CA2422559C - Integrated micro-relay sensor - Google Patents
Integrated micro-relay sensor Download PDFInfo
- Publication number
- CA2422559C CA2422559C CA002422559A CA2422559A CA2422559C CA 2422559 C CA2422559 C CA 2422559C CA 002422559 A CA002422559 A CA 002422559A CA 2422559 A CA2422559 A CA 2422559A CA 2422559 C CA2422559 C CA 2422559C
- Authority
- CA
- Canada
- Prior art keywords
- switching
- sensor device
- circuit
- microrelay
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000926 separation method Methods 0.000 claims abstract description 14
- 230000009471 action Effects 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000005516 engineering process Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 4
- 230000001939 inductive effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000013461 design Methods 0.000 abstract description 9
- 238000002955 isolation Methods 0.000 abstract description 4
- 230000000875 corresponding effect Effects 0.000 description 34
- 230000008901 benefit Effects 0.000 description 8
- 238000010276 construction Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 5
- 230000006978 adaptation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003334 potential effect Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- QHGVXILFMXYDRS-UHFFFAOYSA-N pyraclofos Chemical compound C1=C(OP(=O)(OCC)SCCC)C=NN1C1=CC=C(Cl)C=C1 QHGVXILFMXYDRS-UHFFFAOYSA-N 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000004353 relayed correlation spectroscopy Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000742 single-metal deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D1/00—Measuring arrangements giving results other than momentary value of variable, of general application
- G01D1/18—Measuring arrangements giving results other than momentary value of variable, of general application with arrangements for signalling that a predetermined value of an unspecified parameter has been exceeded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Electronic Switches (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Relay Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10047113.7 | 2000-09-22 | ||
| DE10047113A DE10047113C2 (de) | 2000-09-22 | 2000-09-22 | Sensoreinrichtung |
| PCT/EP2001/010841 WO2002029364A1 (de) | 2000-09-22 | 2001-09-19 | Sensorvorrichtung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2422559A1 CA2422559A1 (en) | 2003-03-14 |
| CA2422559C true CA2422559C (en) | 2006-06-13 |
Family
ID=7657314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002422559A Expired - Fee Related CA2422559C (en) | 2000-09-22 | 2001-09-19 | Integrated micro-relay sensor |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7139159B2 (https=) |
| EP (1) | EP1319168B1 (https=) |
| JP (1) | JP2004510970A (https=) |
| CN (1) | CN1476529A (https=) |
| AU (2) | AU9382301A (https=) |
| CA (1) | CA2422559C (https=) |
| DE (2) | DE10047113C2 (https=) |
| WO (1) | WO2002029364A1 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7633033B2 (en) | 2004-01-09 | 2009-12-15 | General Lasertronics Corporation | Color sensing for laser decoating |
| US8536483B2 (en) * | 2007-03-22 | 2013-09-17 | General Lasertronics Corporation | Methods for stripping and modifying surfaces with laser-induced ablation |
| US10112257B1 (en) * | 2010-07-09 | 2018-10-30 | General Lasertronics Corporation | Coating ablating apparatus with coating removal detection |
| US9140113B2 (en) * | 2012-01-12 | 2015-09-22 | Weatherford Technology Holdings, Llc | Instrumented rod rotator |
| US9895771B2 (en) | 2012-02-28 | 2018-02-20 | General Lasertronics Corporation | Laser ablation for the environmentally beneficial removal of surface coatings |
| US10086597B2 (en) | 2014-01-21 | 2018-10-02 | General Lasertronics Corporation | Laser film debonding method |
| DE102014204039B3 (de) * | 2014-03-05 | 2015-05-07 | Ifm Electronic Gmbh | Elektronisches Schaltgerät in Zweileitertechnik und Verfahren zum Betreiben eines solchen Schaltgeräts |
| US20230286082A1 (en) * | 2022-03-11 | 2023-09-14 | Ats Industrial Automation Inc. | Laser cleaning of oxidized parts |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2314420C3 (de) * | 1973-03-22 | 1978-03-30 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Piezoelektrische Taste |
| US4392074A (en) * | 1980-09-19 | 1983-07-05 | Siemens Aktiengesellschaft | Trigger device and piezo-ignition coupler with galvanic decoupling |
| DE8815289U1 (de) * | 1988-12-08 | 1989-03-09 | Asea Brown Boveri Ag, 68309 Mannheim | Schaltgerät |
| US5287086A (en) * | 1990-01-02 | 1994-02-15 | Raptor, Inc. | Proximity detection system and oscillator |
| DE4100634A1 (de) * | 1991-01-11 | 1992-07-16 | Adaptronic Ag | Pruefvorrichtung |
| DE4114835A1 (de) * | 1991-05-07 | 1992-11-12 | Vdo Schindling | Schalteinrichtung, insbesondere zur verwendung in kraftfahrzeugen |
| DE4205029C1 (en) * | 1992-02-19 | 1993-02-11 | Siemens Ag, 8000 Muenchen, De | Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate |
| JPH0660788A (ja) * | 1992-08-04 | 1994-03-04 | Sharp Corp | 圧電式リレー |
| DE19846639A1 (de) * | 1998-10-09 | 2000-04-27 | Abb Research Ltd | Neue elektrische Schalteinrichtung |
| US6060788A (en) * | 1998-11-12 | 2000-05-09 | Eaton Corporation | Vehicle driver module |
| DE19854450C2 (de) * | 1998-11-25 | 2000-12-14 | Tyco Electronics Logistics Ag | Mikromechanisches elektrostatisches Relais |
-
2000
- 2000-09-22 DE DE10047113A patent/DE10047113C2/de not_active Revoked
-
2001
- 2001-09-19 EP EP01974266A patent/EP1319168B1/de not_active Expired - Lifetime
- 2001-09-19 JP JP2002532890A patent/JP2004510970A/ja active Pending
- 2001-09-19 AU AU9382301A patent/AU9382301A/xx active Pending
- 2001-09-19 WO PCT/EP2001/010841 patent/WO2002029364A1/de not_active Ceased
- 2001-09-19 AU AU2001293823A patent/AU2001293823B9/en not_active Ceased
- 2001-09-19 DE DE50110171T patent/DE50110171D1/de not_active Expired - Lifetime
- 2001-09-19 CA CA002422559A patent/CA2422559C/en not_active Expired - Fee Related
- 2001-09-19 CN CNA018193110A patent/CN1476529A/zh active Pending
- 2001-09-19 US US10/380,472 patent/US7139159B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004510970A (ja) | 2004-04-08 |
| EP1319168A1 (de) | 2003-06-18 |
| AU2001293823B2 (en) | 2005-07-28 |
| DE50110171D1 (de) | 2006-07-27 |
| US20030169167A1 (en) | 2003-09-11 |
| CA2422559A1 (en) | 2003-03-14 |
| CN1476529A (zh) | 2004-02-18 |
| US7139159B2 (en) | 2006-11-21 |
| AU2001293823C1 (en) | 2006-02-09 |
| EP1319168B1 (de) | 2006-06-14 |
| DE10047113C2 (de) | 2003-06-18 |
| WO2002029364A1 (de) | 2002-04-11 |
| AU9382301A (en) | 2002-04-15 |
| DE10047113A1 (de) | 2002-04-25 |
| AU2001293823B9 (en) | 2006-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |