CN100369713C - 一种化学机械法金刚石膜抛光装置及其抛光方法 - Google Patents
一种化学机械法金刚石膜抛光装置及其抛光方法 Download PDFInfo
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- CN100369713C CN100369713C CNB2005100340235A CN200510034023A CN100369713C CN 100369713 C CN100369713 C CN 100369713C CN B2005100340235 A CNB2005100340235 A CN B2005100340235A CN 200510034023 A CN200510034023 A CN 200510034023A CN 100369713 C CN100369713 C CN 100369713C
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- diamond film
- polishing
- temperature
- polishing chassis
- chassis
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
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CNB2005100340235A CN100369713C (zh) | 2005-04-11 | 2005-04-11 | 一种化学机械法金刚石膜抛光装置及其抛光方法 |
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CNB2005100340235A CN100369713C (zh) | 2005-04-11 | 2005-04-11 | 一种化学机械法金刚石膜抛光装置及其抛光方法 |
Publications (2)
Publication Number | Publication Date |
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CN1672875A CN1672875A (zh) | 2005-09-28 |
CN100369713C true CN100369713C (zh) | 2008-02-20 |
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CNB2005100340235A Expired - Fee Related CN100369713C (zh) | 2005-04-11 | 2005-04-11 | 一种化学机械法金刚石膜抛光装置及其抛光方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE1017837A3 (nl) * | 2007-11-05 | 2009-08-04 | Wetenschappelijk En Tech Onder | Werkwijze en inrichting voor het mechanisch bewerken van diamant. |
CN101972979B (zh) * | 2010-08-30 | 2012-03-21 | 南京航空航天大学 | 一种金刚石表面化学机械复合研磨抛光方法与装置 |
CN103909464B (zh) * | 2013-01-09 | 2017-10-31 | 华邦电子股份有限公司 | 化学机械研磨方法与自我对准方法 |
CN103639886A (zh) * | 2013-11-29 | 2014-03-19 | 上海华力微电子有限公司 | 用于w-cmp的化学机械研磨装置及研磨方法 |
CN103934746A (zh) * | 2014-05-15 | 2014-07-23 | 常州机电职业技术学院 | 平面研磨装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0938856A (ja) * | 1995-07-26 | 1997-02-10 | Sumitomo Electric Ind Ltd | 表面研磨装置および表面研磨方法 |
CN2561551Y (zh) * | 2002-08-23 | 2003-07-23 | 郑州磨料磨具磨削研究所 | 金刚石锯片砂带抛光机 |
CN1514760A (zh) * | 2001-03-30 | 2004-07-21 | ��ķ�о�����˾ | 可调节力作用空气台板与主轴系统及其使用方法 |
CN1520348A (zh) * | 2001-06-26 | 2004-08-11 | ��ķ�о�����˾ | 用于化学机械抛光的端点检测系统 |
CN2822875Y (zh) * | 2005-04-11 | 2006-10-04 | 广东工业大学 | 一种化学机械法金刚石膜抛光装置 |
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2005
- 2005-04-11 CN CNB2005100340235A patent/CN100369713C/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0938856A (ja) * | 1995-07-26 | 1997-02-10 | Sumitomo Electric Ind Ltd | 表面研磨装置および表面研磨方法 |
CN1514760A (zh) * | 2001-03-30 | 2004-07-21 | ��ķ�о�����˾ | 可调节力作用空气台板与主轴系统及其使用方法 |
CN1520348A (zh) * | 2001-06-26 | 2004-08-11 | ��ķ�о�����˾ | 用于化学机械抛光的端点检测系统 |
CN2561551Y (zh) * | 2002-08-23 | 2003-07-23 | 郑州磨料磨具磨削研究所 | 金刚石锯片砂带抛光机 |
CN2822875Y (zh) * | 2005-04-11 | 2006-10-04 | 广东工业大学 | 一种化学机械法金刚石膜抛光装置 |
Non-Patent Citations (1)
Title |
---|
金刚石膜机械和机械-化学抛光. 陈春林,王成勇,陈君.金刚石与磨料模具工程,第1期. 2002 * |
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Publication number | Publication date |
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CN1672875A (zh) | 2005-09-28 |
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Fong Hing Precision Industry Co., Ltd. Assignor: Guangdong University of Technology Contract fulfillment period: 2008.2.28 to 2015.2.27 Contract record no.: 2009440001718 Denomination of invention: Chemico-mechanical diamond film polisher and polishing method Granted publication date: 20080220 License type: Exclusive license Record date: 20091022 |
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LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2008.2.28 TO 2015.2.27; CHANGE OF CONTRACT Name of requester: FENGXING PRECISION INDUSTRY( HUIZHOU ) CO., LTD. Effective date: 20091022 |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080220 Termination date: 20210411 |