CN100395170C - Lifting platform - Google Patents

Lifting platform Download PDF

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Publication number
CN100395170C
CN100395170C CNB2007100614817A CN200710061481A CN100395170C CN 100395170 C CN100395170 C CN 100395170C CN B2007100614817 A CNB2007100614817 A CN B2007100614817A CN 200710061481 A CN200710061481 A CN 200710061481A CN 100395170 C CN100395170 C CN 100395170C
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China
Prior art keywords
sliding
frame
outer frame
fixedly arranged
lifting platform
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Expired - Fee Related
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CNB2007100614817A
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Chinese (zh)
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CN101012048A (en
Inventor
王晓奎
杨凯骏
刘瑞霞
霍灼琴
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SHANXI BRANCH OF NEW ENERGY Co
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CETC 2 Research Institute
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Abstract

本发明提供了一种精密多功能升降平台，解决了现有微电子设备升降平台制造加工难度大，成本高，并且不能监测平台所受的压力的技术问题。包括控制器、固定底座(2)、其上固定设置有丝杠固定座(3)，其上固定设置有步进电机(1)及滑动外架(4)，滑动外架上固定设置有滑动架(5)，在滑动架(5)上设置有小滑动件(14)，其下部通过丝杠(12)及丝杠螺母(13)与同步带轮(11)、同步带(10)与步进电机(1)连接，滑动外架(4)的上部与低磨擦气缸(6)同定连接；在所述滑动架(5)的上部固定连有活动法兰(8)，在其下方固定设置有压力传感器(7)，本平台集升降加压测压于一体。

Figure 200710061481

The invention provides a precision multifunctional lifting platform, which solves the technical problems that the existing microelectronic equipment lifting platform is difficult to manufacture and process, the cost is high, and the pressure on the platform cannot be monitored. It includes a controller, a fixed base (2), a screw fixing seat (3) fixedly arranged on it, a stepping motor (1) and a sliding outer frame (4) fixedly arranged on it, and a sliding outer frame is fixedly arranged on the sliding outer frame frame (5), on the sliding frame (5) is provided with a small sliding piece (14), the lower part of which passes through the lead screw (12) and the lead screw nut (13) and the timing pulley (11), the timing belt (10) and The stepper motor (1) is connected, and the upper part of the sliding outer frame (4) is fixedly connected with the low-friction cylinder (6); a movable flange (8) is fixedly connected to the upper part of the sliding frame (5), and fixed below it A pressure sensor (7) is provided, and the platform integrates lifting, pressurizing and measuring pressure.

Figure 200710061481

Description

升降平台 Lifting platform

技术领域 technical field

本发明涉及一种升降平台，特别涉及一种应用在精密机械特别是微电子设备上集升降、加压、测压功能于一体的升降平台。The invention relates to a lifting platform, in particular to a lifting platform which integrates functions of lifting, pressurization and pressure measurement and is applied to precision machinery, especially microelectronic equipment.

背景技术 Background technique

目前，精密机械特别是微电子设备升降平台的功能单一，结构复杂，并且不能监测平台所受的压力。At present, precision machinery, especially the lifting platform of microelectronic equipment, has a single function and a complex structure, and cannot monitor the pressure on the platform.

发明内容 Contents of the invention

本发明解决了现有精密机械特别是微电子设备升降平台制造加工难度大，成本高，并且不能监测平台所受的压力的技术问题。The invention solves the technical problems that the existing precision machinery, especially the lifting platform of microelectronic equipment is difficult to manufacture and process, the cost is high, and the pressure on the platform cannot be monitored.

本发明解决其技术问题所采用的技术方案如下：The technical solution adopted by the present invention to solve its technical problems is as follows:

它包括控制器、固定底座2、其上固定设置有丝杠固定座3，固定座3上固定设置有步进电机1及滑动外架4，所述的滑动外架4上同定设置有交叉辊子导轨17，导轨上设置有滑动架5，在滑动架5上设置有导轨18，导轨18上设置有小滑动件14，该小滑动件14的下部通过丝杠12及丝杠螺母13与同步带轮11连接，同步带轮11通过同步带10与步进电机1的连轴器9连接，所述滑动外架4的上部与低磨擦气缸6固定连接；在所述滑动架5的上部固定连有活动法兰8，在其下方固定设置有压力传感器7，压力传感器7与显示器15电连接。It includes a controller, a fixed base 2, on which a screw fixing seat 3 is fixedly arranged, a stepping motor 1 and a sliding outer frame 4 are fixedly arranged on the fixed seat 3, and cross rollers are fixedly arranged on the sliding outer frame 4 Guide rail 17, a slide frame 5 is arranged on the guide rail, a guide rail 18 is arranged on the slide frame 5, a small sliding part 14 is arranged on the guide rail 18, and the lower part of the small sliding part 14 is connected with the synchronous belt by the lead screw 12 and the lead screw nut 13 Wheel 11 is connected, synchronous pulley 11 is connected with coupling 9 of stepping motor 1 through synchronous belt 10, and the top of described sliding outer frame 4 is fixedly connected with low-friction cylinder 6; There is a movable flange 8, under which a pressure sensor 7 is fixedly arranged, and the pressure sensor 7 is electrically connected with a display 15.

所述的丝杠固定座3与滑动架5之间可设置有机械定位座16。A mechanical positioning seat 16 may be arranged between the screw fixing seat 3 and the sliding frame 5 .

本多功能平台集升降、加压、测压于一体。This multifunctional platform integrates lifting, pressurization and pressure measurement.

附图说明 Description of drawings

图1本实用新型的结构主示意图Fig. 1 main schematic diagram of structure of the utility model

图2本实用新型的滑轨定位结构示意图Figure 2 Schematic diagram of the positioning structure of the slide rail of the present invention

具体实施方式 Detailed ways

下面结合附图详细叙述该发明专利的具体实施方式：Describe the specific embodiment of this invention patent in detail below in conjunction with accompanying drawing:

本发明采用两级直线导轨，固定在滑动外架4上的一级导轨实现平台的精确导向；固定在滑动架5上的二级导轨保证当平台移动到最低点时(即不工作时)，压力传感器7的压力检测点不接触气缸6活塞杆头部，延长了压力传感器7的使用寿命；低摩擦气缸、压力传感器、精密调压阀，配合计算机系统实现了压力的闭环控制。低摩擦气缸6和小滑动件14用螺钉固定，小滑动件14与滑动架5通过交叉辊子导轨连接，滑动架5与滑动外架4用交叉辊子导轨连接，调节两副导轨能自由滑动，用螺钉将丝杠12、丝杠螺母13连接到小滑动件14上，将丝杠12插入丝杠固定座，对好位置后，将丝杠固定座与放平滑动外架4用螺钉固定，连接步进电机1、电机固定座，联轴器到丝杠固定座上，同步带轮11和同步带10连接在两轴上，调节电机固定座，预紧同步带10，要求两同步带轮转动灵活，将固定底座2与丝杠固定座3连接后，将平台立起，安装压力传感器7到活动法兰8上，再将活动法兰8螺接固定在滑动架5上。The present invention adopts two-level linear guide rails, and the first-level guide rails fixed on the sliding outer frame 4 realize the precise guidance of the platform; the second-level guide rails fixed on the sliding frame 5 ensure that when the platform moves to the lowest point (that is, when it is not working), The pressure detection point of the pressure sensor 7 does not touch the head of the piston rod of the cylinder 6, which prolongs the service life of the pressure sensor 7; the low-friction cylinder, pressure sensor, and precision pressure regulating valve cooperate with the computer system to realize the closed-loop control of pressure. The low-friction cylinder 6 and the small sliding part 14 are fixed with screws, the small sliding part 14 is connected with the sliding frame 5 through the cross roller guide rail, the sliding frame 5 is connected with the sliding outer frame 4 with the cross roller guide rail, and the two pairs of guide rails can be adjusted to slide freely. Connect the lead screw 12 and the lead screw nut 13 to the small slider 14 with screws, insert the lead screw 12 into the lead screw fixing seat, and after aligning the position, fix the lead screw fixing seat and the horizontal sliding outer frame 4 with screws, and connect Stepper motor 1, motor fixing seat, coupling to screw fixing seat, timing belt pulley 11 and timing belt 10 are connected on two shafts, adjust motor fixing seat, pre-tighten timing belt 10, and two timing pulleys are required to rotate Flexible, after the fixed base 2 is connected with the lead screw fixing seat 3, the platform is erected, the pressure sensor 7 is installed on the movable flange 8, and the movable flange 8 is screwed and fixed on the sliding frame 5.

Claims (2)

