AT538502T - Multilayer piezoelectric component - Google Patents

Multilayer piezoelectric component

Info

Publication number
AT538502T
AT538502T AT05820084T AT05820084T AT538502T AT 538502 T AT538502 T AT 538502T AT 05820084 T AT05820084 T AT 05820084T AT 05820084 T AT05820084 T AT 05820084T AT 538502 T AT538502 T AT 538502T
Authority
AT
Austria
Prior art keywords
multilayer piezoelectric
piezoelectric component
component
multilayer
Prior art date
Application number
AT05820084T
Other languages
German (de)
Inventor
Koichi Hayashi
Hiromitsu Hongo
Shozo Kobayashi
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2005038232 priority Critical
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to PCT/JP2005/023651 priority patent/WO2006087871A1/en
Publication of AT538502T publication Critical patent/AT538502T/en

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/083Piezo-electric or electrostrictive devices having a stacked or multilayer structure
    • H01L41/0838Piezo-electric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers ("Sollbruchstellen")
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02Details
    • H01L41/04Details of piezo-electric or electrostrictive devices
    • H01L41/047Electrodes or electrical connection arrangements
    • H01L41/0471Individual layer electrodes of multilayer piezo-electric or electrostrictive devices, e.g. internal electrodes
AT05820084T 2005-02-15 2005-12-22 Multilayer piezoelectric component AT538502T (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005038232 2005-02-15
PCT/JP2005/023651 WO2006087871A1 (en) 2005-02-15 2005-12-22 Multilayer piezoelectric device

Publications (1)

Publication Number Publication Date
AT538502T true AT538502T (en) 2012-01-15

Family

ID=36916282

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05820084T AT538502T (en) 2005-02-15 2005-12-22 Multilayer piezoelectric component

Country Status (5)

Country Link
US (1) US7598660B2 (en)
EP (1) EP1850403B1 (en)
JP (1) JP4775372B2 (en)
AT (1) AT538502T (en)
WO (1) WO2006087871A1 (en)

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DE10234787C1 (en) * 2002-06-07 2003-10-30 Pi Ceramic Gmbh Keramische Tec Manufacturing method for monolithic multi-layer piezoceramic actuator with microfaults provided in actuator joints parallel to inner electrodes
DE602005027914D1 (en) * 2005-09-16 2011-06-16 Delphi Tech Holding Sarl Piezoelectric actuator
CN101789486B (en) * 2005-09-29 2012-10-31 京瓷株式会社 Laminated piezoelectric element and jetting apparatus using same
DE102006026644A1 (en) * 2006-06-08 2007-12-13 Robert Bosch Gmbh Piezoelectric actuator
WO2008038683A1 (en) * 2006-09-28 2008-04-03 Kyocera Corporation Laminated piezoelectric element, injection apparatus and fuel injection system using the laminated piezoelectric element, and method for manufacturing laminated piezoelectric element
WO2008047460A1 (en) * 2006-10-20 2008-04-24 Kyocera Corporation Piezoelectric actuator unit and method for manufacturing the same
WO2008066098A1 (en) * 2006-11-29 2008-06-05 Kyocera Corporation Laminated piezoelectric element, jetting device provided with the laminated piezoelectric element and fuel jetting system
EP2101364A4 (en) * 2006-12-06 2013-04-03 Murata Manufacturing Co Laminated piezoelectric device and process for manufacturing the same
JP5084745B2 (en) * 2006-12-15 2012-11-28 京セラ株式会社 Multilayer piezoelectric element, injection device including the same, and fuel injection system
DE102006062076A1 (en) * 2006-12-29 2008-07-10 Siemens Ag Piezoceramic multilayer actuator and method for its production
EP1978568B1 (en) * 2007-02-19 2011-10-12 Siemens Aktiengesellschaft Piezoceramic multilayer actuator and method of manufacturing the same
EP1978567B1 (en) * 2007-02-19 2014-06-25 Continental Automotive GmbH Piezoceramic multilayer actuator and method of manufacturing a piezoceramic multilayer actuator
AT535946T (en) * 2007-02-19 2011-12-15 Siemens Ag Piezokeramic multilayer actor and method for producing a multilayer piezokeramic actuator
DE102007008120A1 (en) * 2007-02-19 2008-08-21 Siemens Ag Piezo stack and method for producing a piezo stack
JP4930410B2 (en) * 2007-02-26 2012-05-16 株式会社デンソー Multilayer piezoelectric element
DE102007037500A1 (en) * 2007-05-11 2008-11-13 Epcos Ag Piezoelectric multilayer component
JP2010536160A (en) * 2007-08-08 2010-11-25 エプコス アクチエンゲゼルシャフトEpcos Ag Multilayer piezoelectric element
JP5076733B2 (en) * 2007-08-24 2012-11-21 株式会社デンソー Multilayer piezoelectric element
DE102007046077A1 (en) * 2007-09-26 2009-04-02 Epcos Ag Piezoelectric multilayer component
DE102008011414A1 (en) * 2008-02-27 2009-09-10 Continental Automotive Gmbh Method for polarizing a piezoceramic
DE102009043000A1 (en) 2009-05-29 2010-12-02 Epcos Ag Piezoelectric multilayer component
DE102010005403A1 (en) 2010-01-22 2011-07-28 Epcos Ag, 81669 Method for producing a piezoelectric multilayer component and piezoelectric multilayer component
DE102010005906A1 (en) * 2010-01-27 2011-07-28 Epcos Ag, 81669 Piezoelectric component
DE102010033136A1 (en) * 2010-05-17 2011-11-17 Epcos Ag Piezoelectric actuator i.e. multilayer piezoelectric actuator, for use in piezo injection system for operating high mechanical load, has auxiliary electrode layers coplanarly arranged and spaced apart from electrode layers, respectively
DE102010022911B4 (en) * 2010-06-07 2017-01-19 Continental Automotive Gmbh Method for producing a piezoelectric actuator and piezoelectric actuator
CN102208526A (en) * 2011-05-31 2011-10-05 广州市番禺奥迪威电子有限公司 Multilayer piezoelectric element and electrode connecting method thereof
JP5963603B2 (en) * 2012-08-03 2016-08-03 オリンパス株式会社 Ultrasonic vibration device, method of manufacturing ultrasonic vibration device, and ultrasonic medical device
DE102012107343B4 (en) * 2012-08-09 2018-11-22 Epcos Ag Method for polarity of a multilayer component

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DE3378393D1 (en) 1982-05-11 1988-12-08 Nec Corp Multilayer electrostrictive element which withstands repeated application of pulses
JPS61124183A (en) * 1984-11-20 1986-06-11 Nippon Soken Inc Laminated piezoelectric unit
JP2567046B2 (en) 1987-09-25 1996-12-25 日立金属株式会社 Stacked displacement element
JPH03270085A (en) * 1990-03-19 1991-12-02 Brother Ind Ltd Laminated piezoelectric actuator element
JPH04299588A (en) 1991-03-28 1992-10-22 Nec Corp Electrostriction effect element
JPH065794A (en) 1992-06-19 1994-01-14 Hitachi Ltd High frequency amplifier
JP3358669B2 (en) * 1992-12-25 2002-12-24 エヌイーシートーキン株式会社 Multilayer type piezoelectric ceramic actuator
JPH08274381A (en) * 1995-03-31 1996-10-18 Chichibu Onoda Cement Corp Stacked piezoelectric actuator and its manufacture
JPH11121820A (en) 1997-10-09 1999-04-30 Hitachi Ltd Laminated piezoelectric actuator
DE19802302A1 (en) * 1998-01-22 1999-07-29 Bosch Gmbh Robert Piezoelectric actuator used e.g. for a fuel injection valve, a hydraulic valve, a micro-pump or an electrical relay
JP2000133851A (en) 1998-10-28 2000-05-12 Hitachi Ltd Stacked piezoelectric element
JP3551089B2 (en) * 1999-07-05 2004-08-04 松下電器産業株式会社 Multilayer piezoelectric transformer and electronic equipment using it
JP2001102646A (en) 1999-09-28 2001-04-13 Tokin Ceramics Corp Laminated piezoelectric ceramic
JP4854831B2 (en) * 2000-03-17 2012-01-18 太平洋セメント株式会社 Multilayer piezoelectric actuator
US20010033125A1 (en) * 2000-04-20 2001-10-25 Tokin Corporation Multilayer piezoelectric actuator device having a conductive member attached to an external electrode thereof
DE10307825A1 (en) * 2003-02-24 2004-09-09 Epcos Ag Electrical multilayer component and layer stack
JP2004288794A (en) * 2003-03-20 2004-10-14 Nec Tokin Corp Laminate piezoelectric element and its manufacturing method
WO2005002049A1 (en) * 2003-06-26 2005-01-06 Murata Manufacturing Co., Ltd. Surface acoustic wave element
JP4802445B2 (en) * 2003-09-29 2011-10-26 株式会社村田製作所 Multilayer piezoelectric element and manufacturing method thereof
JP4931334B2 (en) * 2004-05-27 2012-05-16 京セラ株式会社 Injection device
DE102004031402A1 (en) 2004-06-29 2006-02-09 Siemens Ag Piezoelectric component with predetermined breaking point, method for producing the component and use of the component
DE102004050803A1 (en) * 2004-10-19 2006-04-20 Robert Bosch Gmbh piezo actuator
JP4876467B2 (en) * 2004-12-06 2012-02-15 株式会社デンソー Multilayer piezoelectric element
DE602005027914D1 (en) * 2005-09-16 2011-06-16 Delphi Tech Holding Sarl Piezoelectric actuator
US7679273B2 (en) * 2006-07-31 2010-03-16 Delphi Technologies, Inc. Strain tolerant metal electrode design

Also Published As

Publication number Publication date
JP4775372B2 (en) 2011-09-21
EP1850403A4 (en) 2010-08-11
US7598660B2 (en) 2009-10-06
US20070269667A1 (en) 2007-11-22
JPWO2006087871A1 (en) 2008-07-03
EP1850403B1 (en) 2011-12-21
EP1850403A1 (en) 2007-10-31
WO2006087871A1 (en) 2006-08-24

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