New! View global litigation for patent families

CN100478734C - Electrowetting cell and method of manufacturing an electrowetting cell - Google Patents

Electrowetting cell and method of manufacturing an electrowetting cell Download PDF

Info

Publication number
CN100478734C
CN100478734C CN 200580014589 CN200580014589A CN100478734C CN 100478734 C CN100478734 C CN 100478734C CN 200580014589 CN200580014589 CN 200580014589 CN 200580014589 A CN200580014589 A CN 200580014589A CN 100478734 C CN100478734 C CN 100478734C
Authority
CN
Grant status
Grant
Patent type
Prior art keywords
electrowetting
cell
method
manufacturing
electrowetting cell
Prior art date
Application number
CN 200580014589
Other languages
Chinese (zh)
Other versions
CN1973236A (en )
Inventor
J·W·维坎普
Original Assignee
皇家飞利浦电子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Abstract

电湿单元(15)包括外壁(90)和内壁(80),所述外壁(90)提供有在内壁(80)的相对的两个面上延伸的扩展部分(85,86)。 Electrical dehumidifying unit (15) comprises an outer wall (90) and the inner wall (80), the outer wall (90) is provided with an inner wall (80) opposite the extension (85, 86) extending on both faces. 单元还提供有用于体积膨胀的膜片(45),以及通过电镀层(95)被密封。 Unit is further provided with a diaphragm (45) of the volume expansion, and is sealed by the plating layer (95).

Description

电湿单元和制造电湿单元的方法 Electrical dehumidifying unit and method of manufacturing an electrical dehumidifying unit

技术领域 FIELD

本发明涉及电湿单元,它包括配备有基片和至少一个側壁的本体部分,该基片和側壁合在一起规定了包含电湿流体的腔体,以及还包括被固定在本体部分的至少一个末端部分。 The present invention relates to electrical dehumidifying unit, which comprises a substrate and provided with at least one side wall of the body portion, the substrate and the side wall defines a cavity together comprising electrowetting fluid, and further comprising at least a portion is fixed to the body end portion.

本发明还涉及制造包括配备有基片和側壁的本体部分的电湿单元的方法,该基片和側壁合在一起规定了包含第一和笫二电湿流体的腔体。 The present invention further relates to a method for producing an electrical comprising a dehumidifying unit provided with a body portion and a side wall of the substrate, the substrate and the side wall together defines a first cavity and a sleeping mat comprising two electrowetting fluid.

背景技术 Background technique

电湿单元是一个在其中光被两种不可互混的流体之间的弯月形液面折射的单元.两种流体中的一种流体是电绝缘的以及另一种流体是 Electrically dehumidifying unit is a unit in which the meniscus between the two fluids the light is refracted not be mixed. A two fluids is electrically insulating and the other fluid is

导电的。 Conductive. 弯月形液面的形状在两个电极之间的电压的影响下是可变的, 其中一个电极被连接到导电流体以及另一个电极被连接到本体的表面.这样的单元是已知的,它例如可被应用作透镜或显示器.在应用单元的情形下,存在着穿过本体部分的光路径, Meniscus shape under the influence of the voltage between the two electrodes is variable, wherein one electrode is connected to the conductive fluid and the other electrode is connected to the surface of the body. Such units are known, for example it may be applied as a lens or a display. in the case of the application unit, there is an optical path through the body portion,

这样的电湿单元例如是从WO-A 03/069380获知的。 Such electrical dehumidifying unit, for example, from WO-A 03/069380 learned. 这项专利申请公开了一种透镜,其中至少一个側壁的内表面由憎水性流体接触层所覆盖。 This patent application discloses a lens, wherein the at least one inner surface of the sidewall is covered by a hydrophobic fluid contact layer. 当没有施加电压时,流体接触层相对于电绝缘流体的湿润度不同于流体接触层相对于导电流体的湿润度,在施加的电压的影响下湿润度发生改变。 When no voltage is applied, the fluid contact layer with respect to wettability of the electrically insulating fluid different from the fluid contact layer with respect to the conductive fluid wettability, wettability is changed under the influence of applied voltage. 这导致在流体接触层与流体之间的接触线上弯月形液面的接触角的改变,由此弯月形液面的形状被调节.因此,弯月形液面的形状取决于所施加的电压, This results in a change in contact angle of the meniscus at the line of contact between the fluid contact layer of the fluid, whereby the shape of the meniscus is adjusted. Thus, the shape of the meniscus depends on the applied voltage,

由于电湿单元具有光学特性并包括流体,为达到单元的完全填充和在闭合单元后没有流体泄漏到单元外面而采取的适当的搮作是第一重要的,在现有技术中公开的单元没有给出关于如何达到这样的完全填充和阻止流体泄漏的解决方案. Since the electrical and optical characteristics having a dehumidifying unit comprises a fluid, completely filling unit and a closing unit reaches no fluid leaks to the outside of the unit taken as appropriate Li is the first important unit disclosed in the prior art did not solutions are given on how to achieve this completely filled and prevent fluid leakage.

发明内容 SUMMARY

所以,本发明的第一个目的是提供在开头段落中提到的那种电湿单元,它可以完全地被填充和在单元闭合后能防止流体泄漏. Therefore, a first object of the present invention is to provide a kind of electric dehumidifying unit mentioned in the opening paragraph, which can be completely filled and the closure unit in the fluid leakage can be prevented.

本发明的第二个目的是提供在开头段落中提到的那种方法,它可以以工业上可行的方式达到完全地填充. A second object of the present invention to provide a method of the kind mentioned in the opening paragraph, which may be a commercially viable way to achieve completely filled.

第一目的是这样达到的,其中本体部分的至少一个側壁包括内壁和外壁,该末端部分的一部分是内壁的一部分,从而固定了末端部分和本体部分,以及该外壁配置有在内壁的第一面和在第一面的对面的第二面上延伸的扩展部分. The first object is achieved, wherein the at least one side wall of the body portion comprises inner and outer walls, a portion of the end portion is part of the inner wall, thereby securing the tip portion and a body portion, and an outer wall with a first surface of the inner wall and the extension part on the second side opposite the first side extends.

第二目的是在一种具有内壁和外壁的单元中达到的,所述外壁具有在内壁的两个相对的面上延伸的第一和笫二扩展部分,该方法包括 In a second object having inner and outer walls of the unit reaches the outer wall has two opposing first and Zi two extension portion extending inner wall surface, the method comprising

以下步骤; The following steps;

-提供外壁和基片,形成腔体; -用第一和第二电湿流体填充腔体; - providing a substrate and an outer wall, a cavity is formed; - with a first and second electrical wet fluid filling the cavity;

-提供腔体的末端部分,以使得它在离基片的一个所需距离处被浸入到至少一个流体中,由部分基片和末端部分以及任选地一个中间村 - providing a tip portion of the cavity, such that it is at a desired distance from a substrate is immersed in the at least one fluid, a portion of the substrate and the tip portion and optionally an intermediate village

垫形成内壁;以及 Mat forming the inner wall; and

-把末端部分固定到本体部分,以使得外壁的第一扩展部分位于该末端部分的顶部。 - the tip portion secured to the body portion, such that the first extension portion of the outer wall at the top end portion.

本发明的解决方案是一种双壁单元。 Solutions of the present invention is a double-walled cell. 外壁提供稳定性和足够的密封,而内壁由被相继地组装的組成元件所构成.由于相继的組装和双壁,电湿流体可在该末端部分之前提供,结果,末端部分可被浸入到流体中,在实践中该流体具有最低密度,部分流体将流到末端部分的上面,但无论如何保持在外壁内.这种浸没导致所需要的完全填充。 Outer walls provide stability and an adequate seal, the inner wall is constituted by constituent elements successively assembled Since sequential assembly and a double-walled, electrically wet fluid may be provided prior to the end portion, a result, the end portion may be immersed fluid, in practice, the fluid having the lowest density, the portion of the fluid flow to the upper end portion, but in any case kept within the outer wall. this leads to completely fill the immersion required. 于是达到了完全的密封,因为外壁存在于内壁的对面.这样,封装的外壁只包括两种主要的材料,它们以良好的方式互相固定在一起.适当的組合是金属和玻璃. Thus to achieve a complete sealing, because the inner wall of the outer wall opposite present. As such, the outer wall of the package includes only two main material, they are fixed to each other in a good manner. Suitable combination of metal and glass.

基片可以是外壁的一部分,但优选地是一个分开的部分,它一部分是内壁的一部分.在基片的部分与末端部分之间可以存在衬垫.这是合适的但不是必须的.这样的衬垫的优点在于,它可以提供以任何所需的表面涂层,诸如上面提到的流体接触层.有利地,衬垫在它的底側提供缝隙。 The substrate may be a part of the outer wall, but is preferably a separate part, which is part of the inner wall portion may be present between the spacer portion and the end portion of the substrate. It is suitable, but not necessary. Such pad advantage that it can be provided in any desired surface coating, such as a fluid contact layer mentioned above. advantageously, the liner providing a gap on its underside. 这允许减小单元的高度. This allows reduced height of the unit.

对于在末端部分的顶部提供的第一扩展部分可以设想几个实施例。 For the first extension portion at the top end portion provided several embodiments contemplated. 例如它可以是外壁的柔性的扩展部分.它替换地可以是通过沉积技术,可能是藉助于工具作用压力的沉积技术而设里的金属层. For example, it may be a flexible outer wall extension. It may alternatively be by deposition techniques, deposition techniques may be by means of the pressure tools being provided in the metal layer.

在优选实施例中,第一扩展部分是夹持体,它作为一个分开的部件被组装到末端部分的顶部,并且它被同时或相继连接到外壁.这提供了有效的组装方法.可靠的连接可以以机械的和化学的这两种措施来实现,诸如锁定特性、附加的夹持、粘接层和密封层.有利地,可使用在所述表面上生长的一个联合和保护层,生长层以化学方法结合在表面。 In a preferred embodiment, the first extension portion is a clamping body, which is assembled to the top end portion as a separate member, and it is connected to the outer wall simultaneously or sequentially. This provides an efficient method of assembly. Reliable connection may be both mechanical and chemical measures be implemented, such as a locking feature, additional clamping, the adhesive layer and the sealing layer. advantageously, a joint may be used and the protective layer on the surface of the grown layer grown chemically bonded to a surface. 它具有相同的热膨胀系数,并且它对于在温度的影响下的非弹性和不可逆膨胀是不敏感的,生长层可以生长到所需厚度由此使缝隙和高度差别得到平滑。 It has the same thermal expansion coefficient, and it is for non-elastic under the influence of temperature and irreversible expansion is not sensitive, the growth layer may be grown to a desired thickness of the slit and thereby obtain a smooth height difference. 而且,这样的生长层是相当惰性的,特别是如果有氧化物存在(它可以是自然氣化物),最后,生长层对于由任何电湿流体的冲击是不敏感的,并且没有引起分子扩散的开孔或多孔结构,通过这样的密封,特别是连同玻璃的基片和玻璃的末端部分一起,最终得到的单元是紧密地气密的. Moreover, such growth layer is relatively inert, particularly if the presence of an oxide (which may be natural vapor), and finally, the growth layer against an impact from any wet fluid is electrically insensitive to molecular diffusion and without causing It means open or porous structure, by such a sealing, in particular together with the end portion of the glass substrate and the glass together, resulting in a hermetically tightly.

特别适合的技术是电镀.这种技术具有优点:它可以通过把整个 Particularly suitable electroplating technique This technique has advantages: it can be whole

单元浸入镀槽而在整块级别上施加,而且这样的整个单元的浸入具有 Immersion plating tank unit at the block level is applied, and the entire unit is dipped having such

优点:生长层在整个外壁上和内壁的任一面的扩展部分上延伸.由此 Advantages: any growth layer across an outer and inner side wall extension portion extending therefrom.

外壁的夹持特性被加强. Holding properties of the outer wall is reinforced.

在再一个实施例中,与至少一个电湿流体接触的第一和笫二电极 The first and second electrodes Zi In a further embodiment, the at least one electrical contact with a wet fluid

被限定在腔体的相对两个面的基片和末端部分上,在电湿单元中需要 Is defined on the substrate surface and two opposing end portions of the cavity, it is necessary electrowetting cell

至少两个电极,以便施加所需要的电压来设定弯月形液面的形状.这 At least two electrodes so as to apply the voltage required to set the shape of the meniscus. It

样的电极可以在弯月形液面的相对的两側施加到内壁上.然而,在本 Like electrodes may be applied on opposite sides of the meniscus to the inner wall. However, in the present

实施例中,电极存在于末端部分和在基片上。 Embodiment, the electrode present at the end portion and on the substrate. 这实际上允许使用金属 This fact allows the use of a metal

封装,而不必对一个电极有绝緣的连接。 Package, without having to have a connection to insulated electrodes.

优选地,基片提供有小孔,在它的一端存在所述电极.电极既可 Preferably, the substrate is provided with a hole, the presence of the electrode at one end electrodes can

以出现在面向弯月形液面的基片的表面上也可以在背离弯月形液面的 To appear on the surface of the meniscus facing the substrate may be facing away from the meniscus

相反的表面上。 Opposite to the upper surface. 后者的改型是优选的,因为它在这里不需要用金属填 The latter variant is preferred because it is not needed here filled with a metal

充所述小孔:流体会填充小孔,而且,这种电极的制造可以与被使用 Filling said apertures: fluid will fill the pores, and the manufacture of this electrode may be used

于把外壁固定在基片上的金属带条的提供合在一起,从而提供充分的密封。 To the outer wall of the metal strip is provided on a substrate fixed together so as to provide an adequate seal.

优选地,封装提供有一个体积膨胀部件.这样的膨胀部件例如从JP-A 2002/162506获知的.这个已知的封装包括特定的腔室,它出现在基片旁边,并用柔软的盖与单元分隔开.在单元中压力增加时,柔软200580014589.X Preferably, the package is provided with a volume expansion member. Such expandable member for example, from JP-A 2002/162506 is known. This known package comprises a special chamber, it appears next to the substrate, and with a soft cover and the unit spaced apart. when increasing the pressure in the cell, soft 200580014589.X

说明书第4/10页 Instructions Page 4/10

盖可以变形或甚至伸出,以便形成弯曲的表面而延伸到所迷腔室.本发明提供把这样的腔室放置在内壁与外壁之间的可能性. The cover may be deformed or even extended to form a curved surface extending into the fan chamber. The present invention provides the possibility of such a chamber is placed between the inner and outer walls.

体积膨胀部件的一个更优选的实施例是作为末端部分的一部分的柔软的膜片.这样,末端部分较大的部分(即,在光的路径上出现的部分)被移动.因此,可以补偿很大的体积增加.柔软的膜片特别地是环形的。 A more preferred embodiment the volume of the expandable member as the end portion of the flexible portion of the diaphragm. Thus, some of the larger end portion (i.e., portion occurring on the path of light) is moved. Accordingly, it is possible to compensate for large volume increase. particularly soft diaphragm is annular. 末端部分因此被划分成外边缘、膜片、和内部部分.末端部分的标准位置在这里不需要是平的.正如将参照附困说明的,特别地,外边缘在夹持体的压力下被向下推.这更加导致加压的封装.虽然不是优选的,但不排除末端部分的外边缘部分包括与内部部分不同的另外的材料, Thus the end portion is divided into an outer edge of the diaphragm, and the inner portion. Normal position where the end portion need not be flat. As will be described in reference to the accompanying difficulties, in particular, the outer edge of the clamping body is at a pressure of push down. this results in a more pressurized package Further Although not preferred material, but do not exclude the outer edge portion of the inner end portion comprises a partially different,

膜片较优选地由金属制成.这样的材料有效地能耐受流体.它具有附加的好处,即膜片可被用作为单元的一个电极.如果在夹持体与外壁之间的连接是通过电镀等等提供的,则膜片也将设置有金属层. 一方面具有足够稳定度和另一方面具有足够的乘顺度的膜片层的适当 More preferably a diaphragm made of metal. Such a material can withstand the fluid effectively. It has the additional advantage that can be used as a membrane electrode unit. If the connection between the clamping body and the outer wall are provided by plating or the like, the membrane will be provided with a metal layer on the one hand and on the other hand has sufficient stability membrane layer having a sufficient degree by appropriately cis

的厚度约为5-30微米,以及更优选地在15与25微米之间.这也取决于膜片的材料,为了限制膜片的厚度,它可以设置有绝缘涂层。 Thickness of about 5-30 microns, and more preferably, which also depends on the material of the membrane between 15 and 25 microns, in order to limit the thickness of the diaphragm, it may be provided with an insulating coating.

基片和末端部分优选地是玻璃板.玻璃对于电湿流体是情性的, 它可以用诸如粉末喷射(blasting)那样的技术来处理,并且金属层可以附着到其上。 And the tip portion of the substrate is preferably glass. Glass fluid is a wet feeling to the electrical properties, which can be used, such as a powder injector (DEMOLITION) as processing techniques and the metal layer may be attached thereto. 如果需要, 一个或两个玻璃板可以设置有涂覆和表面层,包括IR涂復、UV-吸收涂褒、抗反射涂復,并且还有透镜.这样的透镜可以用复制技术由表面层制成.对准特性可被包括在这样的复制制成的表面层中,这提供了单元与另外的透镜在底部和顶部面上的正确的对准。 If desired, one or both may be provided with a glass plate and a surface coating layer comprising an IR coating, a UV-absorbing coating praise, the anti-reflective coating, and also the lens. Such a lens can be manufactured by replication surface layer to the alignment characteristics may be included in a surface layer of such a replication, which provides proper alignment of the lens unit and the additional bottom and top surfaces.

如果本发明的单元被用作为透镜,则它与另外的透镜适当地组装 If the unit of the present invention is used as a lens, it is suitably a lens assembly and further

以得到所需的路径.不排除两个电湿透镜是组件的部件;亊实上,这提供变焦特性.然而,替换实施例是一个堆叠的电湿透镜.这种堆叠电湿透镜可以通过本发明的方法适当地制成. . To give the desired two electrical paths do not preclude the mirrors are soaked member assembly; Shi on a solid, which provides a zoom characteristic, however, is an alternative embodiment of the stacked electric power such a stack wet wet microscope microscopy. may be made by the process of the present invention suitably it is.

在堆叠单元制造的第一实施例中,基片出现在堆叠单元结构的中部。 In a first embodiment of a stacked cell manufactured, the substrate appears in the middle of a stacked cell structure. 然后在基片的一倒进行第一组装和填充,以及在结束笫一面的组装和填充后,在相对的第二面上进行第二组装和填充.优选地,两个相对的末端部分都具有柔软的膜片以补偿体积膨胀.在这种具有扩展部分的结构中提供外壁以支撑在堆叠单元中间的基片。 Then poured in a substrate and filling a first assembly, and side sleeping mat after assembly and filled, assembled and filled in a second opposite second face. Preferably, two opposed end portions having flexible membrane to expand to compensate for volume providing peripheral wall structure having an extended portion of the support in this order in the middle of the base sheet stacking unit. 在堆叠单元制造的笫二实施例中,两个单元一个接一个地在外壁内被提供.第一单元的末端部分可以是第二单元的基片,但这不是必须的.最简单地,提供衬垫以代替夹持体.在这个可以通过电镀而很好地连接到外壁的衬垫上,相继提供第二单元的另一个基片和另外的元件.这样的结构还允许使电极位于基片中而各末端部分不需要互相耦合。 In the second embodiment Zi manufactured stacking unit, two units one by one is provided in the outer wall. The first end portion of the substrate unit may be a second unit, this is not necessary. Most simply, provides liner in place of the holding body. on this may well be connected to the outer wall of the liner by plating, sequentially provides the other units of the second substrate and the further element. such a structure also allows the substrate electrode is located and each of the end portions need not coupled to each other.

代替堆叠几个电湿单元,外壁可被用于一个电湿单元和另外的光学和或非光学元件的堆叠.除了分开的透镜和滤色镜以外,可以设想把图像传感器也这样来组装,利用任何衬垫等使其与电湿透镜分隔开所需距离.与困像传感器的这种集成可最有效地实现,其中连接垫被设置在与光学工作面相反的表面上.替换地,图像传感器可被组装在一个介入基片的顶部,它设置有通孔以便接触到与光学工作面相反的面,介入基片的使用本身在半导体封装的技术上是已知的。 Instead of stacking several electrically dehumidifying unit, and the outer wall it may be used for further stacking the optical unit and a wet electrical or optical elements. In addition to the separate filters and lens, an image sensor is also contemplated to assemble such a way, using any liner reacted with other wet pad electrically microscope spaced a desired distance. this integration may be realized most effectively trapped image sensor, wherein the connection pad is provided on the face opposite the optical surface. Alternatively, the image sensor It can be assembled on top of a substrate intervening, which is provided with a through hole so as to contact to the opposite face of the optical surface, using the substrate itself involved in the art of the semiconductor package are known.

本发明的方法的优点在于,它可以在晶片级别或整块级别上实现. 外壁可以是诸如具有小孔的印刷电路板的平板的一部分.它只有在填充和封装步骤后才被分割成各个单独的封装.然而,即使单个地实行单元的制造,电镀步稞可以在镀槽中进行以允许同时电镀多个装置. Advantage of the process of the present invention is that it can achieve at the wafer level or block level. Part of the outer wall may be a flat plate such as a printed circuit board aperture. It is only after the filling step, and is divided into individual packages package. However, even a single unit to carry out the manufacture, wheat plating step plating may be performed to allow simultaneous multiple devices in the plating bath.

本发明还涉及在开头段落中提到的那种制造方法和单元,其中提供严密的密封.这是这样的达到的,即末端部分用金属层固定在本体部分上,该金属层同时施加到末端部分和接合部分的表面.如上所述, 施加上金属层将导致气密的密封.如果金属层或其一部分是金属层的结构延伸到单元的两面,就可实现夹持'优选的施加方法是电镀,但不排除其它方法,诸如金属凝胶溶液沉积、溅射或化学汽相沉积、或这样的沉积方法的组合,金属层被合适地附着在末端部分的表面上和在本体部分的表面上的金属部件上. The present invention further relates to a method and means for producing the kind mentioned in the opening paragraph, which provides a tight seal. This is achieved, i.e., the end portion of the metal layer is secured to the body portion, while the metal layer is applied to the end and the engaging portion of the surface portion as described above, is applied on the metal layer will cause an airtight seal. If the metal layer is a structure or a portion thereof extending to both surfaces of a metal layer unit, the clamping can be achieved 'preferred method for application is plating, but does not exclude other methods, such as metal-gel solution deposition, sputtering, or chemical vapor deposition, or a combination of such a deposition method, a metal layer is suitably attached to the upper surface of the upper end portion and the surface of the body portion metal member.

该单元可被用作为在照相机、光学记录设备或任何其它光学设备中使用的透镜.该单元可以与另外的透镜一起组装,以便按需要得到光学路径,或甚至得到变焦透镜'替换地,该单元被用作为显示器, 在这种情形下,只需要晶片或末端部分是光学透明的。 The unit may be. This unit can be assembled with the lens as used in the camera, the optical recording device, or any other optical devices with additional lenses together, in order to obtain the optical path as required, or even to obtain a zoom lens' Alternatively, the unit It is used as a display, in this case, only the end portion of the wafer or optically transparent. 单元还可被用作为传感器。 It may also be used as a sensor unit.

附图说明参照附困将进一步阐述本发明的单元和方法的这些和其它方面, BRIEF DESCRIPTION attachment trapped further illustrate these and other aspects of the methods and means of the present invention,

其中: among them:

图1以示意性截面圃显示本发明的单元,其中仅仅显示左面部分; 图2-7显示在单元中使用的末端部分的制造中相继各级的示意性 Figure 1 shows the unit according to the present invention in a schematic sectional nursery, where only the left portion of the display; Figure 2-7 shows schematically the end portion of the manufacturing unit used in the successive levels

截面图; Sectional view;

图8-16显示在单元的制造方法中相继各级的示意性截面困,在图上只显示单元的左面部分. FIG 8-16 show a schematic cross-sectional successive levels trapped in the method for producing unit, only the left portion of the display unit in FIG.

图17显示本发明的单元的第二实施例的示意性截面图。 17 shows a schematic cross-sectional view of a second embodiment of the unit according to the invention.

具体实施方式 detailed description

附图是示意的,不是按比例画出的.在不同的图上相同的标号是指相似的部件. The drawings are schematic and not drawn to scale. In the different figures same reference numerals refer to like parts.

图1显示按照本发明的电湿单元15的实施例.在这个图l上,仅仅显示局部截面图,即,仅仅是单元15的左面部分.然而,单元15 是对称结构的,这样,未显示的右面部分是左面部分的镜像.透镜包括流体腔室,具有第一流体51和第二流体S2,第一和第二流体是不可互混的并通过弯月形液面14互相接触.笫一流体51在本例中是硅油、 烷烃、或另外的适用的电绝緣流体。 1 shows. In this figure L, merely an embodiment of an electrowetting element of the present invention 15 is a partial sectional view, i.e., only the left portion of the cell 15. However, means 15 is a symmetrical structure, so that is not shown the right part is a mirror image of the left part of lens includes a fluid chamber having a first fluid 51 and second fluid S2, the first and second fluids being non-miscible and 14 contact with each other through the meniscus. Zi 51 the fluid is a silicone oil, an alkane, or another suitable electrically insulating fluid in the present example. 第二流体52在本例中是包含盐溶液的水或其他合适的导电流体.腔室的各个面具有电绝缘层8和流体接触层IO,例如聚对亚苯基二甲基, The second fluid 52 in the present embodiment is water or other suitable conductive fluid comprises a saline solution. Faces each chamber has an electrically insulating layer 8 and the IO fluid contact layer, such as poly-xylylene,

按照这个实施例,本体部分17包括内壁80和外壁90,以及—在单元15的第二面112上—第二盖板6。 According to this embodiment, the body portion 17 includes an inner wall 80 and outer wall 90, and - on the second face 112 of the unit 15 - second cover 6. 内壁80包括电绝缘部件8,上面涂覆着流体接触层IO.内壁80还包括末端部分4的一部分,这个末端部分(或第一盖板)4包括环形玻璃部件81,它经由可扩展的接合件45被连接到内側部分.在优选实施例中,这个环形玻璃部件81和末端部分4的内側部分用单个玻璃板制成,将参照图2到7作说明.内壁80还包括笫二盖板6的末端61.这个第二盖板6提供有通孔62、电极2和金属化层63.在替换实施例中,板6可以用类似于和等同于单元15的第一面111的结构所替代,即,环形玻璃部件、可扩展的接合件和盖板, 80 comprises an electrically insulating inner wall member 8, the above coating fluid contact layer IO. 80 further includes an inner wall portion of the end portion 4, the end portion (or first cover) 4 comprises an annular glass member 81, which engages via a Scalable 45 is connected to the inside portion of the embodiment, the glass member 81 and the annular inner end portion 4 is made of a single glass plate in the preferred embodiment, 2-7 as will be described with reference to FIG. 80 further includes an inner wall plate Zi two 61. the second end 6 of the cover plate 6 is provided with a through hole 62, the metal layer 2 and the electrode 63. in an alternative embodiment, the plate 6 can be used similar structures and equivalent to the first surface 111 of the unit 15 Alternatively, i.e., an annular glass member, the engaging member may be extended and a cover plate,

内壁80的这三个部分—环形玻璃部件81、(也是环形的)绝蟓部件8 和末端61—被夹持在外壁90的凸起85与环形闭合部件86之间。 An inner wall 80 of three parts - an annular glass member 81 (also annular) insulating member 8 and the end 61- Drury sandwiched outer wall 90 and an annular projection 85 between the closure member 86. 环形闭合部件86在这里是金属片,但它可以是具有导电表面的任何物体。 An annular closure member 86 is here a metal plate, but it may be any object having a conductive surface. 外壁90包括塑料或其它材料的内芯92,它具有金属化表面91.这个金属化表面91还包闺笫二盖板6的金属化层63.这样,提供了机械上稳定的连接. The outer wall 90 comprises an inner core of plastic or other material 92, having a metallized surface 91. The metallized surface 91 Gui Zi two further metallization layer 63.6 cover thus provides a mechanically stable connection.

内壁80和外壁90互相固定并固定在接合件45和末端部分4,以使得密封层95包围它.密封层95由适当的材料制成.可以使用本身作为保护涂覆层已知的橡胶、环氣树脂等的聚合物涂覆.然而,优选地,密封层95包含金属.这允许提供气密的封装,使空气、水或流体不易扩散。 An inner wall 80 and outer wall 90 fixed to each other and fixed to the engagement member 45 and the tip portion 4, the sealing layer 95 so that it surrounds the seal layer 95 is made of a suitable material may be used as a protective coating itself known rubber ring gas polymer-coated resin or the like. preferably, however, the sealing layer 95 comprises a metal. this allows providing an airtight package, air, water, or fluid hardly diffused. 提供这种金属密封层95的特别优选的方法是电镀,这个方法可以例如在镀槽中在三维表面上实现, Such particularly preferred to provide a metal sealing layer 95 is a plating method, this method can be implemented, for example on a three-dimensional surface in the plating bath,

图2到7以示意性截面困显示在基片200的制造方法中相继的步骤,该基片具有被用作为可膨胀的接合件46的集成的膜片210。 2-7 show a schematic cross-sectional trapped FIG successive steps in the manufacturing method of the substrate 200, the substrate having an integrated diaphragm 46 is used as the engaging member 210 can be expandable. 图2 显示基片200,具有第一表面201和相对的笫二表面202.基片200在本例中是具有适当的厚度(例如约0.1mm)的玻璃板. Figure 2 shows a substrate 200 having a first surface 201 and an opposite second surface 202. Zi substrate 200 in the present embodiment is a glass plate having a suitable thickness (e.g., about 0.1mm) of.

图3显示在两个表面201, 202上施加上光致抗蚀刑材料205后的基片200。 Figure 3 shows the two surfaces 201, resist coating material after sentence 205 202 on the substrate 200 is applied. 光致抗蚀剂材料本身在技术上是已知的。 Photoresist materials themselves are known in the art.

图4显示对光致抗蚀刑材料205制作图案和显影后的基片200.在第一面201上制作闺案导致小孔214.在第二面202上制作图案导致: 还使得光致抗蚀剂材料205的表面215具有三维结构。 Figure 4 shows the photoresist after patterning material 205 sentence and developing the substrate 200. The first surface 201 on the case of making the Inner lead apertures 202 on the second face 214. The patterning results in: that the further light-induced anti corrosion inhibitors surface 215 of material 205 having a three-dimensional structure. 这个表面215 在本例中是波浪的形式.这种表面结构可以通过锻压或另一个种机械变形的方式来提供。 In the present embodiment the surface 215 is in the form of waves. Such surface structures can be provided by forging or other mechanical deformation of ways. 替换地,可使用先进的光刻技术.在另一个实施例中,使用模压技术来提供具有想要的形状的光致抗蚀刑层205,正如将会看到的,在这种情形下不需要特定的光致抗蚀剂材料。 Alternatively, using advanced lithography technology. In another embodiment, the use of molding techniques to provide a desired shape of the sentence photoresist layer 205, as will be seen, in this case no It requires specific photoresist material.

图5显示在施加上膜片层225后的基片200,膜片层例如包括具有一定弹性的金属,不过任何其它材料也是适用的,只要它与光致抗蚀剂层205是兼容的。 Figure 5 shows the application of the membrane layer 225 on the substrate 200, for example, comprise a metal membrane layer having a certain elasticity, but also any other suitable material, as long as it is a photo-resist layer 205 is compatible. 许多金属原来是具有足够的柔软性,如果以薄层形式应用的话。 Many metals originally having sufficient flexibility, if applied in a thin layer of it. 例子包括金、铜、镍、铝以及它们的适当的合金.金属层可以用适当的沉积技术(诸如溅射、化学汽相沉积和湿化学技术) 而被施加上。 Examples include gold, copper, nickel, aluminum, and alloys thereof suitable metal layer may be deposited by a suitable technique (such as sputtering, chemical vapor deposition, and wet chemical techniques) is applied. 在本例中,膜片层225被显示为做成困案的,但这不是必须的。 In the present embodiment, the membrane layer 225 is shown trapped made case, but not necessarily.

图6显示在第一面201上通过有困案的光致抗蚀刑材料205被制作成图案后的基片200.在玻璃板200的情形下,可以有利地应用粉末喷射技术,然而,不排除诸如蚀刻的任何其它技术。 Figure 6 shows a glass plate 200. In the case 200, may be advantageously applied powder jet technology on the first face 201 by photoresist materials trapped criminal case 205 is made to pattern the substrate, however, does not exclusion of any other technique, such as etching.

图7显示在去除光致抗蚀刑材料205后的基片200,和得到具有集成的膜片220的基片200.正如将会看到的,基片200可以在橫向上延伸.膜片220可以具有适当的形状.特别优选地是环形.基片可包括多个膜片,并适合于在另一个步骤中进行晶片级处理,或被分隔开, 这样的分开步槺可以在光致抗蚀剂材料205去除之前施加.虽然这里未示出,但不排除基片包括在它的第一或第二面201, 202上的另外的层。 Figure 7 shows the removal of the photo-resist after the substrate 205 criminal material 200, and the base sheet 220 having an integrated diaphragm 200. As will be appreciated, the substrate 200 may extend in the transverse diaphragm 220 may have a suitable shape. particularly preferably annular. the substrate may comprise a plurality of diaphragms, and adapted to process at wafer level in a further step, or spaced apart, such separation step may be induced anti-light Kang 205 removed prior to application of corrosion inhibitor material. Although not shown here, but do not preclude the substrate 201 includes at its further layer 202 on the first or second surface. 如果半导体基片被用作为基片200,则可以在其上规定半导体元件, 诸如二极管和晶体管或沟槽电容器. If the semiconductor substrate is used as the substrate 200, it may be provided in a semiconductor element thereon, such as a diode or a transistor and trench capacitor.

图8到16显示电湿单元15的制造方法的示意性截面图.困上显示图1的实施例的制造,但在本发明的范围内修改方案和替换例是可能的。 Figures 8 to 16 shows a schematic cross-sectional view of a method of manufacturing an electrical dehumidifying unit 15 manufactured by the embodiment of Figure 1 shows a trapped, but modifications and alternative embodiments are possible within the scope of the present invention.

图8显示组装时的第一步骤。 FIG 8 show a first step in assembling. 这里,玻璃基片6以环形部件90形式提供。 Here, the glass substrate 6 is provided in the form of an annular member 90. 环形部件90用作为外壁,以及提供有导电表面.虽然允许, 但不一定必须全部表面是导电的.部件90提供有扩展部分85。 The annular member 90 serves as an outer wall, and provided with a conductive surface. Although allowed, but not necessarily all of the surface is conductive. Member 90 is provided with extension 85. 它存在于基片6的第一面112上,并与基片6的粘接层63接触.粘接层63 在这里是诸如铜那样的金属.电极2存在在基片6的同一个第一面112 上。 It exists on a first surface of the substrate 1 126 and in contact with the adhesive layer 6 of the substrate 63. The adhesive layer 63 is here a metal, such as copper electrode 2 present in the same first substrate 6 surface 112. 这个电极2覆盖基片6的小孔62。 The electrode substrate 2 to cover the aperture 626. 小孔62可以用导电材料填充, 但在本例中不是这种情形,例如与外壁卯相反,孔径62不是环形的而只局部地被提供。 Apertures 62 may be filled with a conductive material, but in the present embodiment this is not the case, for example with the outer wall d contrast, the aperture 62 is not circular but only partially be provided. 可以使用另外的材料而不用玻璃.在单元不是透镜的情形下,基片不需要是光学透明的。 Glass may be used without additional material in the lens unit is not the case, the substrate need not be optically transparent. 为了保持基片6与外壁固定在一起,可以使用例如粘接层. In order to keep the substrate 6 together with the outer wall, for example, an adhesive layer may be used.

图9显示在组装时第二步骤以后的结果。 Figure 9 shows the results after the second step during the assembly. 这里,基片6和外壁90 互相与金属层91相连.这个金属层91是通过在镀槽中电镀而被适当提供的。 Here, the substrate 6 and the outer wall 90 are connected to each other and the metal layer 91. The metal layer 91 by plating in a plating bath is suitably provided. 金属层91沿外壁90延伸,以及被连接到基片的粘接层63。 The metal layer 91 extends along the outer wall 90, and is connected to the adhesive layer 63 of the substrate. 连接不单存在于基片的笫一面112,而且也存在于倒面115.在这里显示了但在另外的图上没有显示的是:电极2还提供有电镀层。 Zi is connected not only present in one side of the substrate 112, but also in the reverse surface 115. In the shown here but not shown on a separate figure is: electrode 2 is also provided with a plating layer. 电极2 的位置被选择为使得在电极与外壁之间没有形成桥.可在电极2提供绝缘涂层,以避免它加厚。 Position of the electrode 2 is selected to be such that there is no bridge is formed between the electrode and the outer wall may be provided an insulating coating on the electrode 2, to prevent it thickened.

图10显示在导电流体52施加到外壁卯和基片6的第二面113后的结果.在本例中,流体52是盐的水溶液.也可以使用酒精等等作为另外的溶剂.流体延伸到孔径62,由此造成与电极2接触。 Figure 10 shows the results after 6 is applied to the outer wall surface 113 d of the second substrate and the conductive fluid 52. In this embodiment, the fluid 52 is a saline solution may also be used as an additional solvent like alcohol. Extends into the fluid aperture 62, resulting in contact with the electrode 2. 电极2同时用作为单元的外壳. 2 while the electrodes used as a housing unit.

困11显示在提供电绝緣流体51后的结杲.这是一种油例如烷烃或硅油,从它的较低的密度看来,它在导电流体51后被提供.所显示的弯月形液面的形状以及到基片6的第二面113的附着纯粹是示意性的,不一定相应于任何物理效果. 11 shows a junction Gao trapped after providing the electrically insulating fluid 51 which is a silicone oil or an alkane, for example, from its lower density appears, after providing the conductive fluid 51. Meniscus displayed adhering the second surface 113 and the shape of the liquid surface to the substrate 6 is purely schematic and does not necessarily correspond to any physical effect.

图12显示在插入衬垫8后的结果.在这种情形下,这是环形电绝缘部件8,它具有聚对亚苯基二甲基的流体接触层10.衬垫8具有表面9,它可以具有经修改的表面结构或层以用于适当地粘接到外壁卯的电镀层91。 Figure 12 shows the results after insertion of the liner 8. In this case, which is electrically insulated from the annular member 8, having a polyethylene surface 9 having a fluid contact layer 10. xylylene spacer 8, it layer may have a surface structure or modified for suitably adhered to the outer wall of the plating layer 91 d. 这种表面结构或层可以是任何化学类型的,但也可以是机械的,诸如锁定特性。 Such a surface structure or layer may be any type of chemical, but may be mechanical, such as a locking feature. 另外,衬垫8提供有缝咪64.这个缝隙64具有第一个优点:电极2可以在这个衬垫8的下面提供。 Further, the pad 8 is provided with a slit 64. The slit 64 having a microphone A first advantage: electrode 2 may be provided below the pad 8. 因此,电极2 位于光路径的外面,这减小单元的直径。 Thus, the electrodes 2 located outside the optical path, which reduces the diameter of the unit. 缝隙的笫二优点是在导电流体52与电绝缘流体51之间的弯月形液面的角度的修改.结果,单元的最小厚度被减小,衬垫与基片的外边缘61合在一起形成内壁的一部分. Zi two slits advantage is that modifications of the meniscus between the conductive fluid 52 is electrically insulating fluid 51 and the angle. As a result, the minimum thickness of the cell is reduced, the outer edge of gasket 61 together with the substrate forms part of the inner wall.

图13显示在笫六制造步驟以后的单元15.这个步驟牵涉到末端部分4的组装.末端部分4包括内部部分、膜片45和外部部分81。 FIG 13 shows a manufacturing step subsequent undertaking of six unit 15. This step involves assembling the end portion 4. The end portion 4 includes an inner portion and an outer portion 45 of the diaphragm 81. 在末端部分4的第一面Ul提供压力工具70.优选地,在实际组装之前, 末端部分4在它的笫二面114上提供有电绝缘流体的层.这保证在组装期间不形成气泡.末端部分4在组装期间浸在流体51中。 Providing a pressure at the end of the tool 70. Preferably, the first face portion 4 Ul, before the actual assembly, the end portion 4 provided with an electrically insulating fluid layer on its surface 114 two great undertaking. This ensures that air bubbles are not formed during assembly. 4 during the assembly of the end portion immersed in the fluid 51. 结果,多余的流体层55在末端部分的第一面上形成。 As a result, excess fluid layer 55 is formed on a first surface of the end portion. 电绝缘层51能够从第二面114流到末端部分4的第一面111,因为在外部部分81与外壁90之间留有窄的通道. Electrically insulating layer 51 of the first end surface 111 to flow from the second portion 4 side 114, because the narrow passage left between the outer portion 81 and the outer wall 90.

图14显示在末端部分4的外部部分81被闺定在本体部分后的单元15,这个本体部分实际上包括衬垫8和外壁卯,这是通过插入夹持体86而实现的.这个夹持体把外部部分81向下夹持和/或放置到衬垫8, 结果,膜片45被放置在稍微弯曲的位置,夹持体具有与外壁卯的电镀表面层91相接触的表面.优选地,它提供有一个或多个锁定特性. 如有需要,它可被设计成延伸到在外部部分81与外壁90之间的通道89.在这种搮作中,内壁80被形成,它由粘接层63、基片6的外部部分61、衬垫8、末端部分4的外部部分81和夹持体86组成. Figure 14 shows the outer end portion 81 of portion 4 is set Gui unit 15 in the body portion, the body portion includes a liner 8 and an outer wall actually d, which is inserted through the holding member 86 is achieved. This clamping the outer body 81 downwardly gripping portion and / or placed into a spacer 8, a result, the diaphragm 45 is placed in a slightly bent position, the clamping member having a surface in contact with the plated surface layer of the outer wall sockets 91 preferably it is provided with one or more locking characteristics. if necessary, it can be designed to extend into the passage 89. the outer portion 81 between the outer wall 90 in such as Li, the inner wall 80 is formed, which consists of stick layer 63, the outer portion of the substrate 616, the spacer 8, the outer end portion 81 and the holding portion 86 is composed of 4.

图15显示在工具70和电绝缘流体51的多余部分55被去除后的单元15,去除步骤后面进行清洁步骤,这样,夹持体86的和膜片45的表面足够干净,可用于以后的步骤. Figure 15 shows in 15, after the step of removing the excess is removed behind the tool units 70 and 51 electrically insulating fluid cleaning step portion 55 so that the surface of the holder body 86 and the diaphragm 45 are sufficiently clean, it can be used in the subsequent step .

图16显示在制造中最后的重要的步骤后的羊元15,在这个步骤中, 在夹持体86与外壁90之间的连接通过供应密封层95而被加强.密封层95优选地通过在适当的镀槽中电镀提供.替换地,它可以是本身在技术上已知的任何其它保护层,诸如基于环氧树脂的层。 Figure 16 shows element 15 after the last sheep important step in manufacturing, in this step, the connection between the clamping member 86 and the outer wall 90 of the sealing layer 95 is reinforced by supplying a sealing layer 95 preferably by providing appropriate plating bath plating. Alternatively, it may be any other protective layer known in the art per se, such as a layer based on an epoxy resin. 密封层95在本例中延伸到膜片45,但这并不是重要的。 The sealing layer 95 extends to the diaphragm 45 in the present embodiment, but this is not important. 优选地,密封层95以适当的厚度被提供,以便填充任何拐角和提供平滑的外表面。 Preferably, the sealing layer 95 is provided with an appropriate thickness, to fill any corners and provide a smooth outer surface. 密封层95在本例中从末端部分的笫一面lll延伸到基片的第一面112,这是有利的: 因为它也具有夹持特性,以及把外壁卯与它的延伸部分85, 86合在一起' In the present embodiment the first surface 95 extending from the side lll Zi end portion of the sealing layer to the substrate 112, which is advantageous: because it also has a holding characteristic, as well as the outer wall of the sockets 85 and its extended portion, 86 engagement together '

图n显示本发明的单元的第二实施例的示意性截面困。 FIG n a schematic sectional view of a second embodiment of the present invention trapped cell. 在本实施 In the present embodiment

例中没有显示用于袭盖外壁80的延伸部分85的经电镀的密封层.在本实施例中,外壁的核心92是一个金属盘.它固有地包括凸起85.具有通孔62的第二盖板6、本体部件8和第一盖板4在这里以参照用8 到16描述的方式被组装,本体部件8通常作为一个电极而工作,并且它例如被连接到用作为触点的盘92。 Not shown embodiment the sealing layer 80 extends in the outer wall of the plated portion 85 for the passage of a cover. In this embodiment, the outer wall of the core 92 is a metal disk which inherently includes a first protrusion 85. The through-hole 62 having a two cover 6, the first body member 8 and cover plate 4 are assembled by reference herein in the manner described with 8 to 16, the body member 8 is generally used as a working electrode, and it is connected to, for example, used as a contact plate 92.

第一盖板4在这里是一个连续的板,它被选择成足够薄,以便在应力下可弯曲,在本例中,使用玻璃板.在本体部件8与笫一盖板4 之间有腔体41。 A first cover 4 is here a continuous sheet, which is selected to be sufficiently thin so as to be bent under stress, in the present embodiment, a glass plate with a cavity between the body member 8 and cover plate 4 Zi 41. 在流体51, 52的至少一个膨胀的情形下(尤其是在温度上升时)笫一盖板4将弯曲,以便增大单元的体积.在流体51, 52 的至少一个收缩下,第一盖板将弯曲,以便缩小单元的体积.由于电绝缘流体51优选地是油,它比起水溶液的第二流体52具有更大的热膨胀系数,因此优选地使可弯曲的笫一盖板4存在于电绝缘流体51的面上。 In the fluid 51, at least one expansion of the case 52 (especially when the temperature rises) Zi, a cover plate 4 is bent, so as to increase the volume of the unit. In the fluid 51, at least one constriction 52, a first cover plate the bent to reduce the volume element. Since the electrically insulating fluid 51 is preferably an oil, it is compared to an aqueous solution of the second fluid 52 has a greater coefficient of thermal expansion, so that the bendable preferably Zi is electrically present in the cover 4 surface 51 of the insulating fluid.

虽然这里未示出,但使用电镀的密封层将得到非常良好的结果, 不排除这个电镀的密封层能够应用到包含流体的单元的其它结构,以及不是所有的应用都需要具有内壁80和外壁90与扩展部分85, 86的单元-还可以看到,在第一和第二面111, 112上延伸的外壁80的扩展部分85, 86不是分开的元件,而是部件的凸起或是生长的或沉积的连接物.具体地,经电镀的连接物可以和这样的扩展部分86—样有效。 Although not shown here, but using a plating sealing layer obtained very good results, it does not exclude the electroplated sealing layer can be applied to other structures comprising fluid units, and not all applications need to have an inner wall 80 and outer wall 90 the unit portion 85, extension 86 - can also be seen, the outer wall extending in the first and second faces 111, 112 extended portions 85, 86 are not separate elements 80, but the boss member or the growth of or deposit linker. specifically, the linker can be plated and such extension portion 86- equally effective.

Claims (15)

1.一种电湿单元,包括配备有基片和至少一个侧壁的本体部分,该基片和侧壁合在一起规定了包含电湿流体的腔体,以及还包括被固定在本体部分的至少一个末端部分,其中本体部分的至少一个侧壁包括内壁和外壁,该末端部分的一部分是内壁的一部分,从而固定了末端部分和本体部分,以及该外壁配置有在内壁的第一面上和在第一面的对面的第二面上延伸的扩展部分,其中在外壁上以及在内壁任一侧上的两个扩展部分上提供金属层,其中金属层从基片延伸到至少一个末端部分,其中所述基片和所述至少一个末端部分由玻璃制成。 An electrowetting cell comprising a substrate and provided with at least one side wall of the body portion, the substrate and the side wall defines a cavity together comprising electrowetting fluid, and further comprising a fixed body portion at least one end portion, wherein the at least one side wall of the body portion comprises inner and outer walls, the end portion is part of the inner wall portion, thereby securing the tip portion and a body portion, an outer wall and an inner wall disposed on a first side and in a second extension portion extending surface opposite the first surface, wherein the inner wall and the outer wall on either side of the two extended portions provided on the metal layer, wherein the metal layer extends from the substrate to at least one end portion, wherein said substrate and said at least one end portion made of glass.
2. 如在权利要求l中要求的电湿单元,其中内壁包括基片的一部分。 2. The claim in claim l in the wet electrical unit, wherein the inner wall comprises a portion of the substrate.
3. 如在权利要求2中要求的电湿单元,其中内壁还包括在基片的所述部分与末端部分的所述部分之间的电绝緣材料的衬垫。 3. In the claims, the electrical unit in the wet claim 2, wherein the pad further comprises an inner wall electrically insulating material between said portion and said end portion of the portion of the substrate.
4. 如在权利要求l中要求的电湿单元,其中在内壁的第一面上延伸的外壁的扩展部分是固定在外壁上的夹持体. 4. The electrical dehumidifying unit in the claims in claim l in which the expansion portion extending in the outer wall surface of a first inner wall is fixed to the outer wall of the clamping member.
5. 如在权利要求4中要求的电湿单元,其中夹持体藉助于在扩展部分和外壁上生长的金属层而固定在外壁上。 The wet electrical unit as claimed in claim 4, wherein the holding body by means of a metal layer and an outer wall of the expanded portion and fixed to the outer wall of the growth.
6. 如在权利要求l中要求的电湿单元,其中与至少一个电湿流体接触的第一和第二电极被限定在腔体的相对两个面的基片和末端部分上。 6. The electrical dehumidifying unit of claim l in the claims, the first and second electrodes wherein the at least one electrical contact is defined on the fluid wet the substrate surface and two opposing end portions of the cavity.
7. 如在权利要求6中要求的电湿单元,其中基片提供有小孔,在它的末端处存在所述电极. 7. As electrowetting cell as claimed in claim 6, wherein the substrate is provided with a hole, the presence of the electrode at its end.
8. 如在权利要求l中要求的电湿单元,其中末端部分包括柔顺的膜片,它允许封闭腔体的体积膨胀. 8. The electrical dehumidifying unit in the claims in claim l, where the tip portion comprises a compliant membrane, which allows the expansion of volume of the closed chamber.
9. 如在权利要求2中要求的电湿单元,其中在内壁的第二面上的扩展部分通过在两个面上生长的金属层而固定在基片上. 9. As electrowetting cell as claimed in claim 2, wherein the extended portion of the second surface of the inner wall is fixed on the substrate by a metal layer grown on both faces.
10. —种制造包括配备有一个基片和一个具有内壁与外壁的側壁的本体部分的电湿单元的方法,所述外壁提供有在内壁的两个相对的面上延伸的第一和第二扩展部分,该基片和倒壁合在一起限定了包含第一和第二电湿流体的腔体,该方法包括以下步骤;-提供由玻璃制成的外壁和基片,从而构成腔体; -用笫一和第二电湿流体填充腔体;-在腔体中提供由玻璃制成的末端部分,以使得它在离基片的一个所需距离处被浸在至少一个流体中,由部分基片和末端部分以及任选地中间衬垫形成该内壁;-把末端部分固定在本体部分,以使得外壁的第一扩展部分位于该末端部分的顶部;-其中在外壁上以及在内壁任一側上的两个扩展部分上提供金属层,其中金属层从基片延伸到至少一个末端部分。 10. - producing species comprising a substrate and provided with a method of electrically body portion having inner and outer walls of the side walls wet means, said outer wall is provided with two opposing first and second inner wall surface extending extension, the substrate and the walls together define inverted first and second electrical wet cavity comprising a fluid, the method comprising the steps of; - providing an outer wall and a substrate made of glass, thereby forming a cavity; - and with a second electrical Zi wet fluid filled cavity; - providing a cavity in the end portion is made of glass, so that it is immersed in a fluid at least at a desired distance from a substrate by portion of the substrate and the tip portion and optionally an intermediate spacer forming the inner wall; - at the end portion of the fixed body portion, such that the first extension portion of the outer wall at the top end portion; - wherein the outer wall and the inner wall of any two extended portions provided on the side of the metal layer, wherein the metal layer extends from the substrate to at least one end portion.
11. 如在权利要求10中要求的方法,其中扩展部分是一个分开的夹持体,它只有在被放置在末端部分后才被连接到外壁, 11. The method as claimed in claim 10, wherein the extension is a separate clamping body, it is only after being placed in the end portion is connected to the outer wall,
12. 如在权利要求ll中要求的方法,其中夹持体和外壁与在它们的表面上生长的金属层相连接。 12. A method as claimed in claim ll, wherein the clamping body and the outer wall of the metal layer grown on their surface are connected.
13. —种包含按照权利要求1到9的任一项的电湿单元的图像摄取装置或图像传感器. 13. - species comprising image pickup apparatus according to claim electrical wet or an image sensor unit according to any one of claims 1 to 9.
14. 一种包括按照权利要求1到9的任一項的电湿单元的光学扫描装置。 14. An optical scanning device comprising an electrical dehumidifying unit according to any one of claims 1 to 9 according to the claims.
15. —种包含按照权利要求1到9的任一项的电湿单元的显示装置。 15. - Species electrically dehumidifying unit includes a display device according to any one of claims 1 to 9 according to the claims.
CN 200580014589 2004-05-07 2005-05-03 Electrowetting cell and method of manufacturing an electrowetting cell CN100478734C (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04101996 2004-05-07
EP04101996.9 2004-05-07
EP04105940.3 2004-11-19

