AT370520T - Piezoelectric control element - Google Patents

Piezoelectric control element

Info

Publication number
AT370520T
AT370520T AT02013415T AT02013415T AT370520T AT 370520 T AT370520 T AT 370520T AT 02013415 T AT02013415 T AT 02013415T AT 02013415 T AT02013415 T AT 02013415T AT 370520 T AT370520 T AT 370520T
Authority
AT
Austria
Prior art keywords
control element
piezoelectric control
piezoelectric
element
Prior art date
Application number
AT02013415T
Other languages
German (de)
Inventor
Wladimir Wischnewskiy
Original Assignee
Physik Instr Pi Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE10128483 priority Critical
Priority to DE2001154526 priority patent/DE10154526B4/en
Application filed by Physik Instr Pi Gmbh & Co Kg filed Critical Physik Instr Pi Gmbh & Co Kg
Publication of AT370520T publication Critical patent/AT370520T/en

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08Piezo-electric or electrostrictive devices
    • H01L41/09Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
    • H01L41/0986Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using longitudinal or thickness displacement only, e.g. d33 or d31 type devices
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/002Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H02N2/0025Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005Mechanical details, e.g. housings
    • H02N2/0065Friction interface
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • H02N2/065Large signal circuits, e.g. final stages
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/145Large signal circuits, e.g. final stages
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/145Large signal circuits, e.g. final stages
    • H02N2/147Multi-phase circuits
AT02013415T 2001-06-12 2002-06-12 Piezoelectric control element AT370520T (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE10128483 2001-06-12
DE2001154526 DE10154526B4 (en) 2001-06-12 2001-11-07 Piezoelectric actuator

Publications (1)

Publication Number Publication Date
AT370520T true AT370520T (en) 2007-09-15

Family

ID=26009510

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02013415T AT370520T (en) 2001-06-12 2002-06-12 Piezoelectric control element

Country Status (4)

Country Link
US (1) US6765335B2 (en)
EP (1) EP1267425B1 (en)
AT (1) AT370520T (en)
DE (2) DE10154526B4 (en)

Families Citing this family (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4056799A (en) * 1999-05-31 2000-12-18 Nanomotion Ltd. Multilayer piezoelectric motor
FR2825680B1 (en) * 2001-06-07 2003-09-26 Sagem Primary flight control actuator with vibration motor
JP2004129458A (en) * 2002-10-07 2004-04-22 Canon Inc Controller for vibratory actuator, vibratory actuator system, and control method for vibratory actuator
JP3759508B2 (en) * 2003-03-31 2006-03-29 オリンパス株式会社 Actuator, actuator driving method, and actuator system
DE102004024656A1 (en) * 2004-05-18 2005-12-08 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelectric ultrasonic motor
DE102004059429B4 (en) * 2004-09-03 2006-07-27 Physik Instrumente (Pi) Gmbh & Co. Kg Linear ultrasonic piezo motor
JP4689993B2 (en) * 2004-09-07 2011-06-01 オリンパス株式会社 Vibration wave motor
GB0506358D0 (en) 2004-09-29 2005-05-04 Nanomotion Ltd Assembly
KR20070090148A (en) * 2004-09-29 2007-09-05 나노모션 리미티드 Camera modules
DE602005007513D1 (en) * 2004-10-11 2008-07-24 Smm Medical Ab Electroactive compression bandage
CN100514692C (en) * 2004-11-15 2009-07-15 物理设备(Pi)两合公司 Linear ultrasound motor
DE202005021150U1 (en) * 2005-03-21 2007-04-05 Physik Instrumente (Pi) Gmbh & Co. Kg Optical lens assembly
US7494602B2 (en) * 2005-04-11 2009-02-24 Piezotech, Llc Compositions for high power piezoelectric ceramics
FR2884657B1 (en) * 2005-04-13 2007-07-06 Micro Controle Sa Sa Elastic mounting system for piezoelectric linear motor
GB2425882A (en) * 2005-04-29 2006-11-08 Univ Northumbria Newcastle Positioning apparatus
JP4827441B2 (en) * 2005-06-01 2011-11-30 キヤノン株式会社 Vibration wave actuator
DE102005039358B4 (en) * 2005-08-19 2016-12-08 Physik Instrumente (Pi) Gmbh & Co. Kg Piezoelectric actuator for an ultrasonic motor
DE102005053018A1 (en) * 2005-10-21 2007-04-26 Physik Instrumente (Pi) Gmbh & Co. Kg Precision miniature ultrasonic linear motor
KR100723172B1 (en) * 2005-12-09 2007-05-30 삼성전기주식회사 Device for lens transfer
DE102006041017B4 (en) * 2005-12-28 2010-04-08 Physik Instrumente (Pi) Gmbh & Co. Kg Circuit arrangement for controlling a reversible single-phase ultrasonic motor
ES2372758T3 (en) * 2006-01-13 2012-01-26 Convatec Technologies Inc. Device and system for compression treatment of a body part.
US7471030B2 (en) * 2006-03-08 2008-12-30 Dynamic Structures And Materials, Llc Spring biasing locking mechanism for step and repeat motors
US7548013B2 (en) * 2006-03-14 2009-06-16 Piezotech, Llc High temperature piezo buzzer
JP2007274865A (en) * 2006-03-31 2007-10-18 Casio Comput Co Ltd Piezoelectric actuator, and transfer device and shaking correction device using same
DE102006025991B4 (en) * 2006-06-02 2012-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Self-exciting low-voltage controller for controlling one or more ultrasonic micro-motors
DE102006047971B4 (en) * 2006-10-10 2008-07-31 Modelleisenbahn Gmbh Actuator for models or model vehicles
CA2676207A1 (en) * 2007-01-24 2008-07-31 Smm Medical Ab An elastomeric particle having an electrically conducting surface, a pressure sensor comprising said particles, a method for producing said sensor and a sensor system comprising said sensors
CN101652921A (en) * 2007-02-06 2010-02-17 夏普株式会社 Drive device, imaging device with the drive device, and imaging equipment
DE102007009874A1 (en) 2007-02-28 2008-09-04 Physik Instrumente (Pi) Gmbh & Co. Kg Linear ultrasonic piezoelectric motor, comprises movable element that is in frictional contact with rectangular resonance plate and electrodes for generating acoustic vibrations
GB0710078D0 (en) * 2007-05-25 2007-07-04 Stfc Science & Technology Extension sensing actuator
JP5006725B2 (en) * 2007-07-20 2012-08-22 オリンパス株式会社 Fine movement mechanism and microscope apparatus provided with the fine movement mechanism
WO2009034885A1 (en) * 2007-09-11 2009-03-19 Nikon Corporation Vibration actuator, and imaging device
DE102008058484A1 (en) 2008-02-28 2009-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg High precision ultrasonic motor
DE102008012992A1 (en) * 2008-03-07 2009-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic motor
DE102008026429A1 (en) 2008-06-02 2009-12-10 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic actuator
DE102008026770A1 (en) 2008-06-04 2009-12-10 Robert Bosch Gmbh Linear movement device, has friction surface formed at ceramic, longitudinally-extended friction lining that is formed from guide rail, where friction lining is supported at base of guide rail over whole length of guide rail
JP2010040080A (en) * 2008-08-01 2010-02-18 Sharp Corp Driving unit and optical pick-up device including the same
TWI408888B (en) * 2008-08-07 2013-09-11 Ind Tech Res Inst Ultrasonic linear motor
EP2164120B1 (en) * 2008-09-10 2013-07-03 Physik Instrumente (PI) GmbH & Co. KG Ultrasonic motor with an ultrasonic actuator in the form of a hollow partial cylinder
US8299684B2 (en) 2008-12-18 2012-10-30 Discovery Technology International, Inc. Piezoelectric quasi-resonance linear motors based on acoustic standing waves with combined resonator
EP2200101A1 (en) 2008-12-22 2010-06-23 Physik Instrumente (PI) GmbH & Co. KG Ultrasound motor
DE102009039922A1 (en) * 2009-04-21 2010-11-04 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic motor
US8143763B2 (en) * 2009-05-29 2012-03-27 Rhk Technology, Inc. Linear piezoelectric nano-positioner
JP5429141B2 (en) * 2010-01-19 2014-02-26 Tdk株式会社 Piezoelectric actuator and method for manufacturing piezoelectric actuator
JP5429140B2 (en) * 2010-01-19 2014-02-26 Tdk株式会社 Piezoelectric actuator
DE102010055848B4 (en) * 2010-12-22 2018-01-18 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic actuator
DE102011087801B4 (en) 2011-02-22 2013-04-25 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic motor
US8912707B2 (en) * 2011-07-13 2014-12-16 Academia Sinica Friction-driven actuator
DE102011087542B3 (en) * 2011-12-01 2013-04-25 Physik Instrumente (Pi) Gmbh & Co. Kg Two-phase ultrasonic motor, has main generator and additional generator generating acoustic standing waves during operation of motor and arranged on two sides with respect to symmetric plane, respectively
DE102012201863B3 (en) * 2012-02-08 2013-05-02 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic actuator
FR2992500B1 (en) * 2012-06-25 2016-01-22 Faurecia Sieges Automobile Circuit for controlling a piezoelectric motor with reduced sensitivity to impedance variations in the piezoelectric motor
EP2680334A1 (en) 2012-06-28 2014-01-01 Leica Geosystems AG Piezo drive with piezo oscillator with a pivoting bearing
US9705425B2 (en) 2012-07-03 2017-07-11 Discovery Technology International, Inc. Piezoelectric linear motor
DE102012024413B4 (en) 2012-12-14 2014-07-10 Krohne Messtechnik Gmbh Positioning device and measuring device
DE102013101020B4 (en) 2013-02-01 2018-08-02 Physik Instrumente (Pi) Gmbh & Co. Kg Ultrasonic actuator and ultrasonic motor with such a Ultraschallaktor
DE102013105024B3 (en) * 2013-05-16 2014-09-25 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic motor
LT6129B (en) 2013-05-31 2015-03-25 Kauno technologijos universitetas High - resolution piezoelectric angular positioning device
DE102013110356B4 (en) 2013-09-19 2018-08-30 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic actuator
DE102013221414A1 (en) * 2013-10-22 2015-04-23 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic motor
DE102013226418B3 (en) * 2013-12-18 2015-04-02 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic motor
JP6406593B2 (en) * 2013-12-28 2018-10-17 株式会社ミクロブ Drive mechanism
LT6254B (en) 2014-04-28 2016-03-10 Kauno technologijos universitetas Rotational movement piezoelectric actuator
US9725154B2 (en) * 2014-05-13 2017-08-08 The Boeing Company Method and apparatus for reducing structural vibration and noise
US9450520B2 (en) * 2014-12-15 2016-09-20 Analog Devices, Inc. Space vector pulse modulation based motor driver
LT6333B (en) 2015-04-24 2016-12-12 Vilniaus Gedimino technikos universitetas Peizoelectric traveling wave device
DE102015120282B4 (en) * 2015-11-24 2018-01-18 Physik Instrumente (Pi) Gmbh & Co. Kg ultrasonic motor
RU2617209C1 (en) * 2016-03-31 2017-04-24 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский Томский государственный университет" (ТГУ, НИ ТГУ) Linear piezoelectric motor
DE102016110209B3 (en) * 2016-06-02 2017-11-02 Physik Instrumente (Pi) Gmbh & Co. Kg Method for connecting a ceramic friction element with a piezoceramic element
WO2019035757A1 (en) * 2017-08-16 2019-02-21 Piezomotor Uppsala Ab Ultrasonic resonating motor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE436675B (en) * 1975-08-12 1985-01-14 Ki Politekhnichsky I Im 50 Let Electric motor driven by piezoelectric forces
CA1289999C (en) * 1987-07-14 1991-10-01 Keisuke Honda Ultrasonic driving device
EP0344008B1 (en) * 1988-05-26 1994-08-17 Kohji Toda Vibrator-type actuator
EP0415657A3 (en) * 1989-08-31 1991-12-04 Kohji Toda Vibrator-type actuator
JPH04121076A (en) * 1990-09-12 1992-04-22 Canon Inc Vibratory wave motor
US5596241A (en) * 1993-01-18 1997-01-21 Canon Kabushiki Kaisha Vibration wave driven linear-motor or printer
IL106296D0 (en) * 1993-07-09 1993-12-28 Nanomotion Ltd Ceramic motor
US5616980A (en) * 1993-07-09 1997-04-01 Nanomotion Ltd. Ceramic motor
JPH1132491A (en) * 1997-05-16 1999-02-02 Seiko Instr Inc Ultrasonic motor and electronic equipment with it
JP4510179B2 (en) * 1998-08-07 2010-07-21 セイコーインスツル株式会社 Ultrasonic motor and electronic equipment with ultrasonic motor
DE19938954A1 (en) * 1999-08-17 2001-03-08 Pi Ceramic Gmbh Keramische Tec Piezoelectric drive, in particular for generating rotational or translational movements that can take place continuously or step by step
JP4442965B2 (en) * 1999-11-01 2010-03-31 セイコーインスツル株式会社 Ultrasonic motor and electronic device with ultrasonic motor

Also Published As

Publication number Publication date
US20030052573A1 (en) 2003-03-20
US6765335B2 (en) 2004-07-20
EP1267425B1 (en) 2007-08-15
EP1267425A3 (en) 2005-11-16
EP1267425A2 (en) 2002-12-18
DE10154526B4 (en) 2007-02-08
DE50210678D1 (en) 2007-09-27
DE10154526A1 (en) 2004-04-29

Similar Documents

Publication Publication Date Title
LU92543I2 (en) Siltuximab
DE60227174D1 (en) Position sensor
DE60227853D1 (en) Substituted pyridinylamines
DE60217457D1 (en) Position sensor
DE50113363D1 (en) Operating element
DE60137361D1 (en) Piezoelectric ceramics
DE50200667D1 (en) piezo valve
DE50214737D1 (en) Sensor arrangement
DE60228602D1 (en) Canolaproteinisolate functionality ii
DE60235961D1 (en) Action
DE60336608D1 (en) delimiting element
FR2832472B3 (en) Retention element
DE50206892D1 (en) Substituted imidazotriazinone
DE60238325D1 (en) Filter element
DK1260640T3 (en) infiltration element
AT279154T (en) Ablationsatherektomiefräswerkzeug
AT294817T (en) Concatamere immunadhäsion
AT303741T (en) Espressobrüheinrichtung
AT305932T (en) RAPANYCIN29-enols
AT289640T (en) Amidofunctional aminopolydiorganosiloxane
AT523946T (en) Electronic control procedure
DE60201159D1 (en) Electrostatic actuator
DE10193295D2 (en) Piezoelectric sensor
DE60215962D1 (en) Flexible construction with integrated sensor / actuator
DE50006733D1 (en) Piezoelectric actuator

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee