AT517752T - Piezoelectric actuator and manufacturing method therefor - Google Patents

Piezoelectric actuator and manufacturing method therefor

Info

Publication number
AT517752T
AT517752T AT08156258T AT08156258T AT517752T AT 517752 T AT517752 T AT 517752T AT 08156258 T AT08156258 T AT 08156258T AT 08156258 T AT08156258 T AT 08156258T AT 517752 T AT517752 T AT 517752T
Authority
AT
Austria
Prior art keywords
therefor
piezoelectric actuator
piezoelectric
actuator
Prior art date
Application number
AT08156258T
Other languages
German (de)
Inventor
David D L Wijngaards
Hans Reinten
Hendrik J Stolk
Alex N Westland
Original Assignee
Oce Tech Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP07109197 priority Critical
Application filed by Oce Tech Bv filed Critical Oce Tech Bv
Publication of AT517752T publication Critical patent/AT517752T/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1623Production of nozzles manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • B41J2/1628Production of nozzles manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • B41J2/1629Production of nozzles manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1631Production of nozzles manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1635Production of nozzles manufacturing processes dividing the wafer into individual chips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1642Production of nozzles manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1645Production of nozzles manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1646Production of nozzles manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258Multi layer thin film type piezoelectric element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making
AT08156258T 2007-05-30 2008-05-15 Piezoelectric actuator and manufacturing method therefor AT517752T (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07109197 2007-05-30

Publications (1)

Publication Number Publication Date
AT517752T true AT517752T (en) 2011-08-15

Family

ID=38543703

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08156258T AT517752T (en) 2007-05-30 2008-05-15 Piezoelectric actuator and manufacturing method therefor

Country Status (4)

Country Link
US (1) US7843113B2 (en)
EP (1) EP1997635B1 (en)
JP (1) JP2008300838A (en)
AT (1) AT517752T (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4435049B2 (en) * 2005-08-08 2010-03-17 株式会社東芝 Thin film piezoelectric resonator and manufacturing method thereof
JP5819585B2 (en) * 2009-12-15 2015-11-24 セイコーエプソン株式会社 Droplet ejecting head and droplet ejecting apparatus
CN103596763B (en) * 2011-05-31 2015-10-14 柯尼卡美能达株式会社 Ink gun and possess the ink-jet drawing apparatus of ink gun
EP2785529B1 (en) 2011-11-30 2019-07-31 OCE-Technologies B.V. Inkjet print head and method for manufacturing such print head
US20130222481A1 (en) * 2012-02-27 2013-08-29 Toshiba Tec Kabushiki Kaisha Inkjet head and method of manufacturing the same
JP2013184321A (en) * 2012-03-06 2013-09-19 Toshiba Tec Corp Inkjet head and method of manufacturing the same
DE102012107155B4 (en) * 2012-08-03 2017-07-13 Snaptrack, Inc. Topographical structure and method for its production
US20140292894A1 (en) * 2013-03-29 2014-10-02 Xerox Corporation Insulating substrate electrostatic ink jet print head
US9293682B2 (en) * 2014-03-26 2016-03-22 Brother Kogyo Kabushiki Kaisha Liquid jetting apparatus
JP6547249B2 (en) * 2014-07-31 2019-07-24 ブラザー工業株式会社 METHOD FOR MANUFACTURING LIQUID DISCHARGE DEVICE, AND LIQUID DISCHARGE DEVICE
WO2016030247A1 (en) * 2014-08-26 2016-03-03 Oce-Technologies B.V. Multi-chip print head
JP6439331B2 (en) * 2014-09-08 2018-12-19 ブラザー工業株式会社 Method for manufacturing liquid ejection device, and liquid ejection device
JP6365347B2 (en) * 2015-02-27 2018-08-01 コニカミノルタ株式会社 Piezoelectric device, piezoelectric device manufacturing method, inkjet head, inkjet head manufacturing method, and inkjet printer
JP6519404B2 (en) * 2015-08-24 2019-05-29 セイコーエプソン株式会社 Electronic device and liquid jet head
JP6613717B2 (en) * 2015-08-25 2019-12-04 セイコーエプソン株式会社 Electronic device, liquid ejecting head, and manufacturing method of electronic device
JP6256641B2 (en) * 2017-02-01 2018-01-10 セイコーエプソン株式会社 Liquid ejecting head and liquid ejecting apparatus

