claimed in claim 1, it is characterized in that by the aberration detection system, the output coupling mirror of forming unstable cavity mirror, the first chamber mirror, the second chamber mirror and feedback mirror constitute self-collimation feedback light path, launch a branch of directional light as signal beams by optical axis by the center of output coupling mirror and the aberration detection system vertical with the unsteady cavity optical axis, successively through output coupling mirror, the first chamber mirror, the second chamber mirror, the feedback mirror, the second chamber mirror, after the first chamber mirror and the output coupling mirror reflection, become the unstable cavity mirror position deviation information of having carried, auto-collimation feedback beam with certain aberration, feedback beam is returned the aberration detection system, provide each rank aberration coefficients of this light beam by the aberration detection system, poor by the data analysis system that links to each other with the aberration detection system according to inclination or the offset of side-play amount equipotential that the aberration and the system sensitivity matrix computations of feedback beam goes out each chamber mirror in the unstable cavity mirror, the chamber mirror control system that links to each other with data analysis system is done corresponding the adjusting according to the inclination of each chamber mirror or each chamber mirror of side-play amount driving unsteady cavity, and each mirror position, chamber reaches design load in the unsteady cavity thereby make.

8, the cavity adjustment method of the unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path according to claim 7 is characterized in that its concrete regulation and control step is as follows:

1), at first determines the optical axis of unsteady cavity, one He-Ne laser is placed the outer and side relative with the first chamber mirroring face of laser pedestal, make the light pencil that the He-Ne laser sends and the central lines of gain module, with of the indication of this light pencil as the unsteady cavity optical axis position;

2), after light path is installed on the first chamber mirror gain module, regulate the first chamber mirror light pencil that incides on the first chamber mirror returned along former road; Before the first chamber mirror and near the first chamber mirror, the feedback mirror is installed, is regulated the feedback mirror light pencil that incides on the feedback mirror is returned along former road, close the He-Ne laser;

3), the second chamber mirror is installed, output coupling mirror and aberration detection system, make output coupling mirror place between the second chamber mirror and the first chamber mirror and the close second chamber mirror, the optical axis of aberration detection system is by the center of output coupling mirror, vertical with the unsteady cavity optical axis, make the aberration detection system send a branch of directional light as signal beams, regulate the inclination angle and the angle of pitch of output coupling mirror, make signal beams after the output coupling mirror reflection, pass through gain module, and the center of signal beams overlaps with the gain module center is approximate, the preliminary second chamber mirror of regulating, the directional light as signal beams that the aberration detection system is launched successively passes through output coupling mirror, the first chamber mirror, the second chamber mirror, the feedback mirror, the second chamber mirror, unstable cavity mirror position deviation information is carried in the first chamber mirror and output coupling mirror reflection, formation, auto-collimation feedback beam with certain aberration;

4), come and go the feedback beam of exporting the back and return the aberration detection system through single, the aberration detection system is measured each rank aberration information of feedback beam, be transferred to data analysis system, go out the position deviation information of the output coupling mirror and the second chamber mirror by data analysis system according to the functional relation quantitative solving of aberration and chamber mirror position offset;

5), according to position deviation information, data analysis system is transferred to chamber mirror control system with the position deviation data that solves, by the automatically controlled adjusting microscope base of chamber mirror control system output drive signal to the output coupling mirror and the second chamber mirror, inclination and skew equipotential offset difference to the chamber mirror are corrected, and the driving mechanism of automatically controlled adjusting microscope base is only once regulated and can be made interior each the mirror position, chamber of unsteady cavity reach design load.

9, a kind of application of unsteady cavity automatic cavity-adjusting system of use self-collimation feedback light path as claimed in claim 1, having of it is characterized in that the output coupling mirror, the first chamber mirror, the second chamber mirror of aberration detection system, unsteady cavity and the self-collimation feedback light path that the feedback mirror constitutes the produce feedback beam that plane wave front distributes is used for fine adjustment, Laser Output Beam transmission direction indication and the focal position indication of the follow-up optics string of laser system laser.

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