AU2002335556A1 - Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same - Google Patents

Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same

Info

Publication number
AU2002335556A1
AU2002335556A1 AU2002335556A AU2002335556A AU2002335556A1 AU 2002335556 A1 AU2002335556 A1 AU 2002335556A1 AU 2002335556 A AU2002335556 A AU 2002335556A AU 2002335556 A AU2002335556 A AU 2002335556A AU 2002335556 A1 AU2002335556 A1 AU 2002335556A1
Authority
AU
Australia
Prior art keywords
measuring
reflectometry
dimensional
refractive index
multiple layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002335556A
Inventor
Jin-Yong Kim
Yeong-Ryeol Kim
Joong-Whan Lee
Ji-Jong Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KMAC
Original Assignee
KMAC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KMAC filed Critical KMAC
Publication of AU2002335556A1 publication Critical patent/AU2002335556A1/en
Abandoned legal-status Critical Current

Links

AU2002335556A 2001-09-21 2002-09-23 Apparatus for measuring thickness profile and refractive index distribution of multiple layers of thin films by means of two-dimensional reflectometry and method of measuring the same Abandoned AU2002335556A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR2001/58535 2001-09-21
KR2002/57581 2002-09-23

Publications (1)

Publication Number Publication Date
AU2002335556A1 true AU2002335556A1 (en) 2003-04-01

Family

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