CA2010803A1 - Capteur semiconducteur capacitif a membrane au silicium articule, pour deplacement lineaire - Google Patents

Capteur semiconducteur capacitif a membrane au silicium articule, pour deplacement lineaire

Info

Publication number
CA2010803A1
CA2010803A1 CA2010803A CA2010803A CA2010803A1 CA 2010803 A1 CA2010803 A1 CA 2010803A1 CA 2010803 A CA2010803 A CA 2010803A CA 2010803 A CA2010803 A CA 2010803A CA 2010803 A1 CA2010803 A1 CA 2010803A1
Authority
CA
Canada
Prior art keywords
diaphragm
silicon
hinge
semiconductive
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2010803A
Other languages
English (en)
Other versions
CA2010803C (fr
Inventor
Daniel H. Grantham
James L. Swindal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Technologies Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of CA2010803A1 publication Critical patent/CA2010803A1/fr
Application granted granted Critical
Publication of CA2010803C publication Critical patent/CA2010803C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
CA002010803A 1989-02-28 1990-02-23 Capteur semiconducteur capacitif a membrane au silicium articule, pour deplacement lineaire Expired - Fee Related CA2010803C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/317,236 US4998179A (en) 1989-02-28 1989-02-28 Capacitive semiconductive sensor with hinged diaphragm for planar movement
US07/317,236 1989-02-28

Publications (2)

Publication Number Publication Date
CA2010803A1 true CA2010803A1 (fr) 1990-08-31
CA2010803C CA2010803C (fr) 1995-01-24

Family

ID=23232735

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002010803A Expired - Fee Related CA2010803C (fr) 1989-02-28 1990-02-23 Capteur semiconducteur capacitif a membrane au silicium articule, pour deplacement lineaire

Country Status (8)

Country Link
US (1) US4998179A (fr)
EP (1) EP0385574B1 (fr)
JP (1) JP2918272B2 (fr)
KR (1) KR0137931B1 (fr)
BR (1) BR9000734A (fr)
CA (1) CA2010803C (fr)
DE (1) DE69007516T2 (fr)
IL (1) IL93540A (fr)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4998179A (en) * 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement
FR2656687B1 (fr) * 1989-12-28 1994-07-22 Vectavib Procede de montage d'une piece mecanique comportant un element sensible definissant, avec un support, un condensateur variable, piece mecanique et outil pour sa mise en óoeuvre.
JP2517467B2 (ja) * 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
GB9111838D0 (en) * 1991-06-01 1991-07-24 Buttwell Limited Treating biomass material
JP3289196B2 (ja) * 1991-06-27 2002-06-04 ドレッサ・ナガノ、インク 変換器の全非直線性を低減する方法及び変換器の非直線性を低減する方法
US5381299A (en) * 1994-01-28 1995-01-10 United Technologies Corporation Capacitive pressure sensor having a substrate with a curved mesa
US5744725A (en) * 1994-04-18 1998-04-28 Motorola Inc. Capacitive pressure sensor and method of fabricating same
JP2935812B2 (ja) * 1994-07-14 1999-08-16 三井金属鉱業株式会社 車両扉用ストライカー装置およびその製造方法
JP3114570B2 (ja) * 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
US6324914B1 (en) 1997-03-20 2001-12-04 Alliedsignal, Inc. Pressure sensor support base with cavity
US6058780A (en) * 1997-03-20 2000-05-09 Alliedsignal Inc. Capacitive pressure sensor housing having a ceramic base
US6387318B1 (en) 1997-12-05 2002-05-14 Alliedsignal, Inc. Glass-ceramic pressure sensor support base and its fabrication
US6167761B1 (en) * 1998-03-31 2001-01-02 Hitachi, Ltd. And Hitachi Car Engineering Co., Ltd. Capacitance type pressure sensor with capacitive elements actuated by a diaphragm
DE69922727T2 (de) 1998-03-31 2005-12-15 Hitachi, Ltd. Kapazitiver Druckwandler
JP3567089B2 (ja) 1998-10-12 2004-09-15 株式会社日立製作所 静電容量式圧力センサ
ATE227423T1 (de) * 1998-12-15 2002-11-15 Fraunhofer Ges Forschung Verfahren zum erzeugen einer mikromechanischen struktur für ein mikro-elektromechanisches element
NO313723B1 (no) * 1999-03-01 2002-11-18 Sintef Sensorelement
DE10036433A1 (de) * 2000-07-26 2002-02-07 Endress Hauser Gmbh Co Kapazitiver Drucksensor
DE50114896D1 (de) 2000-07-26 2009-06-25 Endress & Hauser Gmbh & Co Kg Kapazitiver drucksensor
DE10114838A1 (de) * 2001-03-26 2002-10-10 Implex Ag Hearing Technology I Vollständig implantierbares Hörsystem
US7028551B2 (en) * 2004-06-18 2006-04-18 Kavlico Corporation Linearity semi-conductive pressure sensor
FI119785B (fi) * 2004-09-23 2009-03-13 Vti Technologies Oy Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi
JP2007085837A (ja) * 2005-09-21 2007-04-05 Alps Electric Co Ltd 静電容量型圧力センサ
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
KR100807193B1 (ko) * 2006-09-08 2008-02-28 한국과학기술원 정전용량형 압력센서의 제조방법 및 이에 의해 제조된정전용량형 압력센서
FR2972659A1 (fr) * 2011-03-18 2012-09-21 Commissariat Energie Atomique Procede de traitement par electroerosion d'une surface d'un element en silicium et plaque de silicium obtenue grace a un tel traitement
JP5995038B2 (ja) * 2011-06-16 2016-09-21 富士電機株式会社 半導体基板および半導体装置
DE102011085332A1 (de) * 2011-10-27 2013-05-02 Continental Teves Ag & Co. Ohg Drucksensor
US10525265B2 (en) * 2014-12-09 2020-01-07 Cochlear Limited Impulse noise management
DE102015216626A1 (de) 2015-08-31 2017-03-02 Siemens Aktiengesellschaft Drucksensoranordnung sowie Messumformer zur Prozessinstrumentierung mit einer derartigen Drucksensoranordnung
JP6041033B2 (ja) * 2015-10-23 2016-12-07 富士電機株式会社 半導体基板の製造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPS5838732B2 (ja) * 1978-11-02 1983-08-25 富士電機株式会社 圧力測定用ダイアフラム
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4405970A (en) * 1981-10-13 1983-09-20 United Technologies Corporation Silicon-glass-silicon capacitive pressure transducer
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4586109A (en) * 1985-04-01 1986-04-29 Bourns Instruments, Inc. Batch-process silicon capacitive pressure sensor
JPS62127637A (ja) * 1985-11-28 1987-06-09 Yokogawa Electric Corp 半導体圧力変換器
US4998179A (en) * 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement

