AT147014T - Manufacturing method of an inkjet printhead - Google Patents

Manufacturing method of an inkjet printhead

Info

Publication number
AT147014T
AT147014T AT91309590T AT91309590T AT147014T AT 147014 T AT147014 T AT 147014T AT 91309590 T AT91309590 T AT 91309590T AT 91309590 T AT91309590 T AT 91309590T AT 147014 T AT147014 T AT 147014T
Authority
AT
Austria
Prior art keywords
manufacturing method
inkjet printhead
printhead
inkjet
manufacturing
Prior art date
Application number
AT91309590T
Other languages
German (de)
Inventor
Akio Kashiwazaki
Masatsune Kobayashi
Ryuichi Arai
Junichi Kobayashi
Akihiko Shimomura
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP27783890 priority Critical
Priority to JP16541091 priority
Priority to JP16541191 priority
Priority to JP25766391 priority
Application filed by Canon Kk filed Critical Canon Kk
Publication of AT147014T publication Critical patent/AT147014T/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1637Production of nozzles manufacturing processes molding
    • B41J2/1639Production of nozzles manufacturing processes molding sacrificial molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1631Production of nozzles manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1632Production of nozzles manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1642Production of nozzles manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1645Production of nozzles manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1646Production of nozzles manufacturing processes thin film formation thin film formation by sputtering
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49401Fluid pattern dispersing device making, e.g., ink jet
AT91309590T 1990-10-18 1991-10-17 Manufacturing method of an inkjet printhead AT147014T (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP27783890 1990-10-18
JP16541091 1991-07-05
JP16541191 1991-07-05
JP25766391 1991-10-04

Publications (1)

Publication Number Publication Date
AT147014T true AT147014T (en) 1997-01-15

Family

ID=27474002

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91309590T AT147014T (en) 1990-10-18 1991-10-17 Manufacturing method of an inkjet printhead

Country Status (4)

Country Link
US (1) US5334999A (en)
EP (1) EP0481788B1 (en)
AT (1) AT147014T (en)
DE (2) DE69123932D1 (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0577423A (en) * 1991-09-24 1993-03-30 Canon Inc Ink-jet recording head
EP0543202B1 (en) * 1991-10-31 1996-08-21 Canon Kabushiki Kaisha Transfer-molding resin composition for use to manufacture ink jet recording head, and ink jet recording head manufactured by using the same
JP2960608B2 (en) * 1992-06-04 1999-10-12 キヤノン株式会社 A method for manufacturing a liquid jet recording head
JP3143307B2 (en) * 1993-02-03 2001-03-07 キヤノン株式会社 A method for producing an ink jet recording head
US5589860A (en) * 1993-08-11 1996-12-31 Fuji Electric Co., Ltd. Ink jet recording head and method of producing the same
US6037968A (en) * 1993-11-09 2000-03-14 Markem Corporation Scanned marking of workpieces
JPH0825625A (en) * 1994-07-12 1996-01-30 Nec Corp Ink jet record head and manufacture thereof
JPH08165441A (en) * 1994-10-13 1996-06-25 Canon Inc Active energy ray-polymerizable composition, recording medium containing the same and method for forming image using the same medium
US5983486A (en) * 1995-03-10 1999-11-16 Canon Kabushiki Kaisha Process for producing ink jet head
EP0734866B1 (en) * 1995-03-31 1999-08-11 Canon Kabushiki Kaisha Process for the production of an ink jet head
US6561623B1 (en) * 1995-08-31 2003-05-13 Canon Kabushiki Kaisha Method for producing ink jet recording head and ink jet recording head produced by same
US5812158A (en) * 1996-01-18 1998-09-22 Lexmark International, Inc. Coated nozzle plate for ink jet printing
US5907333A (en) * 1997-03-28 1999-05-25 Lexmark International, Inc. Ink jet print head containing a radiation curable resin layer
US6171765B1 (en) * 1998-05-26 2001-01-09 Agilent Technologies, Inc. Photolithographic processing for polymer LEDs with reactive metal cathodes
JP3780700B2 (en) * 1998-05-26 2006-05-31 セイコーエプソン株式会社 Pattern forming method, pattern forming apparatus, pattern forming plate, pattern forming plate manufacturing method, color filter manufacturing method, conductive film manufacturing method, and liquid crystal panel manufacturing method
TW369485B (en) * 1998-07-28 1999-09-11 Ind Tech Res Inst Monolithic producing method for chip of ink-jet printing head
US6203871B1 (en) 1998-10-14 2001-03-20 Lexmark International, Inc. Encapsulant for leads in an aqueous environment
CN1143773C (en) * 1999-06-04 2004-03-31 佳能株式会社 Liquid ejector nozzle and its producing method, and method for making micro mechanical device
JP3578398B2 (en) * 2000-06-22 2004-10-20 古河スカイ株式会社 Gas dispersion plate for film formation and method of manufacturing the same
US6644789B1 (en) 2000-07-06 2003-11-11 Lexmark International, Inc. Nozzle assembly for an ink jet printer
JP4054583B2 (en) * 2001-02-28 2008-02-27 キヤノン株式会社 Inkjet printhead manufacturing method
US6684504B2 (en) * 2001-04-09 2004-02-03 Lexmark International, Inc. Method of manufacturing an imageable support matrix for printhead nozzle plates
US6964086B2 (en) * 2002-03-04 2005-11-15 Matsushita Electric Industrial Co., Ltd. Method of manufacturing thin film piezoelectric element, and element housing jig
US6709805B1 (en) * 2003-04-24 2004-03-23 Lexmark International, Inc. Inkjet printhead nozzle plate
US6773869B1 (en) * 2003-04-24 2004-08-10 Lexmark International, Inc. Inkjet printhead nozzle plate
US7117597B2 (en) * 2004-08-06 2006-10-10 Canon Kabushiki Kaisha Method of manufacturing liquid discharge head
US20080259134A1 (en) * 2007-04-20 2008-10-23 Hewlett-Packard Development Company Lp Print head laminate
GB201013123D0 (en) * 2010-08-04 2010-09-22 Xaar Technology Ltd Droplet deposition apparatus and method for manufacturing the same

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3954475A (en) * 1971-09-03 1976-05-04 Minnesota Mining And Manufacturing Company Photosensitive elements containing chromophore-substituted vinyl-halomethyl-s-triazines
US3984253A (en) * 1974-04-22 1976-10-05 Eastman Kodak Company Imaging processes and elements therefor
US4312934A (en) * 1976-10-21 1982-01-26 Bard Laboratories, Inc. Photosensitive compositions
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5936879B2 (en) * 1977-10-14 1984-09-06 Canon Kk
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) * 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) * 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
JPH0310509B2 (en) * 1980-12-18 1991-02-13 Canon Kk
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPH0551458B2 (en) * 1982-12-28 1993-08-02 Canon Kk
JPS59138461A (en) * 1983-01-28 1984-08-08 Canon Inc Liquid jet recording apparatus
JPH0152187B2 (en) * 1983-09-28 1989-11-08 Keiichi Hori
US4587205A (en) * 1984-04-05 1986-05-06 The United States Of America As Represented By The United States Department Of Energy Method of using polysilane positive photoresist materials
DE3424187A1 (en) * 1984-06-30 1986-01-09 Basf Ag A process for producing a resist pattern
JPH0645242B2 (en) * 1984-12-28 1994-06-15 キヤノン株式会社 A method for manufacturing a liquid jet recording head
US4766671A (en) * 1985-10-29 1988-08-30 Nec Corporation Method of manufacturing ceramic electronic device
JPH0698755B2 (en) * 1986-04-28 1994-12-07 キヤノン株式会社 A method for manufacturing a liquid jet recording head
JPH01280565A (en) * 1988-05-02 1989-11-10 Fuji Electric Co Ltd Ink jet recording head

Also Published As

Publication number Publication date
US5334999A (en) 1994-08-02
EP0481788B1 (en) 1997-01-02
DE69123932D1 (en) 1997-02-13
EP0481788A1 (en) 1992-04-22
DE69123932T2 (en) 1997-05-22

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties