Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Filing date
Publication date
Priority claimed from JP48005607Aexternal-prioritypatent/JPS5215263B2/ja
Priority claimed from JP48007827Aexternal-prioritypatent/JPS5215264B2/ja
Priority claimed from JP48008820Aexternal-prioritypatent/JPS5219832B2/ja
Priority claimed from JP48025292Aexternal-prioritypatent/JPS5215267B2/ja
Priority claimed from JP48025289Aexternal-prioritypatent/JPS5215265B2/ja
Priority claimed from JP48025290Aexternal-prioritypatent/JPS5215266B2/ja
Priority claimed from JP9154973Aexternal-prioritypatent/JPS5638248B2/ja
Priority claimed from JP48091547Aexternal-prioritypatent/JPS5040461A/ja
Priority claimed from JP48091546Aexternal-prioritypatent/JPS5243468B2/ja
Priority claimed from JP48091550Aexternal-prioritypatent/JPS5040463A/ja
Priority claimed from JP48107123Aexternal-prioritypatent/JPS5239379B2/ja
Application filed by Ebara CorpfiledCriticalEbara Corp
Publication of AU6419374ApublicationCriticalpatent/AU6419374A/en
Publication of AU490326B2publicationCriticalpatent/AU490326B2/en