1.一种精密多功能升降平台，包括控制器、固定底座(2)、其上固定设置有丝杠固定座(3)，固定座(3)上固定设置有步进电机(1)及滑动外架(4)，其特征在于：所述的滑动外架(4)上固定设置有交叉辊子导轨(17)，导轨上设置有滑动架(5)，在滑动架(5)上设置有导轨(18)，导轨(18)上设置有小滑动件(14)，该小滑动件(14)的下部通过丝杠(12)及丝杠螺母(13)与同步带轮(11)连接，同步带轮(11)通过同步带(10)与步进电机(1)的连轴器(9)连接，所述滑动外架(4)的上部与低磨擦气缸(6)固定连接；在所述滑动架(5)的上部固定连有活动法兰(8)，在其下方固定设置有压力传感器(7)，压力传感器(7)与显示器(15)电连接。1. A precision multifunctional lifting platform, including a controller, a fixed base (2), a screw fixing seat (3) fixedly arranged on it, a stepping motor (1) and a sliding The outer frame (4) is characterized in that: the sliding outer frame (4) is fixedly provided with a cross roller guide rail (17), the guide rail is provided with a sliding frame (5), and the sliding frame (5) is provided with a guide rail (18), the guide rail (18) is provided with a small sliding part (14), the bottom of the small sliding part (14) is connected with the synchronous pulley (11) through the leading screw (12) and the leading screw nut (13), synchronously The pulley (11) is connected with the shaft coupling (9) of the stepper motor (1) through the synchronous belt (10), and the top of the sliding outer frame (4) is fixedly connected with the low-friction cylinder (6); The upper part of the sliding frame (5) is fixedly connected with a movable flange (8), and a pressure sensor (7) is fixedly arranged below it, and the pressure sensor (7) is electrically connected with the display (15). 2.根据权利要求1所述的一种精密多功能升降平台，其特征在于：所述的丝杠固定座(3)与滑动架(5)之间设置有机械定位座(16)。2. A precision multifunctional lifting platform according to claim 1, characterized in that: a mechanical positioning seat (16) is provided between the screw fixing seat (3) and the sliding frame (5).
CNB2007100614817A 2007-02-03 2007-02-03 Lifting platform Expired - Fee Related CN100395170C (en)

Priority Applications (1)

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CNB2007100614817A CN100395170C (en) 2007-02-03 2007-02-03 Lifting platform

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Application Number Priority Date Filing Date Title
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CN100395170C true CN100395170C (en) 2008-06-18

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102052437A (en) * 2010-12-21 2011-05-11 东莞市源兴光学仪器有限公司 High precision lifting device
CN102248430B (en) * 2011-06-16 2013-01-16 西北工业大学 Multi-shaft precise linkage feeding equipment
CN103801714A (en) * 2013-12-30 2014-05-21 苏州亚安智能科技有限公司 Efficient mechanical skid platform
CN103771297A (en) * 2014-01-24 2014-05-07 南通剑桥输送设备有限公司 Simple lifting platform
CN104909302A (en) * 2015-06-28 2015-09-16 黄浩 Elevating loading equipment
CN106044622A (en) * 2016-06-30 2016-10-26 南京卓基工业设备有限公司 Lifting device
CN106006459A (en) * 2016-07-11 2016-10-12 长安大学 A compact and small precision elevator
CN107101913A (en) * 2017-05-22 2017-08-29 兰州交通大学 A kind of Hydrophobicity of Composite Insulator detection means
CN111252694A (en) * 2020-03-30 2020-06-09 上海诚淘机械有限公司 A kind of cake machine lifting platform
CN112431916A (en) * 2020-12-31 2021-03-02 江伟仁 High-speed precise gear power transmission device and transmission method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1126524A (en) * 1997-05-08 1999-01-29 Tokyo Electron Ltd Probe device
JP3222412B2 (en) * 1997-10-22 2001-10-29 株式会社東京カソード研究所 Probe card inspection method
JP2002100666A (en) * 2000-09-22 2002-04-05 Yokogawa Electric Corp Lift for stage
EP1202330A2 (en) * 2000-10-26 2002-05-02 Applied Materials, Inc. De-coupled wafer lift and five axis adjustable heater lift system for CVD process chamber
US20020126437A1 (en) * 2001-03-12 2002-09-12 Winbond Electronics Corporation Electrostatic chuck system and method for maintaining the same
CN2656396Y (en) * 2003-09-17 2004-11-17 华中科技大学机械科学与工程学院 Low light electronic mechanical system air fight packaging clamping device
CN1565054A (en) * 2002-10-21 2005-01-12 东京毅力科创株式会社 Prober and probe testing method for temperature-controlling object to be tested

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1126524A (en) * 1997-05-08 1999-01-29 Tokyo Electron Ltd Probe device
JP3222412B2 (en) * 1997-10-22 2001-10-29 株式会社東京カソード研究所 Probe card inspection method
JP2002100666A (en) * 2000-09-22 2002-04-05 Yokogawa Electric Corp Lift for stage
EP1202330A2 (en) * 2000-10-26 2002-05-02 Applied Materials, Inc. De-coupled wafer lift and five axis adjustable heater lift system for CVD process chamber
US20020126437A1 (en) * 2001-03-12 2002-09-12 Winbond Electronics Corporation Electrostatic chuck system and method for maintaining the same
CN1565054A (en) * 2002-10-21 2005-01-12 东京毅力科创株式会社 Prober and probe testing method for temperature-controlling object to be tested
CN2656396Y (en) * 2003-09-17 2004-11-17 华中科技大学机械科学与工程学院 Low light electronic mechanical system air fight packaging clamping device

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Owner name: SHANXI ZHONGDIANKE NEW ENERGY CO., LTD.

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Address after: 030032 Shanxi city of Taiyuan province Taiyuan economic and Technological Development Zone Tang Cassia Road No. 5

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Granted publication date: 20080618

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