AU429431B2 - Improvements in and relating to methods of etching - Google Patents

Improvements in and relating to methods of etching

Info

Publication number
AU429431B2
AU429431B2 AU64754/69A AU6475469A AU429431B2 AU 429431 B2 AU429431 B2 AU 429431B2 AU 64754/69 A AU64754/69 A AU 64754/69A AU 6475469 A AU6475469 A AU 6475469A AU 429431 B2 AU429431 B2 AU 429431B2
Authority
AU
Australia
Prior art keywords
etching
relating
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU64754/69A
Other versions
AU6475469A (en
Inventor
ARTHUR COUTURE and JOHN JAMES LAJZA ROGER JR
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU429431B2 publication Critical patent/AU429431B2/en
Publication of AU6475469A publication Critical patent/AU6475469A/en
Expired legal-status Critical Current

Links

AU64754/69A 1969-01-15 1969-12-04 Improvements in and relating to methods of etching Expired AU429431B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS791,521 1969-01-15

Publications (2)

Publication Number Publication Date
AU429431B2 true AU429431B2 (en) 1971-06-10
AU6475469A AU6475469A (en) 1971-06-10

Family

ID=

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