AU2003288479A1 - Apparatus for modulating a light beam - Google Patents

Apparatus for modulating a light beam

Info

Publication number
AU2003288479A1
AU2003288479A1 AU2003288479A AU2003288479A AU2003288479A1 AU 2003288479 A1 AU2003288479 A1 AU 2003288479A1 AU 2003288479 A AU2003288479 A AU 2003288479A AU 2003288479 A AU2003288479 A AU 2003288479A AU 2003288479 A1 AU2003288479 A1 AU 2003288479A1
Authority
AU
Australia
Prior art keywords
modulating
apparatus
light beam
beam
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003288479A
Inventor
Patrick Vincent Kelly
Martin Edward Murtagh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optical Metrology Patents Ltd
Original Assignee
Optical Metrology Patents Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US42923602P priority Critical
Priority to US60/429,236 priority
Priority to IE2002/0913 priority
Priority to IE20020913 priority
Application filed by Optical Metrology Patents Ltd filed Critical Optical Metrology Patents Ltd
Priority to PCT/IE2003/000158 priority patent/WO2004048945A1/en
Publication of AU2003288479A1 publication Critical patent/AU2003288479A1/en
Application status is Abandoned legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/636Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited using an arrangement of pump beam and probe beam; using the measurement of optical non-linear properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
AU2003288479A 2002-11-27 2003-11-27 Apparatus for modulating a light beam Abandoned AU2003288479A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US42923602P true 2002-11-27 2002-11-27
US60/429,236 2002-11-27
IE2002/0913 2002-11-28
IE20020913 2002-11-28
PCT/IE2003/000158 WO2004048945A1 (en) 2002-11-27 2003-11-27 Apparatus for modulating a light beam

Publications (1)

Publication Number Publication Date
AU2003288479A1 true AU2003288479A1 (en) 2004-06-18

Family

ID=32396062

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003288479A Abandoned AU2003288479A1 (en) 2002-11-27 2003-11-27 Apparatus for modulating a light beam

Country Status (2)

Country Link
AU (1) AU2003288479A1 (en)
WO (1) WO2004048945A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4807707B2 (en) * 2007-11-30 2011-11-02 キヤノン株式会社 Waveform information acquisition device
US7760364B1 (en) 2008-10-22 2010-07-20 Kla-Tencor Corporation Systems and methods for near-field heterodyne spectroscopy
US9640449B2 (en) 2014-04-21 2017-05-02 Kla-Tencor Corporation Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5255071A (en) * 1989-09-13 1993-10-19 Pollak Fred H Photoreflectance method and apparatus utilizing acousto-optic modulation
US5377006A (en) * 1991-05-20 1994-12-27 Hitachi, Ltd. Method and apparatus for detecting photoacoustic signal
US5172191A (en) * 1991-08-06 1992-12-15 The United States Of America As Represented By The Secretary Of The Army Sweeping photoreflectance spectroscopy
JPH08285768A (en) * 1995-04-19 1996-11-01 Toshiba Corp Infrared scanning optical system and inspection equipment employing it
US5903358A (en) * 1997-06-20 1999-05-11 The Board Of Trustees Of The Leland Stanford Junior University Spectroscopy using active diode laser stabilization by optical feedback
US6188478B1 (en) * 1998-10-21 2001-02-13 Philips Electronics North America Corporation Method and apparatus for film-thickness measurements
US6052216A (en) * 1999-01-29 2000-04-18 Agfa Corporation Laser and beam intensity modulation system for imagesetting device
US6885807B2 (en) * 2001-03-14 2005-04-26 Nuonics, Inc. High speed fiber-optic attenuation modules

Also Published As

Publication number Publication date
WO2004048945A1 (en) 2004-06-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase