CN100522483C - Device for detecting interlayer membrane abnormal grinding and its realizing method - Google Patents
Device for detecting interlayer membrane abnormal grinding and its realizing method Download PDFInfo
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- CN100522483C CN100522483C CNB2006100286790A CN200610028679A CN100522483C CN 100522483 C CN100522483 C CN 100522483C CN B2006100286790 A CNB2006100286790 A CN B2006100286790A CN 200610028679 A CN200610028679 A CN 200610028679A CN 100522483 C CN100522483 C CN 100522483C
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Abstract
The present invention discloses device and method for detecting abnormal grinding of interlayer film. The device is one transparent container set below the grinder for accepting grinding resultant and chemical reagent and with one sensor and one alarm in the outer wall. The present invention detects ground off metal with the sensor, which operates on the chemical reaction between the metal and the chemical reagent and resulting in color change, and the alarm to find out abnormal grinding of interlayer film, and this can avoid further loss.
Description
Technical field
The present invention relates to a kind of semiconductor devices, relate in particular to a kind of device that detects interlayer membrane abnormal grinding.The invention still further relates to the process that a kind of semiconductor is made, relate in particular to the implementation method of the device of above-mentioned detection interlayer membrane abnormal grinding.
Background technology
In current semiconductor production process, chemical mechanical milling tech is extremely important, because chemical mechanical milling tech can provide good flatness.In existing grinding technics, since artificial, such as the polish process of call error, or set wrong milling time, and the membranous light that all grinds insulating barrier is ground to metal level always.In addition,, cause in the interlayer film process of lapping and can be ground to following metal level, cause the reduction of product yield and pollute board because the influence of grinding rate, time sudden change or the improper technology in preceding road needs the interlayer film of grinding thin partially.When this situation took place, board itself can not alarm, often will wait until that situation just can note abnormalities when problematic product went to measure the back value.
Summary of the invention
One of the technical problem to be solved in the present invention provides a kind of device that detects interlayer membrane abnormal grinding, uses this device can in time find interlayer membrane abnormal grinding, reduce or avoid the loss.
Two of the technical problem to be solved in the present invention provides the implementation method of the device of above-mentioned detection interlayer membrane abnormal grinding.
For solving the problems of the technologies described above, the invention provides a kind of device that detects interlayer membrane abnormal grinding, this device comprises: a transparent vessel is arranged under grinder station, and this transparent vessel receives grinding product and chemical reagent, and a sensor and a warning device are arranged on the wall of the outside of this transparent vessel.
Described chemical reagent comprises the mixed liquor of rutin and methyl alcohol and hydrochloric acid.
Described sensor is the color identification sensor.
The present invention also provides a kind of implementation method that detects the device of interlayer membrane abnormal grinding, may further comprise the steps:
Step 1 when grinding each flake products, is collected a spot of grinding product and chemical reagent, when normal grinding, does not have metal ion and produces, and transparent vessel is that milky can not reported to the police;
Step 2, when being ground to metal level, grinding product contains active metal ion and the chemical reagent reaction generates non-milky compound;
When step 3, sensor detect non-milky, just report to the police and stop to grind;
Step 4, the technical staff confirms to take measures areput after receiving alarm signal, just discharges detection liquid after having detected.
Active metal ion described in the step 2 is an aluminium ion, and described non-milky compound is yellow compound.
Compare with prior art, the present invention has following beneficial effect: by the present invention, can in time catch the change color that the back produces because metal ion and reagent react, after color sensor was found change color, warning and notification technique personnel confirmed and take measures.The used reagent of the present invention belongs to general chemical reagent, and sensor also belongs to matured product, can both buy in market, and enforceability is good.The aluminium ion chemical property is active, has done to experimental results show that this reagent and contain aluminum ions mixture and can react and generate yellow compound, by the change of color, is easy to detect the generation of unusual condition.Thereby can in time find interlayer membrane abnormal grinding, reduce or avoid the loss.
Description of drawings
Fig. 1 is the interlayer structure figure that grinds;
Fig. 2 is a kind of device schematic diagram that detects interlayer membrane abnormal grinding of the present invention.
The specific embodiment
The present invention is further detailed explanation below in conjunction with drawings and Examples.
As shown in Figure 1, between grinding layer, during film, should be worth (preceding film thickness) under the normal condition in the past and be ground to back value (caudacoria normal thickness).When undesired grinding, if be ground to metal level, just have metal ingredient and occur, in existing eight inches technologies, metal level is a kind of aluminium copper, grinding the metal ingredient that comes can run off along with products such as lapping liquids.
As shown in Figure 2, the present invention installs a transparent vessel below grinder station, and a termination of this transparent vessel is received grinding product, and the other end receives chemical reagent.Every grinding a slice is collected a small amount of grinding product and chemical reagent, for example collects 50 milliliters of grinding products and chemical reagent.When normal grinding, grinding product does not have metal ion and produces, and transparent vessel still keeps original milky, can not report to the police.Color identification sensor and warning device are installed on the wall of the outside of transparent vessel, and when being ground to metal level, grinding product contains active metal ion and the chemical reagent reaction generates non-milky compound.When finding to have the milky color of the default setting of being different to occur, then the sensor output alarm signal when grinder station is received alarm signal, then stops to grind and notifying operation personnel inspection product, take measures areput, just discharge detection liquid after having detected.
For example, chemical reagent is the mixed liquor of a small amount of rutin and 1 ml methanol and hydrochloric acid, and hydrochloric acid can not react with methyl alcohol, and the reaction of rutin and alchlor is complex reaction.When the grinding product that contains aluminium and chemical reagent mix flavescence immediately, because, when being ground to metal level, grinding product contains active metallic aluminium and the hydrochloric acid reaction in the chemical reagent generates alchlor, rutin reaction in alchlor and the chemical reagent generates yellow compound, and the sensor output alarm signal also stops to grind.
Wherein, the molecular formula of rutin is:
Wherein, the chemical equation of aluminium and hydrochloric acid reaction is:
2Al+6HCl——2AlCl
3+3H
2
The chemical equation of rutin and alchlor is:
Claims (3)
1, a kind of device that detects interlayer membrane abnormal grinding, it is characterized in that, one transparent vessel is arranged under grinder station, this transparent vessel receives grinding product and chemical reagent, one sensor and a warning device are arranged on the wall of the outside of this transparent vessel, described chemical reagent comprises the mixed liquor of rutin and methyl alcohol and hydrochloric acid, and described sensor is the color identification sensor.
2, the implementation method of the device of the described detection interlayer membrane abnormal grinding of a kind of claim 1 is characterized in that, may further comprise the steps:
Step 1 when grinding each flake products, is collected a spot of grinding product and chemical reagent, when normal grinding, does not have metal ion and produces, and transparent vessel is that milky can not reported to the police;
Step 2, when being ground to metal level, active metal ion that grinding product contains and chemical reagent reaction generate non-milky compound;
When step 3, sensor detect non-milky, just report to the police and stop to grind;
Step 4, the technical staff confirms to take measures areput after receiving alarm signal, just discharges detection liquid after having detected.
3, the implementation method of the device of detection interlayer membrane abnormal grinding as claimed in claim 2 is characterized in that, the active metal ion described in the step 2 is an aluminium ion, and described non-milky compound is yellow compound.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100286790A CN100522483C (en) | 2006-07-06 | 2006-07-06 | Device for detecting interlayer membrane abnormal grinding and its realizing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100286790A CN100522483C (en) | 2006-07-06 | 2006-07-06 | Device for detecting interlayer membrane abnormal grinding and its realizing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101100046A CN101100046A (en) | 2008-01-09 |
| CN100522483C true CN100522483C (en) | 2009-08-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100286790A Expired - Fee Related CN100522483C (en) | 2006-07-06 | 2006-07-06 | Device for detecting interlayer membrane abnormal grinding and its realizing method |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110328211B (en) * | 2019-06-19 | 2022-02-01 | 东莞高伟光学电子有限公司 | Separation method and chemical reagent for separating nonmetal sensor |
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| CN101100046A (en) | 2008-01-09 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140110 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20140110 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
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