Publications (2)

Publication Number Publication Date
CN1973236A true CN1973236A (en) 2007-05-30
CN100478734C true CN100478734C (en) 2009-04-15

Family

ID=38019382

Family Applications (3)

Application Number Title Priority Date Filing Date
CN 200580014543 CN1950725A (en) 2004-05-07 2005-05-03 Electrowetting cell and method of manufacturing an electrowetting cell
CN 200580014589 CN100478734C (en) 2004-05-07 2005-05-03 Electrowetting cell and method of manufacturing an electrowetting cell
CN 200580014593 CN1950743A (en) 2004-05-07 2005-05-04 Electrowetting cell and method of manufacturing an electrowetting cell

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN 200580014543 CN1950725A (en) 2004-05-07 2005-05-03 Electrowetting cell and method of manufacturing an electrowetting cell

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN 200580014593 CN1950743A (en) 2004-05-07 2005-05-04 Electrowetting cell and method of manufacturing an electrowetting cell

Country Status (1)

Country Link
CN (3) CN1950725A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101303422B (en) 2007-05-11 2012-06-27 奇美电子股份有限公司 Lens unit and lens module using the same as well as flat panel display
CN101393320B (en) 2007-09-21 2010-08-25 群康科技(深圳)有限公司;群创光电股份有限公司 Electric moisten display device
US8102379B2 (en) 2008-03-26 2012-01-24 Raydium Semiconductor Corporation Touch sensing device and touch sensing apparatus
CN101556515B (en) 2008-04-08 2011-03-30 瑞鼎科技股份有限公司 Touch sensing assembly and touch sensing device
JP2010032706A (en) 2008-07-28 2010-02-12 Sony Corp Liquid lens apparatus and method of manufacturing the same
JP2010243631A (en) * 2009-04-02 2010-10-28 Sony Corp Method for manufacturing liquid lens device and liquid lens device
JP2010250126A (en) * 2009-04-16 2010-11-04 Sony Corp Method for manufacturing liquid lens device, and the liquid lens device
RU2578262C2 (en) * 2011-08-31 2016-03-27 Джонсон Энд Джонсон Вижн Кэа, Инк. Liquid meniscus lenses with improved composition based on physiological solution

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1077289A (en) 1991-03-30 1993-10-13 南东顺 Fluid lens and its making method
CN1300372A (en) 1998-03-19 2001-06-20 约瑟华·戴维·西尔弗 Improvements in variable focus optical devices
WO2003069380A1 (en) 2002-02-14 2003-08-21 Koninklijke Philips Electronics N.V. Variable focus lens
WO2003071335A2 (en) 2002-02-20 2003-08-28 Koninklijke Philips Electronics N.V. Display apparatus
CN1483153A (en) 2000-08-08 2004-03-17 斯特拉托斯光波公司 Post assembly metallization of a device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1077289A (en) 1991-03-30 1993-10-13 南东顺 Fluid lens and its making method
CN1300372A (en) 1998-03-19 2001-06-20 约瑟华·戴维·西尔弗 Improvements in variable focus optical devices
CN1483153A (en) 2000-08-08 2004-03-17 斯特拉托斯光波公司 Post assembly metallization of a device
WO2003069380A1 (en) 2002-02-14 2003-08-21 Koninklijke Philips Electronics N.V. Variable focus lens
WO2003071335A2 (en) 2002-02-20 2003-08-28 Koninklijke Philips Electronics N.V. Display apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Variable focal lens controlled by an external voltage:Anapplication of electrowetting. B.Berge,J.Peseux.The European Physical Journal E,Vol.3 No.2. 2000

Also Published As

Publication number Publication date Type
CN1973236A (en) 2007-05-30 application
CN1950743A (en) 2007-04-18 application
CN1950725A (en) 2007-04-18 application

Similar Documents

Publication Publication Date Title
US7675665B2 (en) Methods and apparatus for actuating displays
US7746529B2 (en) MEMS display apparatus
US6857501B1 (en) Method of forming parylene-diaphragm piezoelectric acoustic transducers
US6894358B2 (en) Process for producing microelectromechanical components and a housed microelectromechanical component
US4943032A (en) Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US5490220A (en) Solid state condenser and microphone devices
US20110134303A1 (en) Image pickup device and manufacturing method thereof
US20090169806A1 (en) Display and fabricating method thereof
EP0561566A2 (en) Solid state condenser and microphone
US7440193B2 (en) Wide-angle variable focal length lens system
US20070180916A1 (en) Capacitive micromachined ultrasound transducer and methods of making the same
US20020149864A1 (en) Variable-profile optical device including variable-profile mirror and optical element including variable-profile optical element
US20060076648A1 (en) System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US20070252227A1 (en) Optical apparatus and optical module using the same
US20010004180A1 (en) Piezoelectric acoustic components and method of manufacturing the same
US20050111842A1 (en) Moving mechanism, and compact camera, goniometer and fiberscope using the moving mechanism
JP2005123561A (en) Sealing structure of micro electronic mechanical system, sealing method therefor, and micro electronic mechanical system
US8289497B2 (en) Apparatus and methods for recovering fluid in immersion lithography
US20090041270A1 (en) Mems Microphone And Method For Producing Said Microphone
US20060056999A1 (en) Piezoelectric actuator and pump using same
US6621163B2 (en) Electronic device having an electronic component with a multi-layer cover, and method
US20080112059A1 (en) Optical lens and method of manufacturing the same
US7368803B2 (en) System and method for protecting microelectromechanical systems array using back-plate with non-flat portion
US20100133230A1 (en) Method for manufacturing adjustable lens
US7298559B2 (en) Variable focus lens and optical device using the same as well as method of manufacturing variable focus lens

Legal Events

Date Code Title Description
C06 Publication
C10 Request of examination as to substance
C14 Granted
C17 Cessation of patent right