Family Cites Families (19)

* Cited by examiner, † Cited by third party
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EP0943437B1 (en) * 1997-07-25 2003-02-12 Seiko Epson Corporation Ink jet recording head and ink jet recorder
JP3589560B2 (en) * 1998-01-27 2004-11-17 株式会社リコー Ink jet head and method of manufacturing the same
JP3868143B2 (en) * 1999-04-06 2007-01-17 松下電器産業株式会社 Piezoelectric thin film element, ink jet recording head using the same, and manufacturing method thereof
JP2003086854A (en) * 2001-08-30 2003-03-20 Oce Technologies Bv Multilayer piezoelectric actuator
WO2004017063A2 (en) * 2002-07-19 2004-02-26 Siemens Aktiengesellschaft Device and method for detecting a substance with the aid of a high frequency piezo-acoustic thin film resonator
US20040051763A1 (en) 2002-09-13 2004-03-18 Shogo Matsubara Piezoelectric thin film element, actuator, ink-jet head and ink-jet recording apparatus therefor
JP4366568B2 (en) 2003-08-04 2009-11-18 セイコーエプソン株式会社 Liquid ejecting head and liquid ejecting apparatus
JP2005123421A (en) * 2003-10-17 2005-05-12 Matsushita Electric Ind Co Ltd Piezoelectric thin film element, ink jet head, ink jet type recorder, angular velocity sensor, and piezoelectric actuator for disk unit
JP4280198B2 (en) * 2004-04-30 2009-06-17 株式会社東芝 Thin film piezoelectric resonator
JP5070674B2 (en) 2004-06-14 2012-11-14 富士ゼロックス株式会社 Ink jet recording head and ink jet recording apparatus
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
JP5041765B2 (en) * 2005-09-05 2012-10-03 キヤノン株式会社 Epitaxial oxide film, piezoelectric film, piezoelectric film element, liquid discharge head and liquid discharge apparatus using piezoelectric film element
JP5023461B2 (en) * 2005-09-27 2012-09-12 富士ゼロックス株式会社 Piezoelectric element, droplet discharge head, droplet discharge apparatus, and method for manufacturing piezoelectric element
JP4142706B2 (en) * 2006-09-28 2008-09-03 富士フイルム株式会社 Film forming apparatus, film forming method, insulating film, dielectric film, piezoelectric film, ferroelectric film, piezoelectric element, and liquid discharge apparatus
JP4296441B2 (en) * 2006-10-11 2009-07-15 セイコーエプソン株式会社 Method for manufacturing actuator device
JP4300431B2 (en) * 2007-01-15 2009-07-22 セイコーエプソン株式会社 Actuator device and liquid jet head using the same
US7837305B2 (en) * 2007-01-30 2010-11-23 Panasonic Corporation Piezoelectric element, ink jet head, and ink jet recording device
JP5242238B2 (en) * 2007-05-30 2013-07-24 オセ−テクノロジーズ・ベー・ヴエー Manufacturing method of piezoelectric ink jet device
EP1997638B1 (en) * 2007-05-30 2012-11-21 Océ-Technologies B.V. Method of forming an array of piezoelectric actuators on a membrane

Also Published As

Publication number Publication date
US7843113B2 (en) 2010-11-30
JP2008300838A (en) 2008-12-11
EP1997635B1 (en) 2011-07-27
US20080297006A1 (en) 2008-12-04
EP1997635A1 (en) 2008-12-03

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