CN100493452C - Mini-sensor for human breathing - Google Patents
Mini-sensor for human breathing Download PDFInfo
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- CN100493452C CN100493452C CNB2005101122172A CN200510112217A CN100493452C CN 100493452 C CN100493452 C CN 100493452C CN B2005101122172 A CNB2005101122172 A CN B2005101122172A CN 200510112217 A CN200510112217 A CN 200510112217A CN 100493452 C CN100493452 C CN 100493452C
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Abstract
A miniature sensor for human respiration is composed of a substrate, and microelectrodes or their array on said substrate. The positive and negative electrodes of said microelectrodes or their array are isolated from each other by air. Its advantages are high sensitivity and S/N ratio, and low energy consumption.
Description
Technical field
What the present invention relates to is a kind of product of sensor technical field, specifically, relates to a kind of mini-sensor for human breathing.
Technical background
The composition of monitoring human breathing and behavioral characteristics (intensity and frequency) change the method for the human metabolization of monitoring that is a kind of safety in essence.The developing direction of sensor for human breathing technology is the high security and stability of research and development, high sensitivity, high selectivity, the human breathing metabolism Static Detection of low energy consumption and the sensing system that dynamic monitoring combines at present, as the reliable basis of the human a series of physiology of analysis monitoring, pathology and psychologic status.On the static statistics feature detection, since M.Phillips in 1992 published article in " Scientific Beauty compatriots " print claims to analyze human physiology, pathological condition by detected gas content, some rapid progresses have been obtained.
Find through literature search prior art, people such as Joon-Boo Yu rolled up at Sensors and Actuators B (sensor and actuator B) in 2005 the 108th, the article on the 262-271 page or leaf " Analysis ofdiabetic patient ' s breath with conducting polymer sensor array (with conduction organic sensor array analysis diabetes patient's breathing) ".Composition information in the article use sensor array detection human breathing is as the foundation of diagnosing diabetes, but this technology can not realize the behavioral characteristics of human breathing is monitored.Be used to monitor the pick off of the dynamic characteristic of human breathing, though be used for long-time monitoring analysis and nursing technique already to patient's pathological change, and be used for the monitoring analysis of human psychology situations such as a lie detector, but at present, this type of pick off is all based on to the moisture that discharges of environment towards periphery in the human breathing process, heat, air-flow or chest exercise are realized conversion of signals as the input quantity of pick off, they belong to piezoelectricity, thermoelectric principle or barometer, the air flow meter principle, most pick offs based on above principle are difficult to realize utilizing semiconductor processing technology manufacturing, therefore be difficult to high accuracy, realize microminiaturized at low cost, array, and then be difficult to improve cost performance.
Summary of the invention
The present invention is directed to the deficiencies in the prior art and defective, propose a kind of mini-sensor for human breathing, make it improve and cut down the consumption of energy and cost monitoring accuracy, sensitivity, safety, the stability of multidate informations such as human breathing intensity and frequency change.
The present invention is achieved by the following technical solutions, the present invention includes: substrate, microelectrode or its array layer, microelectrode or its array layer are arranged on the substrate, and in microelectrode or its array layer, negative and positive the two poles of the earth of microelectrode or its array are isolated mutually by the airspace.
Described substrate, its surface has high insulating property, and it can be a glass, also can be the silicon chip that the upper strata has insulating barrier, and insulating layer material can be silicon dioxide, silicon nitride, also can be other dielectric substrate.
Described microelectrode or its array can be monolayer or plural layers, are metal microelectrode or its array layer of metal microelectrode or its array layer or surface coverage monodimension nanometer material layer.
Described microelectrode array comprises anode array and cathode array, between every pair of adjacent electrode bar certain interval is arranged all, has air in the interval.
Described monodimension nanometer material layer is positioned at the some or all of surface of anode array and cathode array electrode strip.
The present invention proposes to utilize highfield that the charged particle that is contained in the expired gas is drifted about and gathers as the respiratory capacity sensing principle, and utilizes the snowslide that motion caused of charged particle in electric field to amplify phenomenon is amplified mode as the signal intrinsic respiratory capacity pick off.This transducer sensitivity height, the signal to noise ratio height does not need to contact human body, and safety, stability are high, can be controlled at according to the application scenario running voltage and severally lie prostrate tens volts, and sensing unit core energy consumption is less than 10
-5The wattage magnitude, simple in structure, be suitable for volume production, be easy to array and low cost of manufacture.Can be used for fields such as medical treatment, mental analysis.Key property of the present invention also is, under the normal condition that does not have human breathing to occur, institute's making alive is much smaller than air breakdown voltage between the pick off anodic-cathodic, therefore air is in state of insulation, the pick off external circuit is owing to be in off state, therefore theoretical energy consumption is zero, and actual consumption can be less than 10
-11The wattage magnitude, and when human breathing occurs, just can export transducing signal in its work response range (1 centimetre to 50 centimetres), so this pick off also is applicable to some automatons and security fields.
Description of drawings
Fig. 1 is the two-dimensional structure sketch of a specific embodiment of the present invention;
Fig. 2 is the pick off that the do not use monodimension nanometer material pulse signal curve of output when detecting certain tested person's first breathing in normal living environment;
Fig. 3 is the two-dimensional structure sketch of a kind of structure of the present invention;
Pulse signal curve of output when Fig. 4 is to use the pick off of monodimension nanometer material to detect certain tested person's first breathing in normal living environment.
The specific embodiment
As Fig. 1, shown in Figure 3, the present invention includes: substrate 1, microelectrode or its array layer 6, microelectrode or its array layer 6 are arranged on the substrate, and in microelectrode or its array layer 6, negative and positive the two poles of the earth of microelectrode or its array are isolated mutually by the airspace.
Described microelectrode or its array layer 6, its composition are monolayer or multiwalled metal or alloy thin film, are the pectination cross array structures that a kind of little beam of number of metal that is positioned on the substrate 1 forms.
Described microelectrode array layer 6 comprises anode array 5 and cathode array 3, and there is air at the interval that all has between the every pair of adjacent electrode bar at interval.
Described microelectrode or its array 6 are for metal microelectrode or its array layer 2 or be metal microelectrode or its array layer 2 of surface coverage monodimension nanometer material layer 4.
Described monodimension nanometer material layer 4, it is positioned at the some or all of surface of anode array 5 and cathode array 3 electrode strips.
Described substrate 1 is dielectric substrate.
As shown in Figure 1, the present invention includes: substrate 1, microelectrode or its array layer 6, described microelectrode or its array layer 6 are metal microelectrode or its array layer 2, are arranged on the substrate 1.In metal microelectrode or its array layer 2, metal microelectrode or its array are isolated mutually by the airspace.
The surface of substrate 1 has high insulating property, and it can be a glass, also can be the silicon chip that the upper strata has insulating barrier, and insulating layer material can be silicon dioxide, silicon nitride, also can be other dielectric substrate.
As shown in Figure 3, the present invention includes: substrate 1, microelectrode or its array layer 6, described microelectrode or its array layer 6 are metal microelectrode or its array layer 2 of surface coverage monodimension nanometer material layer 4, metal microelectrode or its array layer 2 are arranged on the substrate 1, in microelectrode or its array layer 6, metal microelectrode or its array are isolated mutually by the airspace.
When work, anode array 5 links to each other with negative pole with positive source respectively with cathode array 3, thereby make and have potential drop between the two poles of the earth, and then in per two unitary gaps of anode and cathode and each unitary adjacent domain form electrostatic field, when this electric field intensity during less than the disruptive field intensity of air, sensor circuit is in off state; (nasal respiration is about 1-30 centimetre when the charged particle in the human breath arrives within the microelectrode array response range by modes such as air motion and diffusion motions; Mouth breathing is about 1-60 centimetre), positively charged and particle negative charge " is caught " by the highfield of cathode array 3 and anode array 5 adjacent domains respectively and to drift electrode, is formed output current signal.When monodimension nanometer material layer 4 is capped on metal microelectrode or its array layer 2 surfaces, because the effect of the big electric field enhancer of monodimension nanometer material layer 4, under identical voltage, the electric field intensity of its adjacent domain strengthens greatly, therefore make charging particle movement speed up, electric current density is strengthened, thereby can improve signal output intensity.On the other hand, the drift of charged particle also can produce processes such as ionization by collision in electric field, thereby form avalanche gain and then improve signal output intensity, and the enhancing of electric field intensity can improve the degree of gain, so the use of monodimension nanometer material layer 4 is beneficial to the raising signal intensity.
Fig. 2 and Fig. 4 represent that respectively the device shown in Figure 1 and the use monodimension nanometer material layer 4 that do not use monodimension nanometer material layer 4 to cover cover under two kinds of situations of devices shown in Figure 3, the corresponding signal output that pick off is breathed the measured, employed monodimension nanometer material is a multi-walled carbon nano-tubes, about 35 microns of the even electrode spacing of anodic-cathodic array, the working environment of device is the air that ambient air is depressed, humidity is about 80%, and temperature is about 18 ℃.Wherein, the sensor distance measured nostril of not using monodimension nanometer material layer 4 towards distance be 2 centimetres, running voltage provides for 50 volts of dc sources, and the sensor distance measured nostril of using monodimension nanometer material layer 4 towards distance be 15 centimetres, running voltage provides for 10 volts of dc sources.
By Fig. 2, Fig. 4 as seen, two kinds of pick offs all can react the slight change of multidate informations such as measured's respiratory intensity and frequency sensitively, and its average energy consumption is all 10
-5The wattage magnitude, but use the pick off of monodimension nanometer material layer 4 can obtain stronger signal output in the distance farther place, therefore have more performance.Do not use the pick off of monodimension nanometer material layer 4 that certain price advantage is then arranged.
Claims (6)
1, a kind of mini-sensor for human breathing, comprise: substrate (1), microelectrode or its array layer (6), it is characterized in that, microelectrode or its array layer (6) are arranged on the substrate, in microelectrode or its array layer (6), negative and positive the two poles of the earth of microelectrode or its array are isolated mutually by the airspace, and negative and positive the two poles of the earth of pick off link to each other with negative pole with positive source respectively, there is potential drop between the two poles of the earth thereby make, and then forms electrostatic field.
2, mini-sensor for human breathing according to claim 1, it is characterized in that, described microelectrode or its array layer (6), its composition is monolayer or multiwalled metal or alloy thin film, and described microelectrode or its array layer (6) are the pectination cross array structures that a kind of little beam of number of metal that is positioned on the substrate (1) forms.
According to claim 1 or 2 described mini-sensor for human breathing, it is characterized in that 3, described microelectrode array layer (6) comprises anode array (5) and cathode array (3), there is air at the interval that all has between the every pair of adjacent electrode bar at interval.
4, according to claim 1 or 2 described mini-sensor for human breathing, it is characterized in that, described microelectrode or its array (6) are for metal microelectrode or its array layer (2) or be metal microelectrode or its array layer (2) of surface coverage monodimension nanometer material layer (4).
5, mini-sensor for human breathing according to claim 3 is characterized in that, described monodimension nanometer material layer (4), and it is positioned at the some or all of surface of anode array (5) and cathode array (3) electrode strip.
6, mini-sensor for human breathing according to claim 1 is characterized in that, described substrate (1) is dielectric substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101122172A CN100493452C (en) | 2005-12-29 | 2005-12-29 | Mini-sensor for human breathing |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101122172A CN100493452C (en) | 2005-12-29 | 2005-12-29 | Mini-sensor for human breathing |
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| CN1792326A CN1792326A (en) | 2006-06-28 |
| CN100493452C true CN100493452C (en) | 2009-06-03 |
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| CNB2005101122172A Expired - Fee Related CN100493452C (en) | 2005-12-29 | 2005-12-29 | Mini-sensor for human breathing |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106770539B (en) * | 2016-11-18 | 2019-04-23 | 盐城工学院 | The manufacturing method of gas sensor based on carbon nano tube growth technology |
| CN108128750B (en) * | 2017-12-14 | 2020-12-11 | 上海交通大学 | Manufacturing method of ionization type sensor |
| CN113397483B (en) * | 2021-05-20 | 2022-07-12 | 上海交通大学 | Flexible respiration sensor and preparation method thereof |
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