CA905564A - Susceptor structure in silicon epitaxy - Google Patents

Susceptor structure in silicon epitaxy

Info

Publication number
CA905564A
CA905564A CA905564A CA905564DA CA905564A CA 905564 A CA905564 A CA 905564A CA 905564 A CA905564 A CA 905564A CA 905564D A CA905564D A CA 905564DA CA 905564 A CA905564 A CA 905564A
Authority
CA
Canada
Prior art keywords
silicon epitaxy
susceptor structure
susceptor
epitaxy
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA905564A
Inventor
Spiro Andrea
H. White William
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA905564A publication Critical patent/CA905564A/en
Expired legal-status Critical Current

Links

CA905564A Susceptor structure in silicon epitaxy Expired CA905564A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA905564T

Publications (1)

Publication Number Publication Date
CA905564A true CA905564A (en) 1972-07-18

Family

ID=36413366

Family Applications (1)

Application Number Title Priority Date Filing Date
CA905564A Expired CA905564A (en) Susceptor structure in silicon epitaxy

Country Status (1)

Country Link
CA (1) CA905564A (en)

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