CN100573032C - The system and method that is used for three dimensional optical measuring - Google Patents
The system and method that is used for three dimensional optical measuring Download PDFInfo
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- CN100573032C CN100573032C CNB2005800277988A CN200580027798A CN100573032C CN 100573032 C CN100573032 C CN 100573032C CN B2005800277988 A CNB2005800277988 A CN B2005800277988A CN 200580027798 A CN200580027798 A CN 200580027798A CN 100573032 C CN100573032 C CN 100573032C
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Abstract
A kind of optical measuring system is used in combination optical interdferometer (406) and optical-autocollimator (408), to increase the translation carried out with the laser instrument (400) that sends single beam laser (403), to wave and number is measured in pitching.Carry out translation measurement with the fringe counter (426) in the interferometer (406).Wave with pitching with the lateral effect photodiode (434) in the autocollimator (408) and to measure.Angle in the target beam of retroeflection (409) is departed from effect and can be minimized by reverse telescopic lens assembly (428), thereby can measure wideer angular range under the situation that does not significantly reduce the translation measurement precision.
Description
Technical field
The present invention relates to a kind of optical devices that are used for measurement target object location and orientation.
Background technology
For a lot of automated processes, position and the orientation of measuring cutter or workpiece rapidly and accurately are extremely important.Although developed various measuring system, optical measuring system is proved to be accurately, can adapts to, reliable and relatively not expensive.
Most of optical measuring systems all rely on the various effects that obtain by the output of controlling the low level laser device to realize.For example, can obtain the measurement of high precision linear range by the interference fringe that takes place to be offset from the object reflection that is offset owing to laser beam is counted.Such system can be by the Laser Measurement pulse the bump object and return light path time of light source and initial calibration.
Orientation is measured and is faced a lot of challenges, and for example, the light beam that is parallel to the object turning axle may not write down variable in distance.A solution of this problem is to utilize the polarization effect of Glan-Tang Pusen (Glan-Thompson) prism, and wherein the rotation orientation according to the relative light beam of prism resolves into two different quadrature resolutes of intensity with incoming laser beam.In a single day this system is calibrated, and will calculate the anglec of rotation of object around axle according to the intensity difference between the measured output resolute.
But, adopt the simple form of this measuring technique to obtain complete object positional information and can require each translation shaft that independent Range Measurement System is arranged, and each turning axle is had independent wheel measuring system.The trouble because the setting of single multi-dimensional measuring system and operation can become and costliness are so be sought after carrying out different measurement as much as possible simultaneously with single light beam.
Summary of the invention
According to the present invention, a kind of optical measuring system is provided, comprising: laser instrument, send the laser beam that comprises at least two orthogonal polarization components; The direct reflection object; Interferometer; And with the autocollimator of lateral effect photoelectric detector modification.
Described laser beam enters interferometer and is incident on first beam splitter, and here light beam is divided into reference beam and target beam.The outgoing target beam that is reflected is by the first quarter-wave retardation plate and second beam splitter, and is incident on the object, described object with the target beam retroeflection to second beam splitter.
A part return target beam become the autocollimator part by second beam splitter reflection, and by first lens focus to detecting device.The orientation of autocollimator light beam and focus change according to the object pitching or the variation of waving.Detecting device produces corresponding first output signal in position that detects lip-deep point with detecting device first.Another part return target beam is incident on the fringe counter by second beam splitter, the first quarter-wave retardation plate and first beam splitter.
Reference beam is incident on the fixing reverberator that turns back by first beam splitter and the second quarter-wave retardation plate.The reverberator that turns back reflection reference beam makes it pass through the second quarter-wave retardation plate once more to first beam splitter.The first beam splitter reflection reference beam is to fringe counter, and reference beam and return target beam are merged.In response to minimum that produces between reference beam and the return target beam and maximum interference, fringe counter produces second output signal.
In the embodiment that substitutes, be clipped in reverse telescopic lens assembly between first beam splitter and the fringe counter and reduce by the object pitching or wave the angle that changes the return target beam that causes and depart from.
Can be sent to computing machine with corresponding first output signal of change of measured autocollimation beam direction.Also can be sent to computing machine with the minimum and corresponding second output signal of maximum interference that detect by fringe counter.Data line is sent to computing machine with first output signal and second output signal, and computing machine calculates the object translation according to the change in orientation of first output signal calculating object according to second output signal.
All these features of the present invention are explained in the following drawings and explanation.
Description of drawings
Fig. 1 illustrates measurement axis of the present invention.
Fig. 2 illustrates the figure of typical optical interdferometer.
Fig. 3 illustrates the reduced graph of conventional autocollimator.
Fig. 4 illustrates the schematic views of the preferred embodiments of the present invention, comprises optical interdferometer, autocollimator and reverse telescopic lens assembly (reverse telescopic lens assembly).
Fig. 5 illustrates and adopts the typical case of two modules of the present invention to measure setting.
Embodiment
The present invention is used in combination optical interdferometer and optical-autocollimator, so that come the measurement target thing in linear translation on the dimension and the orientation of the rotation on two dimensions with single low level laser bundle.As shown in Figure 1, object 130 can be by measuring the optical interdferometer 110 of light beam 100 guiding reflecting surfaces 140 along the linear translation of y axle.
Fig. 2 illustrates the figure of typical optical interdferometer.Stable light source 200 sends coherent light beam 210, is incident on the beam splitter 260 well known in the art.The reference part 220 of light beam 210 is directed to fixing reference reflector 230 and returns beam splitter 260.The object part 240 of light beam 210 incides on the target reflector 250 by beam splitter 260.Target reflector 250 can be the flat reflector that directly or indirectly is fixed to the object surface that will measure its linear translation, the reverberator that turns back (retroreflector) or other suitable reverberator.The object part 240 of light beam from target reflector 250 retroeflection to beam splitter 260, and synthetic once more with the reference part 220 of light beam 210.
The relative beam splitter in the position of reference reflector 230 260 is fixing, so target reflector 250 causes having phase shift between target beam 240 and the reference beam 220 along the linear translation of beam axis.Along with target reflector 250 translation on measurement axis, detect the minimum and very big of the synthetic again light beam 270 interior interference that form by fringe counter 280.Can calculate the change in location of target reflector 250 according to fringe counter 280 detected fringe number.
Fig. 3 summarizes the operation that is used to from the conventional autocollimator device of the light of pointolite is shown.Light 310 from light source 300 is become the collimated light beam of being made up of parallel rays 330 by lens 320 refractions.Collimated light beam 330 is reflected and scioptics 320 by flat reflector 340, and lens 320 focus on collimated light beam 330 acceptance point 350 on the plane of light source 300.If collimated light beam 330 is orthogonal to flat reflector 340, then acceptance point 350 will overlap with light source 300.But if flat reflector 340 aligns collimated optical beam 330 at angle, then acceptance point 350 is with relative light source 300 offset distance d.During low-angle (tan (2a) approximates 2a greatly), the radian of the pitch angle a of flat reflector 340 can be calculated as a=d/2f, and wherein f is the focal length of lens 320.
The present invention is placed on interferometer and autocollimator in the same light path, thereby available single light velocity measurement pitching, waves and linear translation.Fig. 4 illustrates the synoptic diagram of the preferred embodiments of the present invention that are used in combination interferometer and autocollimator.Use He-Ne well known in the art or other laser instrument 400 to send the laser beam 403 that comprises at least two orthogonal polarization components.Be polarized maintenance (PM) optical fiber from the output of laser instrument 400 and guide to lens 404, lens 404 are guided light beam in the interferometer 406 into.
PM optical fiber can separate laser instrument 400 with measurement mechanism, reduces heat credit and vibration, avoids reducing measuring accuracy.Preferred interferometer 406 of the present invention comprises polarization beam apparatus 420 well known in the art, quarter-wave retardation plate 421 and 422, fixing turn back reverberator 424 and fringe counter 426.Preferred embodiment also can comprise reverse telescopic lens assembly 428.
The autocollimator 408 that outgoing target beam 407 is passed through quarter-wave retardation plate 422 and is made up of beam splitter 430, lens 432 and detecting device 434.Outgoing target beam 407 is at first by beam splitter 430 and incide on the reflectance target thing 410, and the target beam of returning from these reflectance target thing 410 reflections 409 is by beam splitter 430.Object 410 is level crossing normally.But, also can adopt other known specular reflector.
For clarity sake, Fig. 4 illustrates the target beam of outgoing and retroeflection to separate light path, and in fact, when the reflecting surface of object 410 during perpendicular to outgoing target beam 407, both are with identical optic path.The autocollimation part 436 of beam splitter 430 guiding return target beam 409 partly focuses on lens 430 on the detecting device 434 by the autocollimation with light beam.Typical detecting device 434 can utilize lateral effect photodiode (lateral effect photodiode).Detecting device 434 produces and the position respective output voltages signal of focused beam on the detection surface 435 of detecting device, and this signal passes through the data line (not shown) via serial connector 440 or other data connector known in the art and the communication of computing machine (not shown).Come the output voltage signal of self-detector 434 to convert digital form to, be used for Computer Processing by the A/D converter (not shown).
An alternate embodiment of the present invention can utilize dual-axis lateral effect photodiode as the SC/10 from United Detetor Technology.Dual-axis photodiode provides two output signals, and these two signals are being measured the incidence point of autocollimation part 436 on detecting device 434 that is focused together on the lateral dimensions of two quadratures.
Because the autocollimation part 436 of light beam enters autocollimator 408 as non-divergent laser beam, the conventional autocollimation that the preferred autocollimator 408 of Fig. 4 is compared Fig. 3 is simple.In autocollimator 408, do not need the retroeflection reflected light path to come the autocollimation part 436 of collimated light beam.Do not need pointolite to set up zero deviation point.On the contrary, any point on the detecting device 434 can at random be designed to zero deviation point.
When reflectance target thing surface 410 was orthogonal to outgoing target beam 407, the autocollimation part 436 of light beam was orthogonal to outgoing target beam 407 and focuses on the zero deviation point that detects on the surface 435.Reflectance target thing surface is 410 moves on the surface of whole detecting device 434 with the pitching surface or the corresponding reorientation of variation of waving cause the being reflected focus of autocollimation part 436 of light beam, thereby is convenient to measure side-play amount and calculates pitching and angle of oscillation.
Remaining return target beam 409 becomes interferometer beam 411 through autocollimator beam splitter 430.Interferometer beam 411 reconsolidates and introduces in the fringe counter 426 linear translation with measurement target thing 410 through quarter-wave retardation plates 422 and interferometer beam splitter 420 and reference beam 405.
Fringe counter known in the art produces average output signal from the detector array (not shown) usually, answers with minimum on whole detecting devices and maximum mobile phase.The present invention can utilize any suitable fringe counter known in the art.Fringe counter 426 produces by the output voltage signal of data line (not shown) via serial connector 442 or other data connector known in the art and the communication of computing machine (not shown).Output voltage signal from fringe counter 426 converts digital form to by Computer Processing by the A/D converter (not shown).The present invention can assemble light path time detector well known in the art in addition, initially to set up the absolute distance between detecting device and the object 410.
The skew that the pitching on reflectance target thing surface 410 or the variation of waving cause return target beam 409 to list at whole fringe counter detector arrays, thus measuring error introduced, and when skew was enough big, return target beam 409 was guided to the array outside fully.Introduce reverse telescopic lens assembly 428 in interferometer beam 411 paths of the preferred embodiments of the present invention between polarization beam apparatus 420 and fringe counter 426.Reverse telescopic lens assembly 428, come down to telescope (reversedtelescope) well known in the art, by assembly amplify oppositely, reduce the deviation angle of interferometer beam 411, making that 10X looks in the distance array can be with 10 ' depart from reduce to 1 ' depart from.Advantageously, this minimizing makes and can measure bigger pitching and wave change, still can keep linear translation measurement accurately simultaneously.Advantageously, the reverse telescopic lens assembly 428 between polarization beam apparatus 420 and the fringe counter 426 can reduce interferometric error and not influence autocollimator 408 operations.
Fig. 5 illustrates operation of the present invention.Platform 502 with minute surface 504A, 504B moves on pedestal 500.Can be when platform 502 moves measurements and calculations be installed in the position of the object (not shown) on the platform 502.The light that laser instrument 508 sends enters measurement mechanism 506A, the 506B that the present invention adopts by PM optical fiber 510A, 510B.Measurement mechanism 506A, 506B can be installed on the device in pedestal 500 or platform 502 sighting distances.Preferably, the laser beam 512A of measurement mechanism 506A, 506B projection, 512B mutually orthogonal.Data line 522A, 522B will be separately fringe counter among measurement mechanism 506A and the 506B and the output of autocollimator detecting device be sent to computing machine 520.
Can increase extra interferometer (not shown), to measure translation along the z axle with the light beam that is parallel to the z axle.Under the suitable situation of element, 1/100 the angle that the present invention can measure the translation of a nanometer and one second radian changes.
Principle of the present invention disclosed herein, embodiment and mode of operation should be understood that to explain and unrestricted the present invention.Can make various distortion and change to above stated specification embodiment and do not deviate from scope and spirit of the present invention.
Claims (5)
1. optical measuring system comprises:
Laser instrument (400), this laser instrument (400) send the laser beam (403) that comprises first beam component and second beam component, and first beam component has first polarization, and second beam component has second polarization, and second polarized orthogonal is in first polarization;
The object (410) of direct reflection at least a portion laser beam (403);
Interferometer (406), this interferometer (406) comprises first polarization beam apparatus (420), the first quarter-wave retardation plate (422), the second quarter-wave retardation plate (421), reverberator (424), and fringe counter (426), interferometer (406) receives laser beam (403);
Autocollimator (408), autocollimator (408) comprise second beam splitter (430), first lens (432) and detecting device (434), and detecting device (434) has at least the first and detects surface (435);
Laser beam (403) is incident on first beam splitter (420), the outgoing object part (407) of first beam component of first beam splitter (420) reflection lasering beam (403), make it pass through the first quarter-wave retardation plate (422) and second beam splitter (430), to be incident on the object (410), the return target part (409) of object (410) reflection first beam component is got back to second beam splitter (430), the return target part (409) of second beam splitter (430) reflection, first beam component, make it pass through first lens (432), first lens (432) focus on the autocollimator part (436) of the return target part (409) of first beam component on any of the first detection surface (435), and detecting device (434) produces corresponding first output signal in position with the lip-deep point of first detection;
Second beam splitter (430), the first quarter-wave retardation plate (422) and first beam splitter (420) are sent to fringe counter (426) with the interferometer part (411) of the return target part (409) of first beam component; And
First beam splitter (420) and the second quarter-wave retardation plate (421) are sent to reverberator (424) with second beam component (405), reverberator (424) reflection second beam component (405), it is incident on first beam splitter (420) by the second quarter-wave retardation plate (421) once more, first beam splitter (420) reflexes to fringe counter (426) with second beam component (405), and second beam component (405) and the interferometer part (411) of the return target part (409) of first beam component are merged, in response to the interference between the interferometer part (411) of the return target of first beam component part (409) and second beam component (405), fringe counter (426) generation second output signal.
2. according to the optical measuring system of claim 1, wherein further comprise reverse telescopic lens assembly (428), reverse telescopic lens assembly (428) is clipped between first beam splitter (420) and the fringe counter (426), and reverse telescopic lens assembly (428) reduces the angle of interferometer part (411) of the return target part (409) of at least the first beam component that the change in orientation by object (410) causes to be departed from.
3. according to the optical measuring system of claim 1, wherein further comprise computing machine (520) and at least one first data line (522A), data line is sent to computing machine (520) with at least the first output signal and second output signal, computing machine (520) is according to the change in orientation of first output signal calculating object (504A), and the translation of calculating object (504A) according to second output signal.
4. according to the optical measuring system of claim 1, wherein further comprise polarization-maintaining fiber (402) and second lens (404), polarization-maintaining fiber (402) will be sent to second lens (404) from the laser beam (403) of laser instrument (400), and second lens (404) are with laser beam (403) guiding first beam splitter (420).
5. the method for the translation of a measurement target thing and rotation comprises:
With the laser beam beam splitting is outgoing target beam (407) and reference beam (405);
With outgoing target beam (407) guiding minute surface reflectance target thing (410), outgoing target beam (407) is become return target beam (409) by object (410) reflection;
With return target beam (409) beam splitting is interferometer beam (411) and autocollimator light beam (436);
The direction of measuring autocollimator light beam (436) changes;
Generation changes corresponding first output signal with the direction of autocollimator light beam (436), and first output signal is sent to computing machine (520);
Stack reference beam (405) and interferometer beam (411) are to produce minimum and maximum interference;
Detect minimum and maximum interference with fringe counter (426);
Produce the minimum and corresponding second output signal of maximum interference that are detected with fringe counter (426), second output signal is sent to computing machine (520); And
According to the change in orientation of first output signal calculating object, the translation of calculating object according to second output signal.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US60183104P | 2004-08-16 | 2004-08-16 | |
| US60/601,831 | 2004-08-16 | ||
| US11/203,782 | 2005-08-15 |
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| Publication Number | Publication Date |
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| CN101065640A CN101065640A (en) | 2007-10-31 |
| CN100573032C true CN100573032C (en) | 2009-12-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103471508A (en) * | 2012-06-08 | 2013-12-25 | 上海微电子装备有限公司 | Shear displacement speckle measurement method and device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015208087A1 (en) * | 2015-04-30 | 2016-11-03 | Carl Zeiss Microscopy Gmbh | Method for generating a reflection-reduced contrast image and related devices |
| CN105444998B (en) * | 2015-12-15 | 2017-12-05 | 中国科学院西安光学精密机械研究所 | Device and method for measuring visual magnification of telescopic system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103471508A (en) * | 2012-06-08 | 2013-12-25 | 上海微电子装备有限公司 | Shear displacement speckle measurement method and device |
| CN103471508B (en) * | 2012-06-08 | 2016-06-01 | 上海微电子装备有限公司 | A kind of shear displacemant speckle measurement method and device |
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