BE713067A - - Google Patents

Info

Publication number
BE713067A
BE713067A BE713067DA BE713067A BE 713067 A BE713067 A BE 713067A BE 713067D A BE713067D A BE 713067DA BE 713067 A BE713067 A BE 713067A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE713067A publication Critical patent/BE713067A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/521—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite obtained by impregnation of carbon products with a carbonisable material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
BE713067D 1967-04-18 1968-04-01 BE713067A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63182067A 1967-04-18 1967-04-18

Publications (1)

Publication Number Publication Date
BE713067A true BE713067A (en) 1968-08-16

Family

ID=24532889

Family Applications (1)

Application Number Title Priority Date Filing Date
BE713067D BE713067A (en) 1967-04-18 1968-04-01

Country Status (7)

Country Link
US (1) US3549847A (en)
BE (1) BE713067A (en)
DE (1) DE1771169A1 (en)
FR (1) FR1562474A (en)
GB (1) GB1221852A (en)
NL (1) NL6805349A (en)
SE (1) SE353005B (en)

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1932567C3 (en) * 1969-06-27 1975-06-26 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Process for the production of fuel and / or breeding elements for nuclear reactors
US3636923A (en) * 1970-03-04 1972-01-25 Atomic Energy Commission Apparatus for coating microspheres with pyrolytic carbon
US3845738A (en) * 1973-09-12 1974-11-05 Rca Corp Vapor deposition apparatus with pyrolytic graphite heat shield
GB1490347A (en) * 1974-02-08 1977-11-02 Dunlop Ltd Friction members
US3980854A (en) * 1974-11-15 1976-09-14 Rca Corporation Graphite susceptor structure for inductively heating semiconductor wafers
US4089176A (en) * 1976-01-20 1978-05-16 The Garrett Corporation Heat storage method and apparatus
CA1101164A (en) * 1977-04-30 1981-05-19 Sumitomo Electric Industries, Ltd. Method and apparatus for producing fibers for optical transmission
US4241104A (en) * 1978-10-16 1980-12-23 The Fluorocarbon Company Process for bonding carbon substrates using particles of a thermally stable solid
US4168998A (en) * 1978-12-06 1979-09-25 Mitsubishi Monsanto Chemical Co. Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder
US4251206A (en) * 1979-05-14 1981-02-17 Rca Corporation Apparatus for and method of supporting a crucible for EFG growth of sapphire
DE2949476A1 (en) * 1979-12-08 1981-06-11 Philips Patentverwaltung Gmbh, 2000 Hamburg METHOD FOR PRODUCING CUVETTES FOR THE FLAMELESS ATOMIC ABSORPTION SPECTROSCOPY
US4339645A (en) * 1980-07-03 1982-07-13 Rca Corporation RF Heating coil construction for stack of susceptors
US4442165A (en) * 1981-03-26 1984-04-10 General Electric Co. Low-density thermally insulating carbon-carbon syntactic foam composite
FR2516914B1 (en) * 1981-11-26 1986-03-14 Commissariat Energie Atomique METHOD FOR DENSIFICATION OF A POROUS STRUCTURE
DE8413711U1 (en) * 1984-05-05 1985-08-29 Philips Patentverwaltung Gmbh, 2000 Hamburg Sample carrier for flameless atomic absorption and emission spectroscopy
US4640223A (en) * 1984-07-24 1987-02-03 Dozier Alfred R Chemical vapor deposition reactor
US5273778A (en) * 1985-03-20 1993-12-28 Sharp Kabushiki Kaisha Method for producing graphite intercalation compound
DE3687529T2 (en) * 1985-03-20 1993-05-13 Sharp Kk PRODUCTION OF GRAPHITE STORAGE COMPOUND AND DOPED CARBON FILMS.
US5238705A (en) * 1987-02-24 1993-08-24 Semiconductor Energy Laboratory Co., Ltd. Carbonaceous protective films and method of depositing the same
US4761308A (en) * 1987-06-22 1988-08-02 General Electric Company Process for the preparation of reflective pyrolytic graphite
DE4020723C2 (en) * 1990-06-29 1999-10-21 Finckh Maschf Shaking roller for the Fourdrinier wire of Fourdrinier paper machines
US5198263A (en) * 1991-03-15 1993-03-30 The United States Of America As Represented By The United States Department Of Energy High rate chemical vapor deposition of carbon films using fluorinated gases
US5645744A (en) * 1991-04-05 1997-07-08 The Boeing Company Retort for achieving thermal uniformity in induction processing of organic matrix composites or metals
US5728309A (en) * 1991-04-05 1998-03-17 The Boeing Company Method for achieving thermal uniformity in induction processing of organic matrix composites or metals
US5808281A (en) * 1991-04-05 1998-09-15 The Boeing Company Multilayer susceptors for achieving thermal uniformity in induction processing of organic matrix composites or metals
JPH07176482A (en) * 1991-05-31 1995-07-14 At & T Corp Method and apparatus for epitaxial growth
NZ282347A (en) * 1994-03-16 1999-01-28 Larkden Pty Ltd Converting rotational energy of shaft into heat, inducing eddy currents in graphite block
US6086680A (en) * 1995-08-22 2000-07-11 Asm America, Inc. Low-mass susceptor
GB9612882D0 (en) 1996-06-20 1996-08-21 Dunlop Ltd Densification of a porous structure
KR100660416B1 (en) * 1997-11-03 2006-12-22 에이에스엠 아메리카, 인코포레이티드 Improved low mass wafer support system
US6623563B2 (en) 2001-01-02 2003-09-23 Applied Materials, Inc. Susceptor with bi-metal effect
US6554907B2 (en) * 2001-01-02 2003-04-29 Applied Materials, Inc. Susceptor with internal support
US20050170314A1 (en) * 2002-11-27 2005-08-04 Richard Golden Dental pliers design with offsetting jaw and pad elements for assisting in removing upper and lower teeth and method for removing teeth utilizing the dental plier design
US7285483B2 (en) * 2003-06-26 2007-10-23 Silitronic Ag Coated semiconductor wafer, and process and apparatus for producing the semiconductor wafer
DE102004060625A1 (en) * 2004-12-16 2006-06-29 Siltronic Ag Coated semiconductor wafer and method and apparatus for producing the semiconductor wafer
US7235139B2 (en) * 2003-10-28 2007-06-26 Veeco Instruments Inc. Wafer carrier for growing GaN wafers
JP4350695B2 (en) * 2004-12-01 2009-10-21 株式会社フューチャービジョン Processing equipment
JP5051875B2 (en) * 2006-12-25 2012-10-17 東京エレクトロン株式会社 Film forming apparatus and film forming method
US7921803B2 (en) * 2007-09-21 2011-04-12 Applied Materials, Inc. Chamber components with increased pyrometry visibility
US8801857B2 (en) * 2008-10-31 2014-08-12 Asm America, Inc. Self-centering susceptor ring assembly
EP2866848B1 (en) * 2012-07-02 2018-08-22 Zimmer, Inc. Thin film tantalum coating for medical implants
TWI664918B (en) 2014-05-21 2019-07-11 瑞士商菲利浦莫里斯製品股份有限公司 Inductively heatable tobacco product
US10407769B2 (en) * 2016-03-18 2019-09-10 Goodrich Corporation Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces
USD920936S1 (en) 2019-01-17 2021-06-01 Asm Ip Holding B.V. Higher temperature vented susceptor
USD914620S1 (en) 2019-01-17 2021-03-30 Asm Ip Holding B.V. Vented susceptor
US11404302B2 (en) 2019-05-22 2022-08-02 Asm Ip Holding B.V. Substrate susceptor using edge purging
US11764101B2 (en) 2019-10-24 2023-09-19 ASM IP Holding, B.V. Susceptor for semiconductor substrate processing

Also Published As

Publication number Publication date
US3549847A (en) 1970-12-22
NL6805349A (en) 1968-10-21
FR1562474A (en) 1969-04-04
GB1221852A (en) 1971-02-10
DE1771169A1 (en) 1972-02-17
SE353005B (en) 1973-01-15

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