CH598600A5CH912277ACH912277ACH598600A5CH 598600 A5CH598600 A5CH 598600A5CH 912277 ACH912277 ACH 912277ACH 912277 ACH912277 ACH 912277ACH 598600 A5CH598600 A5CH 598600A5
Authority
CH
Switzerland
Application number
CH912277A
Inventor
Walter Dr Umraht
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co KgfiledCriticalLeybold Heraeus Gmbh & Co Kg
Publication of CH598600A5publicationCriticalpatent/CH598600A5/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Forging
(AREA)
Treatments Of Macromolecular Shaped Articles
(AREA)
