BE814247A - Procede de realisation d'un agencement en silicium ou en carbure de silicium pour des processus de diffusion - Google Patents

Procede de realisation d'un agencement en silicium ou en carbure de silicium pour des processus de diffusion

Info

Publication number
BE814247A
BE814247A BE143667A BE143667A BE814247A BE 814247 A BE814247 A BE 814247A BE 143667 A BE143667 A BE 143667A BE 143667 A BE143667 A BE 143667A BE 814247 A BE814247 A BE 814247A
Authority
BE
Belgium
Prior art keywords
silicon
making
diffusion processes
silicon carbide
arrangement
Prior art date
Application number
BE143667A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE814247A publication Critical patent/BE814247A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057—Carbides
    • C04B41/5059—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
    • C04B41/5096—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
BE143667A 1973-04-26 1974-04-26 Procede de realisation d'un agencement en silicium ou en carbure de silicium pour des processus de diffusion BE814247A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732321186 DE2321186B2 (de) 1973-04-26 1973-04-26 Verfahren zum Herstellen eines Silicium- oder Siliciumcarbid-Rohres

Publications (1)

Publication Number Publication Date
BE814247A true BE814247A (fr) 1974-08-16

Family

ID=5879350

Family Applications (1)

Application Number Title Priority Date Filing Date
BE143667A BE814247A (fr) 1973-04-26 1974-04-26 Procede de realisation d'un agencement en silicium ou en carbure de silicium pour des processus de diffusion

Country Status (4)

Country Link
JP (1) JPS5433835B2 (enrdf_load_stackoverflow)
BE (1) BE814247A (enrdf_load_stackoverflow)
DE (1) DE2321186B2 (enrdf_load_stackoverflow)
IT (1) IT1010053B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2652218A1 (de) * 1976-11-16 1978-05-24 Wacker Chemitronic Verfahren zur herstellung von substratgebundenem, grossflaechigem silicium
JPS5717126A (en) * 1980-07-03 1982-01-28 Toshiba Ceramics Co Ltd Manufacture of silicon carbide process tube for semiconductor
US9683286B2 (en) 2006-04-28 2017-06-20 Gtat Corporation Increased polysilicon deposition in a CVD reactor
EP2402287B1 (en) * 2009-02-27 2018-10-17 Tokuyama Corporation Polycrystalline silicon rod and device for producing same

Also Published As

Publication number Publication date
DE2321186B2 (de) 1979-03-08
DE2321186C3 (enrdf_load_stackoverflow) 1979-10-31
JPS5015478A (enrdf_load_stackoverflow) 1975-02-18
DE2321186A1 (de) 1974-11-21
IT1010053B (it) 1977-01-10
JPS5433835B2 (enrdf_load_stackoverflow) 1979-10-23

Similar Documents

Publication Publication Date Title
BE807276A (fr) Procede de purification de charges d'hydrocarbures
BE817818A (fr) Procede pour la production d'hydrocarbures a insaturation olefinique
BE821983A (fr) Procede pour la preparation d'hydroxycholesterines
BE816507A (fr) Procede de fabrication de supports en silicium ou carbure de silicium pour processus de diffusion
BE814021A (fr) Procede pour la production d'acier au silicium a permeabilite elevee
OA04809A (fr) Procédé de préparation d'a-aminoacyl-3-halocépha-losporines.
RO68145A (ro) Procedeu pentru prepararea unor 3,4-dihidro-2h-1,2-benzo-tiazincarboxamide
RO69912A (ro) Procedeu pentru prepararea unor tieno (1,5) benzodiazepine
BE827125A (fr) Procede ameliore pour la preparation de l'hexanediol-1,6
RO69740A (ro) Procedeu pentru prepararea unor 5-pirazolone-1-substituite
CH556313A (fr) Procede pour la preparation d'un edulcorant.
BE791664A (fr) Centrifugeuse d'aeration de surface pour installation de clarification d'eaux usees
RO64334A (fr) Procede et installation d'obtention du carbure de silicium
RO64705A (fr) Procede et installation d'obtention du carbure de silicium
FR2303082A1 (fr) Procede pour la preparation d'une matrice de micro-organismes
BE823348A (fr) Procede pour separer l'isobutene de melanges d'hydrocarbures en c4
BE814247A (fr) Procede de realisation d'un agencement en silicium ou en carbure de silicium pour des processus de diffusion
FR2326262A1 (fr) Procede de formation d'articles en carbure de silicium
RO68500A (ro) Procedeu pentru prepararea unor 1,1-dioxizi ai 4-hidroxi-2h-nafto(2,1-e)-1,2-tiazin-3-carboxamidei
BE802394A (fr) Procede pour eliminer le cyclopentadiene de melanges d'hydrocarbures
RO63911A (fr) Procede pour la preparation des 2-amino-5-alkyle-1,3,4-thiadiazoles
BE788641A (fr) Procede pour purifier certains melanges d'hydroformylation
RO63558A2 (ro) Procedeu pentru prepararea n-fenil-n'-1,2,3,-tiadiazol-5-il-tioureei
CH556327A (fr) Procede pour la preparation d'un decapeptide.
BE793223A (fr) Procede de preparation d'apprets pour textiles