AT426914T - Contact copier and method for manufacturing a device - Google Patents

Contact copier and method for manufacturing a device

Info

Publication number
AT426914T
AT426914T AT04726018T AT04726018T AT426914T AT 426914 T AT426914 T AT 426914T AT 04726018 T AT04726018 T AT 04726018T AT 04726018 T AT04726018 T AT 04726018T AT 426914 T AT426914 T AT 426914T
Authority
AT
Austria
Prior art keywords
manufacturing
device
method
contact copier
copier
Prior art date
Application number
AT04726018T
Other languages
German (de)
Inventor
Hideaki Hara
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
Priority to JP2003103145 priority Critical
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AT426914T publication Critical patent/AT426914T/en
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=33156817&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=AT426914(T) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Exposure apparatus for microlithography
    • G03F7/70216Systems for imaging mask onto workpiece
    • G03F7/70341Immersion
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00Photographic printing apparatus
    • G03B27/32Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/42Projection printing apparatus, e.g. enlarger, copying camera for automatic sequential copying of the same original
AT04726018T 2003-04-07 2004-04-06 Contact copier and method for manufacturing a device AT426914T (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003103145 2003-04-07

Publications (1)

Publication Number Publication Date
AT426914T true AT426914T (en) 2009-04-15

Family

ID=33156817

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04726018T AT426914T (en) 2003-04-07 2004-04-06 Contact copier and method for manufacturing a device

Country Status (8)

Country Link
US (4) US7480029B2 (en)
EP (1) EP1612850B1 (en)
JP (2) JP4902201B2 (en)
KR (1) KR101176817B1 (en)
AT (1) AT426914T (en)
DE (1) DE602004020200D1 (en)
TW (1) TWI385706B (en)
WO (1) WO2004090956A1 (en)

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US8111375B2 (en) 2012-02-07
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WO2004090956A1 (en) 2004-10-21
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US20080291410A1 (en) 2008-11-27
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KR101176817B1 (en) 2012-08-24
JP5287791B2 (en) 2013-09-11
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US20070064209A1 (en) 2007-03-22
EP1612850B1 (en) 2009-03-25

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