CN101063539A

CN101063539A - Fan-filter-units used for decontamination chamber

Info

Publication number: CN101063539A
Application number: CN 200710101082
Authority: CN
Inventors: 辛大建
Original assignee: KOREA PNC CO Ltd
Current assignee: KOREA PNC CO Ltd
Priority date: 2006-04-26
Filing date: 2007-04-26
Publication date: 2007-10-31

Abstract

The invention relates to a purifying room draught fan-filter set, which is easy to disassemble and assemble and has a high degerming efficiency, comprising: a housing including the front air inlet and inner occepting space; fan, plasma filter, catalytic filter, HEPA filter (high-efficient air corpuscule filter) which are attached to the inner accepting space and adjacent to the air inlet. Furthermore, the fan-filter set is pressed by the contact of accepting space inner wall and frame surface of the HEPA filter or is assembled by the connection element between the housing and HEPA filter.

Description

The used for decontamination chamber fan-filter set

Technical field

The present invention relates to a kind of fan-filter set, particularly, relate to a kind of being suitable for the used for decontamination chamber fan-filter set of aseptic cleaning as the clean room of necessary hospital or semiconductor manufacturing facility etc.

Background technology

Fan-filter set is the assembly of blower fan and filter, is arranged on the unit of the air cleaning unit in the place that needs clean air.As air cleaning unit, can be divided into mechanical type dust arrester and electronic type dust arrester substantially.The former is meant the filter-type device of eliminating dust by the removal particulate filter of nonwoven that has utilized resin series or stationery etc., the latter generally is meant by corona discharge and forms ionisation region, and air is caused the device of charged powder dust particle control of dust at battery lead plate by this zone.

Both compare, but therefore the use of electronic type dust arrester semipermanent ground compares the advantage with life-span length with the mechanical type dust arrester.In contrast, ionisation region is very narrow under the situation of corona discharge, and discharge instability, and the quantity of electric charge of generation is few, makes the charged difficulty of bringing of the minuteness particle that effective surface area is little therefore to produce the problem that efficiency of dust collection descends.In addition, also there is electric arc to reach problems such as thereupon producing dust.In contrast to this, the simple in structure and efficiency of dust collection of mechanical type dust arrester is good, but needs often to change the filter of high price, therefore has the heavy problem of financial burden.

On the other hand, owing to the fan-filter set of said apparatus is that purpose is used with the seizure and the elimination of dust particle mainly, so unit inside is easily by germ contamination, and this also is finally to cause the contaminated reason in clean room.

Summary of the invention

The present invention proposes in order to solve the problem that exists in the dust arrester in the past.The object of the present invention is to provide a kind of fan-filter set, this fan-filter set is to have used electronic type dedusting and mechanical type dedusting and efficiency of dust collection and the high fan-filter set of degerming rate with.In order to reach this purpose, use in the present invention to stop plasma filter

And catalytic filter.

Another object of the present invention is to provide a kind of miniaturization and fan-filter set of decomposing simple and convenient assembly of realizing.

Fan-filter set of the present invention, it is characterized in that, comprise: housing with front air inflow aperture and inner accepting space, and attached to above-mentioned inner accepting space and from the blower fan that sets gradually with above-mentioned air inflow aperture adjoining position, stop plasma filter, catalytic filter, HEPA filter (highly effective air particulate filter).In addition, above-mentioned fan-filter set is characterised in that, can pass through the framework surface crimping mutually of the receiving space inwall and the HEPA filter of housing, perhaps also can assemble by the attaching parts between housing and the HEPA filter.

According to above-mentioned fan-filter set, extraneous air can be by stopping the sterilization deodorization that is captured for the first time of plasma filter and catalytic filter.Then, caught for the second time by the HEPA filter.Therefore, efficiency of dust collection also improves thereupon, and free of contamination clean air can be provided.On the other hand, above-mentioned fan-filter set can realize small and light skilful, and has the structure of easy decomposition assembling.

Description of drawings

Fig. 1 is the stereogram of fan-filter set of the present invention;

Fig. 2 is the structure chart of fan-filter set of the present invention;

The action diagram of fan-filter set of the present invention during Fig. 3

Wherein, description of reference numerals is as follows:

10. fan-filter set

11. housing

12. air inflow aperture

13. blower fan

14. stop plasma filter

15. catalytic filter

16.HEPA filter

17. first electrode

18. second electrode

19. dielectric layer

22. framework

23. attaching parts

The specific embodiment

Feature of the present invention and effect can be clearer by the following embodiment with reference to description of drawings.

As shown in Figures 1 and 2, fan-filter set of the present invention is represented with symbol 10.Above-mentioned fan-filter set 10 comprises: central authorities are formed with the housing 11 of air inflow aperture 12 in front, are arranged on the blower fan 13 and the

filter

14,15,16 of the inner accepting space of this housing 11.Specifically, from its receiving space, being provided with blower fan 13 and

filter

14,15,16 successively with above-mentioned air inflow aperture 12 adjoining positions.It is at first, bright that to write down described each

filter

14,15,16 of face be not special filter in the present invention.

At first, filter 14 is to stop plasma filter.The above-mentioned plasma filter that stops vertically is provided with respect to the flow direction of air, and isolates setting abreast by first electrode 17 of electrical ground connection with respect to above-mentioned first electrode 17, and is applied in high-tension second electrode, 18 formations.

Above-mentioned first electrode 17 shown in the drawings is shapes of metal wire, but but also can be the various ways such as netted or expanded metal of moving air.Because so above-mentioned first electrode, 17 electrical ground connection are along with second electrode 18 is applied high voltage and forms electric field.As the material of first electrode 17, preferably use stainless steel or copper alloy.

In addition, above-mentioned second electrode 18 shown in the drawings is an expanded metal, but but also can be the metal wire or the various ways such as netted of moving air.Because above-mentioned second electrode 18 separates certain distance from first electrode 17, thus can guarantee ionisation region between two

electrodes

17,18 because of discharging and forming, and owing to be set up abreast with first electrode 17, so can form uniform electric field.In order to implement barrier discharge and dedusting, second electrode 18 comprises the dielectric layer 19 that is coated in its inwall.

As the material of second electrode 18, preferably use stainless steel or copper alloy, dielectric layer 19 is urethanes overlay or ceramic coating.And dielectric layer 19 forms in relative to each other mode on the medial surface of two

electrodes

17,18.

Be arranged on and above-mentionedly stop that the filter 15 of plasma filter 14 back is catalytic filters.Catalytic filter 15 is with photocatalyst coated filter on the structure of net 20 grades.And photochemical catalyst is a kind of of semiconductive ceramic, when irradiation ultraviolet radiation, forms the material of strong oxidability on its surface, and its representative materials is a titanium dioxide.

The filter 16 that is arranged on photochemical catalyst 15 back is HEPA filters.HEPA filter 16 is by testing with the same regulation of medium (MEDIUM) filter, high-performance filter with the above efficient (more than 99.97%) of regulation numerical value, use fiber 21 as material, particularly use glass fibre or synthetic fibers etc.

The above-mentioned plasma filter 14 that stops, catalytic filter 15, HEPA filter 16 be set up successively and the inner accepting space attached to above-mentioned housing 11 in.And, combining with housing 11 by HEPA filter 16, above-mentioned

filter

14,15,16 is attached to the inner space of housing 11 and become one.As shown in the figure, by the rotatable attaching parts 23 on the housing 11, HEPA filter 16 can combine with housing 11.On the other hand, HEPA filter 16 and housing 11 can contact with the surface of the framework 22 of HEPA filter 16 by the receiving space inwall of housing 11, and combine in the mode of crimping.According to this package assembly, the decomposition of fan-filter set, assembling becomes easier.

As shown in Figure 3, the extraneous air that is sucked by the action of blower fan 13 is at first by stopping plasma filter 14.At this moment, be applied in negative potential in first electrode 17 of above-mentioned plasma filter 14, and be applied in positive potential in second electrode 18, according to the high potential difference formation barrier discharge of 17,18 at two electrodes.Fine dust is electronegative in the chromatography with discharge ionization zone, and adsorbed by positively charged second electrode (18).

Then will be by the air that stops plasma filter 14 by catalytic filter 15.At this moment, to the photochemical catalyst irradiation ultraviolet radiation, then can produce electronics and hole with strong reducing power and oxidability, OH free radical and active oxygen also produce thereupon.Because the energy of above-mentioned free radical is than the binding energy height between organic molecule, therefore, airborne various viruses, the elimination that will be decomposed of bacterium and odorant.

Air by catalytic filter 15 at last will be indoor by entering into behind the HEPA filter 16.Above-mentioned by the air that stops plasma filter 14 in, only have a spot of fine solid particle, and be eliminated during by HEPA filter 16.In fact most dust is being removed when stopping plasma filter 14, has only the dust of only a few to be removed by HEPA filter 16.Therefore, the efficiency of dust collection of fan-filter set 10 also will improve, and on the other hand, the capacity of HEPA filter 16 does not need greatly, so fan-filter set 10 also just can be small and light skilful.In addition, according to the seizure effect that stops plasma filter 14, has the effect in the life-span that prolongs HEPA filter 16.

The effect of invention

According to fan-filter set of the present invention, extraneous air can reach by stopping plasma filter The catalytic filter sterilization deodorization that is captured for the first time. Then, by the HEPA filter by for the second time Catch. Therefore, efficiency of dust collection also improves thereupon, and free of contamination clean air can be provided. On the other hand, Above-mentioned fan-filter set is small and light skilful, and has the structure of easy decomposition assembling.

Claims

1. used for decontamination chamber fan-filter set, it is characterized in that, comprise: housing (11) with front air inflow aperture (12) and inner accepting space, and attached to above-mentioned inner accepting space and from the blower fan (13) that sets gradually with above-mentioned air inflow aperture (12) adjoining position, stop plasma filter (14), catalytic filter (15), HEPA filter (16), above-mentioned housing (11) and HEPA filter (16) mutually combine by surperficial crimping or attaching parts and assembled.

2. according to the described used for decontamination chamber fan-filter set of claim 1, it is characterized in that, the above-mentioned plasma filter (14) that stops is vertical and be provided with respect to the flow direction of air, and separates abreast by first electrode (17) of electrical ground connection with respect to above-mentioned first electrode (17) and to be provided with and to be applied in high-tension second electrode (18) and constitute.