CN100595847C - Electrically conducting transparent film and its preparing process - Google Patents
Electrically conducting transparent film and its preparing process Download PDFInfo
- Publication number
- CN100595847C CN100595847C CN200710160242A CN200710160242A CN100595847C CN 100595847 C CN100595847 C CN 100595847C CN 200710160242 A CN200710160242 A CN 200710160242A CN 200710160242 A CN200710160242 A CN 200710160242A CN 100595847 C CN100595847 C CN 100595847C
- Authority
- CN
- China
- Prior art keywords
- magnesium
- zinc
- gallium
- aluminium
- transparent conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710160242A CN100595847C (en) | 2007-12-14 | 2007-12-14 | Electrically conducting transparent film and its preparing process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200710160242A CN100595847C (en) | 2007-12-14 | 2007-12-14 | Electrically conducting transparent film and its preparing process |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101221830A CN101221830A (en) | 2008-07-16 |
CN100595847C true CN100595847C (en) | 2010-03-24 |
Family
ID=39631583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200710160242A Expired - Fee Related CN100595847C (en) | 2007-12-14 | 2007-12-14 | Electrically conducting transparent film and its preparing process |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100595847C (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101300560B1 (en) * | 2009-07-01 | 2013-09-03 | 삼성코닝정밀소재 주식회사 | ZnO-based conductor |
KR20120094035A (en) * | 2009-12-16 | 2012-08-23 | 미쓰비시 마테리알 가부시키가이샤 | Transparent conductive film, solar cell using same, sputtering target for forming said transparent conductive film, and manufacturing method therefor |
CN103199189B (en) * | 2012-01-09 | 2015-04-22 | 清华大学 | Codope ZnO thin film with high visible light transmittance and high piezoelectric constants |
CN103132018B (en) * | 2013-03-12 | 2015-03-18 | 电子科技大学 | Method for improving electric conductivity of amorphous silicon membrane |
CN109628899A (en) * | 2019-01-24 | 2019-04-16 | 苏州罗纳尔材料科技有限公司 | Rotate zinc-magnesium target and preparation method thereof |
JPWO2021090790A1 (en) * | 2019-11-08 | 2021-05-14 | ||
CN113088907A (en) * | 2021-03-26 | 2021-07-09 | 哈尔滨工业大学 | Preparation method of MgGaZnO film with deep ultraviolet detection function |
CN114807856A (en) * | 2022-04-28 | 2022-07-29 | 浙江大学 | Fluorine-doped indium tin oxide transparent conductive film and preparation method thereof |
-
2007
- 2007-12-14 CN CN200710160242A patent/CN100595847C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101221830A (en) | 2008-07-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100595847C (en) | Electrically conducting transparent film and its preparing process | |
Jang et al. | Comparison study of ZnO-based quaternary TCO materials for photovoltaic application | |
CN101609729B (en) | Manufacture method of multilayer transparent electricity conductive film | |
CN1938791B (en) | Transparent conductive film, process for producing the same, transparent conductive base material and luminescent device | |
JP4670877B2 (en) | Zinc oxide based transparent conductive film laminate, transparent conductive substrate and device | |
TWI543195B (en) | Transparent conductive film and method for preparing the same and electronic element and thin film transistor including the same | |
CN101158049A (en) | Method for preparing P-type transparent conductive oxide CuAlO2 film | |
CN102174689A (en) | FZO/metal/FZO transparent conductive film and preparation method thereof | |
CN101660120A (en) | Multi-element doping n-type zinc-oxide-base transparent conducting film and preparation method thereof | |
CN101697289A (en) | Transparent conducting film and preparation method thereof | |
CN1369572A (en) | Electrically conducting transparent oxide film | |
CN103014705B (en) | Deposition method of Cu/ZnO/Al photoelectric transparent conducting film | |
CN101834009B (en) | Low-indium doping amount zinc oxide transparent conducting film and preparation method thereof | |
WO2009119962A1 (en) | Boron-doped zinc oxide based transparent conducting film and manufacturing method of thereof | |
CN101101931A (en) | Near-infrared high-transmission rate non-crystal transparent conductive oxide film and its making method | |
CN102426876A (en) | H doped FZO transparent conductive film and preparation method thereof | |
CN105908127A (en) | P-type doped tin dioxide transparent conductive film and preparation method thereof | |
CN101262016B (en) | A p type conductive transparent nickel-doped CuO film and its making method | |
CN1289128A (en) | Zinc-aluminium target material for preparing transparent conducting film | |
CN108986955A (en) | Transparent conductive film and its manufacturing method | |
CN220402262U (en) | Full vacuum Cheng Yizhi junction trans-perovskite laminated solar cell | |
KR101128499B1 (en) | A preparation method of high density zinc oxide based sputtering target and transparent electroconductive film | |
CN1962508B (en) | Transparent highly-conductive near-infrared reflection coated glass and its preparation method | |
CN103014655A (en) | Preparation method of Ga/Al-codoped ZnO film by ECR-PEMOCVD (electron cyclotron resonance-plasma-enhanced metal-organic chemical vapor deposition) low-temperature deposition | |
CN104342137A (en) | Ce-doped trivalent vanadium silicate light-emitting film as well as preparation method and application thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20080716 Assignee: Nanjing Huijin Jinyuan Optoelectronic Materials Co., Ltd. Assignor: Zhejiang University Contract record no.: 2013320000191 Denomination of invention: Transparent conducting thin film and preparation method thereof Granted publication date: 20100324 License type: Exclusive License Record date: 20130321 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100324 Termination date: 20201214 |