ATE378584T1 - Gassensor - Google Patents
GassensorInfo
- Publication number
- ATE378584T1 ATE378584T1 AT99965875T AT99965875T ATE378584T1 AT E378584 T1 ATE378584 T1 AT E378584T1 AT 99965875 T AT99965875 T AT 99965875T AT 99965875 T AT99965875 T AT 99965875T AT E378584 T1 ATE378584 T1 AT E378584T1
- Authority
- AT
- Austria
- Prior art keywords
- gas sensor
- active element
- surrounded
- sensor comprises
- another gas
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11714399P | 1999-01-25 | 1999-01-25 | |
US09/290,792 US6344174B1 (en) | 1999-01-25 | 1999-04-12 | Gas sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE378584T1 true ATE378584T1 (de) | 2007-11-15 |
Family
ID=26814961
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT99965875T ATE378584T1 (de) | 1999-01-25 | 1999-11-23 | Gassensor |
Country Status (10)
Country | Link |
---|---|
US (3) | US6344174B1 (de) |
EP (1) | EP1151285B1 (de) |
JP (1) | JP2002535649A (de) |
CN (1) | CN1172180C (de) |
AT (1) | ATE378584T1 (de) |
AU (1) | AU760554B2 (de) |
BR (1) | BR9916970B1 (de) |
CA (2) | CA2599136C (de) |
DE (1) | DE69937578T2 (de) |
WO (1) | WO2000043765A1 (de) |
Families Citing this family (71)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW539918B (en) * | 1997-05-27 | 2003-07-01 | Tokyo Electron Ltd | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
GB2335043B (en) * | 1998-03-04 | 2002-05-22 | Eev Ltd | Gas sensors |
US6344174B1 (en) * | 1999-01-25 | 2002-02-05 | Mine Safety Appliances Company | Gas sensor |
CA2387341A1 (en) * | 1999-11-02 | 2001-05-10 | Tokyo Electron Limited | Method and apparatus for supercritical processing of multiple workpieces |
US6748960B1 (en) * | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
AU2001290171A1 (en) * | 2000-07-26 | 2002-02-05 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
CA2444296A1 (en) * | 2001-04-10 | 2002-10-24 | Supercritical Systems Inc. | High pressure processing chamber for semiconductor substrate including flow enhancing features |
WO2003042678A1 (fr) * | 2001-11-15 | 2003-05-22 | Riken Keiki Co., Ltd. | Capteur de gaz |
AU2003215238A1 (en) * | 2002-02-15 | 2003-09-09 | Supercritical Systems Inc. | Pressure enchanced diaphragm valve |
US7080545B2 (en) * | 2002-10-17 | 2006-07-25 | Advanced Technology Materials, Inc. | Apparatus and process for sensing fluoro species in semiconductor processing systems |
US6722642B1 (en) | 2002-11-06 | 2004-04-20 | Tokyo Electron Limited | High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism |
US7270137B2 (en) * | 2003-04-28 | 2007-09-18 | Tokyo Electron Limited | Apparatus and method of securing a workpiece during high-pressure processing |
US20050034660A1 (en) * | 2003-08-11 | 2005-02-17 | Supercritical Systems, Inc. | Alignment means for chamber closure to reduce wear on surfaces |
US6973819B2 (en) * | 2003-11-01 | 2005-12-13 | Honeywell International Inc. | Differential compensated vapor sensor |
US7250374B2 (en) * | 2004-06-30 | 2007-07-31 | Tokyo Electron Limited | System and method for processing a substrate using supercritical carbon dioxide processing |
US7307019B2 (en) * | 2004-09-29 | 2007-12-11 | Tokyo Electron Limited | Method for supercritical carbon dioxide processing of fluoro-carbon films |
US20060065288A1 (en) * | 2004-09-30 | 2006-03-30 | Darko Babic | Supercritical fluid processing system having a coating on internal members and a method of using |
US20060102591A1 (en) * | 2004-11-12 | 2006-05-18 | Tokyo Electron Limited | Method and system for treating a substrate using a supercritical fluid |
US20060102208A1 (en) * | 2004-11-12 | 2006-05-18 | Tokyo Electron Limited | System for removing a residue from a substrate using supercritical carbon dioxide processing |
US20060102204A1 (en) * | 2004-11-12 | 2006-05-18 | Tokyo Electron Limited | Method for removing a residue from a substrate using supercritical carbon dioxide processing |
US7491036B2 (en) * | 2004-11-12 | 2009-02-17 | Tokyo Electron Limited | Method and system for cooling a pump |
US20060102590A1 (en) * | 2004-11-12 | 2006-05-18 | Tokyo Electron Limited | Method for treating a substrate with a high pressure fluid using a preoxide-based process chemistry |
US20060130966A1 (en) * | 2004-12-20 | 2006-06-22 | Darko Babic | Method and system for flowing a supercritical fluid in a high pressure processing system |
US20060135047A1 (en) * | 2004-12-22 | 2006-06-22 | Alexei Sheydayi | Method and apparatus for clamping a substrate in a high pressure processing system |
US20060134332A1 (en) * | 2004-12-22 | 2006-06-22 | Darko Babic | Precompressed coating of internal members in a supercritical fluid processing system |
US7140393B2 (en) * | 2004-12-22 | 2006-11-28 | Tokyo Electron Limited | Non-contact shuttle valve for flow diversion in high pressure systems |
US7434590B2 (en) * | 2004-12-22 | 2008-10-14 | Tokyo Electron Limited | Method and apparatus for clamping a substrate in a high pressure processing system |
US7435447B2 (en) * | 2005-02-15 | 2008-10-14 | Tokyo Electron Limited | Method and system for determining flow conditions in a high pressure processing system |
US20060180174A1 (en) * | 2005-02-15 | 2006-08-17 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using a peroxide-based process chemistry in conjunction with an initiator |
US7291565B2 (en) * | 2005-02-15 | 2007-11-06 | Tokyo Electron Limited | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid |
US20060180572A1 (en) * | 2005-02-15 | 2006-08-17 | Tokyo Electron Limited | Removal of post etch residue for a substrate with open metal surfaces |
US7767145B2 (en) | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
DE102005020131B3 (de) * | 2005-04-30 | 2006-05-11 | Dräger Safety AG & Co. KGaA | Gassensor zum Nachweis von brennbaren Gasen |
US20060255012A1 (en) * | 2005-05-10 | 2006-11-16 | Gunilla Jacobson | Removal of particles from substrate surfaces using supercritical processing |
US7789971B2 (en) * | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
US7524383B2 (en) * | 2005-05-25 | 2009-04-28 | Tokyo Electron Limited | Method and system for passivating a processing chamber |
US20070012337A1 (en) * | 2005-07-15 | 2007-01-18 | Tokyo Electron Limited | In-line metrology for supercritical fluid processing |
US20080273572A1 (en) * | 2006-06-02 | 2008-11-06 | James Madison University | Thermal detector for chemical or biological agents |
US7439206B2 (en) * | 2006-07-18 | 2008-10-21 | Conocophillips Company | Process for selective oxidation of carbon monoxide in a hydrogen containing stream |
JP4739166B2 (ja) * | 2006-10-24 | 2011-08-03 | 本田技研工業株式会社 | ガスセンサ |
JP5012036B2 (ja) * | 2007-01-17 | 2012-08-29 | トヨタ自動車株式会社 | 硫黄成分検出装置 |
DE102007032700B4 (de) * | 2007-07-13 | 2011-04-07 | Dräger Safety AG & Co. KGaA | Gassensor mit zumindest einem katalytischen Messelement |
JP4892511B2 (ja) * | 2008-04-15 | 2012-03-07 | 本田技研工業株式会社 | ガスセンサ |
JP2010145295A (ja) * | 2008-12-19 | 2010-07-01 | New Cosmos Electric Corp | ガス検知素子 |
DE102009007279A1 (de) | 2009-02-03 | 2010-08-19 | Dräger Safety AG & Co. KGaA | Explosionsgeschützter Gassensor ohne druckfeste Kapselung |
CA2774467C (en) * | 2009-10-30 | 2017-08-15 | Mine Safety Appliances Company | Combustible gas sensors including integral support structures and combustible gas sensor with multiple active elements |
CN102539489A (zh) * | 2012-02-09 | 2012-07-04 | 中国矿业大学 | 一种催化燃烧式瓦斯敏感元件的封装结构 |
WO2014012951A1 (en) | 2012-07-16 | 2014-01-23 | Sgx Sensortech Sa | Mems device with improved filter |
WO2014048335A1 (zh) * | 2012-09-28 | 2014-04-03 | 华瑞科学仪器(上海)有限公司 | 防爆型小型化可燃气体传感器 |
EP2806266B1 (de) * | 2013-05-23 | 2017-06-14 | Honeywell International Inc. | Pellistor mit Einzelelement, der unempfindlich gegenüber internen und externen Störungen ist |
JP6076196B2 (ja) * | 2013-05-27 | 2017-02-08 | 理研計器株式会社 | 可燃性ガス検出器用硫化水素除去フィルタ |
DE102013018457A1 (de) | 2013-11-02 | 2015-05-07 | Dräger Safety AG & Co. KGaA | Filmmaterial zur selektiven Entfernung von Siloxanen |
DE102014207829A1 (de) * | 2014-04-25 | 2015-10-29 | Robert Bosch Gmbh | Chemischer Gassensor |
JP6433052B2 (ja) * | 2014-09-09 | 2018-12-05 | 理研計器株式会社 | ガス測定装置用素子 |
CN105572166B (zh) * | 2014-10-09 | 2019-01-15 | 通用电气公司 | 采用了基于催化剂的一氧化碳传感器的系统以及防止该传感器被硫和积炭损害的方法 |
DE102014018681B3 (de) * | 2014-12-18 | 2015-10-29 | Dräger Safety AG & Co. KGaA | Gassensor und Verfahren zur Herstellung eines Messelementes |
US10197525B2 (en) | 2015-12-21 | 2019-02-05 | Msa Technology, Llc | Pulsed potential gas sensors |
EP3196533A1 (de) * | 2016-01-25 | 2017-07-26 | Plastic Omnium Advanced Innovation and Research | Leckage detektiersystem für druckbehälter |
US10234412B2 (en) | 2016-11-04 | 2019-03-19 | Msa Technology, Llc | Identification of combustible gas species via pulsed operation of a combustible gas sensor |
CA3059987A1 (en) | 2017-06-11 | 2018-12-20 | Msa Technology, Llc | Filter for sulfur compounds |
JP7043192B2 (ja) * | 2017-07-10 | 2022-03-29 | 新コスモス電機株式会社 | 接触燃焼式ガスセンサ |
US20190025270A1 (en) * | 2017-07-21 | 2019-01-24 | Riken Keiki Co., Ltd. | Gas detector |
CN107389729B (zh) * | 2017-08-31 | 2023-06-23 | 邹小红 | 一种可抗震和抗中毒的催化燃烧式传感器 |
DE102018108723A1 (de) * | 2018-04-12 | 2019-10-17 | Tdk Corporation | Sensorvorrichtung, Verfahren zum Betreiben einer Sensorvorrichtung und elektronische Baugruppe, die eine Sensorvorrichtung aufweist |
US10900922B2 (en) | 2018-07-17 | 2021-01-26 | Msa Technology, Llc | Power reduction in combustible gas sensors |
JP6976991B2 (ja) * | 2019-06-06 | 2021-12-08 | Nissha株式会社 | 2成分ガスの濃度比算出方法および検知対象ガスの濃度算出方法 |
US11543396B2 (en) | 2019-06-11 | 2023-01-03 | Msa Technology, Llc | Gas sensor with separate contaminant detection element |
US11268923B2 (en) | 2019-06-11 | 2022-03-08 | Msa Technology, Llc | Sensor for compositions which deposit upon a surface from a gaseous matrix |
US11703473B2 (en) * | 2019-12-11 | 2023-07-18 | Msa Technology, Llc | Operation of combustible gas sensor in a dynamic mode with a constant resistance setpoint |
DE102021111431A1 (de) | 2020-06-29 | 2021-12-30 | Dräger Safety AG & Co. KGaA | Überwachungssystem |
BR202021012321U2 (pt) * | 2021-06-22 | 2023-01-03 | Jose Marcos Nabhan | Sensor de co2 para descontaminação da cabine de automóveis e emissão de alerta |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3948810A (en) * | 1974-07-23 | 1976-04-06 | Universal Oil Products Company | Monolithic catalyst support member |
JPS51145390A (en) * | 1975-06-10 | 1976-12-14 | Nissan Motor Co Ltd | Manufacturing method of a coated layer of oxygen senser |
GB1549640A (en) * | 1976-07-06 | 1979-08-08 | English Electric Valve Co Ltd | Combustible-gas detectors |
JPS5382822A (en) * | 1976-12-28 | 1978-07-21 | Ngk Insulators Ltd | Cordierite ceramics |
DE3000993A1 (de) * | 1980-01-12 | 1981-07-23 | Daimler Benz Ag | Elektrochemischer messfuehler mit schutzeinrichtung fuer die bestimmung des sauerstoffgehaltes in abgasen, insbesondere von verbrennungsmotoren |
GB2121180B (en) | 1982-05-01 | 1985-07-17 | English Electric Valve Co Ltd | Catalytic combustible-gas detectors |
EP0094863A1 (de) | 1982-05-13 | 1983-11-23 | The Bendix Corporation | Gegen Katalysatorgifte geschützter katalytisch aktivierter Gassensor |
US4569826A (en) * | 1983-06-27 | 1986-02-11 | Kabushiki Kaisha Toshiba | Gas detecting element |
US5271858A (en) * | 1986-03-24 | 1993-12-21 | Ensci Inc. | Field dependent fluids containing electrically conductive tin oxide coated materials |
US4950628A (en) * | 1989-04-19 | 1990-08-21 | Corning Incorporated | Material and process to produce low thermal expansion cordierite structures |
AU647041B2 (en) * | 1989-09-22 | 1994-03-17 | Minnesota Mining And Manufacturing Company | Disposable test packs for steam or gas sterilizers |
DE4033388C3 (de) * | 1990-10-20 | 1998-01-29 | Bosch Gmbh Robert | Schichtsystem für Gassensoren und Verfahren zu dessen Herstellung |
DE4131503A1 (de) * | 1991-09-21 | 1993-04-01 | Bosch Gmbh Robert | Abgassensor und verfahren zu dessen herstellung |
US5401470A (en) * | 1992-04-24 | 1995-03-28 | Mine Safety Appliances Company | Combustible gas sensor |
US5320817A (en) * | 1992-08-28 | 1994-06-14 | Novapure Corporation | Process for sorption of hazardous waste products from exhaust gas streams |
CA2173612A1 (en) * | 1993-10-08 | 1995-04-20 | James Edward Van De Vyver | A catalytic gas sensor |
DE69519474T3 (de) * | 1994-05-27 | 2007-06-21 | Minnesota Mining And Mfg. Co., Saint Paul | Sterilisationstestsystem unter Verwendung parametrischer Messungen |
US5707148A (en) | 1994-09-23 | 1998-01-13 | Ford Global Technologies, Inc. | Catalytic calorimetric gas sensor |
US5599584A (en) * | 1994-12-16 | 1997-02-04 | Mine Safety Appliances Company | Microminiature combustible gas sensor and method of fabricating a microminiature combustible gas sensor |
US5841021A (en) * | 1995-09-05 | 1998-11-24 | De Castro; Emory S. | Solid state gas sensor and filter assembly |
US6019946A (en) * | 1997-11-14 | 2000-02-01 | Engelhard Corporation | Catalytic structure |
US6071476A (en) * | 1997-11-14 | 2000-06-06 | Motorola, Inc. | Exhaust gas sensor |
GB2335043B (en) * | 1998-03-04 | 2002-05-22 | Eev Ltd | Gas sensors |
US6080219A (en) * | 1998-05-08 | 2000-06-27 | Mott Metallurgical Corporation | Composite porous media |
US6344174B1 (en) * | 1999-01-25 | 2002-02-05 | Mine Safety Appliances Company | Gas sensor |
-
1999
- 1999-04-12 US US09/290,792 patent/US6344174B1/en not_active Expired - Lifetime
- 1999-11-23 AT AT99965875T patent/ATE378584T1/de not_active IP Right Cessation
- 1999-11-23 JP JP2000595136A patent/JP2002535649A/ja active Pending
- 1999-11-23 EP EP99965875A patent/EP1151285B1/de not_active Expired - Lifetime
- 1999-11-23 CA CA002599136A patent/CA2599136C/en not_active Expired - Fee Related
- 1999-11-23 WO PCT/US1999/027788 patent/WO2000043765A1/en active Search and Examination
- 1999-11-23 BR BRPI9916970-3A patent/BR9916970B1/pt not_active IP Right Cessation
- 1999-11-23 DE DE69937578T patent/DE69937578T2/de not_active Expired - Lifetime
- 1999-11-23 CN CNB998158518A patent/CN1172180C/zh not_active Expired - Fee Related
- 1999-11-23 AU AU21554/00A patent/AU760554B2/en not_active Ceased
- 1999-11-23 CA CA002360928A patent/CA2360928C/en not_active Expired - Fee Related
-
2001
- 2001-12-10 US US10/012,816 patent/US6756016B2/en not_active Expired - Lifetime
-
2004
- 2004-05-07 US US10/842,036 patent/US20040208789A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2002535649A (ja) | 2002-10-22 |
CA2360928C (en) | 2007-11-13 |
WO2000043765A1 (en) | 2000-07-27 |
DE69937578T2 (de) | 2008-09-04 |
US20040208789A1 (en) | 2004-10-21 |
DE69937578D1 (de) | 2007-12-27 |
CA2360928A1 (en) | 2000-07-27 |
CN1342263A (zh) | 2002-03-27 |
EP1151285B1 (de) | 2007-11-14 |
US20020085956A1 (en) | 2002-07-04 |
CN1172180C (zh) | 2004-10-20 |
CA2599136C (en) | 2009-03-17 |
AU760554B2 (en) | 2003-05-15 |
CA2599136A1 (en) | 2000-07-27 |
BR9916970B1 (pt) | 2012-08-07 |
US6344174B1 (en) | 2002-02-05 |
US6756016B2 (en) | 2004-06-29 |
AU2155400A (en) | 2000-08-07 |
BR9916970A (pt) | 2003-01-14 |
EP1151285A1 (de) | 2001-11-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69937578D1 (de) | Gassensor | |
DE69942602D1 (de) | Gassensor mit elektrisch leitfähigen hydrophobischen Membranen | |
EP1681025A3 (de) | Elektrochirurgische Vorrichtung mit angereichertem Inertgas | |
AU4788293A (en) | System for detection of electrically conductive fluids | |
ATE480877T1 (de) | Brennstoffzelleneinheit | |
KR960027093A (ko) | 전자 팩키지용 게터(getter) 하우징 | |
PT718917E (pt) | Sistema de contacto de interligacao electrica | |
ITMI922939A1 (it) | Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi | |
DE69833465D1 (de) | Schutzschalter mit Bogenbeschleunigungskammer und Kontaktarmaufnahme | |
FR2778023B1 (fr) | Substance active positive pour batterie alcaline et electrode utilisant cette substance | |
MY129266A (en) | Integrated circuit package with a capacitor | |
ATE230894T1 (de) | Überspannungsableiter für hoch- oder mittelspannung | |
DE50003901D1 (de) | Leistungselektronik-baulement mit verbesserten thermischen eigenschaften | |
IT8420553A0 (it) | Elettricamente conduttive. procedimento e dispositivo per la depurazione dei gas da particelle | |
SE0003930D0 (sv) | Shielded housing | |
JPS5548940A (en) | Semiconductor device | |
GB0028522D0 (en) | Circuit arrangemnt for the purpose of operating an exhaust gas sensor | |
KR960705470A (ko) | 확성기를 포함하는 장치, 확성기 장치와 확성기 하우징(Apparatus including a loudspeaker unit, loudspeaker unit, and housing for a loudspeaker unit) | |
SE9703647D0 (sv) | High Voltage Electric Device | |
RU93005234A (ru) | Измерительный пробник | |
ES2153637T3 (es) | Percarbonato de sodio y su procedimiento de obtencion. | |
SE0003102D0 (sv) | An optical sensor | |
RU92007716A (ru) | Способ изготовления датчика химического состава газа на кремниевой подложке | |
JPS5960835A (ja) | 振動検知スイツチ | |
RU93042120A (ru) | Пленочное переключающее и коммутирующее устройство |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |