CA992110A - Device for the precise positioning on a mobile mounting, of an object holder introduced through an airlock into a vacuum tight enclosure - Google Patents

Device for the precise positioning on a mobile mounting, of an object holder introduced through an airlock into a vacuum tight enclosure

Info

Publication number
CA992110A
CA992110A CA183,257A CA183257A CA992110A CA 992110 A CA992110 A CA 992110A CA 183257 A CA183257 A CA 183257A CA 992110 A CA992110 A CA 992110A
Authority
CA
Canada
Prior art keywords
airlock
precise positioning
object holder
tight enclosure
vacuum tight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA183,257A
Other languages
English (en)
Other versions
CA183257S (en
Inventor
Jean Bouygues
Rene Gerard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Application granted granted Critical
Publication of CA992110A publication Critical patent/CA992110A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Accommodation For Nursing Or Treatment Tables (AREA)
CA183,257A 1972-10-13 1973-10-12 Device for the precise positioning on a mobile mounting, of an object holder introduced through an airlock into a vacuum tight enclosure Expired CA992110A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7236420A FR2202759B1 (de) 1972-10-13 1972-10-13

Publications (1)

Publication Number Publication Date
CA992110A true CA992110A (en) 1976-06-29

Family

ID=9105627

Family Applications (1)

Application Number Title Priority Date Filing Date
CA183,257A Expired CA992110A (en) 1972-10-13 1973-10-12 Device for the precise positioning on a mobile mounting, of an object holder introduced through an airlock into a vacuum tight enclosure

Country Status (6)

Country Link
US (1) US3860124A (de)
JP (1) JPS4995584A (de)
CA (1) CA992110A (de)
DE (1) DE2350909A1 (de)
FR (1) FR2202759B1 (de)
GB (1) GB1447096A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4042119A (en) * 1975-06-30 1977-08-16 International Business Machines Corporation Workpiece positioning apparatus
JPS5949206U (ja) * 1982-09-21 1984-04-02 東京精密測器株式会社 真空容器内被加工体の位置制御装置
CN104401713A (zh) * 2014-09-27 2015-03-11 昆山允升吉光电科技有限公司 一种掩模框的搬运装置
NO345647B1 (en) * 2019-09-25 2021-05-25 Autostore Tech As Gas isolated storage system
CN112809650A (zh) * 2021-02-08 2021-05-18 天津大学 一种步进电机内嵌驱动式二自由度定位平台

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3188879A (en) * 1961-07-03 1965-06-15 Conley micromanipulator

Also Published As

Publication number Publication date
GB1447096A (en) 1976-08-25
FR2202759A1 (de) 1974-05-10
JPS4995584A (de) 1974-09-10
FR2202759B1 (de) 1980-02-15
US3860124A (en) 1975-01-14
DE2350909A1 (de) 1974-04-18

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