BR112016006523A2 - circuito integrado de sistema micro-eletro-mecânico, elemento de medição e sensor de pressão - Google Patents

circuito integrado de sistema micro-eletro-mecânico, elemento de medição e sensor de pressão

Info

Publication number
BR112016006523A2
BR112016006523A2 BR112016006523A BR112016006523A BR112016006523A2 BR 112016006523 A2 BR112016006523 A2 BR 112016006523A2 BR 112016006523 A BR112016006523 A BR 112016006523A BR 112016006523 A BR112016006523 A BR 112016006523A BR 112016006523 A2 BR112016006523 A2 BR 112016006523A2
Authority
BR
Brazil
Prior art keywords
micro
electro
mechanical system
mems
integrated circuit
Prior art date
Application number
BR112016006523A
Other languages
English (en)
Inventor
Goehlich Andreas
Cavalloni Claudio
Kühne Stéphane
Original Assignee
Kistler Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Holding Ag filed Critical Kistler Holding Ag
Publication of BR112016006523A2 publication Critical patent/BR112016006523A2/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0005—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0045—Diaphragm associated with a buried cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/005—Non square semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)

Abstract

resumo “circuito integrado de sistema micro-eletro-mecânico, elemento de medição e sensor de pressão” um circuito integrado de sistema micro-eletro-mecânico (circuito integrado de sistema micro-eletro-mecânico (mems)) para a medição de uma pressão em um espaço de pressão (d), compreendendo um substrato de sistema micro-eletro-mecânico (mems) (30) e um substrato de suporte/carga (31), os quais são unidos, um ao outro, de uma maneira bidimensional, no qual o circuito integrado de sistema micro-eletro-mecânico (mems) (3) se encontra na forma de uma haste e tem uma região de medição (4) com meios de medição eletromecânica e então uma região de bucha (11), e então uma região de formação de contato (6) a qual é conectada a região de medição (4) através de linhas (8) e tem contatos (16), e nos quais o circuito integrado de sistema micro-eletro-mecânico (mems) (3) na região de bucha (11) é adequado para um arranjo apertado por pressão em uma bucha. de acordo com a invenção, os meios de medição eletromecânicos são configurados de tal maneira que o substrato de sistema micro-eletro-mecânico (mems) (30) tem uma cavidade (5) formando um orifício/furo cego, a borda do qual forma uma membrana (7) no substrato de sistema micro-eletro-mecânico (mems) (30), e uma ponte de medição (19) compreendendo elementos piezo resistivos (2) sobre aquele lado desta membrana (7) que fica de frente afastada a partir da cavidade (5). o substrato de sistema micro-eletro-mecânico (mems) (30) é unido ao substrato de suporte (31) com o lado da cavidade (5) voltado para o substrato de suporte (31), com o resultado que o substrato de suporte (31) forma uma parede inferior (50) da cavidade (5) formada sob a membrana (7). 1/1
BR112016006523A 2013-10-03 2014-10-02 circuito integrado de sistema micro-eletro-mecânico, elemento de medição e sensor de pressão BR112016006523A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH01699/13A CH708708A1 (de) 2013-10-03 2013-10-03 Messelement zum Messen eines Drucks und Druckmesssensor.
PCT/CH2014/000142 WO2015048916A1 (de) 2013-10-03 2014-10-02 Mems-chip, messelement und drucksensor zum messen eines drucks

Publications (1)

Publication Number Publication Date
BR112016006523A2 true BR112016006523A2 (pt) 2017-08-01

Family

ID=49322111

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112016006523A BR112016006523A2 (pt) 2013-10-03 2014-10-02 circuito integrado de sistema micro-eletro-mecânico, elemento de medição e sensor de pressão

Country Status (10)

Country Link
US (1) US9927316B2 (pt)
EP (1) EP3052915A1 (pt)
JP (2) JP2016540192A (pt)
KR (1) KR20160065109A (pt)
CN (1) CN105593657A (pt)
BR (1) BR112016006523A2 (pt)
CA (1) CA2924166A1 (pt)
CH (1) CH708708A1 (pt)
MX (1) MX360473B (pt)
WO (1) WO2015048916A1 (pt)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3030738B1 (fr) * 2014-12-19 2020-03-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur de pression adapte aux mesures de pression en milieu agressif
IT201600083804A1 (it) * 2016-08-09 2018-02-09 St Microelectronics Srl Procedimento di fabbricazione di un dispositivo a semiconduttore includente una struttura microelettromeccanica ed un associato circuito elettronico integrato e relativo dispositivo a semiconduttore
CN109025971B (zh) * 2018-04-28 2022-02-01 中国石油天然气股份有限公司 钻井压力检测装置及其膜片受力机构
EP3654005B1 (en) * 2018-11-15 2022-05-11 TE Connectivity Solutions GmbH Differential pressure sensor device
CN114555160B (zh) * 2019-11-06 2023-11-21 艾斯曲尔医疗公司 喷嘴芯片
DE102019133325A1 (de) 2019-12-06 2021-06-10 Endress+Hauser SE+Co. KG Druckmessaufnehmer
DE102020206769B3 (de) * 2020-05-29 2021-06-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Mikroelektronische anordnung und verfahren zur herstellung derselben
CN112284608B (zh) * 2020-09-15 2022-08-02 南京高华科技股份有限公司 电容式微机械气压传感器及其制备方法
CN112254865A (zh) * 2020-09-15 2021-01-22 南京高华科技股份有限公司 电阻式微机械气压传感器及其制备方法
CN113155348B (zh) * 2021-02-26 2023-09-12 西安微电子技术研究所 一种压阻式压力传感器信号处理模块及其集成方法
CN114136528B (zh) * 2021-12-07 2024-03-01 华东光电集成器件研究所 一种soi压力敏感芯片

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4021766A (en) * 1975-07-28 1977-05-03 Aine Harry E Solid state pressure transducer of the leaf spring type and batch method of making same
US4901731A (en) * 1988-04-27 1990-02-20 Millar Instruments, Inc. Single sensor pressure differential device
JPH05340828A (ja) * 1992-05-18 1993-12-24 Fujikura Ltd 半導体圧力センサ
JPH08247873A (ja) * 1995-03-13 1996-09-27 Tokai Rika Co Ltd 圧力センサ
JP2001324398A (ja) * 2000-03-07 2001-11-22 Anelva Corp 耐蝕型真空センサ
US6626044B1 (en) 2000-10-03 2003-09-30 Honeywell International Inc. Freeze resistant sensor
US6505398B2 (en) * 2000-12-04 2003-01-14 Kavlico Corporation Very high pressure miniature sensing and mounting technique
JP4159895B2 (ja) * 2003-02-17 2008-10-01 キヤノンアネルバ株式会社 静電容量型圧力センサ及びその製造方法
EP1601942B1 (en) * 2003-03-10 2008-05-07 Danfoss A/S Silicon pressure sensor with decreased pressure equalization between measured pressure and reference chamber
US7111518B1 (en) * 2003-09-19 2006-09-26 Silicon Microstructures, Inc. Extremely low cost pressure sensor realized using deep reactive ion etching
DE102004018408A1 (de) * 2004-04-16 2005-11-03 Robert Bosch Gmbh Kapazitiver Drucksensor und Verfahren zur Herstellung
JP4506478B2 (ja) * 2005-01-18 2010-07-21 株式会社デンソー 圧力センサ
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
EP2166330A1 (en) * 2008-09-22 2010-03-24 GE Infrastructure Sensing, Inc. Miniature pressure transducer with elongate base wafer and operable at high temperatures
US9340414B2 (en) * 2009-07-07 2016-05-17 MCube Inc. Method and structure of monolithically integrated absolute pressure sensor
US8569851B2 (en) * 2010-06-18 2013-10-29 General Electric Company Sensor and method for fabricating the same
US8141429B2 (en) * 2010-07-30 2012-03-27 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors and methods of making the same
US8656784B2 (en) * 2011-08-19 2014-02-25 Kulite Semiconductor Products, Inc. Flat covered leadless pressure sensor assemblies suitable for operation in extreme environments
US8714021B2 (en) * 2012-02-27 2014-05-06 Amphenol Thermometrics, Inc. Catheter die and method of fabricating the same

Also Published As

Publication number Publication date
US9927316B2 (en) 2018-03-27
KR20160065109A (ko) 2016-06-08
EP3052915A1 (de) 2016-08-10
MX2016004234A (es) 2016-10-07
CN105593657A (zh) 2016-05-18
JP6655211B2 (ja) 2020-02-26
JP2019174478A (ja) 2019-10-10
MX360473B (es) 2018-11-05
WO2015048916A1 (de) 2015-04-09
JP2016540192A (ja) 2016-12-22
US20160231189A1 (en) 2016-08-11
CH708708A1 (de) 2015-04-15
CA2924166A1 (en) 2015-04-09

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according art. 34 industrial property law
B06U Preliminary requirement: requests with searches performed by other patent offices: suspension of the patent application procedure
B11B Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements