BE710114A - - Google Patents
Info
- Publication number
- BE710114A BE710114A BE710114DA BE710114A BE 710114 A BE710114 A BE 710114A BE 710114D A BE710114D A BE 710114DA BE 710114 A BE710114 A BE 710114A
- Authority
- BE
- Belgium
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/008—Systems specially adapted to form image relays or chained systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6701520A NL6701520A (US06589383-20030708-C00041.png) | 1967-02-01 | 1967-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE710114A true BE710114A (US06589383-20030708-C00041.png) | 1968-07-30 |
Family
ID=19799187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE710114D BE710114A (US06589383-20030708-C00041.png) | 1967-02-01 | 1968-01-30 |
Country Status (8)
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3914030A (en) * | 1971-04-12 | 1975-10-21 | Helmut Weiss | Virtual image magnifier system filled with a refractive medium |
| US3758196A (en) * | 1971-04-12 | 1973-09-11 | H Weiss | Optical magnifying system and apparatus for viewing small objects |
| US3748015A (en) * | 1971-06-21 | 1973-07-24 | Perkin Elmer Corp | Unit power imaging catoptric anastigmat |
| US4103989A (en) * | 1977-02-07 | 1978-08-01 | Seymour Rosin | Unit-power concentric optical systems |
| US4171870A (en) * | 1977-05-06 | 1979-10-23 | Bell Telephone Laboratories, Incorporated | Compact image projection apparatus |
| US4171871A (en) * | 1977-06-30 | 1979-10-23 | International Business Machines Corporation | Achromatic unit magnification optical system |
| US4288148A (en) * | 1979-08-29 | 1981-09-08 | The Perkin-Elmer Corporation | Beam-splitting optical system |
| US4302079A (en) * | 1980-04-10 | 1981-11-24 | Bell Telephone Laboratories, Incorporated | Photolithographic projection apparatus using light in the far ultraviolet |
| US4406520A (en) * | 1980-08-14 | 1983-09-27 | Universal Pioneer Corporation | Beam splitter optical system of signal pickup device |
| US4391494A (en) * | 1981-05-15 | 1983-07-05 | General Signal Corporation | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
| US4425037A (en) | 1981-05-15 | 1984-01-10 | General Signal Corporation | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
| US4444492A (en) * | 1982-05-15 | 1984-04-24 | General Signal Corporation | Apparatus for projecting a series of images onto dies of a semiconductor wafer |
| US4540251A (en) * | 1983-12-01 | 1985-09-10 | International Business Machines Corporation | Thermo-mechanical overlay signature tuning for Perkin-Elmer mask aligner |
| US4896952A (en) * | 1988-04-22 | 1990-01-30 | International Business Machines Corporation | Thin film beamsplitter optical element for use in an image-forming lens system |
| US4953960A (en) * | 1988-07-15 | 1990-09-04 | Williamson David M | Optical reduction system |
| US4964705A (en) * | 1988-11-07 | 1990-10-23 | General Signal Corporation | Unit magnification optical system |
| US5040882A (en) * | 1988-11-07 | 1991-08-20 | General Signal Corporation | Unit magnification optical system with improved reflective reticle |
| US5140459A (en) * | 1989-08-29 | 1992-08-18 | Texas Instruments | Apparatus and method for optical relay and reimaging |
| US5241423A (en) * | 1990-07-11 | 1993-08-31 | International Business Machines Corporation | High resolution reduction catadioptric relay lens |
| US5089913A (en) * | 1990-07-11 | 1992-02-18 | International Business Machines Corporation | High resolution reduction catadioptric relay lens |
| US5323263A (en) * | 1993-02-01 | 1994-06-21 | Nikon Precision Inc. | Off-axis catadioptric projection system |
| US5515207A (en) * | 1993-11-03 | 1996-05-07 | Nikon Precision Inc. | Multiple mirror catadioptric optical system |
| US5610765A (en) * | 1994-10-17 | 1997-03-11 | The University Of North Carolina At Chapel Hill | Optical path extender for compact imaging display systems |
| US20060238732A1 (en) * | 2005-04-21 | 2006-10-26 | Mercado Romeo I | High-NA unit-magnification projection optical system having a beamsplitter |
| US8493670B2 (en) | 2010-09-10 | 2013-07-23 | Coherent, Inc. | Large-field unit-magnification catadioptric projection system |
| US8659823B2 (en) | 2011-04-22 | 2014-02-25 | Coherent, Inc. | Unit-magnification catadioptric and catoptric projection optical systems |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2801570A (en) * | 1952-05-29 | 1957-08-06 | Centre Nat Rech Scient | Mirror type optical objectives for microscopes |
| FR1471508A (fr) * | 1966-03-15 | 1967-03-03 | Optische Ind De Oude Delft Nv | Système catadioptrique de grossissement égal à l'unité |
-
1967
- 1967-02-01 NL NL6701520A patent/NL6701520A/xx unknown
-
1968
- 1968-01-11 DE DE19681622979 patent/DE1622979A1/de active Pending
- 1968-01-26 US US700970A patent/US3536380A/en not_active Expired - Lifetime
- 1968-01-29 GB GB4441/68A patent/GB1213728A/en not_active Expired
- 1968-01-29 SE SE01144/68A patent/SE330993B/xx unknown
- 1968-01-29 CH CH129268A patent/CH483026A/de not_active IP Right Cessation
- 1968-01-30 BE BE710114D patent/BE710114A/xx unknown
- 1968-02-01 FR FR1558619D patent/FR1558619A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1213728A (en) | 1970-11-25 |
| DE1622979A1 (de) | 1971-01-07 |
| NL6701520A (US06589383-20030708-C00041.png) | 1968-08-02 |
| CH483026A (de) | 1969-12-15 |
| SE330993B (US06589383-20030708-C00041.png) | 1970-12-07 |
| US3536380A (en) | 1970-10-27 |
| FR1558619A (US06589383-20030708-C00041.png) | 1969-02-28 |
