AT421150T - Device and method for a raster-term microscope - Google Patents

Device and method for a raster-term microscope

Info

Publication number
AT421150T
AT421150T AT02776745T AT02776745T AT421150T AT 421150 T AT421150 T AT 421150T AT 02776745 T AT02776745 T AT 02776745T AT 02776745 T AT02776745 T AT 02776745T AT 421150 T AT421150 T AT 421150T
Authority
AT
Austria
Prior art keywords
raster
device
method
microscope
term
Prior art date
Application number
AT02776745T
Other languages
German (de)
Inventor
Detlef Dr Knebel
Torsten Jaehnke
Olaf Suenwoldt
Original Assignee
Jpk Instruments Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE10147868 priority Critical
Application filed by Jpk Instruments Ag filed Critical Jpk Instruments Ag
Publication of AT421150T publication Critical patent/AT421150T/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00Monitoring the movement or position of the probe
    • G01Q20/02Monitoring the movement or position of the probe by optical means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/849Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86Scanning probe structure
    • Y10S977/868Scanning probe structure with optical means
AT02776745T 2001-09-24 2002-09-24 Device and method for a raster-term microscope AT421150T (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10147868 2001-09-24

Publications (1)

Publication Number Publication Date
AT421150T true AT421150T (en) 2009-01-15

Family

ID=7700623

Family Applications (2)

Application Number Title Priority Date Filing Date
AT02776747T AT377248T (en) 2001-09-24 2002-09-24 Method and device for measuring a sample through the helm of a gridder microscope
AT02776745T AT421150T (en) 2001-09-24 2002-09-24 Device and method for a raster-term microscope

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT02776747T AT377248T (en) 2001-09-24 2002-09-24 Method and device for measuring a sample through the helm of a gridder microscope

Country Status (6)

Country Link
US (3) US6998602B2 (en)
EP (2) EP1430485B1 (en)
JP (2) JP4044042B2 (en)
AT (2) AT377248T (en)
DE (4) DE10294378D2 (en)
WO (2) WO2003028038A2 (en)

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US5345170A (en) * 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5729150A (en) * 1995-12-01 1998-03-17 Cascade Microtech, Inc. Low-current probe card with reduced triboelectric current generating cables
US5914613A (en) 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6232789B1 (en) * 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US6002263A (en) * 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6034533A (en) * 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
US6256882B1 (en) * 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
US6578264B1 (en) * 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
DE10143173A1 (en) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafer probe has contact finger array with impedance matching network suitable for wide band
WO2003052435A1 (en) * 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
AT377248T (en) * 2001-09-24 2007-11-15 Jpk Instruments Ag Method and device for measuring a sample through the helm of a gridder microscope
US6951846B2 (en) * 2002-03-07 2005-10-04 The United States Of America As Represented By The Secretary Of The Army Artemisinins with improved stability and bioavailability for therapeutic drug development and application
US6861856B2 (en) * 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
WO2005065258A2 (en) 2003-12-24 2005-07-21 Cascade Microtech, Inc. Active wafer probe
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US7214575B2 (en) * 2004-01-06 2007-05-08 Micron Technology, Inc. Method and apparatus providing CMOS imager device pixel with transistor having lower threshold voltage than other imager device transistors
US20050241392A1 (en) * 2004-03-09 2005-11-03 Lyubchenko Yuri L Atomic force microscope tip holder for imaging in liquid
WO2006031646A2 (en) 2004-09-13 2006-03-23 Cascade Microtech, Inc. Double sided probing structures
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
WO2006090593A1 (en) * 2005-02-24 2006-08-31 Sii Nanotechnology Inc. Displacement detection mechanism for scanning probe microscope and scanning probe microscope
US7249494B2 (en) * 2005-06-06 2007-07-31 Academia Sinica Beam tracking system for scanning-probe type atomic force microscope
US20070294047A1 (en) * 2005-06-11 2007-12-20 Leonard Hayden Calibration system
US7282930B2 (en) * 2005-12-21 2007-10-16 Suss Microtec Test Systems Gmbh Device for testing thin elements
JP4810251B2 (en) * 2006-02-16 2011-11-09 キヤノン株式会社 Atomic force microscope
US7478552B2 (en) * 2006-03-21 2009-01-20 Veeco Instruments Inc. Optical detection alignment/tracking method and apparatus
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US8166567B2 (en) 2007-03-16 2012-04-24 Bruker Nano, Inc. Fast-scanning SPM scanner and method of operating same
US7607344B2 (en) * 2007-04-23 2009-10-27 Frederick Sachs Factory-alignable compact cantilever probe
WO2008131416A1 (en) * 2007-04-24 2008-10-30 The University Of Akron Method and apparatus for performing apertureless near-field scanning optical microscopy
US8904560B2 (en) * 2007-05-07 2014-12-02 Bruker Nano, Inc. Closed loop controller and method for fast scanning probe microscopy
US7770231B2 (en) 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
DE102008005248A1 (en) * 2008-01-18 2009-07-30 Jpk Instruments Ag Measuring probe i.e. cantilever, providing method for examining sample in e.g. atomic force microscope, involves processing measuring probe before or after measurement, where measuring probe is held at carrier device
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
RU2472165C2 (en) * 2008-10-27 2013-01-10 ЗАО "Нанотехнология МДТ" Scanning probe microscope for biological applications
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
CN102620690B (en) * 2012-04-01 2014-05-07 华中科技大学 Multi-probe flatness detector and flatness detection method
CN107923928A (en) * 2015-05-19 2018-04-17 南洋理工大学 The apparatus and method for checking sample surfaces
KR101756449B1 (en) 2015-08-28 2017-07-11 현대오트론 주식회사 Low-voltage canceling apparatus and method for thereof
CN105259178B (en) * 2015-11-20 2019-03-15 云南卡索实业有限公司 A kind of shearing class linear trace laser detection system
CN106645803B (en) * 2016-12-14 2019-03-22 国家纳米科学中心 A kind of invention provides a double-probe atomic power quickly approaches device and method

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Publication number Priority date Publication date Assignee Title
US5260824A (en) * 1989-04-24 1993-11-09 Olympus Optical Co., Ltd. Atomic force microscope
US5291775A (en) * 1992-03-04 1994-03-08 Topometrix Scanning force microscope with integrated optics and cantilever mount
US8087288B1 (en) * 1993-08-17 2012-01-03 Bruker Nano, Inc. Scanning stylus atomic force microscope with cantilever tracking and optical access
JP3174465B2 (en) * 1994-11-28 2001-06-11 松下電器産業株式会社 Atomic force microscope
US6138503A (en) * 1997-10-16 2000-10-31 Raymax Technology, Inc. Scanning probe microscope system including removable probe sensor assembly
AT377248T (en) 2001-09-24 2007-11-15 Jpk Instruments Ag Method and device for measuring a sample through the helm of a gridder microscope

Also Published As

Publication number Publication date
WO2003028038A2 (en) 2003-04-03
US20060168703A1 (en) 2006-07-27
JP2005504301A (en) 2005-02-10
US7473894B2 (en) 2009-01-06
DE50211146D1 (en) 2007-12-13
WO2003028038A3 (en) 2004-02-12
US6998602B2 (en) 2006-02-14
DE10294376D2 (en) 2004-08-26
WO2003028037A3 (en) 2004-02-12
EP1430485A2 (en) 2004-06-23
DE50213222D1 (en) 2009-03-05
US20050061970A1 (en) 2005-03-24
DE10294378D2 (en) 2004-08-26
EP1430485B1 (en) 2009-01-14
WO2003028037A2 (en) 2003-04-03
EP1430486B1 (en) 2007-10-31
US20050023481A1 (en) 2005-02-03
EP1430486A2 (en) 2004-06-23
JP4044042B2 (en) 2008-02-06
US7022985B2 (en) 2006-04-04
JP2007333743A (en) 2007-12-27
AT377248T (en) 2007-11-15

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee