CN100402867C - Digitalized linear proportional flow parallel control valve - Google Patents

Digitalized linear proportional flow parallel control valve Download PDF

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CN100402867C
CN100402867C CN 03141700 CN03141700A CN100402867C CN 100402867 C CN100402867 C CN 100402867C CN 03141700 CN03141700 CN 03141700 CN 03141700 A CN03141700 A CN 03141700A CN 100402867 C CN100402867 C CN 100402867C
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solenoid valve
flow
control
min
valve
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CN 03141700
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CN1570403A (en
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海 庄
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海 庄
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Abstract

一种数字化线性比例流量并联控制阀,至少置有二个电磁阀,电磁阀与电磁阀之间的气、液管道通路置为并联连接,每个电磁阀通路中还串联连接节流阀,并通过该节流阀使每个电磁阀气、液管道通路大小依序设置为:2<sup>N-1</sup>×流量基值,其中N为每个电磁阀序数值,所述的流量基值大于0,小于等于2升/分。 A Digital linearly proportional flow control valves connected in parallel, there is placed at least between two gas solenoid valve, the solenoid valve and the solenoid valve, the liquid passage pipes are connected in parallel opposed, each solenoid valve is also connected in series with the throttle passage, and by this throttle solenoid valves each gas, liquid passage pipes are sequentially set size: 2 <sup> N-1 </ sup> × flow rate value group, where N is the ordinal value of each solenoid valve, said yl flow value greater than 0 and less than or equal to 2 liters / minute. 本发明优点是控制码与输出流量值一一对应;控制特性线性度好;激励响应快;整个控制区都在受控状态,没有迟滞、死区,及不敏感区,可用于精密的微压微流量控制;流量控制精度高,可实现零流量或微流量输出。 Advantage of the present invention is a control code correspondence with the output flow rate value; good linearity of the control characteristic; fast excitation response; the entire control region in a controlled state, no hysteresis, dead band and dead zone, may be used for precision micro pressure micro-flow; flow rate control of high precision, can be zero or slightly traffic flow output. 本发明可以作为核心调控部件,广泛应用于各种流体的精密微压微流量控制系统,以确保设备的精确度、稳定度和安全性。 The present invention can be regulated as a core member, it is widely used in micro-precision micro-pressure flow control system of various fluids, in order to ensure the accuracy of the device, stability and safety.

Description

数字化线性比例流量并联控制阀技术领域本发明涉及一种精密压力流量控制设备中的控制阀,特别是一种数字化线性比例流量并联控制阀。 Parallel digital linear proportional flow control valves Technical Field The present invention relates to a precision pressure flow rate control valve control apparatus, particularly to a digital linear proportional flow control valves connected in parallel. 背景技术现有技术中,精密压力流量控制设备中特别是微压微流量控制设备,例如医学内窥镜诊治手术的重要设^-气控仪(俗称气腹机),由于其技术性能指标要求高,因此对关键的控制执行部件要求较髙, 一般都采用电磁比例调节阀作为调控执行部件。 Background prior art, precise pressure and flow control devices in particular micro-pressure micro-flow control device, such as endoscopic medical diagnosis and treatment provided significant surgery ^ - gas control instrument (commonly known as the pneumoperitoneum), because of their technical performance requirements high, thus requiring more critical Gao execution control means, are generally used as the electromagnetic proportional control valve member performs regulation. 如用比例压力调节阀为核心调控执行部件的比例压力控制系统(参见图1);以及用比例流量调节阀为核心调控执行部件的比例流量控制系统(参见图2)。 Proportional pressure regulating valve with a proportional pressure regulation performed as the core components of a control system (see FIG. 1); and a proportional flow control valve proportional to the core member performs regulation of flow control system (see FIG. 2). 由于上述电磁比例调节阀制造精度高,装配调试难度大,应用控制要求高,价格昂贵,且有其难以逾越的先天不足,困扰着应用者, 使所选配的设备的性能指标也不尽乎人意。 Since the electromagnetic proportional regulator valve for producing a high precision, large assembly debugging is difficult, application control requirements, expensive, and has its inherent insurmountable, plagued by the application, so that the performance of the optional devices are not intended to people almost . 电磁比例调节阀共同的不足是控制特性的非线性,即初始控制段有一个死区,控制量增加与减少走的不是一条线,因此转折处会有一个不敏感区(控制量变化了,但输出量仍不变)。 Common deficiency of the electromagnetic proportional control valve is non-linear control characteristics, i.e., initial control section has a dead zone, controlling the amount of increase and decrease is not taking a line, so there will be a dead zone at the transition (change of the control amount, but output remains unchanged). 图3和图4分别是比例流量电磁阀和比例压力电磁阀的输入输出特性曲线。 Figures 3 and 4 are the input output characteristics of solenoid proportional flow valve and a pressure proportional solenoid valve curve. 从图中可看出,比例流量电磁阖的非线性较大,起始段死区也较大。 As can be seen from the figure, the nonlinear flow solenoid whole family large proportion of the starting section is large deadband. 而比例压力电磁阀由于内置压力调节环节, 在内部调节的作用下,使输入输出特性曲线的线性度得到改善,但由于机械阻力、迟滞等的综合作用,使增i调节与减量调节走的仍是二条曲线。 And since the solenoid proportional pressure control element built-in pressure, at an internal regulatory role, so that the degree of input-output characteristic linear curve is improved, but the mechanical resistance, the combined effect of the hysteresis, etc., so that adjustment and downregulated by i go still the two curves. 因此,在控制量的转折处仍会有一个不敏感区。 Therefore, the amount of control the turning point there will not be a sensitive area. 控制的非线性影响了流量的控制精度,也很难进行流量积算统计。 Control of non-linear effects of flow control precision, it is difficult to flow totalizer statistics. 不敏感区使闭环控制特性变坏,超调量增大,系统响应频率低,压力偏差修正慢。 Closed loop control dead zone characteristic deterioration, the overshoot increases, system response low frequency offset correction pressure slowly. 另外,比例压力电磁阀当它的控制量回复到零时,它仍有一个输出i。 Further, a pressure proportional solenoid valve control amount when it returns to zero, it still has an output i. 此输出量约等于它的迟滞量。 This output is about equal to its hysteresis. 由于这个不能"关断性",给微压力微流量控制设置了重大的障碍。 Since this can not be "off of" micro-pressure micro-flow control to set a major obstacle. 发明内容本发明所要解决的技术问题是克服上述现有技术中所存在的缺陷,提供一种数字化线性比例流量并联控制阀。 SUMMARY OF THE INVENTION The technical problem to be solved is to overcome the drawbacks of the prior art described above is present, there is provided a digital linear proportional flow control valves connected in parallel. 本发明采用了下列技术方案解决了其技术问题: 一种数字化线性比例流量并联控制阀,至少置有二个电磁阀,电磁阀与电磁阀之间的气、液管道通路置为并联连接,其特征在于:每一个电磁阀气、液管道通路中还串联连接一节流阀,并通过该节流阀使每个电磁阀气、液管道通路大小依序设置为:2N—1X流量基值,其中N为每个电磁阀序数值,所述的流量基值大于0,小于等于2升/分。 The present invention adopts the following technical solution to solve the technical problem: A Digital linearly proportional flow control valves connected in parallel, there is placed at least between two gas solenoid valve, the solenoid valve and the solenoid valve, the liquid passage pipes are connected in parallel is set which characterized in that: each of the gas solenoid valve, the liquid passage pipe connected in series to a throttle valve, and each solenoid valve so that the gas passes through the throttle valve, the liquid passage pipe size sequentially to: 2N-1X base value flow rate, where N is the ordinal value of each solenoid valve, the flow rate of the base is greater than 0 and less than or equal to 2 liters / minute. 本发明与电磁比例阀相比,其优点在于(1)控制码与输出流量值一一对应;(2) 控制特性曲线线性度好;(3)激励响应快;(4)整个控制区都在受控状态,没有迟滞,没有死区,没有不敏感区,可以用于精密的微压微流量控制;(5)流量控制精度高,可以实现零流牟或微流量输出。 Compared with the proportional solenoid valve, which is advantageous in that (1) the control codes and flow rate output values ​​correspond; (2) good linearity of the control characteristic; (3) fast response excitation; (4) in the whole control region controlled state, no hysteresis, no dead zone, there is no dead zone, it may be used for precise micro-pressure micro-flow control; (5) the flow rate control of high precision, can be zero or slightly Mu stream flow output. 本发明可以作为核心调控部件,广泛应用于各种流体(包括气体和液体) 的各种精密压力流量控制系统,特别是精密微压微流i控制系统,以确保设备的精确度、稳定度和安全性。 The present invention can be regulated as a core member, widely used in a variety of precision pressure fluid flow control systems (including gas and liquid), in particular microfluidic i precision micro pressure control system, to ensure the accuracy of the device, stability and safety. 附图说明图1为现有技术中比例压力控制系统原理简图;图2为现有技术中比例流量控制系统原理简图;图3为比例流量电磁阀输入输出特性曲线图;图4为比例压力电磁阀输入输出特性曲线图;图5本发明结构示意图;图6本发明实施例结构示意图;图7本发明实施例输入输出特性曲线图;图8本发明用于医用微压微流量控制气控仪结构原理图。 Figure 1 is a prior art simplified schematic of proportional pressure control system; FIG. 2 is a schematic diagram of the prior art proportional flow control system; FIG. 3 is a flow rate proportional solenoid valve input-output characteristic curve; Figure 4 is a ratio pressure solenoid valve input-output characteristic curve; Figure 5 a schematic view of the structure of the invention; FIG. 6 shows a structure of embodiment of the present invention; FIG embodiment of the input-output characteristic curve of FIG. 7 embodiment of the present invention; FIG. 8 of the present invention for a medical micro-micro-flow control gas pressure control instrument structure diagram. 具体实施方式以下结合图以及实施例来对本发明作进一步的说明。 DETAILED DESCRIPTION The following embodiments and in conjunction with FIGS further illustrate the present invention. 参照图5,本发明所述的并联控制阀,至少置有二个电磁阀,电磁阀与电磁阀之间的气、液管道通路置为并联连接。 Referring to FIG 5, the parallel control valve of the present invention, there is placed at least between two gas solenoid valve, the solenoid valve and the solenoid valve, the liquid passage pipes are connected in parallel is set. 每一个电磁阀气、 液管道通路中还串联连接一节流阀J,并通过该节流阀J使每个电磁阀气、液管道通路大小依序设置为:2N—]乂流量基值,其中N为每个电磁阀序数值。 Each gas solenoid valve, the liquid passage pipe connected in series to a throttle valve J, through the throttle valve and each solenoid valve J gas, liquid passage pipes are sequentially set size: 2N-] qe yl flow value, where N is the ordinal value of each solenoid valve. 所述的电磁阀为电磁闸阀或者电磁滑阀。 The solenoid valve is an electromagnetic valve or an electromagnetic spool valve. 所述的流量基值a大于0,小于等于2升/分。 A base value of the flow rate is greater than 0 and less than or equal to 2 liters / minute. 这样本发明的就可以实现各个控制组件平行供流,组合控流。 Thus the present invention can be implemented in parallel for each flow control means, flow control compositions. 根据上述的构造要求,如果本实施例设置八个气、液管道通路并联连接的电磁阀,则电磁阈气、液管道通路的大小应依序设置为:电磁阀1的气、液管道通路大小为2卜〜流量基值;电磁阀2的气、液管道通路大小为22—^X流量基值;电磁阀3的气、液管道通路大小为23—iX流量基值;电磁阀4的气、液管道通路大小的气、液管道通路大小为24—'X流量基值;电磁阀5的气、液管道通路大小为25—1乂流量基值;电磁阀6的气、液管道通路大小为26—1乂流量基值;电磁阀7的气、液管道通路大小为27—iX流量基值;电磁阀8的气、液管道通路大小为28—1乂流量基值。 According to the above configuration requirements, if the embodiment of the present embodiment is provided eight gas, liquid line solenoid valve is connected in parallel to the passage, the solenoid threshold gas, liquid passage pipe size should be set to sequentially: a gas solenoid valve, the fluid passage conduit size Bu ~ 2-yl flow rate value; gas solenoid valve 2, the liquid passage pipe size yl 22- ^ X flow rate value; 3 gas solenoid valve, the fluid passage conduit size 23-iX-yl flow value; gas solenoid valve 4 , the size of the liquid passage pipe gas, the liquid passage pipe size yl 24-'X flow value; air solenoid valve 5, the liquid conduit flow passage size is 25-1 qe base value; air solenoid valve 6, the size of the liquid passage pipe 26-1 is a base value qe flow; gas solenoid valve 7, the liquid passage pipe size yl 27-iX flow value; gas solenoid valve 8, the liquid conduit flow passage size is 28-1 qe base value. 参见图6,本发明具体实施例为用8个气、液管道通路并联连接的电磁阀,若流量基值设置为0.1升/分,则电磁阀1的气、液管道通路大小是0.1升/分;电磁阀2的气、液管道通路大小是0.2升/ 分;电磁阀3的气、液管道通路大小是0.4升/分;电磁阀4的气、 液管道通路大小是0.8升/分;电磁阀5的气、液管道通路大小是1.6 升/分;电磁阀6的气、液管道通路大小是3.2升/分;电磁阀7的气、液管道通路大小是6.4升/分;电磁阀8的气、液管道通路大小是12.8升/分。 Referring to Figure 6, the specific embodiments of the present invention to use 8 gas, a solenoid valve passage in parallel to the liquid pipe connection, if the flow rate of the base value is set to 0.1 liter / min, the solenoid valve gas 1, liquid line passage size is 0.1 l / min; solenoid gas 2, the fluid conduit passage size is 0.2 l / min; the solenoid valve gas 3, liquid line passage size is 0.4 l / min; solenoid gas 4, the fluid conduit passage size is 0.8 l / min; air solenoid valve 5, the liquid conduit passage size is 1.6 l / min; air solenoid valve 6, the liquid conduit passage size is 3.2 l / min; solenoid gas 7, the fluid conduit passage size is 6.4 l / min; a solenoid valve 8 gas, a liquid passage pipe size is 12.8 liters / min. 本发明可以方便地与电子计算机系统实行连接从而达到实时控制的目的。 The present invention can be conveniently connected to the computer system so as to achieve the implementation of real-time control. 比如设电磁阀的关闭状态为"0",则其打开状态为"1", 上述实施例中的8个电磁阀整体可以组成八位二进制码。 Closed solenoid valve is provided such as "0", its opened state is "1", the above-described embodiment the entire solenoid valve 8 may be composed of eight binary code. 其数据可由全闭状态的"00000000"至全开状态的"11111111",如化为十进制即为0~255。 Which data may be fully closed state "00000000" to the fully opened state of "11111111", that is, as a decimal into 0 ~ 255. 另外,本发明的流量设定理论误差值界为正负最低位设置量值。 Further, the present invention is set to the theoretical flow rate error bound is the least significant bit set negative value. 例如本实施例的调整范围即为0~25.5升/分±0.1升/分。 For example, the adjustment range of the present embodiment is the embodiment of 0 to 25.5 l / min ± 0.1 liter / min. 若控制码为10011011,化为十进数为155,总流量L总-155Xa-155X0.1升/ 分=15.5升/分。 If the control code is 10,011,011, 155 into a decimal number, the total L total flow -155Xa-155X0.1 liters / min 15.5 liters / min. 本发明能很方便地实现二进码控流,为数字化控流,数字化闭环控压奠定了基础。 The present invention can be easily implemented binary code flow control, flow control is digital, the digital closed-loop pressure control basis. 参照图7中8位并联电磁阀的控制特性曲线,本发明与电磁比例阀相比,其优点之一是控制码与输出流量值可一一对应。 7, 8 the control characteristic of the solenoid valve in parallel with reference to FIGS., The present invention is compared with the electromagnetic proportional valve, one advantage that the control code and the output flow rate value may be one correspondence. 由图7可知, 主控单元给出一个控制码,8位并联电磁阀只有一个输出总流量与之对应,它是唯一的。 Seen from FIG. 7, the main control unit gives a control code, in parallel with the solenoid valve 8 only a corresponding total flow output, which is unique. 而比例压力调节阀或比例流量调节阀的控制量却有二个输出量与之对应,还要顾及上次控制点的位置,增量控制与减量控制走的是二条曲线。 And proportional control amount proportional flow control valve or a pressure regulating valve there are two output corresponding thereto, also taking into account the position of the last control point, the control increment and decrement control taking the two curves. 若控制转向,则会出现一段不敏感区。 If the steering control, some insensitive zone appears. 这是阀的迟滞造成的。 This is caused by hysteresis valve. 控制换向时,虽然控制值变了,但输出值不变。 Commutation control, although the control value has changed, but the output value remains unchanged. 只有越过不敏感区,移到另一条控制曲线上,才能使输出量得到控制。 Not only over the sensitive area, moved to another control curve in order to make the output control. 本发明与电磁比例阀相比,其优点之二是控制特性曲线线性度好。 Compared with the proportional solenoid valve, the advantage of the two control characteristic is good linearity. 由图7可知,8位并联电磁阀的特性曲线是一条固定斜率过原点零位的直线,没有一点扭曲,线性度极好。 Seen from FIG. 7, a characteristic curve 8 in parallel a solenoid valve is fixed slope a straight line through the origin is zero, with no distortion, excellent linearity. 对比图3所示比例流量电磁阀的控制特性曲线,以增量控制为例,0〜0.26A是它的死区,阀始终没有打开;0.26^0.4A是斜率变化很大的曲线;0.4〜0.55A这一段接近于直线,线性度较好;0.55〜1A这一段又是斜率变化很大的曲线。 Contrast control characteristic shown in FIG. 3 solenoid proportional flow valve to increase control as an example, 0~0.26A its dead zone, the valve has not opened; 0.26 ^ 0.4A is a great change in the slope of the curve; 0.4~ this is close to a straight line section 0.55A, good linearity; 0.55~1A this period is highly variable slope curve. 而图5所示的为比例压力电磁阀的控制特性曲线。 And FIG. 5 is a pressure proportional solenoid valve control characteristic curve shown. 由于该阀一般内置压力自调节环节,80%控制段线性度较好,0~10%和90%~100%控制段,曲率变化较大,线性度较差。 Since the built-in pressure valve is typically part of a self-regulating, the linearity of the control segment is preferably 80%, 0 to 10% and 90% to 100% of the control section, the larger curvature poor linearity. 本发明与电磁比例阀相比,其优点之三是激励响应快。 Compared with the proportional solenoid valve, which is the advantage of the three excitation fast response. 特别是我们采用并联控制,响应时间与控制量的增加值大小无关,仅与电磁阀开关速度有关。 In particular, we use a parallel control, the response time and the value of the control amount is increased regardless of the size, only the solenoid valve switching speed. 常规的二位二通电磁阀每秒可连续开关10次,开关时间小于5ms,因此系统激励响应时间小于5ms。 Continuously switching a conventional two-way solenoid valve 10 times per second, the switching time is less than 5ms, and therefore the excitation system response time less than 5ms. 而比例调节电磁阀激励响应时间要大几十倍。 And the proportion of the excitation response time of the regulating solenoid valve several times larger. 如国外著名品牌的高精度比例压力电磁阀,阶跃响应的数据如下:从0—90。 The famous brand high-precision proportional pressure solenoid valve, step response data are as follows: from 0-90. /。 /. Pmax,开阀响应的时间为200ms; 从100%—10%Pmax,关阀响应的时间为500ms。 Pmax, the valve opening response time is 200ms; time from 100% -10% Pmax, close the valve in response to 500ms. 响应时间分别是并联电磁阀的40倍和IOO倍。 Response time and 40 times respectively in parallel IOO times solenoid valve. 比例流量阀是直动型的,响应的时间比比例压力阀短,但也要在50ms以上,响应时间是并联电磁阀的IO倍。 Proportional flow valve is direct-acting type, the response time is shorter than the proportional pressure valve, but also in 50ms or more times parallel IO response time of the solenoid valve. 本发明与电磁比例阀相比,其优点之四是整个控制区都在受控状态,没有迟滞,没有死区,没有不敏感区,可以用于精密的微压微流量控制。 Compared with the proportional solenoid valve of the present invention, the advantage of the entire control region is four in a controlled state, no hysteresis, no dead zone, there is no dead zone, may be used in micro-precision micro-pressure flow control. 比例压力电磁阀,在增量起调区,线性度差,微压控制精度难以保证。 A pressure proportional solenoid valve, the increment from the transfer zone, poor linearity, micro pressure control difficult to ensure accuracy. 在减量调整时,由于迟滞的存在,当控制量为零时,阀仍有一微压量输出, 一般约5KPa,关不死。 When quantity adjustments, since hysteresis is present, when the control amount is zero, there is still a micro-valve output pressure, typically about 5KPa, related death. 因此,在微压微流量控制中容易造成压力失控上冲。 Thus, in the micro-flow control micro-pressure likely to cause loss of control pressure overshoot. 比例流量电磁阀死区很大,约占整个控制段的30%,且起调区控制特性曲线曲率变化很大,线性度极差,很难使微压微流量的精度得到有效的控制。 Flow rate proportional solenoid valve dead zone is large, about 30% of the entire control segment, a control zone and from the transfer characteristic curvature changes greatly, poor linearity, accuracy is difficult to micro-pressure micro-flow are effectively controlled. 本发明并联电磁阀与电磁比例阀相比,其优点之五是流量控制精度高,可以零流量或微流量输出。 Compared with the solenoid valve in parallel with the electromagnetic proportional valve of the present invention, the advantage of high precision flow rate control is five, or may output zero flow micro-flow. 最小流量输出取决于最低位,即"0 " 位a的设定量。 The minimum flow rate output depending on the least significant bit, i.e., a set amount of "0" of a bit. 最髙位增加l位,流量增大一倍。 The most Gao digit increase l level, flow doubled. 最低位量为流量控制的分辨率值。 The minimum amount for the resolution of the value of the flow control. 全量程流量自由设定,精确输出,最大误差-最低位值+各位电磁阀整定误差。 Full scale flow freely set, accurate output, the maximum deviation - the minimum bit value you + solenoid valve tuning error. 另外,可根据各电磁阀开通时间积时计算, 较精确地进行总用量的统计。 Further, when the solenoid valves according to the opening time product calculating, more accurate statistics for the total amount. 而比例电磁阀由于其控制特性的非线性、迟滞、死区以及增量控制和减量控制走的是二条曲线,因此流量设定误差很大。 And due to its proportional solenoid valve control characteristic nonlinearity, hysteresis, dead band and increment and decrement control of control is taking the two curves, and therefore the flow rate is set large error. 参照图8,此为以本发明作为核心执行部件的控制系统的医用微压微流量控制气控仪系统原理简图。 Referring to FIG. 8, the present invention is to perform as a control system core member of a medical micro-pressure micro-flow diagram of the control principle of pneumatic instrument system. 该医用微压微流量控制气控仪选用0〜5KPa双精密微压传感器并联测压,以确保测压数据的可信度。 The micro-pressure medical gas control micro-flow control device adopts a double-precision micro credibility 0~5KPa parallel load pressure sensor, to ensure that the pressure measurement data. 压力信号经运算放大后,转变成0〜5V的电压信号。 Pressure signal after the operational amplifier, is converted into a voltage signal 0~5V. 系统以嵌入式单板机作为微电脑主控单元,此单板机内置多通道10位A/D转换部分。 SBC embedded microcomputer system as the master unit, this built-in multi SBC channel 10 bit A / D conversion section. 选用三菱公司5.7"液晶触摸屏作为本实施例的人机界面。系统主控单元的8位开关量输出口(1/0口)作为8位并联电磁阀的控制接口,根据流量控制二进制的码值,并行控制各电磁阀的开关。系统调流范围为0〜25.5升/ 分,流量控制精度为土Ol升/分。输入控制主控单元的控制程序和触摸屏的图象程序,即组成了调流范围为0~25升/分,控压范围为0~4KPa GOmmHg)的气控仪。上述实施例气控仪与以比例电磁阀(压力型或流量型)为调控部件的系统相比有明显的优点-1、 激劢响应快,超调量小,压力偏差修正快。从开机启动到压力达到压力设定点值的动态控制过程时间很短,很快压力就稳定下来,控压过程不会出现压力上下波动现象。2、 控流精度高,控流范围宽,可以进行微量输出。由于控制特性曲线线性度好,没有迟滞,没有死区,以上述实施例为例,零流量、 HMI "embodiment of the present embodiment selection LCD touch screen Mitsubishi 5.7 8-bit digital output port (port 1/0) as the main control unit 8 controls the parallel interface to the solenoid valve, the flow control according to the binary code value , parallel to the respective solenoid valves switch the control system adjusting flow range 0~25.5 liters / min, the flow rate control accuracy of soil Ol l / min. the main control unit controls an image input program and a touch screen control program, i.e. the composition of the tune flow range of 0 to 25 l / min, the control pressure in the range of 0 ~ 4KPa GOmmHg) gas control apparatus above embodiments as compared with the gas analyzer at a ratio control solenoid valve (or pressure type flow type) system for the regulation member -1 obvious advantages, the laser Mai fast response, small overshoot, faster pressure deviation correction. starting from the pressure reaches the pressure set point value of the power dynamic control process time is very short, pressure is quickly stabilized, pressure control process phenomenon does not occur .2 pressure fluctuations, high precision flow control, a wide range of flow control may be subjected to the trace output. Since the control characteristics of a good linearity curve, no hysteresis, no dead zone, the above-described embodiments, for example, zero flow, 0.1升/分以及0^25.5升/分之间任意值, 都能精确地进行流量控制,流量输出值和其控制码严格对应。3、 控压精度高,控压范围宽,可以进行极微压输出。以上述实施例为例,可以把输出压力设置在0.1KPa, 4KPa,也可设置在0〜4KPa之间任意点,都能保证控压精度。 0.1 l / min and 25.5 l ^ 0 to any value between min /, can accurately control the flow rate, the flow rate output values ​​and their control codes correspond exactly .3, high precision control pressure, a wide pressure control range, can be minimal pressure output. in the embodiment described above as an example, the output pressure may be provided at 0.1KPa, 4KPa, may be provided at any point between 0~4KPa, can ensure the accuracy of pressure control.

Claims (5)

1. 一种数字化线性比例流量并联控制阀,至少置有二个电磁阀,电磁阀与电磁阀之间的气、液管道通路置为并联连接,其特征在于:每一个电磁阀气、液管道通路中还串联连接一节流阀,并通过该节流阀使每个电磁阀气、液管道通路大小依序设置为:2N-1×流量基值,其中N为每个电磁阀序数值,所述的流量基值大于0,小于等于2升/分。 A digital linear proportional flow control valves connected in parallel, there is placed at least between two gas solenoid valve, the solenoid valve and the solenoid valve, the liquid passage pipes are connected in parallel is set, wherein: each of the gas solenoid valve, liquid conduit path connected in series to a throttle valve and the throttle by the solenoid valve each gas, liquid passage pipes are sequentially set size: 2N-1 × flow rate value group, where N is the ordinal value of each solenoid valve, the base flow rate value is greater than 0 and less than or equal to 2 liters / minute.
2、 根据权利要求1所述的数字化线性比例流量并联控制阀,其特征在于:所述的电磁阀为电磁闸阀或者电磁滑阀。 2, parallel digital linearly proportional flow control valve according to claim 1, wherein: said solenoid valve is a solenoid valve or an electromagnetic spool valve.
3、 根据权利要求1所述的数字化线性比例流量并联控制阀,其特征在于:所述的流量基值为0.1升/分。 3, the digital linear proportional flow according to claim 1, parallel control valve, wherein: said base flow rate of 0.1 liter / min.
4、 根据权利要求1所述的数字化线性比例流量并联控制阀,其特征在于:置有八个气、液管道通路并联连接的电磁阀,电磁阔的气、 液管道通路大小依序设置为:第一个电磁阀为2HX流量基值;第二个龟磁阀为22—'X流量基值;第三个电磁阀为23—'X流量基值;第四个电磁阀为24—'X流量基值;第五个电磁阀为25—'X流量基值;第六个电磁阀为2S^X流量基值;第七个电磁阀为2""X流量基值;第八个电磁阀为2^X流量基值。 4. The digital linear parallel flow proportional control valve according to claim 1, wherein: there are eight counter gas, liquid line solenoid valve is connected in parallel to the passage, the width of the electromagnetic gas, liquid passage pipe size to sequentially: a solenoid valve for the first flow 2HX base value; the second solenoid valve is a turtle 22-'X flow value group; the third solenoid valve group 23-'X flow value; fourth solenoid valve 24-'X flow base value; fifth solenoid valve group 25-'X flow value; sixth solenoid valve 2S ^ X flow rate value group; seventh solenoid valve 2 "" X flow rate value group; eighth solenoid valve flow rate of 2 ^ X base value.
5、 根据权利要求l、 4所述的数字化线性比例流量并联控制阀,其特征在于:置有八个气、液管道通路并联连接的电磁阀,电磁阀的气、液管道通路大小依序为:第一个电磁阀0.1升/分;第二个电磁阀0.2升/分;第三个电磁阀0.4升/分;第四个电磁阀0.8升/分; 第五个电磁阀1.6升/分;第六个电磁阀3.2升/分;第七个电磁阀6.4升/分;第八个电磁阀12.8升/分。 5, according to claim L, parallel digital linear proportional flow control valve of claim 4, wherein: there are eight counter gas, liquid line solenoid valve connected in parallel passages, the gas solenoid valve, the liquid passage pipe size order, is : a first solenoid valve 0.1 l / min; the second solenoid valve 0.2 l / min; the third solenoid valve 0.4 l / min; the fourth solenoid valve 0.8 l / min; the fifth solenoid valve 1.6 l / min ; sixth solenoid valve 3.2 l / min; the seventh solenoid valve 6.4 l / min; the eighth solenoid valve 12.8 l / min.
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CN101485591B (en) 2008-01-14 2012-07-04 庄海 Intelligent constant-voltage variable-flow pneumoperitoneum machine
CN102192217A (en) * 2011-03-10 2011-09-21 武汉航天波纹管股份有限公司 Full digital electro-hydraulic position control system based on multiple control policies
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3156157A (en) * 1961-04-11 1964-11-10 Burroughs Corp Positioning control system and apparatus
US3437098A (en) * 1965-10-25 1969-04-08 North American Utility Constru System of automatic controls for gas mixing
US4020862A (en) * 1973-12-15 1977-05-03 Idra-Pressen G.M.B.H. Apparatus for controlling the volume and pressure of a pressure medium in a die-casting machine
CN86208370U (en) * 1986-10-30 1987-12-16 华中工学院 Digital colltrolling solenoid valve
DE4431103A1 (en) * 1994-09-01 1996-03-14 Danfoss As Hydraulic control unit
JP2000205204A (en) * 1999-01-11 2000-07-25 Hitachi Constr Mach Co Ltd Spool type directional selector valve pilot system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3156157A (en) * 1961-04-11 1964-11-10 Burroughs Corp Positioning control system and apparatus
US3437098A (en) * 1965-10-25 1969-04-08 North American Utility Constru System of automatic controls for gas mixing
US4020862A (en) * 1973-12-15 1977-05-03 Idra-Pressen G.M.B.H. Apparatus for controlling the volume and pressure of a pressure medium in a die-casting machine
CN86208370U (en) * 1986-10-30 1987-12-16 华中工学院 Digital colltrolling solenoid valve
DE4431103A1 (en) * 1994-09-01 1996-03-14 Danfoss As Hydraulic control unit
JP2000205204A (en) * 1999-01-11 2000-07-25 Hitachi Constr Mach Co Ltd Spool type directional selector valve pilot system

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