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CN100442612C - Complex electrode structure of longitudinal stream gas discharge system - Google Patents

Complex electrode structure of longitudinal stream gas discharge system Download PDF

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CN100442612C
CN100442612C CN 200610046473 CN200610046473A CN100442612C CN 100442612 C CN100442612 C CN 100442612C CN 200610046473 CN200610046473 CN 200610046473 CN 200610046473 A CN200610046473 A CN 200610046473A CN 100442612 C CN100442612 C CN 100442612C
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gas
electrode
system
structure
discharge
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CN101064409A (en )
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于海军
唐书凯
多丽萍
桑凤亭
健 汪
金玉奇
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中国科学院大连化学物理研究所
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Abstract

本发明是一种流动气体放电的电极结构,具体地说是纵向流气体放电体系的复电极结构,包括阳极、石英管、双阴极,阳极为柱状空腔结构,通过密封套与石英管相连,双阴极为两个分别放置,第一阴极为环状空腔结构,同样通过密封套与石英管相连,阳极和石英管,石英管和第一阴极组成密封结构,第二阴极是螺旋盘管结构,垂直放置在第一阴极外侧气流下游过渡段位置。 The present invention is an electrode structure of a discharge gas flow, specifically the electrode structure is a complex longitudinal flow gas discharge system, comprising an anode, a quartz tube, double-cathode, anode columnar cavity structure, the sealing sleeve is connected with the quartz tube, two double cathode respectively placed, a first annular cavity of the cathode structure, and the same is connected via a sealing sleeve quartz tube, the anode and the quartz tube, the quartz tube and a sealing structure composed of a first cathode, the second cathode is a helical coil structure vertically disposed outside the cathode gas flow downstream of the first transition section position. 本发明通过采用双阴极结构,得到了很好的放电稳定性,注入功率明显提高;对于基于活性粒子的放电引发的化学激光来说,活性粒子产量得到了很大提高,双阴极结构提高了活性粒子的利用效率。 The present invention dual cathode structure, the discharge stability was good, the injected power significantly improved; the chemical active particles based on laser discharge initiated, the active particle production has been greatly improved, dual cathode structure increases the activity the utilization efficiency of the particles.

Description

纵向流气体放电体系的复电极结构 Longitudinal flow of complex electrode structure of the gas discharge system

技术领域 FIELD

本发明涉及一种流动气体放电的电极结构,来提高气流放电的稳定性, 加强气流间的混合。 The present invention relates to an electrode structure of a gas discharge flow, to improve the stability of the discharge airflow, enhance mixing between the gas stream. 通过这种电极结构的气流,不但提高了活性粒子的浓度,提高了放电的稳定性,而且提高了活性粒子的利用效率,从而推动了流动气体放电的发展。 Air flow through such an electrode structure, not only increases the concentration of active particles, improves the stability of discharge, and improves the efficiency of the active species, thus promoting the development of flow of the gas discharge.

背景技术 Background technique

氧碘化学激光器发展已有二十年的历史,也具有一定的规模。 Chemical oxygen iodine laser development has been 20 years of history, but also has a certain scale. 由于氧发生器为气液反应,使得氧碘化学激光器的体积比功率很难提高,为此, Since the oxygen generator is a gas-liquid reaction, so that the volume ratio COIL difficult to increase power, therefore,

縮减氧碘激光器的体积和重量都受到限制。 Oxygen-iodine laser reduced size and weight are limited. 1990年Bower和Yang报道观察到NCl(a】A)+I的传能,引起了世界人们的极大关注。 1990 Bower and Yang report observed NCl (a] A) + I can pass, caused a world of great concern. 由NClWA)泵浦I 原子的全气相化学激光器能否产生和放大以及该体系的相关动力学的研究近几年也广泛展开。 I pumped by the NClWA) atoms can produce a full chemical vapor laser and associated amplification and dynamics of the system are also widely studied in recent years to expand.

自19卯年Bower和Yang报道观察到NCl(a'A)+I的传能以来,对亚稳态粒子NCl(a^)猝灭及传能动力学的研究成为热点。 Bower 19 years since Mao and Yang report observed NCl (a'A) + Since I can pass on metastable particles NCl (a ^) and quenching kinetics study can become hot pass. 93-95年间,Denver 大学的Coombe等人用193nm激光光解C1N3及CH2I2/C1N3的体系,并研究了诸多粒子对NCl(a)的猝灭动力学。 93-- between 95 years, Coombe University of Denver and other people with a 193nm laser photolysis C1N3 and CH2I2 / C1N3 system, and a lot of research on particle NCl (a) quenching kinetics. 在1995年Ray和Coombe报道了NCl(a) 泵浦的碘原子化学激光器,它是光引发,非流动的;用探头记录到激光的输出波形,并没有测量激光的输出功率。 In 1995 and Ray Coombe reported NCl (a) chemical laser pumped iodine atom, which is a photoinitiator, illiquid; probe to record the output waveform of the laser, and the laser output power is not measured.

1999年西部光电子会议上,美国空军武器实验室报告了"NCl(a)/1体系测量1.315m小信号增益",是用直流放电(2KW)F2:He-l:4来产生F,加入DC1和HI进行置换反应产生CI和I,测得1.315m小信号增益为0.02%cm"。 作者分析了增益如此低的原因是受F粒子数密度的限制,因为F2流量小于0.75mmol/s,直流放电才更高效。同时也提出下步工作目标是提高F粒子数密度。2000年首次报道了流动的NCl(a)/I体系的出光装置AGILI,出光功率达到180mW。 2003年和2004年分别报道了扩大和改进的AGIL II出光功率达到15W和31W。 1999 photoelectron West Conference, the US Air Force Weapons Laboratory reports "(a) / 1 system to measure NCl 1.315m small signal gain", is a DC discharge (2KW) F2: He-l: 4 to produce F, adding DC1 HI and CI replacement reaction, and I, the measured small-signal gain 1.315m 0.02% cm ". the authors analyzed the reasons for this low gain is limited by the particle number density of F, F2 because the flow is less than 0.75mmol / s, DC discharge is more efficient, while also propose the next step goals is to improve the F particle number density in 2000 first reported the flow of NCl (a) / the optical device AGILI I system, the optical power of 180mW. in 2003 and 2004, respectively, reports expanded and improved AGIL II optical power reaches 15W and 31W.

以上研究的AGIL I和AGIL II都是由直流放电产生氟原子,间接产生氯原子,来实现激发态碘原子出光的。 The above studies AGIL I and AGIL II are produced by the DC discharge a fluorine atom, a chlorine atom indirectly, to achieve an iodine atom excited light. 因此要想提高F/DC1/HI/HN3全气相碘激光系统的小信号增益和输出功率,必须要提高F原子的产量,因为tc 原子的多少直接影响和限制该体系的效率。 Therefore, in order to improve the output power of the small signal gain and F / DC1 / HI / HN3 full iodine vapor laser system, we must improve the yield of F atoms, and because the limit directly affects the efficiency of the system tc atoms. 上述报道虽然都提及直流放电产生氟原子,但没有提到直流放电的放电模式和电极结构。 Although the above-mentioned direct-current discharge have been reported to produce a fluorine atom, but no mention of the discharge current and discharge mode electrode structure. 发明内容 SUMMARY

本发明的目的是提供一种流动气体直流放电的电极结构。 Object of the present invention is to provide an electrode structure of a discharge current flow of the gas. 通过该种电极结构,实现流动气体直流放电的稳定、注入功率的高效和活性粒子的髙利用率。 By this type of electrode structure, stable DC discharge flow of the gas injected Gao and efficient utilization of the power of the active particles.

为实现上述目的,本发明采用的技术方案是: To achieve the above object, the technical solution adopted by the invention is:

纵向流气体放电体系的复电极结构,包括阳极、石英管、双阴极,阳极为柱状空腔结构,通过密封套与石英管相连,双阴极为两个分别放置,第一阴极为环状空腔结构,同样通过密封套与石英管相连,阳极和石英管, 石英管和第一阴极组成密封结构,第二阴极是螺旋盘管结构,垂直放置在第一阴极外侧气流下游过渡段位置,气体从一个阴极环的中心流出,碰撞并穿过另一个阴极。 Longitudinal flow multiplexing structure of the gas discharge electrode system comprising an anode, a quartz tube, double-cathode, anode columnar cavity structure, the sealing sleeve is connected with the quartz tube, were placed two double cathode, the cathode of the first annular cavity structure, and likewise the sealing sleeve is connected to the quartz tube, the anode and the quartz tube, the quartz tube and a sealing structure composed of a first cathode, the second cathode is a helical coil structure, a first vertically disposed outside the cathode gas stream downstream of the transition section position, gas from the a center of the cathode ring effluent, through the other of the cathode and collide.

所述阳极、第一阴极和第二阴极均为金属材料加工而成,它们内部均采用循环水冷却,其上分别设置有循环水的进出口;石英管为放电等离子管, 为双层结构,其上设置有循环水的进出口,内部水循环冷却,在石英管靠近阳极端的侧壁上设置有流动气体的进气孔,其中上还设置有测压孔。 The anode, the first and second cathodes are metallic materials processing, they are used in the internal circulating cooling water, circulating water are provided Importers thereon; quartz tube plasma discharge tube, a two-layer structure, on which the export of the circulating water, cooling water circulation inside, close to the quartz tube with a flow of the gas inlet port is provided on the anode end of the side wall, provided with a load cell on which the hole.

本发明的有益效果是- Advantageous effect of the invention is -

1、 气流放电的高稳定性。 1, high air flow discharge stability. 本发明为一种流动气体放电的电极结构,通过采用双阴极结构,得到了很好的放电稳定性,气流间的均匀混合,注入功率明显提高。 The present invention is an electrode structure of a discharge gas flowing through the dual cathode structure, the discharge stability was good, homogeneous mixing between the gas stream, the injected power significantly improved.

2、 提高了活性粒子产量。 2, increase the activity of particle production. 本发明对于基于活性粒子的放电引发的化学激光来说,活性粒子产量得到了很大提高,提髙了活性粒子的浓度。 For the present invention chemically active particles based on laser discharge initiated, the active particle production has been greatly improved, the concentration of active Gao mentioned particles.

3、 提高了活性粒子的利用效率。 3, to improve the utilization efficiency of the active particles. 本发明对于基于活性粒子的放电引发的化学激光来说,双阴极结构提高了活性粒子的利用效率。 For the present invention chemically active particles based on laser discharge is initiated, double structure improves the utilization efficiency of the cathode active particles.

附图说明 BRIEF DESCRIPTION

图la为本发明的结构示意图; FIG la is a schematic structural diagram of the present invention;

图lb为图la的俯视图; Fig lb is a top view of FIG la;

图2a为本发明的具体实施结构示意图; Figure 2a shows a specific structure of the present embodiment of the invention;

图2b为图la的俯视图; 2b is a plan view of FIG la;

图3为本发明实施例注入功率曲线。 Figure 3 embodiment of the invention the injection power curve.

具体实施方式 detailed description

本发明系统包括循环冷却的柱状阳极,放电石英管,循环冷却的双阴极,电极(包括阳极、第一阴极和第二阴极)选用导电和导热良好的金属材料,采用制冷方式减少电极的损耗。 The system of the present invention includes a cylindrical anode circulation cooling, the quartz discharge tube, cooling the dual cathode electrode (comprising an anode, a first and second cathodes) selection of a conductive metallic material, and good thermal conductivity, cooling methods employed to reduce electrode wear. 由于是纵向流动,第一阴极两端要-有进气孔和出气孔。 Since the flow is vertical, both ends of the cathode to the first - inlet hole and outlet hole. 高压端的阳极是柱状结构,内部循环冷却,侧面进气; 接地的公共阴极为双阴极结构,双阴极为两个分别放置,两个阴极之间分开一定的距离放置, 一个为环状结构,放置在放电石英管的端口,气体从环的中心流出,另一个为旋转的蟪旋结构,放置在环状阴极出口气流下游副气流加入的位置,主气流垂直穿过螺旋,双阴极的内部循环冷却。 An anode high voltage terminal is a columnar structure, the internal cooling cycle, the intake side surface; grounded common cathode dual cathode structure, two double cathode are disposed, separated by a distance placed between the two cathodes, a cyclic structure, is placed the discharge port of the quartz tube, the gas flows from the center of the ring, the other rotating structure rotates cicada, placed downstream of the secondary flow in the annular cathode outlet gas stream was added a position perpendicular to the main gas flow through the spiral, the internal circulation cooling bis cathode .

实施例1 Example 1

请参阅图1所示,发明装置由阳极、石英放电管、双阴极结构组成。 Please refer to FIG. 1, an anode discharge device of the invention, a quartz, a double cathode structures. 阳极1为圆柱空腔结构,内部循环水冷却,通过一有机玻璃密封套与石英 The anode 1 has a cylindrical cavity structure, the internal circulation of cooling water, and through a sealing sleeve plexiglass quartz

管2相连,第一阴极3为环状空腔结构,内部循环冷却,同样通过有机玻璃密封套与石英管2相连,第二阴极4是螺旋盘管结构,垂直放置在气流下游过渡段位置,内部循环冷却。 Pipe 2 is connected to the first annular cavity of the cathode structure 3, the internal circulation cooling, by the same plexiglass sealing sleeve 2 is connected to the quartz tube, the cathode 4 is a second helical coil structure, is placed in the vertical position of the gas flow downstream of the transition section, internal circulation cooling. 5是流动气体的进气孔,气体流过放电管, 由阴极3的环中心流出,碰撞流经阴极4,增加扰动,加强混合。 5 is a flow of the gas inlet holes, the gas flowing through the discharge tube, the outflow from the center of the ring cathode 3, the collision flow through the cathode 4, the disturbance increases, enhance mixing.

上述电极结构可应用于流动气体稳定放电、增加活性粒子产生浓度和提高活性粒子的利用效率。 The electrode configuration may be applied to stabilize the discharge gas flow, increase the activity of particle generation and improve the utilization efficiency of the concentration of active particles.

实施例2 Example 2

下面以F/DC1/HI/HN3全气相碘激光系统的应用为例以说明本发明电极结构的使用方法。 To apply the following F / DC1 / HI / HN3 full iodine vapor laser system as an example to illustrate the use of the electrode structure of the present invention.

申请人利用本发明即混合反应气流放电体系的电极结构来产生活性粒子氟原子,并且首次将该发明应用于F/DCl/HI/HN3全气相碘激光体系,研究了气体的放电特性和注入功率情况。 The applicant of the present invention using the electrode structure that is mixing of the reaction gas flow discharge system to produce active particles of a fluorine atom, and the invention is applied to the first F / DCl / HI / HN3 full iodine vapor laser system, research and discharge characteristics of the gas injected power Happening.

请参阅图2所示,由于F/DC1/HI/HN3全气相碘激光体系是四股气流的混合反应,产生激发态的碘原子,才有可能进行增益测量和出光演示。 Please refer to FIG. 2, since the F / DC1 / HI / HN3 gas iodine laser system is a full four strands of mixing the reaction stream to produce an iodine atom in an excited state, and possible gain measurement light presentations. 本' 实施例采用本发明即混合反应气流放电体系的电极结构对NF3/He的混合气体进行直流放电,产生活性粒子氟原子,携带氟原子的主气流流过第一阴极3,第二阴极4,在第二阴极4的位置,上下有两排直径为0.5mm第一小孔6, DCl/He混合气体从第一小孔6喷入主气流,主副气流进行混合反应,置换出氯原子。 The present 'embodiment of the present invention, i.e., reaction mixture stream discharge electrode structure of a mixed gas system NF3 / He is DC discharge, generates active particles fluorine atom, a fluorine atom carrying the main gas stream through the first cathode 3, the second cathode 4 in the second position of the cathode 4, there are two vertical rows of holes having a diameter of 0.5mm the first 6, DCl / He mixed gas from the first discharge orifice 6 into the main gas stream, reaction was mixed primary and secondary airflow, replacement of a chlorine atom . 继续向下游流动,与从第二小孔7喷入的HI/He反应置换出碘原子,与从第三小孔8喷入的HN3/He反应生成NCl(a),:^Pw),NCl(b)等,9为测试窗口,可以通过测试窗口测量激发态碘原子1(2&/2)的荧光辐射和小信号增益系数,真空系统是由真空泵10来保障的。 Continues to flow downstream from the second aperture 7 injected HI / He reaction to displace the iodine atom, and from the third orifice 8 is injected into the reaction HN3 He NCl (a) /,: ^ Pw), NCl (b), etc., as the test window 9, an iodine atom can be excited by measuring a test window (2 & / 2) of the fluorescence radiation and small signal gain, the vacuum system is to protect the vacuum pump 10.

F/DC1/HI/HN3全气相碘激光体系的反应机理为, 氯原子的产生 F / DC1 / HI / HN3 gas phase reaction mechanism of the whole of the iodine laser system, for generating a chlorine atom

Ncuy厶)的产生 Ncuy Si) generation

<formula>formula see original document page 5</formula>(2) <Formula> formula see original document page 5 </ formula> (2)

<formula>formula see original document page 5</formula> (3) <Formula> formula see original document page 5 </ formula> (3)

碘原子的产生 Generating an iodine atom

<formula>formula see original document page 5</formula>(4)激发态碘原子的产生 <Formula> formula see original document page 5 </ formula> (4) iodine atoms excited states generated

A) + / — /(2户1/2) + AO(J^i:) (5) 输出激光 A) + / - / (2 households 1/2) + AO (J ^ i :) (5) Laser output

/(2尸1/2) + /^ —/(2尸3/2) + 2計(6) / (2 1/2 dead) + / ^ - / (2 3/2 dead) + 2 meter (6)

图3为本发明实施例在不同NF3和He流量的混合气体,在单电极和复电极两种情况下,直流放电的注入功率曲线。 Example 3 FIG mixed gas of NF3 and He flow at different embodiment of the invention, the single electrode and the electrode multiplexing both cases, the discharge current injection power curve. 可以看到,在小的氦气流量的情况下,复电极放电的注入功率明显高于单电极放电的注入功率,而且放电稳定。 It can be seen in the helium gas flow is small, the electric discharge power of complex injection was significantly higher than the injected power a single electrode discharge, and the discharge stability. 在较大氦气流量的情况下,他们的注入功率基本一样,但是放电要稳定的多。 In the larger helium flow conditions, their power is injected essentially the same, but much more stable discharge.

Claims (5)

  1. 1.纵向流气体放电体系的复电极结构,其特征在于:包括阳极、石英管、双阴极,阳极(1)为柱状空腔结构,通过密封套与石英管(2)相连,双阴极为两个分别放置的第一阴极(3)和第二阴极(4),第一阴极(3)为环状空腔结构,同样通过密封套与石英管(2)相连,阳极(1)和石英管(2),石英管(2)和第一阴极组成密封结构,第二阴极(4)是螺旋盘管结构,放置在第一阴极(3)出口气流下游副气流加入的位置,主气流垂直穿过螺旋。 1. Structure of the complex longitudinal flow electrode gas discharge system, characterized by: comprising an anode, a quartz tube, double-cathode, an anode (1) is a hollow columnar structure, the sealing sleeve is connected to the quartz tube (2), two cathode bis are placed a first cathode (3) and a second cathode (4), a first cathode (3) an annular cavity structure, the same sealing sleeve through the quartz tube (2) is connected to the anode (1) and quartz tube (2), a quartz tube (2) and a sealing structure composed of a first cathode, the second cathode (4) is a helical coil structure, is placed in the first cathode (3) secondary airflow downstream of the outlet stream was added a position perpendicular to the main gas flow through too spiral.
  2. 2. 按照权利要求l所述纵向流气体放电体系的复电极结构,其特征在于:所述石英管(2)为放电等离子管;阳极(1)、第一阴极(3)和第二阴极(4)均为金属材料加工而成。 2. The claim l complex electrode structures of the longitudinal flow in the gas discharge system, characterized in that: said quartz tube (2) is a plasma discharge tube; an anode (1), a first cathode (3) and a second cathode ( 4) are made of metal materials processing.
  3. 3. 按照权利要求l所述纵向流气体放电体系的复电极结构,其特征在于:所述阳极(1)、第一阴极(3)和第二阴极(4)内部均采用循环水冷却,其上分别设置有循环水的进出口。 3. The claim l complex electrode structures of the longitudinal flow in the gas discharge system, characterized in that: the anode (1), a first cathode (3) and a second cathode (4) are made of inner circulating water cooling, which are respectively provided on the circulation water export.
  4. 4. 按照权利要求1所述纵向流气体放电体系的复电极结构,其特征在于:所述石英管(2)为双层结构,其上设置有循环水的进出口,内部水循环冷却,在石英管(2)靠近阳极(1)端的侧壁上设置有流动气体的进气孔(5)。 4. The double electrode structure 1 longitudinal flow gas discharge system according to claim, wherein: said quartz tube (2) is a two-layer structure is provided thereon with a circulation water export, internal water cooling, quartz tube (2) near the anode (1) is provided with a flow of gas inlet holes (5) on the side wall end.
  5. 5. 按照权利要求l所述纵向流气体放电体系的复电极结构,其特征在于:所述石英管(2)上设置有测压孔。 5. The longitudinal claim l multiplexed stream structure of the gas discharge electrode system, wherein: the load cell is provided with a hole (2) of the quartz tube.
CN 200610046473 2006-04-29 2006-04-29 Complex electrode structure of longitudinal stream gas discharge system CN100442612C (en)

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US4266200A (en) 1977-01-13 1981-05-05 Liu Chi Sheng Metal halide laser tube structure
CN1118943A (en) 1994-09-12 1996-03-20 中国科学院大连化学物理研究所 Pulse oxygen iodine chemical laser triggered by electric discharge
US6970492B2 (en) 2002-05-17 2005-11-29 Lambda Physik Ag DUV and VUV laser with on-line pulse energy monitor
CN2762396Y (en) 2004-12-30 2006-03-01 周迅 Middle power carbon dioxide laser tube

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Publication number Priority date Publication date Assignee Title
US4266200A (en) 1977-01-13 1981-05-05 Liu Chi Sheng Metal halide laser tube structure
CN1118943A (en) 1994-09-12 1996-03-20 中国科学院大连化学物理研究所 Pulse oxygen iodine chemical laser triggered by electric discharge
US6970492B2 (en) 2002-05-17 2005-11-29 Lambda Physik Ag DUV and VUV laser with on-line pulse energy monitor
CN2762396Y (en) 2004-12-30 2006-03-01 周迅 Middle power carbon dioxide laser tube

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