CN100511728C - Method for producing solar cell with flexible transfer underlay by using suede temporary underlay - Google Patents
Method for producing solar cell with flexible transfer underlay by using suede temporary underlay Download PDFInfo
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- CN100511728C CN100511728C CNB2007100613250A CN200710061325A CN100511728C CN 100511728 C CN100511728 C CN 100511728C CN B2007100613250 A CNB2007100613250 A CN B2007100613250A CN 200710061325 A CN200710061325 A CN 200710061325A CN 100511728 C CN100511728 C CN 100511728C
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Abstract
The invention discloses a method for preparing flexible transfer substrate solar battery by luster temporary substrate, wherein, the method is that a metal substrate is immerged into electrolyte for surface processing so that the metal substrate has pile face structure. The pile face metal aluminum foil is prepared with a front electrode, laser cutting, preparation of P-I-N layer, laser cutting, preparation of back electrode, laser cutting, and lamination polymer substrate, as a result, the metal substrate is removed to prepare the flexible transfer substrate solar battery. The metal substrate as the flexible transfer substrate of the invention has a neat surface and pile face structure, and the front electrode deposited on the surface has a certain woolen degree, such that the prepared solar battery has good light trap structure, thereby improving efficiency of the solar battery.
Description
[technical field]
The present invention relates to the thin-film solar cells device making technics, especially a kind of method of utilizing the interim substrate preparation flexible transfer substrate of matte solar cell
[background technology]
Development of human society is accompanied by the increase of energy resource consumption, meanwhile, conventional energy resource (as oil, coal etc.) reserves are reducing year by year, and use conventional energy resource to cause environmental pollution and climatic deterioration, cause the pollution of ball ecological environment, destruction to be on the rise.Therefore, the mankind are more and more important, urgent to " regenerative resource ", the research of " green energy resource ", development and utilization.This wherein, solar energy is undoubtedly the first-selection of human future source of energy.From the seventies in last century, many countries have started the solar energy power generating upsurge, the numerous and confused development of formulating ambitious medium-term and long-term development plan promotion photovoltaic technology and photovoltaic industry of country such as the U.S., Japan, European Union, India promotes the development of this new forms of energy industry.
Thin-film solar cells is a type of solar cell, and wherein silicon film solar batteries is because few, the low cost of manufacture of consumptive material, and abundant raw materials, advantage such as nontoxic, pollution-free enjoy favor.Silicon-film solar-cell can be divided into hard substrate (as glass substrate) and flexible substrate (as stainless steel, polymer) two big classes by substrate.Present silicon-film solar-cell major part prepares on hard substrate, but this battery is more thick and heavy, and broken easily, and transportation and keeping all have inconvenience.The solar cell that on flexible substrate, prepares, but characteristics are light, thin and crimpiness, can be used in many other fields that the hard substrate solar cell is difficult to be competent at, for example solar telephone, aircraft, dirigible, building etc. need the special surface applications, and because characteristic light, thin and that can curl is convenient to storage very much, but be to use at the bottom of the stainless steel lining, preparation integrated battery technology is comparatively complicated, uses polymer substrate, and the depositing temperature of battery is had bigger restriction.
A kind of novel flexible transfer substrate solar cell can overcome at the bottom of the above-mentioned stainless steel lining and the shortcoming of polymer substrate solar cell.This translate substrate is to be interim substrate with a kind of tinsel, in the above with the sequential aggradation battery of p-i-n, and then transfers to substituted metal paillon foil on the polymer substrate.Use the major advantage of this technology to be: can use temperature suitable and similar technology to remove deposit transparent conductive film (TCO) and each silicon layer with conventional glass substrate, can prepare high-quality material with higher deposition rate like this, make the deposition integrated technology of the volume to volume (roll-to-roll) on the polymer substrate become possibility simultaneously.
In this novel flexible transfer substrate solar battery structure, interim substrate can be selected metal aluminum foil cheaply for use, but not surface treated metal aluminum foil surface exists many because mechanical mark and the pit that produces in rolling, the transportation, and prepared preceding electrode (SnO
2, ITO etc.) and the thickness of silicon thin-film battery all in micron dimension, the existence of these cuts can make these films be difficult to densification, can't intactly cover the surface of metal forming, make degradation of cell performance, more seriously, remove in the subsequent technique of the interim substrate of metal aluminum foil of this battery at needs, can make battery be subjected to the influence of corrosive liquid, obscission takes place, thereby cause the performance of solar cell to reduce even can't use.
[summary of the invention]
The object of the invention is intended to for overcoming the deficiencies in the prior art, and a kind of method of utilizing the interim substrate preparation flexible transfer substrate of matte solar cell is provided, the translate substrate surfacing in this method, and have suede structure.
The present invention has designed a kind of method of utilizing the interim substrate preparation flexible transfer substrate of matte solar cell for achieving the above object, and it may further comprise the steps: metal substrate immerses in the electrolyte carries out surface treatment; Carry out successively on the metal substrate after surface treatment: electrode, laser cutting line, deposition P-I-N silicon thin-film battery layer, laser cutting line again, deposition back electrode, laser cutting line more at last before the deposition; At back electrode upper strata compression polymer substrate; Remove metal substrate at last and carry out the cell package processing.
Beneficial effect of the present invention is: in the preparation of flexible solar battery, adopt the flexible transfer substrate of metal substrate as solar cell, overcome at the bottom of the stainless steel lining and the shortcoming of polymer substrate solar cell.This metal substrate is through the surface treatment of electrolyte, surfacing and have suede structure (suede structure is yardstick with the surface roughness of atomic force microscope test at 20-100nm), make preceding electrode also have certain suede degree at its surface deposition thereupon, thereby make prepared solar cell have good light trapping structure, thereby help improving the light absorption of battery, improve battery short circuit electric current and open circuit voltage, and fill factor, curve factor, and then the photoelectric conversion efficiency of raising solar cell, improve efficiency of solar cell.
[description of drawings]
Fig. 1 is a flexible transfer substrate solar battery structure schematic diagram of the present invention;
Fig. 2 is a flexible transfer substrate preparation method of solar battery flow chart of the present invention;
Fig. 3 is surface-treated metal aluminum foil schematic diagram not;
Fig. 4 is through the metal aluminum foil schematic diagram after the surface treatment.
[embodiment]
Below in conjunction with the drawings and specific embodiments technical solutions according to the invention are described in detail.
The present invention utilizes the interim substrate preparation flexible displace substrate solar energy battery of matte, comprises handling successively or preparation: metal substrate A transparent conductive film T, electricity level before the laser cutting, p type Window layer P, intrinsic active area I, N
+District N, laser cutting silion cell layer, back electrode M, laser cutting back electrode, laminated polymeric thing substrate S etc.Metal substrate A wherein is through electrochemical polishing treatment, and the evenness on surface is well improved, and also has certain suede degree simultaneously, as the interim translate substrate of flexible displace substrate solar energy battery.
Described metal substrate surface-treated technological parameter is: electrolyte, and perchloric acid and absolute ethyl alcohol, proportioning is 1:1～1:10; More than the surface treatment voltage 3-20V; Electrolyte temperature ,-10～50 ℃; Electrode spacing, 1～10cm; The surface treatment time, 0.1～30 minute.
Described metal substrate is that thickness is aluminium foil or the Copper Foil of 0.05mm～2mm.
Electrode T before described is to adopt deposition techniques transparent conductive film TCO such as ullrasonic spraying or electron beam evaporation, adopts SnO
2Or material such as ITO.
Described P-I-N silicon thin-film battery is to adopt the plasma reinforced chemical vapour deposition method to deposit p type Window layer, intrinsic active area and N+ district three silicon layers successively.
Described back electrode M is to adopt metal organic chemical vapor deposition or sputtering method preparation, and back electrode M is at least a among metal A g, Al and the ZnO.
Described polymer substrate S, adopting thickness is transparent PET or other encapsulation polymeric film material of 0.1mm～2.0mm.
Described removal metal substrate is also carried out cell package and is handled, and is specially and adopts wet etching that metal substrate is removed, and adopts polymer that battery is carried out encapsulation process then.
The flexible displace substrate solar energy battery of the present invention's preparation, at first adopt electrolyte that aluminium foil A is carried out surface treatment, electrode transparent conductive film T before on aluminium foil A, depositing then, electrode before the laser cutting, plasma reinforced chemical vapour deposition (PECVD) method deposits p type Window layer P successively, intrinsic active area I, N+ district N three silicon layers, laser cutting silion cell layer, metal organic chemical vapor deposition or sputtering method prepare back electrode M, laser cutting, in back electrode upper strata compression polymer substrate S, remove aluminium foil A at last and carry out the cell package processing, obtain flexible displace substrate solar energy battery.
Please refer to shown in Figure 2ly, concrete preparation technology is:
1, will carry out surface treatment in the aluminium foil A immersion electrolyte, concrete technological parameter is as follows:
Electrolyte adopts perchloric acid (or acids chemicals of other corresponding difficult infringement aluminium foil) and absolute ethyl alcohol (or other organic solvent), and its proportioning is 1:1～1:10;
Surface treatment voltage: 3-20V;
Electrolyte temperature :-10～50 ℃;
Electrode spacing: 1～10cm;
The surface treatment time: 0.1～30 minute.
2, on the aluminium foil A after the surface treatment, electrode transparent conductive film T before the deposition; Electrode before the laser cutting;
3, adopt plasma reinforced chemical vapour deposition film deposition techniques such as (PECVD) to deposit p type Window layer P, intrinsic active area I, N+ district N three silicon layers successively; Laser cutting silion cell layer;
4, preparation back electrode M; Laser cutting, and electrode drawn;
5, with laminating machine that battery and polymer substrate S is laminated together;
6, adopt wet etching that aluminium foil A is removed;
7, battery is good with polymer encapsulated.
Embodiment 1:
Electrolyte adopts perchloric acid (or acids chemicals of other corresponding difficult infringement aluminium foil) and absolute ethyl alcohol (or other organic solvent), and its proportioning is 1:4;
Surface treatment voltage: 12V;
Electrolyte temperature: 15 ℃;
Electrode spacing: 2.5cm;
The surface treatment time: 2.5 minutes.
Metal aluminum foil after the processing at first adopts the ullrasonic spraying technology to prepare SnO
2Transparent conductive film, the laser cutting line, carry out battery P, I, the deposition of each layer of N through putting into the PECVD depositing system after the ultrasonic cleaning then, cut and cross through laser after the deposition, adopt evaporation technique to carry out the preparation of back electrode A1, the polymer lamination is used in laser cutting line then, put into the interim substrate aluminium foil of corrosive liquid erosion removal behind the lamination, then cell package.
Embodiment 2:
Electrolyte adopts perchloric acid (or acids chemicals of other corresponding difficult infringement aluminium foil) and absolute ethyl alcohol (or other organic solvent), and its proportioning is 1:4;
Surface treatment voltage: 18.5V;
Electrolyte temperature: 2 ℃;
Electrode spacing: 4cm;
The surface treatment time: 1 minute.
One of effective way of it should be noted that the raising silicon-film solar-cell is to adopt light trapping structure.Electrode is the key factor that constitutes the efficient light trapping structure of silicon-film solar-cell before the electrically conducting transparent of suede structure.For in flexible displace substrate solar energy battery, realizing good light trapping structure, when aluminium foil surface is carried out surface-treated, by control surface treatment process parameter, make aluminium foil surface have certain suede degree, thereby make transparent conductive film also have certain suede degree thereupon, make prepared flexible displace substrate solar energy battery have good light trapping structure in its surface preparation.Therefore, in the above-mentioned steps, the process of surface treatment of the described aluminium foil of step 1 is the key point of whole flexible displace substrate solar energy battery technology.
As shown in Figure 3 and Figure 4, illustrate the difference of solar cell flexible transfer substrate tinsel before and after handling, wherein Fig. 3 is surface-treated aluminium foil not, and Fig. 4 is the aluminium foil after the surface treatment.In this example, adopting at thickness is on the aluminium foil of 0.1mm, according to selecting surperficial processing parameter described in the above-mentioned steps 1, aluminium foil surface is carried out electrochemical treatments.Can find out that from Fig. 3 and Fig. 4 compare with untreated sample, the sample surfaces cut disappears substantially after surface treatment, and have certain suede degree.
Surface treatment to aluminium foil, be to come the roughness of aluminium foil surface is adjusted with other burnishing parameters (comprising voltage, temperature, time) by the concentration of control electrolyte, make its surperficial roughness can reach tens nanometers, so not only reduced the aluminium foil surface roughness to the electrically conducting transparent of deposition thereafter before the influence of electrode growth, electrode can be grown in aluminium foil surface densely before making, the transparent conductive film for preparing on the aluminium foil with certain suede degree simultaneously also can have certain suede degree.
To sum up, the invention provides a kind of flexible displace substrate solar energy battery structure and preparation method, this flexible transfer substrate surfacing and have suede structure, make film also have certain suede degree thereupon, thereby make prepared solar cell have good light trapping structure, thereby help improving the light absorption of battery at its surface deposition, improve battery short circuit electric current and open circuit voltage, and fill factor, curve factor, and then the photoelectric conversion efficiency of raising solar cell, improve efficiency of solar cell.
The above; only for the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, and anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; the variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection range of claim.
Claims (8)
1, a kind of method of utilizing the interim substrate preparation flexible transfer substrate of matte solar cell is characterized in that, may further comprise the steps:
Metal substrate immerses in the electrolyte carries out surface treatment;
Carry out successively on the metal substrate after surface treatment: electrode, laser cutting line, deposition P-I-N silicon thin-film battery layer, laser cutting line again, deposition back electrode, laser cutting line more at last before the deposition;
At back electrode upper strata compression polymer substrate;
Remove metal substrate and carry out the cell package processing.
2, the method for utilizing the interim substrate preparation flexible transfer substrate of matte solar cell according to claim 1 is characterized in that: described metal substrate immerses in the electrolyte carries out surface treatment, and this surface-treated technological parameter is,
Electrolyte, perchloric acid and absolute ethyl alcohol, proportioning is 1:1～1:10;
Surface treatment voltage, 3-20V;
Electrolyte temperature ,-10～50 ℃;
Electrode spacing, 1～10cm;
The surface treatment time, 0.1～30 minute.
3, the method for utilizing the interim substrate preparation flexible transfer substrate of matte solar cell according to claim 1 and 2 is characterized in that: described metal substrate is that thickness is aluminium foil or the Copper Foil of 0.05mm～2mm.
4, the method for utilizing the interim substrate preparation flexible transfer substrate of matte solar cell according to claim 3 is characterized in that: electrode is SnO before described
2Or ITO transparent conductive film.
6, the method for utilizing the interim substrate preparation flexible transfer substrate of matte solar cell according to claim 3 is characterized in that: described deposition P-I-N silicon thin-film battery is to adopt the plasma reinforced chemical vapour deposition method to deposit p type Window layer, intrinsic active area and N+ district three silicon layers successively.
7, the method for utilizing the interim substrate preparation flexible transfer substrate of matte solar cell according to claim 3, it is characterized in that: described back electrode comprises among Ag, Al and the ZnO at least a.
8, the method for utilizing the interim substrate preparation flexible transfer substrate of matte solar cell according to claim 3, it is characterized in that: described removal metal substrate is also carried out cell package and is handled, be specially and adopt wet etching that metal substrate is removed, adopt polymer that battery is carried out encapsulation process then.
9, according to the described arbitrary method of utilizing the interim substrate preparation flexible transfer substrate of matte solar cell of claim 4-7, it is characterized in that: described removal metal substrate is also carried out cell package and is handled, be specially and adopt wet etching that metal substrate is removed, adopt polymer that battery is carried out encapsulation process then.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100613250A CN100511728C (en) | 2007-09-30 | 2007-09-30 | Method for producing solar cell with flexible transfer underlay by using suede temporary underlay |
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| CNB2007100613250A CN100511728C (en) | 2007-09-30 | 2007-09-30 | Method for producing solar cell with flexible transfer underlay by using suede temporary underlay |
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| CN100511728C true CN100511728C (en) | 2009-07-08 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2161758A1 (en) * | 2008-09-05 | 2010-03-10 | Flexucell ApS | Solar cell and method for the production thereof |
| CN101944541B (en) * | 2009-07-08 | 2013-01-02 | 深圳先进技术研究院 | Thin-film photovoltaic cell and manufacturing method thereof |
| CN102709402B (en) * | 2012-06-29 | 2015-11-18 | 中国科学院上海高等研究院 | Thin film solar cell of graphic based metal substrate and preparation method thereof |
| CN103151399A (en) * | 2013-03-04 | 2013-06-12 | 上海中科高等研究院 | Flexible thin film solar cell with periodic trapping structure and preparation method for flexible thin film solar cell |
| CN104377251B (en) * | 2013-08-12 | 2016-09-14 | 上海理想万里晖薄膜设备有限公司 | The flexible large area lamination solar cell of a kind of multiple dimensioned sunken light and preparation method |
| CN104752557A (en) * | 2013-12-31 | 2015-07-01 | 中国电子科技集团公司第十八研究所 | Preparation method of light trapping structure type copper indium gallium diselenide thin film solar cell |
| CN105633202B (en) * | 2014-11-06 | 2017-05-10 | 中物院成都科学技术发展中心 | Surface treatment method of solar cell flexible substrate |
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