AU2002243240A1 - Precision sub-pixel alignment technique - Google Patents
Precision sub-pixel alignment techniqueInfo
- Publication number
- AU2002243240A1 AU2002243240A1 AU2002243240A AU2002243240A AU2002243240A1 AU 2002243240 A1 AU2002243240 A1 AU 2002243240A1 AU 2002243240 A AU2002243240 A AU 2002243240A AU 2002243240 A AU2002243240 A AU 2002243240A AU 2002243240 A1 AU2002243240 A1 AU 2002243240A1
- Authority
- AU
- Australia
- Prior art keywords
- alignment technique
- pixel alignment
- precision sub
- precision
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2001/044196 WO2003046528A1 (en) | 2001-11-21 | 2001-11-21 | Precision sub-pixel alignment technique |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002243240A1 true AU2002243240A1 (en) | 2003-06-10 |
Family
ID=21743024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002243240A Abandoned AU2002243240A1 (en) | 2001-11-21 | 2001-11-21 | Precision sub-pixel alignment technique |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2002243240A1 (en) |
WO (1) | WO2003046528A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102409943B1 (en) * | 2017-11-29 | 2022-06-16 | 삼성전자주식회사 | Method of detecting a defect and apparatus for performing the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4845373A (en) * | 1984-02-22 | 1989-07-04 | Kla Instruments Corporation | Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting |
US5067020A (en) * | 1989-12-14 | 1991-11-19 | Eastman Kodak Company | Dual sensor film scanner having coupled optics and a video viewfinder |
US5923430A (en) * | 1993-06-17 | 1999-07-13 | Ultrapointe Corporation | Method for characterizing defects on semiconductor wafers |
-
2001
- 2001-11-21 WO PCT/US2001/044196 patent/WO2003046528A1/en not_active Application Discontinuation
- 2001-11-21 AU AU2002243240A patent/AU2002243240A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2003046528A1 (en) | 2003-06-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |