AU2002335556A1 - Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same
- Google Patents
Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same
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Abandoned
Application number
AU2002335556A
Inventor
Jin-Yong Kim
Yeong-Ryeol Kim
Joong-Whan Lee
Ji-Jong Park
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KMAC
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KMAC
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Publication of AU2002335556A1publicationCriticalpatent/AU2002335556A1/en
AU2002335556A2001-09-212002-09-23Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same
AbandonedAU2002335556A1
(en)
Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same
Method and device for optically measuring the surface shape and for the optical surface inspection of moving strips in rolling and processing installations
Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same