AT156895T - microvalve - Google Patents

microvalve

Info

Publication number
AT156895T
AT156895T AT94916136T AT94916136T AT156895T AT 156895 T AT156895 T AT 156895T AT 94916136 T AT94916136 T AT 94916136T AT 94916136 T AT94916136 T AT 94916136T AT 156895 T AT156895 T AT 156895T
Authority
AT
Austria
Prior art keywords
microvalve
Prior art date
Application number
AT94916136T
Other languages
German (de)
Inventor
Thomas Lisec
Hans-Joachim Quenzer
Bernd Wagner
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE4317676 priority Critical
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Publication of AT156895T publication Critical patent/AT156895T/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00Circuit elements having moving parts
    • F15C3/04Circuit elements having moving parts using diaphragms
AT94916136T 1993-05-27 1994-05-21 microvalve AT156895T (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE4317676 1993-05-27

Publications (1)

Publication Number Publication Date
AT156895T true AT156895T (en) 1997-08-15

Family

ID=6489068

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94916136T AT156895T (en) 1993-05-27 1994-05-21 microvalve

Country Status (6)

Country Link
US (1) US5681024A (en)
EP (1) EP0700485B1 (en)
JP (1) JP3418741B2 (en)
AT (1) AT156895T (en)
DE (1) DE4418450C2 (en)
WO (1) WO1994028318A1 (en)

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US6494804B1 (en) * 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
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US6626417B2 (en) 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
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US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
EP1615721B1 (en) 2003-04-03 2014-06-18 Fluidigm Corporation Microfluidic devices and methods of using same
EP1685282A2 (en) * 2003-04-17 2006-08-02 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
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US20050118073A1 (en) * 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
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WO1991001464A1 (en) * 1989-07-19 1991-02-07 Westonbridge International Limited Anti-return valve, particularly for micropump and micropump provided with such a valve
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Also Published As

Publication number Publication date
JPH09501265A (en) 1997-02-04
DE4418450C2 (en) 1996-07-25
EP0700485A1 (en) 1996-03-13
JP3418741B2 (en) 2003-06-23
WO1994028318A1 (en) 1994-12-08
US5681024A (en) 1997-10-28
EP0700485B1 (en) 1997-08-13
DE4418450A1 (en) 1994-12-01

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