New! View global litigation for patent families

CA2248386A1 - Liquid dispensing apparatus and method - Google Patents

Liquid dispensing apparatus and method

Info

Publication number
CA2248386A1
CA2248386A1 CA 2248386 CA2248386A CA2248386A1 CA 2248386 A1 CA2248386 A1 CA 2248386A1 CA 2248386 CA2248386 CA 2248386 CA 2248386 A CA2248386 A CA 2248386A CA 2248386 A1 CA2248386 A1 CA 2248386A1
Authority
CA
Grant status
Application
Patent type
Prior art keywords
pressure
liquid
chamber
point
mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2248386
Other languages
French (fr)
Other versions
CA2248386C (en )
Inventor
Peter M. Pozniak
Benjamin R. Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide Electronics U S LP
Original Assignee
Linde Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces

Abstract

A liquid dispensing method and apparatus in which liquid is dispensed from chambers, that can be pressure vessels, to a flow circuit. A valve network is designed such that when one chamber functions in a dispense mode of operation another chamber functions in a return mode of operation in which unused liquid is sent back to such chamber so that liquid is continually circulated. The chamber or vessel undergoing the return mode of operation is vented through a valve that is either a pressure regulation valve having a set point of pressure or a remotely activated control valve response to liquid pressure at the point of use. In such manner internal pressure within the chamber or pressure vessel undergoing the return mode of operation is regulated to in turn regulate liquid pressure at the point of use. In case of pressure vessel operation, gas pressure within each pressure vessel can also be regulated in conjunction with internal pressure during the return mode to in turn regulate liquid pressure at the point of use. As a result of such pressure regulation, constant flow rate of liquid through the flow circuit and at the point or points of use can be assured.
CA 2248386 1997-10-14 1998-09-25 Liquid dispensing apparatus and method Expired - Fee Related CA2248386C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US08/950,150 1997-10-14
US08950150 US6019250A (en) 1997-10-14 1997-10-14 Liquid dispensing apparatus and method

Publications (2)

Publication Number Publication Date
CA2248386A1 true true CA2248386A1 (en) 1999-04-14
CA2248386C CA2248386C (en) 2003-02-25

Family

ID=25490029

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2248386 Expired - Fee Related CA2248386C (en) 1997-10-14 1998-09-25 Liquid dispensing apparatus and method

Country Status (6)

Country Link
US (1) US6019250A (en)
EP (1) EP0909610B1 (en)
JP (1) JP4354551B2 (en)
KR (1) KR100274925B1 (en)
CA (1) CA2248386C (en)
DE (2) DE69826804D1 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6616014B1 (en) * 2000-02-25 2003-09-09 The Boc Group, Inc. Precision liquid mixing apparatus and method
US6736154B2 (en) * 2001-01-26 2004-05-18 American Air Liquide, Inc. Pressure vessel systems and methods for dispensing liquid chemical compositions
US6783429B2 (en) * 2001-08-17 2004-08-31 The Boc Group, Inc. Apparatus and method for sampling a chemical-mechanical polishing slurry
US20050224523A1 (en) * 2004-04-13 2005-10-13 Advanced Technology Materials, Inc. Liquid dispensing method and system with headspace gas removal
JP4763262B2 (en) * 2004-10-15 2011-08-31 株式会社ディスコ High-pressure liquid jet cutting device
GB0501335D0 (en) * 2005-01-21 2005-03-02 Cryostar France Sa Natural gas supply method and apparatus
CN101193815B (en) 2005-03-04 2012-03-28 液化空气电子美国有限公司 Control of fluid conditions in bulk fluid delivery systems
US7810516B2 (en) * 2005-03-04 2010-10-12 Air Liquide Electronics U.S. Lp Control of fluid conditions in bulk fluid distribution systems
DE102006016087B4 (en) 2005-04-11 2007-09-06 Unaxis International Trading Ltd. A method of operating a pneumatic device for the metered delivery of a liquid and pneumatic device
US20070215639A1 (en) * 2006-02-15 2007-09-20 Roberts Benjamin R Method and Apparatus for Dispensing Liquid with Precise Control
US20070205214A1 (en) * 2006-03-03 2007-09-06 Roberts Benjamin R Liquid dispense system
KR20100017695A (en) * 2007-05-09 2010-02-16 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 Systems and methods for material blending and distribution
JP2011506110A (en) * 2007-12-06 2011-03-03 フォアサイト プロセッシング,エルエルシー System and method for transporting the processed material mixture containing a fluid
US8997789B2 (en) * 2008-06-22 2015-04-07 Malema Engineering Corporation Internal leak detection and backflow prevention in a flow control arrangement
US9038855B2 (en) 2009-06-10 2015-05-26 Advanced Technology Materials, Inc. Fluid processing systems and methods
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture
US9279419B2 (en) 2013-01-16 2016-03-08 Prochem Ulc System and process for supplying a chemical agent to a process fluid
CN104108072B (en) * 2013-04-16 2016-06-01 陈炤彰 Polishing solution with added gas supply system and method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals
US5485941A (en) * 1994-06-30 1996-01-23 Basf Corporation Recirculation system and method for automated dosing apparatus
KR100377304B1 (en) * 1994-07-19 2003-06-09 어플라이드 케미컬 솔루션즈, 인크. Apparatus and method used in the mechanical polishing process Chemistry

Also Published As

Publication number Publication date Type
EP0909610A2 (en) 1999-04-21 application
KR100274925B1 (en) 2000-12-15 grant
CA2248386C (en) 2003-02-25 grant
EP0909610A3 (en) 2001-01-31 application
DE69826804T2 (en) 2006-03-09 grant
DE69826804D1 (en) 2004-11-11 grant
US6019250A (en) 2000-02-01 grant
EP0909610B1 (en) 2004-10-06 grant
JP4354551B2 (en) 2009-10-28 grant
JPH11182800A (en) 1999-07-06 application

Similar Documents

Publication Publication Date Title
US5000357A (en) Soft drink dispenser
US5033645A (en) Carbonation system for soft drink dispenser
US4204215A (en) Ink jet system for issuing ink under a predetermined uniform pressure in an ink jet system printer
US4903862A (en) Soft drink dispenser
US5360140A (en) Low cost control circuit for sensing the operation of an electrically operable device
US3074700A (en) Carbonating apparatus
JPH02219702A (en) Fixed volume filler
WO2002079679A1 (en) Valve
JPH02149778A (en) Piezoelectric micropump
JPH02122858A (en) Liquid material quantitative discharge device
JPH03246514A (en) Method for supplying liquid crystal to substrate for liquid crystal display element
DE2533527A1 (en) Liq. dispensing equipment for shower head - has solenoid valve controlled by proximity switch monitoring area below water outlet
JPH04278529A (en) Silicon wafer cleaning equipment
WO2000040346A1 (en) Method and device for injecting a fixed quantity of liquid
JPH01254960A (en) Method of feeding water to treating liquid tank
DE2815610A1 (en) Supply equipment for different drinks - has electronic storage unit for ingredients and quantities with valve control unit
US6213348B1 (en) System for the pumping of liquid
JP2004105968A (en) Liquid discharging device
US4822531A (en) Non-venting microgravity carbonator and method
JPS59189988A (en) Controlling mechanism for volume of water in continuous water electrolysis unit
JP2006061824A (en) Liquid quantitative discharge apparatus
JPS553916A (en) Recorder
US5152935A (en) Carbonation system
US20040074923A1 (en) Air pumping type fixed quantity dispensing container
US4921134A (en) Circuit arrangement for regulating the filling and refilling of containers with liquids

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20130925