CA2529794A1 - Plasma production device and method and rf driver circuit with adjustable duty cycle - Google Patents
Plasma production device and method and rf driver circuit with adjustable duty cycle Download PDFInfo
- Publication number
- CA2529794A1 CA2529794A1 CA002529794A CA2529794A CA2529794A1 CA 2529794 A1 CA2529794 A1 CA 2529794A1 CA 002529794 A CA002529794 A CA 002529794A CA 2529794 A CA2529794 A CA 2529794A CA 2529794 A1 CA2529794 A1 CA 2529794A1
- Authority
- CA
- Canada
- Prior art keywords
- plasma
- reactance
- expected
- impedance
- radio frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/36—Circuit arrangements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/26—Supports; Mounting means by structural association with other equipment or articles with electric discharge tube
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B31/00—Electric arc lamps
- H05B31/02—Details
- H05B31/26—Influencing the shape of arc discharge by gas blowing devices
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48033803P | 2003-06-19 | 2003-06-19 | |
US60/480,338 | 2003-06-19 | ||
PCT/US2004/019931 WO2004114461A2 (en) | 2003-06-19 | 2004-06-21 | Plasma production device and method and rf driver circuit with adjustable duty cycle |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2529794A1 true CA2529794A1 (en) | 2004-12-29 |
Family
ID=33539287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002529794A Abandoned CA2529794A1 (en) | 2003-06-19 | 2004-06-21 | Plasma production device and method and rf driver circuit with adjustable duty cycle |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1689907A4 (ja) |
JP (1) | JP2007524963A (ja) |
KR (1) | KR20060029621A (ja) |
CN (1) | CN1871373A (ja) |
CA (1) | CA2529794A1 (ja) |
WO (1) | WO2004114461A2 (ja) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4773165B2 (ja) * | 2005-08-31 | 2011-09-14 | 株式会社ダイヘン | 高周波電源装置 |
CN100411496C (zh) * | 2005-09-21 | 2008-08-13 | 大连理工大学 | 一种实现脉冲电源与等离子体负载间匹配的方法 |
JP5241578B2 (ja) * | 2009-03-19 | 2013-07-17 | 株式会社日清製粉グループ本社 | 誘導熱プラズマ発生方法及び装置 |
US10707055B2 (en) | 2017-11-17 | 2020-07-07 | Advanced Energy Industries, Inc. | Spatial and temporal control of ion bias voltage for plasma processing |
JP5592098B2 (ja) | 2009-10-27 | 2014-09-17 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP5757710B2 (ja) * | 2009-10-27 | 2015-07-29 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
KR101757922B1 (ko) | 2009-10-27 | 2017-07-14 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
CN102056395B (zh) * | 2009-10-27 | 2014-05-07 | 东京毅力科创株式会社 | 等离子体处理装置和等离子体处理方法 |
JP5957816B2 (ja) * | 2011-02-23 | 2016-07-27 | 株式会社村田製作所 | インピーダンス変換デバイス、アンテナ装置および通信端末装置 |
CN103456591B (zh) * | 2012-05-31 | 2016-04-06 | 中微半导体设备(上海)有限公司 | 自动频率调谐源和偏置射频电源的电感耦合等离子处理室 |
JP6267989B2 (ja) * | 2013-02-18 | 2018-01-24 | 東京エレクトロン株式会社 | プラズマ処理方法及び容量結合型プラズマ処理装置 |
CN103311648B (zh) * | 2013-06-18 | 2015-04-29 | 浙江大学 | 一种超宽带等离子发射天线装置 |
JP2016046391A (ja) * | 2014-08-22 | 2016-04-04 | 株式会社アルバック | プラズマエッチング装置 |
KR20180023904A (ko) * | 2015-07-03 | 2018-03-07 | 도요세이칸 그룹 홀딩스 가부시키가이샤 | 고주파 유전 가열 장치 |
CN105228330B (zh) * | 2015-09-01 | 2018-09-14 | 沈阳拓荆科技有限公司 | 一种射频等离子体设备匹配器 |
US10211522B2 (en) * | 2016-07-26 | 2019-02-19 | Smartsky Networks LLC | Density and power controlled plasma antenna |
US10734195B2 (en) * | 2017-06-08 | 2020-08-04 | Lam Research Corporation | Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching |
US20190108976A1 (en) * | 2017-10-11 | 2019-04-11 | Advanced Energy Industries, Inc. | Matched source impedance driving system and method of operating the same |
US11437221B2 (en) | 2017-11-17 | 2022-09-06 | Advanced Energy Industries, Inc. | Spatial monitoring and control of plasma processing environments |
US10672590B2 (en) * | 2018-03-14 | 2020-06-02 | Lam Research Corporation | Frequency tuning for a matchless plasma source |
WO2021257374A1 (en) * | 2020-06-17 | 2021-12-23 | Lam Research Corporation | Protection system for switches in direct drive circuits of substrate processing systems |
WO2022173626A1 (en) * | 2021-02-09 | 2022-08-18 | Advanced Energy Industries, Inc. | Spatial monitoring and control of plasma processing environments |
US11942309B2 (en) | 2022-01-26 | 2024-03-26 | Advanced Energy Industries, Inc. | Bias supply with resonant switching |
US12046448B2 (en) | 2022-01-26 | 2024-07-23 | Advanced Energy Industries, Inc. | Active switch on time control for bias supply |
US11670487B1 (en) | 2022-01-26 | 2023-06-06 | Advanced Energy Industries, Inc. | Bias supply control and data processing |
US11978613B2 (en) | 2022-09-01 | 2024-05-07 | Advanced Energy Industries, Inc. | Transition control in a bias supply |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0773105B2 (ja) * | 1987-02-16 | 1995-08-02 | 日電アネルバ株式会社 | プラズマ処理装置 |
JP3283476B2 (ja) * | 1989-09-22 | 2002-05-20 | 株式会社日立製作所 | 放電状態変動量モニタ |
DE69304522T2 (de) * | 1992-04-16 | 1997-01-23 | Advanced Energy Ind Inc | Stabilisator fuer schalt-mode geleistet radio-frequenz plasma einrichtung |
US5473291A (en) * | 1994-11-16 | 1995-12-05 | Brounley Associates, Inc. | Solid state plasma chamber tuner |
US6264812B1 (en) * | 1995-11-15 | 2001-07-24 | Applied Materials, Inc. | Method and apparatus for generating a plasma |
JP2884056B2 (ja) * | 1995-12-07 | 1999-04-19 | パール工業株式会社 | 放電プラズマ発生用高周波電源装置及び半導体製造装置 |
US5654679A (en) * | 1996-06-13 | 1997-08-05 | Rf Power Products, Inc. | Apparatus for matching a variable load impedance with an RF power generator impedance |
JP2001073149A (ja) * | 1999-09-01 | 2001-03-21 | Shimadzu Corp | Ecr成膜装置 |
JP2001332534A (ja) * | 2000-05-25 | 2001-11-30 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及びプラズマ処理装置 |
US6305316B1 (en) * | 2000-07-20 | 2001-10-23 | Axcelis Technologies, Inc. | Integrated power oscillator RF source of plasma immersion ion implantation system |
JP4711543B2 (ja) * | 2001-05-22 | 2011-06-29 | キヤノンアネルバ株式会社 | 放電を利用した処理装置における放電検出の方法と装置 |
US7132996B2 (en) * | 2001-10-09 | 2006-11-07 | Plasma Control Systems Llc | Plasma production device and method and RF driver circuit |
JP3574104B2 (ja) * | 2001-11-27 | 2004-10-06 | 三容真空工業株式会社 | プラズマ発生のためのマッチング回路を利用したプラズマ発生駆動装置 |
-
2004
- 2004-06-21 EP EP04755834A patent/EP1689907A4/en not_active Ceased
- 2004-06-21 CN CNA2004800232588A patent/CN1871373A/zh active Pending
- 2004-06-21 WO PCT/US2004/019931 patent/WO2004114461A2/en active Application Filing
- 2004-06-21 CA CA002529794A patent/CA2529794A1/en not_active Abandoned
- 2004-06-21 KR KR1020057024404A patent/KR20060029621A/ko not_active Application Discontinuation
- 2004-06-21 JP JP2006517522A patent/JP2007524963A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2004114461A2 (en) | 2004-12-29 |
KR20060029621A (ko) | 2006-04-06 |
CN1871373A (zh) | 2006-11-29 |
EP1689907A2 (en) | 2006-08-16 |
JP2007524963A (ja) | 2007-08-30 |
WO2004114461A3 (en) | 2006-07-06 |
EP1689907A4 (en) | 2008-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
FZDE | Discontinued | ||
FZDE | Discontinued |
Effective date: 20110621 |