AU2002339524A1 - Method and device for the thermal treatment of substrates - Google Patents

Method and device for the thermal treatment of substrates

Info

Publication number
AU2002339524A1
AU2002339524A1 AU2002339524A AU2002339524A AU2002339524A1 AU 2002339524 A1 AU2002339524 A1 AU 2002339524A1 AU 2002339524 A AU2002339524 A AU 2002339524A AU 2002339524 A AU2002339524 A AU 2002339524A AU 2002339524 A1 AU2002339524 A1 AU 2002339524A1
Authority
AU
Australia
Prior art keywords
substrates
thermal treatment
thermal
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002339524A
Inventor
Markus Hauf
Christoph Striebel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mattson Thermal Products GmbH
Original Assignee
Mattson Thermal Products GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mattson Thermal Products GmbH filed Critical Mattson Thermal Products GmbH
Publication of AU2002339524A1 publication Critical patent/AU2002339524A1/en
Abandoned legal-status Critical Current

Links

AU2002339524A 2001-05-23 2002-05-23 Method and device for the thermal treatment of substrates Abandoned AU2002339524A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10125318.4 2001-05-23
DE10222879.5 2002-05-23

Publications (1)

Publication Number Publication Date
AU2002339524A1 true AU2002339524A1 (en) 2002-12-03

Family

ID=

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