US20070215486A1
(en )
2007-09-20
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TWI286959B
(en )
2007-09-21
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FR2527118A1
(fr )
1983-11-25
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(ja )
1992-08-21
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(cs )
LU84470A1
(fr )
1984-06-13
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FR2508365A1
(fr )
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JPH05131365A
(ja )
1993-05-28
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US20040259365A1
(en )
2004-12-23
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WO2001054179A1
(en )
2001-07-26
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BE437463A
(cs )
JP3485170B2
(ja )
2004-01-13
リムーバブル電極
US606000A
(en )
1898-06-21
Tool-sharpener
US5419046A
(en )
1995-05-30
Chrome plate remover
CH361346A
(fr )
1962-04-15
Procédé d'usinage électrolytique
JP2000144477A
(ja )
2000-05-26
電着ブレード及びその製造方法
JPS5639866A
(en )
1981-04-15
Cup wheel for hard brittle substance
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2021
Effect of ethylenediamine on CMP performance of ruthenium in H₂O₂-based slurries
KR20230151481A
(ko )
2023-11-01
양극 산화 원용 연삭 장치 및 양극 산화 원용 연삭 방법
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(cs )
1993-01-20
WO2021074509A1
(fr )
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Tribofinition de pièces assistée par oxydo-réduction
JP4805468B2
(ja )
2011-11-02
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US908908A
(en )
1909-01-05
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EP0370950A1
(fr )
1990-05-30
Machine à électro-érosion à fil
CH588910A5
(en )
1977-06-15
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