AU1329000A - Multidimensional uncertainty analysis - Google Patents

Multidimensional uncertainty analysis

Info

Publication number
AU1329000A
AU1329000A AU13290/00A AU1329000A AU1329000A AU 1329000 A AU1329000 A AU 1329000A AU 13290/00 A AU13290/00 A AU 13290/00A AU 1329000 A AU1329000 A AU 1329000A AU 1329000 A AU1329000 A AU 1329000A
Authority
AU
Australia
Prior art keywords
uncertainty analysis
multidimensional
multidimensional uncertainty
analysis
uncertainty
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU13290/00A
Other languages
English (en)
Inventor
Roland Ruhl
Marcos Sepulveda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISE Integrated Systems Engineering AG
Original Assignee
ISE Integrated Systems Engineering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISE Integrated Systems Engineering AG filed Critical ISE Integrated Systems Engineering AG
Publication of AU1329000A publication Critical patent/AU1329000A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
AU13290/00A 1998-11-02 1999-10-28 Multidimensional uncertainty analysis Abandoned AU1329000A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09184611 1998-11-02
US09/184,611 US6173240B1 (en) 1998-11-02 1998-11-02 Multidimensional uncertainty analysis
PCT/US1999/025338 WO2000026730A1 (en) 1998-11-02 1999-10-28 Multidimensional uncertainty analysis

Publications (1)

Publication Number Publication Date
AU1329000A true AU1329000A (en) 2000-05-22

Family

ID=22677627

Family Applications (1)

Application Number Title Priority Date Filing Date
AU13290/00A Abandoned AU1329000A (en) 1998-11-02 1999-10-28 Multidimensional uncertainty analysis

Country Status (3)

Country Link
US (1) US6173240B1 (US06173240-20010109-M00015.png)
AU (1) AU1329000A (US06173240-20010109-M00015.png)
WO (1) WO2000026730A1 (US06173240-20010109-M00015.png)

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US7160739B2 (en) * 2001-06-19 2007-01-09 Applied Materials, Inc. Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
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US6455434B1 (en) * 2001-10-23 2002-09-24 International Business Machines Corporation Prevention of slurry build-up within wafer topography during polishing
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US6451621B1 (en) * 2002-01-16 2002-09-17 Advanced Micro Devices, Inc. Using scatterometry to measure resist thickness and control implant
US7225047B2 (en) * 2002-03-19 2007-05-29 Applied Materials, Inc. Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
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US7333871B2 (en) * 2003-01-21 2008-02-19 Applied Materials, Inc. Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
US7205228B2 (en) * 2003-06-03 2007-04-17 Applied Materials, Inc. Selective metal encapsulation schemes
WO2005008379A2 (en) * 2003-07-03 2005-01-27 Reaction Design Method and system for integrated uncertainty analysis
US20050004833A1 (en) * 2003-07-03 2005-01-06 Reaction Design, Llc Method and system for integrated uncertainty analysis
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US7354332B2 (en) * 2003-08-04 2008-04-08 Applied Materials, Inc. Technique for process-qualifying a semiconductor manufacturing tool using metrology data
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US7356377B2 (en) * 2004-01-29 2008-04-08 Applied Materials, Inc. System, method, and medium for monitoring performance of an advanced process control system
US7096085B2 (en) * 2004-05-28 2006-08-22 Applied Materials Process control by distinguishing a white noise component of a process variance
US6961626B1 (en) * 2004-05-28 2005-11-01 Applied Materials, Inc Dynamic offset and feedback threshold
US7363195B2 (en) * 2004-07-07 2008-04-22 Sensarray Corporation Methods of configuring a sensor network
CN101218517B (zh) * 2005-07-13 2012-05-30 埃克森美孚上游研究公司 预测非唯一解集合中的最佳和最坏解的方法
US7444275B2 (en) * 2005-07-22 2008-10-28 Agere Systems Inc. Multi-variable polynomial modeling techniques for use in integrated circuit design
US8036758B2 (en) * 2008-04-07 2011-10-11 Honeywell International Inc. System and method for continuous supply chain control and optimization using stochastic calculus of variations approach
JP2013504133A (ja) * 2009-09-03 2013-02-04 イー． ラリモア，ウォレス 反復線形部分空間計算による時変、パラメータ変動、及び非線形システムの経験的モデル化のための方法及びシステム
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CN106991252A (zh) * 2017-04-27 2017-07-28 上海理工大学 复杂试验不确定度评价方法
CN108920786B (zh) * 2018-06-20 2022-10-25 北京航空航天大学 一种基于切比雪夫多项式拟合的区间不确定性分析方法
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Also Published As

Publication number Publication date
WO2000026730A1 (en) 2000-05-11
US6173240B1 (en) 2001-01-09

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase