CA1052164A - Photosensitive composition - Google Patents

Photosensitive composition

Info

Publication number
CA1052164A
CA1052164A CA201,325A CA201325A CA1052164A CA 1052164 A CA1052164 A CA 1052164A CA 201325 A CA201325 A CA 201325A CA 1052164 A CA1052164 A CA 1052164A
Authority
CA
Canada
Prior art keywords
composition
sensitizer
chlorobenzanthrone
photosensitive
halogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA201,325A
Other languages
English (en)
French (fr)
Other versions
CA201325S (en
Inventor
Hideo Fukutani
Konoe Miura
Chihiro Eguchi
Yoshihiro Takahashi
Kazuo Torige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Application granted granted Critical
Publication of CA1052164A publication Critical patent/CA1052164A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C49/00Ketones; Ketenes; Dimeric ketenes; Ketonic chelates
    • C07C49/587Unsaturated compounds containing a keto groups being part of a ring
    • C07C49/687Unsaturated compounds containing a keto groups being part of a ring containing halogen
    • C07C49/697Unsaturated compounds containing a keto groups being part of a ring containing halogen containing six-membered aromatic rings
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Epoxy Resins (AREA)
CA201,325A 1973-06-02 1974-05-31 Photosensitive composition Expired CA1052164A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48062144A JPS5146697B2 (it) 1973-06-02 1973-06-02

Publications (1)

Publication Number Publication Date
CA1052164A true CA1052164A (en) 1979-04-10

Family

ID=13191595

Family Applications (1)

Application Number Title Priority Date Filing Date
CA201,325A Expired CA1052164A (en) 1973-06-02 1974-05-31 Photosensitive composition

Country Status (7)

Country Link
JP (1) JPS5146697B2 (it)
CA (1) CA1052164A (it)
DE (1) DE2426645C3 (it)
FR (1) FR2231985A1 (it)
GB (1) GB1450630A (it)
IT (1) IT1014637B (it)
NL (1) NL7407156A (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4946697A (en) * 1996-10-28 1998-05-22 Merck Patent Gmbh Dihydrobenzoanthracenone, -pyrimidinone or dihydronaphtoquinolinone

Also Published As

Publication number Publication date
JPS5011418A (it) 1975-02-05
FR2231985A1 (it) 1974-12-27
DE2426645B2 (de) 1978-03-23
JPS5146697B2 (it) 1976-12-10
DE2426645C3 (de) 1978-11-23
GB1450630A (en) 1976-09-22
IT1014637B (it) 1977-04-30
NL7407156A (it) 1974-12-04
DE2426645A1 (de) 1974-12-12

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