AU7491598A - Lithographically defined microelectronic contact structures - Google Patents

Lithographically defined microelectronic contact structures

Info

Publication number
AU7491598A
AU7491598A AU74915/98A AU7491598A AU7491598A AU 7491598 A AU7491598 A AU 7491598A AU 74915/98 A AU74915/98 A AU 74915/98A AU 7491598 A AU7491598 A AU 7491598A AU 7491598 A AU7491598 A AU 7491598A
Authority
AU
Australia
Prior art keywords
contact structures
lithographically defined
microelectronic contact
defined microelectronic
lithographically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU74915/98A
Inventor
Igor Y. Khandros
David V Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FormFactor Inc
Original Assignee
FormFactor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1997/008634 external-priority patent/WO1997043654A1/en
Application filed by FormFactor Inc filed Critical FormFactor Inc
Publication of AU7491598A publication Critical patent/AU7491598A/en
Abandoned legal-status Critical Current

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    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4846Leads on or in insulating or insulated substrates, e.g. metallisation
    • H01L21/4853Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4092Integral conductive tabs, i.e. conductive parts partly detached from the substrate
AU74915/98A 1997-05-15 1998-05-14 Lithographically defined microelectronic contact structures Abandoned AU7491598A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
PCT/US1997/008634 WO1997043654A1 (en) 1996-05-17 1997-05-15 Microelectronic spring contact elements
WOUS9708634 1997-05-15
US7367998P 1998-02-04 1998-02-04
US60073679 1998-02-04
US3247398A 1998-02-26 1998-02-26
US09032473 1998-02-26
PCT/US1998/009999 WO1998052224A1 (en) 1997-05-15 1998-05-14 Lithographically defined microelectronic contact structures

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AU7491598A true AU7491598A (en) 1998-12-08

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AU74915/98A Abandoned AU7491598A (en) 1997-05-15 1998-05-14 Lithographically defined microelectronic contact structures

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JP (3) JP3378259B2 (en)
KR (2) KR100577132B1 (en)
AU (1) AU7491598A (en)
WO (1) WO1998052224A1 (en)

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EP0985231A1 (en) 2000-03-15
KR100577131B1 (en) 2006-05-10
KR20010012575A (en) 2001-02-15
KR100577132B1 (en) 2006-05-09
JP3378259B2 (en) 2003-02-17
JP2003031289A (en) 2003-01-31
JP2002231718A (en) 2002-08-16
JP2000512437A (en) 2000-09-19
KR20040034685A (en) 2004-04-28
WO1998052224A1 (en) 1998-11-19

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