AT394699T - Micro-electro-mechanical structure (mems) of optical modulator and optical display system - Google Patents

Micro-electro-mechanical structure (mems) of optical modulator and optical display system

Info

Publication number
AT394699T
AT394699T AT01124608T AT01124608T AT394699T AT 394699 T AT394699 T AT 394699T AT 01124608 T AT01124608 T AT 01124608T AT 01124608 T AT01124608 T AT 01124608T AT 394699 T AT394699 T AT 394699T
Authority
AT
Austria
Prior art keywords
mems
electro
micro
display system
mechanical structure
Prior art date
Application number
AT01124608T
Other languages
German (de)
Inventor
Michael J Sinclair
Gary K Starkweather
Original Assignee
Microsoft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US09/702,585 priority Critical patent/US6775048B1/en
Application filed by Microsoft Corp filed Critical Microsoft Corp
Publication of AT394699T publication Critical patent/AT394699T/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/02Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the intensity of light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3576Temperature or heat actuation
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/74Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7408Direct viewing projectors, e.g. an image displayed on a video CRT or LCD display being projected on a screen
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35543D constellations, i.e. with switching elements and switched beams located in a volume
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/356Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3594Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/74Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
AT01124608T 2000-10-31 2001-10-15 Micro-electro-mechanical structure (mems) of optical modulator and optical display system AT394699T (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US09/702,585 US6775048B1 (en) 2000-10-31 2000-10-31 Microelectrical mechanical structure (MEMS) optical modulator and optical display system

Publications (1)

Publication Number Publication Date
AT394699T true AT394699T (en) 2008-05-15

Family

ID=24821828

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01124608T AT394699T (en) 2000-10-31 2001-10-15 Micro-electro-mechanical structure (mems) of optical modulator and optical display system

Country Status (7)

Country Link
US (5) US6775048B1 (en)
EP (1) EP1202096B1 (en)
JP (1) JP4362251B2 (en)
KR (1) KR100815752B1 (en)
AT (1) AT394699T (en)
DE (1) DE60133868D1 (en)
TW (1) TW530175B (en)

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US6775048B1 (en) 2004-08-10
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