Also Published As

Publication number Publication date
KR0137931B1 (ko) 1998-05-15
US4998179A (en) 1991-03-05
JP2918272B2 (ja) 1999-07-12
BR9000734A (pt) 1991-01-22
JPH0381635A (ja) 1991-04-08
IL93540A0 (en) 1990-11-29
DE69007516D1 (de) 1994-04-28
EP0385574A1 (fr) 1990-09-05
DE69007516T2 (de) 1994-08-04
IL93540A (en) 1993-05-13
EP0385574B1 (fr) 1994-03-23
KR900013665A (ko) 1990-09-06
CA2010803C (fr) 1995-01-24

Similar Documents

Publication Publication Date Title
CA2010803A1 (fr) Capteur semiconducteur capacitif a membrane au silicium articule, pour deplacement lineaire
GB9401409D0 (en) Absolute pressure sensor
KR970077749A (ko) 마이크로 가공된 고감도의 압력 센서 및 음향 트랜스듀서의 제조 방법
CA2054668A1 (fr) Capteurs microminiaturises de pression differentielle et methode de production
EP0631122B1 (fr) Transducteur de pression miniature à haute sensibilité avec un diaphragme sous tension
CA2006672A1 (fr) Capteur de pression capacitif avec troisieme plaque de ceinture
JPS60244864A (ja) 容量性トランスジユ−サ
GB2274945B (en) Capacitive surface micromachined differential pressure sensor
EP0245032A3 (fr) Détecteur de pression avec transducteur de pression capacitif
GB2276979B (en) Silicon-on-insulator capacitive surface micromachined absolute pressure sensor
JPS62191730A (ja) 圧力センサ
EP0990885A3 (fr) Capteur de pression capacitif
US4589054A (en) Capacitive pressure detector independent of temperature
GB2119098A (en) Piezo electric pressure sensor
EP0225095A3 (fr) Systèmes à jauges de contraintes biaxiales
KR950001303A (ko) 박막 적외선 센서구조 및 그 제조 방법
CA2038226A1 (fr) Capteur de pression piezoelectrique
EP0127176A3 (fr) Capteur de pression intégré
JPS6427274A (en) Semiconductor pressure sensor
JPH0426280B2 (fr)
JPS6427635U (fr)
JPS6252952U (fr)
JP2643906B2 (ja) 圧力センサ
CN117664202A (zh) 传感器及电子设备
JPH01127268U (fr)

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed